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Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays

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Microsystems & Nanoengineering 2015年第1期1卷 44-51页

作者： Masayoshi Esashi Akira Kojima Naokatsu Ikegami Hiroshi Miyaguchi Nobuyoshi Koshida World Premier International Research Center Advanced Institute for Materials Research(WPI-AIMR) Tohoku University519-1176 Aramaki-Aza-AobaAoba-kuSendaiMiyagi 980-0845Japan Micro System Integration Center Tohoku University519-1176 Aramaki-Aza-AobaAoba-kuSendaiMiyagi 980-0845Japan Department of Electrical and Electronic Engineering Tokyo University of Agriculture&Technology2-24-16 Naka-choKoganei-shiTokyo 184-8588Japan

Nanoscale lithographic technologies have been intensively studied for the development of the next generation of semiconductor manufacturing *** mask-less/direct-write electron beam(EB)lithography methods serve as a candidate for the upcoming 10-nm node approaches and beyond,it remains difficult to achieve an appropriate level of *** innovative features of the multiple EB system that involve the use of a thermionic source have been ***,a blanking array mechanism is required for the individual control of multiple beamlets whereby each beamlet is deflected onto a blanking object or passed through an *** paper reviews the recent developments of our application studies on the development of a high-speed massively parallel electron beam direct write(MPEBDW)*** emitter array used in our study includes nanocrystalline-Si(nc-Si)ballistic electron *** are drifted via multiple tunnelling cascade transport and are emitted as hot *** transport mechanism allows one to quickly turn electron beamlets on or *** emitter array is a micro-electro-mechanical system(MEMS)that is hetero-integrated with a separately fabricated active-matrix-driving complementary metal-oxide semiconductor(CMOS)large-scale integration(LSI)system that controls each emitter *** basic function of the LSI was confirmed to receive external writing bitmap data and generate driving signals for turning beamlets on or *** emitted beamlet(10×10μm^(2))is converged to 10×10 nm^(2) on a target via the reduction electron optic system under *** paper presents an overview of the system and characteristic evaluations of the nc-Si emitter *** examine beamlets and their electron emission characteristics via a 1:1 exposure test.

关键词： direct write lithography electron beam lithography electron emitter array multiple electron beams nanocrystalline Si

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ELUCIDATION OF HYDRODESULFURIZATION AND HYDROGENATION MECHANISMS USING RADIOISOTOPE TRACER METHODS

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石油学报（石油加工） 2001年第1期17卷 18-24页

作者： Atsushi ISHIHARA, Wei hua QIAN, Toshiaki KABE (Department of Chemical Engineering Faculty of technology, Tokey university of agriculture and technology, 2 24 1 nakacho, koganei, tokyo 184 8588, japan) Tokey university of agriculture and technology 日本 184 8588

To meet the specification of sulfur and aromatic contents in diesel fuel, it is necessary for refiners to develop a new catalyst with high activity of hydrodesulfurization and hydrogenation. In the present study, the properties of noble metal catalysts for hydrodesulfurization and hydrogenation in the presence of sulfur compounds have been investigated. The hydrogenation activity of phenanthrene (PHE) on single noble metal and double noble metal catalysts—Pt/Al 2O 3, Pd/Al 2O 3 and Pd Pt/Al 2O 3 in the presence of dibenzothiophene (DBT) was perforrned in a fixed bed flow reactor. The Pt based catalysts revealed the similar HDS activities and higher HYD activity compared with convertional Mo based ca talysts . The maximum activity was obtained around 320 ℃ for both catalyst types. The Pt based catalysts produced perhydrophenanthrene as a major product at the maximum activity in the hydrogenation of PHE while the Mo based catalysts produced octahydrophenanthrene. A 35 S radioisotope pulse tracer method ( 35 S RPTM) was used to estimate the behavior of sulfur on the working catalysts and to clarity the differences between Pt and Mo based catalysts. Very little amount of labile sulfur was accumulated on the Pt and Pd catalysts in the HDS of [ 35 S]DBT (PtS 0.25 or PdS 0.25 ). This indicates that the mechanism of DBT HDS on noble metal catalysts is significantly different from that on conventional Mo based catalysts where Mo is present as MoS 2 less than 60% of which can be labile in the case of Co Mo/Al 2O 3. Another Ru Cs/Al 2O 3 catalysts were also prepared and the behavior of sulfur on the working catalyst was compared with those of Mo based catalysts and Pt and Pd catalysts. The values of labile sulfur in the HDS reaction for Ru Cs catalysts approximately correspond to RuS 0.5-0.74 . These amounts of labile sulfur are much higher than those for Pt and Pd catalysts. The result suggests that the oxidation state of Ru species is present between the oxidation states of

