Optical actuation of a micromechanical photodiode via the photovoltaic-piezoelectric effect
作者机构：Department of Engineering PhysicsMcMaster UniversityHamiltonONL8S 4L7Canada Present address:CircuitMind Inc185 Spadina AvenueTorontoONM5T 2C6Canada
出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)
年 卷 期：2021年第7卷第2期
页 面：167-175页
核心收录：
学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学]
基 金：The heterostructure sample used in this work was MBE grown at McMaster University by Dr.Shahram Tavakoli.We would like to thank Dr.Matthew Minnick,Dr.Martin Gerber and Dr.Kevin Boyd for helpful discussions.A.R.would like to thank Doris Stevanovic for providing training in using the clean room at McMaster University.Natural Sciences and Engineering Research Council of Canada(NSERC)(03736) Canada Foundation for Innovation(CFI)(32168)
主 题：resonator piezoelectric effect
摘 要：Radiation pressure and photothermal forces have been previously used to optically actuate micro/nanomechanical structures fabricated from semiconductor piezoelectric materials such as gallium arsenide(GaAs).In these materials,coupling of the photovoltaic and piezoelectric properties has not been fully explored and leads to a new type of optical actuation that we call the photovoltaic-piezoelectric effect(PVPZ).We demonstrate this effect by electrically measuring,via the direct piezoelectric effect,the optically induced strain in a novel torsional *** micron-scale torsional resonator is fabricated from a lattice-matched single-crystal molecular beam epitaxy(MBE)-grown GaAs photodiode *** find that the strain depends on the product of the electro-optic responsivity and piezoelectric constant of *** photovoltaic-piezoelectric effect has important potential applications,such as in the development of configurable optical circuits,which can be used in neuromorphic photonic chips,processing of big data with deep learning and the development of quantum circuits.
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