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Optical manipulation of ratio-designable Janus microspheres

Photonics Research 2024年第6期12卷 1239-1249页

作者： YULU CHEN CONG ZHAI XIAOQING GAO HAN WANG ZUZENG LIN XIAOWEI ZHOU CHUNGUANG HU state key laboratory of precision measuring technology and instruments Tianjin UniversityTianjin 300072China

Angular optical trapping based on Janus microspheres has been proven to be a novel method to achieve controllable *** contrast to natural birefringent crystals,Janus microspheres are chemically synthesized of two compositions with different refractive ***,their structures can be artificially regulated,which brings excellent potential for fine and multi-degree-of-freedom manipulation in the optical ***,it is a considerable challenge to model the interaction of heterogeneous particles with the optical field,and there has also been no experimental study on the optical manipulation of microspheres with such designable refractive index *** the specific structure affects the kinematic properties of Janus microspheres remains ***,we report systematic research on the optical trapping and rotating of various ratio-designable Janus *** employ an efficient T-matrix method to rapidly calculate the optical force and torque on Janus microspheres to obtain their trapped postures and rotational characteristics in the optical *** have developed a robust microfluidic-based scheme to prepare Janus *** experimental results demonstrate that within a specific ratio range,the rotation radii of microspheres vary linearly and the orientations of microsphere are always aligned with the light polarization *** is of great importance in guiding the design of Janus *** their orientations flip at a particular ratio,all consistent with the *** work provides a reliable theoretical analysis and experimental strategy for studying the interaction of heterogeneous particles with the optical field and further expands the diverse manipulation capabilities of optical tweezers.

关键词： polarization ratio refractive

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Particle distributions in Lamb wave based acoustofluidics

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Nanotechnology and precision Engineering 2024年第2期7卷 60-68页

作者： Chuanchao Zhang Xian Chen Wei Wei Xuejiao Chen Quanning Li Xuexin Duan key laboratory of precision measuring technology and instruments College of Precision Instrument and Optoelectronics EngineeringTianjin UniversityTianjin300072China

Acoustic streaming enabled by a Lamb wave resonator(LWR)is efficient for particle trapping and enrichment in microfluidic ***,because Lamb waves combine the features of bulk acoustic waves and surface acoustic waves,the resulting acoustic streaming in the LWR occurs in multiple planes,and the particle flow behavior in this acoustofluidic system is largely *** here are numerical simulations and laboratory experiments conducted to investigate the boundary conditions for particle motion inside a microvortex induced by an *** dynamic capture,the particles’trajectories become orbital paths within an acoustic *** suspended particles encounter two distinct acoustic phenomena,i.e.,the drag force resulting from acoustic streaming and the acoustic radiation force,which exert forces in various directions on the *** the acoustic radiation force and the fluid drag force are dominant for large and small particles in a mixed solution,respectively,the large particles reside within the vortex while the small particles remain at its ***,when the acoustic radiation force is dominant for both types of particles,the distribution pattern is reversed.

关键词： Acoustofluidics Lamb wave resonator Particle manipulation Microvortex

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Advances in microfluidic-based DNA methylation analysis

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Nanotechnology and precision Engineering 2024年第1期7卷 116-134页

作者： Jiwen Li Tiechuan Li Xuexin Duan state key laboratory of precision measuring technology and instruments Tianjin UniversityTianjin 300072China

DNA methylation has been extensively investigated in recent years,not least because of its known relationship with various *** in analytical methods can greatly increase the relevance of DNA methylation studies to both clinical medicine and scientiﬁc ***ﬂu-idic chips are excellent carriers for molecular analysis,and their use can provide improvements from multiple ***-chip molecular analysis has received extensive attention owing to its advantages of portability,high throughput,low cost,and high efﬁ*** recent years,the use of novel microﬂuidic chips for DNA methylation analysis has been widely reported and has shown obvious superiority to conventional *** this review,weﬁrst focus on DNA methylation and its ***,we discuss advanced microﬂuidic-based methods for DNA methylation analysis and describe the great progress that has been made in recent ***,we summarize the advantages that microﬂuidic technology brings to DNA methylation analysis and describe several challenges and perspectives for on-chip DNA methylation *** review should help researchers improve their understanding and make progress in developing microﬂuidic-based methods for DNA methylation analysis.

关键词： Microﬂuidic chip DNA methylation analysis Molecular analysis High throughput Low cost

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Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators

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Nanotechnology and precision Engineering 2024年第1期7卷 32-43页

作者： Shuai Shi Qingrui Yang Yi Yuan Haolin Li Pengfei Niu Wenlan Guo Chen Sun Wei Pang state key laboratory of precision measuring technology and instruments Tianjin UniversityTianjin 300072China

This paper presents the design,fabrication,and characterization of cantilever-type resonators with a novel stacked *** nitride is adopted as the material for both the structural layer and the piezoelectric layer;this simpliﬁes the fabrication process and improves the quality factor of the *** in-plane and out-of-planeﬂexural modes were *** effect of the structural dimensions and electrode patterns on the resonator’s performance were also ***-element simulations and experiments examining anchor loss and thermoelastic damping,which are the main loss mechanisms affecting the quality factor of these resonators,were carried *** optimal structural dimensions and electrode patterns of the cantilever-type resonators are presented.A quality factor of 7922 with a motional impedance of 88.52 kΩand a quality factor of 8851 with a motional impedance of 67.03 kΩwere achieved for the in-plane and out-of-planeﬂexural-mode resonators,*** proposed resonator design will contribute to the development of high-performance devices such as accelerometers,gyroscopes,and pressure sensors.