关键词：加氢脱硫氢化作用柴油机催化转化

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SYNTHESIS OF STYRENIC TONER PARTICLES BY SPG EMULSIFICATION TECHNIQUE

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Chinese Journal of Polymer Science 2000年第4期18卷 309-322页

作者： Suda Kiatkamjornwong Roongkan Nuisin Guang-HuiMa Shinzo Omi Department of Imaging and Printing technology Faculty of ScienceChulalongkorn University.Bangkok 10330Thailand Multi-disciplinary Program of Petrochemistry and Polymer Faculty of ScienceChulalongkorn UniversityBangkok 10330Thailand Graduate School of Bio-application and System Engineering Tokyo University of Agriculture and TechnologyNakamachiKoganeiTokyo 184-8588Japan

This research studied the initiator efficiency for producing polymeric particles of poly(styrene-co-methyl methacrylate)copolymers by a Shirasu porous glass membrane(SPG)emulsification technique followed by suspension ***,ADVN,and AIBN were used as initiators and we found that BPO is the most suitable *** for various feed ratios of styrene/methyl methacrylate were thus synthesized by benzoyl peroxide,and their copolymer particle size,molecular weight distribution and pat-ride size distribution were *** n-BMA or 2-EHMA was added as the third monomer to decrease the terpolymer glass transition *** article describes the preparation technique,recipes and polymerization conditions for producing both copolymer and terpolymer particles,particle size changes,the corresponding particle morphologies and glass transition temperatures.

关键词： Shirasu porous glass emulsification n-butyl methacrylate 2-ethylhexyl methacrylate toner binder

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Influences of Incidence Angle on 2D-Flow and Secondary Flow Structure in Ultra-Highly Loaded Turbine Cascade

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Journal of Thermal Science 2014年第1期23卷 13-21页

作者： Hoshio Tsujita Atsumasa Yamamoto Department of Mechanical Engineering Hosei University3-7-2Kajino-choKoganei-shiTokyo Japan

An increase of turbine blade loading can reduce the numbers of blade and stage of gas turbines. However, an increase of blade loading makes the secondary flow much stronger because of the steep pitch-wise pressure gradient in the cascade passage, and consequently deteriorates the turbine efficiency. In this study, the computations were performed for the flow in an ultra-highly loaded turbine cascade with high turning angle in order to clarify the effects of the incidence angle on the two dimensional flow and the secondary flow in the cascade passage, which cause the profile loss and the secondary loss, respectively. The computed results showed good agreement with the experimental surface oil flow visualizations and the blade surface static pressure at mid-span of the blade. The profile loss was strongly increased by the increase of incidence angle especially in the positive range. Moreover, the positive incidences not only strengthened the horseshoe vortex and the passage vortex but also induced a new vortex on the end-wall. Moreover, the newly formed vortex influenced the formation of the pressure side leg of horseshoe vortex.

关键词： Turbine Cascade Incidence Angle Numerical Analysis Secondary Flow

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Numerical Investigation of Loss Generation Mechanisms of Flow in Turbomachinery by Using Curved Square Duct

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Journal of Thermal Science 2003年第3期12卷 219-224页

作者： Hoshio Tsujita Shimpei Mizuki Gaku Minorikawa Atsumasa Yamamoto Department of Mechhanical Engineering Hosei University3-7-2 Kajino-choKoganeiTokyoJapanDepartment of Mechhanical EngineeringHosei University3-7-2 Kajino-choKoganeiTokyoJapanDepartment of Mechhanical EngineeringHosei University3-7-2 Kajino-choKoganeiTokyoJapanNational Aerospace Laboratory 7-44-1 Jindaiji-higashi-machi Chofu Tokyo Japan

The secondary flow within a passage of turbomachinery exhibits a complex flow pattern by the effect of the centrifugal and the Coriolis forces. The passage vortex in this secondary flow generates a major part of the losses. However, the mechanism of the loss generation has not been fully clarified yet. In this point of view, the passage vortex is closely examined by the computational method using the two-dimensional curved square ducts as fundamental models. The inlet boundary layer thickness and the inlet velocity distortion are considered to be the major parameters affecting the generation of passage vortex in the present study. The computed results revealed that the passage vortex gave the predominant effects for the generation of loss not only in the breakdown process but also in the development process.

关键词： curved duct turbomachinery secondary flow passage vortex loss generation

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Numerical Investigation of Influence of Tip Leakage Flow on Secondary Flow in Transonic Centrifugal Compressor at Design Condition

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Journal of Thermal Science 2015年第2期24卷 117-122页

作者： Masanao Kaneko Hoshio Tsujita Graduate School of Engineering Hosei University3-7-2Kajino-choKoganei-shiTokyo184-8584Japan Department of Mechanical Engineering Faculty of Science and EngineeringHosei University

In a centrifugal compressor, the leakage flow through the tip clearance generates the tip leakage vortex by the in- teraction with the main flow, and consequently makes the flow in the impeller passage more complex by the inte- raction with the passage vortex. In addition, the tip leakage vortex interacts with the shock wave on the suction surface near the blade tip in the transonic centrifugal compressor impeller. Therefore, the detailed examination for the influence of the tip leakage vortex becomes seriously important to improve the aerodynamic performance cs- pccia｜ly for the transonic centrifugal compressor. In this study, the flows in the transonic centrifugal compressor with and without the tip clearance at the design condition were analyzed numerically by using the commercial CFD code. The computed results revealed that the tip leakage vortex induced by the high loading at the blade tip around the leading edge affected the loss generation by the reduction or the suppression of the shock wave on the suction surface of the blade.

关键词： Transonic Centrifugal Compressor Leakage Vortex Secondary Flow Shock Wave Numerical Analysis

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Thermal Emulsion Polymerization without any Conventional Initiators and Emulsifiers

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Chinese Chemical Letters 2006年第4期17卷 553-556页

作者： Yong Zhong DU Fu Qiang HU Hong YUAN Shinzo OMI College of Pharmaceutical Science Zhejiang University 353 Yanan Road Hangzhou 310031 Graduate School of Bio-Applications and System Engineering Tokyo University of Agriculture and Technology Tokyo 184-8588 Japan

Stable poly（styrene-co-sodium styrene sulfonate）（P（St-NaSS） nanoparticles with broader size distribution were synthesized by thermal emulsion polymerization without any conventional initiators and emulsifiers. The obtained polymer nanoparticles have higher potential, and the particle sizes have broad distribution. The stability of polymer particles originated from the addition of small amounts of ionic comonomer, NaSS, which can act as an emulsifier in somewhat. The monomer conversion could reach up to about 28 wt% in 48 h, and did not increase by further polymerization when higher polymerization temperature （120℃） was employed. This polymerization system may be give some further understand for mechanism of emulsion polymerization.

关键词： Thermal emulsion polymerization latex particles styrene sodium styrene sulfonate.

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未来气候条件下蒙古草原植被的预测分布

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Journal of Plant Ecology 2024年第3期17卷 16-27页

作者： Kohei Suzuki Ikutaro Tsuyama Radnaakhand Tungalag Amartuvshin Narantsetseg Tsagaanbandi Tsendeekhuu Masato Shinoda Norikazu Yamanaka Takashi Kamijo Department of Regional Regeneration Science Faculty of Regional Environment ScienceTokyo University of AgricultureTokyo 156-8502Japan Hokkaido Research Center Forestry and Forest Products Research InstituteHokkaido 062-8516Japan Department ofBiology School of Arts and SciencesNational University of MongoliaUlaanbaatar 210646Mongolia Botanic Garden and ResearchInstitute Mongolian Academy of ScienceUlaanbaatar 51Mongolia Department of Earth and Environmental Sciences GraduateSchool of Environmental StudiesNagoya UniversityNagoya 464-8601Japan Arid Land Research Center Tottori UniversityTottori680-0001Japan Faculty of Life and Environmental Sciences University of TsukubaIbaraki 305-8572Japan