关键词： MEMS Cantilever-type micro-resonator AlN Finite-element simulation

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Frequency-modulated continuous-wave multiplexed gas sensingbased on optical frequency comb calibration

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Chinese Physics B 2024年第9期33卷 152-163页

作者： Linhua Jia Xinghua Qu Fumin Zhang state key laboratory of precision Measurement technology and instruments Tianjin UniversityTianjin 300072China

Laser absorption spectroscopy has proven to be an effective approach for gas sensing, which plays an important rolein the fields of military, industry, medicine and basic research. This paper presents a multiplexed gas sensing system basedon optical frequency comb (OFC) calibrated frequency-modulated continuous-wave (FMCW) tuning nonlinearity. Thesystem can be used for multi-parameter synchronous measurement of gas absorption spectrum and multiplexed opticalpath. Multi-channel parallel detection is realized by combining wavelength division multiplexing (WDM) and frequencydivision multiplexing (FDM) techniques. By introducing nonlinear optical crystals, broadband spectrum detection is simultaneouslyachieved over a bandwidth of hundreds of nanometers. An OFC with ultra-high frequency stability is used asthe frequency calibration source, which guarantees the measurement accuracy. The test samples involve H13C14N, C_(2)H_(2)and Rb vapor cells of varying densities and 5 parallel measurement experiments are designed. The results show that themeasurement accuracies of spectral absorption line and the optical path are 150 MHz and 20 m, respectively. The schemeoffers the advantages of multiplexed, multi-parameter, wide spectrum and high resolution detection, which can realize theidentification of multi-gas components and the high-precision inversion of absorption lines under different *** proposed sensor demonstrates great potential in the field of high-resolution absorption spectrum measurement for gassensing applications.

关键词： frequency-modulated continuous-wave (FMCW) technology optical frequency comb multiplexing absorption spectroscopy

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Molecular dynamics simulation study of nitrogen vacancy color centers prepared by carbon ion implantation into diamond

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Nanotechnology and precision Engineering 2024年第3期7卷 71-78页

作者： Wei Zhao Zongwei Xu Pengfei Wang Hanyi Chen state key laboratory of precision measuring technology and instruments Tianjin UniversityTianjin 300072China Department of Modern Physics University of Science and Technology of ChinaHefei 230026China

Nitrogen vacancy(NV)color centers in diamond have useful applications in quantum sensing andﬂuorescent *** can be gen-erated experimentally by ion implantation,femtosecond lasers,and chemical vapor ***,there is a lack of studies of the yield of NV color centers at the atomic *** the molecular dynamics simulations described in this paper,NV color centers are pre-pared by ion implantation in diamond with pre-doped nitrogen and subsequent *** differences between the yields of NV color centers produced by implantation of carbon(C)and nitrogen(N)ions,respectively,are *** is found that C-ion implantation gives a greater yield of NV color centers and superior location *** effects of different pre-doping concentrations(400–1500 ppm)and implantation energies(1.0–3.0 keV)on the NV color center yield are analyzed,and it is shown that a pre-doping concentra-tion of 1000 ppm with 2 keV C-ion implantation can produce a 13%yield of NV color centers after 1600 K annealing for 7.4 ***,a brief comparison of the NV color center identiﬁcation methods is presented,and it is found that the error rate of an analysis utiliz-ing the identify diamond structure coordination analysis method is reduced by about 7%compared with conventional identiﬁcation+methods.

关键词： NV color center Ion implantation Molecular dynamics(MD)simulation Yield enhancement

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Electrostatic generator enhancements for powering IoT nodes via efficient energy management

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Microsystems & Nanoengineering 2024年第2期10卷 143-152页

作者： Zibo Wu Zeyuan Cao Junchi Teng Rong Ding Jiani Xu Xiongying Ye state key laboratory of precision Measurement technology and instruments Department of Precision InstrumentTsinghua University100084BeijingChina

Electrostatic generators show great potential for powering widely distributed electronic devices in Internet of Things(IoT)***,a critical issue limiting such generators is their high impedance mismatch when coupled to electronics,which results in very low energy utilization ***,we present a high-performance energy management unit(EMU)based on a spark-switch tube and a buck converter with an RF *** optimizing the elements and parameters of the EMU,a maximum direct current output power of 79.2 mW m^(-2)rps^(-1)was reached for a rotary electret generator with the EMU,achieving 1.2 times greater power output than without the ***,the maximum power of the contact-separated triboelectric nanogenerator with an EMU is 1.5 times that without the *** excellent performance is attributed to the various optimizations,including utilizing an ultralow-loss spark-switch tube with a proper breakdown voltage,adding a matched input capacitor to enhance available charge,and incorporating an RF inductor to facilitate the high-speed energy transfer *** on this extremely efficient EMU,a compact self-powered wireless temperature sensor node was demonstrated to acquire and transmit data every 3.5 s under a slight wind speed of 0.5 m/*** work greatly promotes the utilization of electrostatic nanogenerators in practical applications,particularly in IoT nodes.