蒙古牧民家庭通过适应当地植被分布的特点来维持牲畜的健康状况。因此,预测未来植被变化对于稳定的牲畜放牧和可持续的草原利用至关重要。本研究基于前期研究获得的植被数据预测了2081年至2100年间草原植被,尤其是沙漠草原、草原和草甸... 详细信息

蒙古牧民家庭通过适应当地植被分布的特点来维持牲畜的健康状况。因此,预测未来植被变化对于稳定的牲畜放牧和可持续的草原利用至关重要。本研究基于前期研究获得的植被数据预测了2081年至2100年间草原植被,尤其是沙漠草原、草原和草甸草原的分布范围。我们首先基于在蒙古(43–50°N,87–119°E)收集的草原植被数据(2012至2016年,278个样地)划分了不同的群落类型。其次,采用最大熵(MaxEnt)模型进行物种分布建模,其中以荒漠草原、草原和草甸草原的分布数据作为目标变量,使用WorldClim的生物气候数据作为解释变量。最后,采用WorldClim提供的CMIP6下缩放的未来气候预测数据进行未来预测。结果发现,荒漠草原、草原和草甸草原模型的曲线下面积值分别为0.850、0.847和0.873。根据所有情景和所有群落的气候变化,适宜栖息地预计将缩小。潜在适宜区域减少的程度在草甸草原群落中最为显著。上述结果表明,未来气候变化情景下草甸草原群落将转变为草原群落。

关键词：气候变化群落最大熵物种分布建模草原 WorldClim

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Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses

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International Journal of Extreme Manufacturing 2023年第1期5卷 212-220页

作者： Shota Kawabata Shi Bai Kotaro Obata Godai Miyaji Koji Sugioka RIKEN Center for Advanced Photonics 2-1 HirosawaWakoSaitama 351-0198Japan Department of Applied Physics Tokyo University of Agriculture and Technology2-24-16 NakachoKoganeiTokyo 184-8588Japan

Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses(single-pulse mode).However,most studies using the GHz burst mode femtosecond laser pulses focus on ablation of materials to achieve high-efficiency and high-quality material *** this study,we explore the ability of the GHz burst mode femtosecond laser processing to form laser-induced periodic surface structures(LIPSS)on *** is well known that the direction of LIPSS formed by the single-pulse mode with linearly polarized laser pulses is typically perpendicular to the laser polarization *** contrast,we find that the GHz burst mode femtosecond laser(wavelength:1030 nm,intra-pulse duration:220 fs,intra-pulse interval time(intra-pulse repetition rate):205 ps(4.88 GHz),burst pulse repetition rate:200 kHz)creates unique two-dimensional(2D)*** regard the formation mechanism of 2D LIPSS as the synergetic contribution of the electromagnetic mechanism and the hydrodynamic ***,generation of hot spots with highly enhanced electric fields by the localized surface plasmon resonance of subsequent pulses in the bursts within the nanogrooves of one-dimensional LIPSS formed by the preceding pulses creates 2D ***,hydrodynamic instability including convection flow determines the final structure of 2D LIPSS.

关键词： GHz burst laser-induced periodic surface structures(LIPSS) surface nanostructuring 2D nanostructures

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Modeling and Control of Active Suspensions for MDOF Vehicle

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Tsinghua Science and technology 2003年第2期8卷 224-230页

作者：李克强郑四发杨殿阁连小珉永井正夫 State Key Laboratory of Automotive Safety and Energy Departtment of Automative EngineeringTsinghua UniversityBeijing 100084China State Key Laboratory of Automotive Safety and Energy Department of Automative EngineeringTsinghua UniversityBeijing 100084China tokyo university of agriculture and technology 2-24-16NakachoKoganeishi Tokyo 184-8588Japan

An MDOF model was developed including the influence of factors such as the engine, the seats, and the passengers to describe vehicle motion using a reduced order model of the controller designed by using the H∞ control method. The control system performance has been investigated by comparing the H∞ controller with a linear quadratic (LQ) controller.

关键词： Control equipment Control systems Degrees of freedom (mechanics)

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