关键词： IoT power generator

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Wearable Leg Movement Monitoring System for High-precision Real-Time Metabolic Energy Estimation and Motion Recognition

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Research 2024年第2期2023卷 417-429页

作者： Jinfeng Yuan Yuzhong Zhang Shiqiang Liu Rong Zhu state key laboratory of precision Measurement technology and instruments Department of Precision InstrumentTsinghua UniversityBeijing 100084China

Comprehensive and quantitative assessment of human physical activity in daily life is valuable for healthcare,especially for those who suffer from obesity and neurological disorders or are at high risk of *** wearable devices,e.g.,smartwatches,are insufficient and inaccurate for monitoring highly dynamic limb movements and assessing human ***,we report a new wearable leg movement monitoring system incorporating a custom-made motion sensor with machine learning algorithm to perceive human motion accurately and comprehensively during diverse walking and running *** system enables real-time multimodal perceptions of personal identity,motion state,locomotion speed,and energy expenditure for wearers.A general law of extracting real-time metabolic energy from leg movements is verified although individual gaits show *** addition,we propose a novel sensing configuration combining unilateral lower leg movement velocity with its angular rate to achieve high accuracy and good generalizability while simplifying the wearable *** performances in personal identification(accuracy of 98.7%)and motion-state recognition(accuracy of 93.7%)are *** wearable system also exhibites high-precision real-time estimations of locomotion speed(error of 3.04%to 9.68%)and metabolic energy(error of 4.18%to 14.71%)for new subjects across various time-varying *** wearable system allows reliable leg movement monitoring and quantitative assessment of bodily kinematic and kinetic behaviors during daily activities,as well as safe identity authentication by gait parameters,which would greatly facilitate smart life,personal healthcare,and rehabilitation training.

关键词： smart enable monitoring

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Metasurface array for single-shot spectroscopic ellipsometry

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Light(Science & Applications) 2024年第5期13卷 835-842页

作者： Shun Wen Xinyuan Xue Shuai Wang Yibo Ni Liqun Sun Yuanmu Yang Department of precision instrument State Key Laboratory of Precision Measurement Technology and InstrumentsTsinghua UniversityBeijing 100084China

Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive *** conventional ellipsometers utilize mechanically rotating polarizers and grating-based spectrometers for spectropolarimetric ***,we demonstrated a compact metasurface array-based spectroscopic ellipsometry system that allows single-shot spectropolarimetric detection and accurate determination of thin film properties without any mechanical *** silicon-based metasurface array with a highly anisotropic and diverse spectral response is combined with iterative optimization to reconstruct the full Stokes polarization spectrum of the light reflected by the thin film with high ***,the film thickness and refractive index can be determined by fitting the measurement results to a proper material model with high *** approach opens up a new pathway towards a compact and robust spectroscopic ellipsometry system for the high throughput measurement of thin film properties.

关键词： properties. spectroscopic film

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Sensitivity Improvements for Picosecond Ultrasonic Thickness Measurements in Gold and Tungsten Nanoscale Films

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Nanomanufacturing and Metrology 2024年第2期7卷 1-12页

作者： Jiaqi Dong Chengyuan Yao Yuanhao Zhu Shaojie Li Bowen Liu JinTao Fan Chunguang Hu Youjian Song Minglie Hu key laboratory of Opto-Electronic Information Science and technology of Ministry of Education School of Precision Instruments and Opto-Electronics EngineeringTianjin UniversityTianjin 300072China state key laboratory of precision measuring technology and instruments Tianjin UniversityTianjin 300072China

Picosecond ultrasonics,as a nondestructive and noncontact method,can be employed for nanoscale metallic film thickness *** sensitivity of the system,which determines the measurement precision and practicability of this technique,is often limited by the weak intensity of the ultrasonic *** solve this problem,we investigate the distinct mechanisms involved in picosecond ultrasonic thickness measurement for two types of metals,namely tungsten(W)and gold(Au).For thickness measurement in W films,theory and simulation show that optimizing the pump and probe laser wavelengths,which determine the intensity and shape of the ultrasonic signal,is critical to improving measurement sensitivity,while for Au film measurements,where acoustic-induced beam distortion is dominant,the signal intensity can be optimized by selecting an appropriate aperture size and sample *** above approaches are validated in experiments.A dual-wavelength pump-probe system is constructed based on a passively mode-locked ytterbium-doped fiber *** smoothing method and multipeak Gaussian fitting are employed for the extraction of ultrasonic *** measurement precision is achieved in a series of W and Au films with thicknesses of 43-750 *** work can be applied to various high-precision,noncontact measurements of metal film thickness in the semiconductor industry.

关键词： Picosecond ultrasonics Thickness measurement Optical pump-probe Beam distortion technique

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