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A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks

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Chinese Physics Letters 2017年第2期34卷 52-55页

作者：张乐民焦斌斌云世昌孔延梅辜志伟陈大鹏 smart sensing r&d center Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029 Company of Jiangsu Atmems Wuxi 214000

We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal oxide semiconductor （CMOS） microelectromechanical system （MEMS） process. The metal interconnection of the device is fabricated by a 0.5 μm standard CMOS process on 8-inch silicon wafer. Then, a SiO2-Si low-temperature fusion bonding is developed to bond the CMOS wafer and the MEMS wafer, with the electrical connection realized by the tungsten through silicon via process. Wafer- level A1Ge euteetic bonding is adopted to package the Pirani gauge in a non-hermetic cavity to protect the gauge from being damaged or contaminated in the dicing and assembling process, and to make it suitable for actual applications. To increase the accuracy of the test and restrain negative influence of temperature drift, the Wheatstone bridge structure is introduced. The test results show that before capping, the gauge has an average sensitivity of 1.04 × 104 K.W-1Torr-1 in dynamic range of 0.01 20 Torr. After capping, the sensitivity of the gauge does not decrease but increases to 1.12 × 104 K.W-1 Torr-1.

关键词： A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks

Spin-modulated near-infrared-Ⅰ emission in a xanthene-decorated Fe(Ⅱ) spin-crossover complex

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Science China Chemistry 2025年

作者： Cheng Yi duyong Chen Shihui Zhang rui Cai Chunying duan Yinshan Meng Tao Liu State Key Laboratory of Fine Chemicals Frontier Science Center for Smart Materials and Chemical Engineering School of Chemical Engineering Dalian University of Technology Instrumental Analysis center Dalian University of Technology School of Chemistry Dalian University of Technology Liaoning Binhai Laboratory

Molecular materials showing synergetic coupling of near-infrared （NIr） fluorescence and spin-crossover （SCO） are promisingly applicable in in-vivo bioimaging,temperature sensing,and spintronic *** the related study faces formidable *** this work we graft the NIr fluorophore xanthene onto the dipyridyl substituted triazole ligand and construct a new Febased SCO material,{FeⅡ（ddxc-abpt）2[N（CN）2]2}(1,ddxc-abpt:（E）-4-(((3,5-di（pyridin-2-yl）-4H-1,2,4-triazol-4-yl)imino)methyl)-N,N-diethyl-2,3-dihydro-1H-xanthen-6-amine).Magnetic studies indicate that compound 1 exhibits thermally induced SCO property in both the solid and solution ***-temperature fluorescence emission spectra reveal a remarkable 7-fold increase in photoluminescence intensity upon the transition from the low-spin state at 110 K to the high-spin state at 280 K,which is the record of all reported coupled fluorescence-SCO ***-temperature ultraviolet-visible （UV-Vis）absorption spectra show a significant change in absorption intensity within the fluorescence emission window,consistent with the F?rster resonance energy transfer （FrET） ***-dependent density functional theory （Td-dFT） calculations demonstrate that the strong coupling is attributed to disrupted energy transfer between the xanthene fluorophore and high-spin *** work provides a feasible approach for expanding the synergetic SCO-fluorescence materials to the NIr-Iwavelength region,and hopefully contributes to the applications of tunable NIr-SCO molecule-based sensors and devices.

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A new type of lipophilic hydrophobic self-repairing cellulose insulating paper developed with ST-110/FAS/PTFE ternary system as coating substrate

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High Voltage 2024年第2期9卷 474-483页

作者： Zhenglin Zeng Jinshan Qin Zuhao Wang Weimin Tan Chao Tang College of Engineering and Technology Southwest UniversityChongqingChina International r&d center for New Technologies of smart Grid and Equipment ChongqingChina

The moisture generated by the ageing of the oil-paper insulating system can easily lead to the deterioration of the performance of the insulating *** order to alleviate the impact of moisture on the performance of the insulating paper,we developed a kind of lipophilic hydrophobic self-repairing cellulose insulating paper(new insulating paper)based on the ternary system of polytetrafluoroethylene,fluorocarbon surfactant and fluorinated alkyl silane,and accelerated thermal ageing test for 45 days at 130°C was carried *** experimental results show that the new insulating paper with excellent lipophilic property can realise hydrophobic self-repairing through heat treatment after physical *** tensile strength and elongation at break of the new insulating paper increased by 5%–8%and 6.25%–27%respectively compared with the original cellulose insulating *** the end of ageing,the relative dielectric constant and dielectric loss factor of new insulating paper are 10.4%and 9.9%lower than that of the original cel-lulose insulating paper,while the breakdown voltage is 6.8%*** acid and moisture content produced during the ageing process of the insulating oil impregnated with new insulating paper are also less,indicating that the coating can delay the ageing of the insulating paper.

关键词： coating moisture cellulose

Prediction of dissolved gas content in transformer oil based on multi-information fusion

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High Voltage 2024年第3期9卷 685-699页

作者： Tongliang Yang Yun Fang Chengming Zhang Chao Tang dong Hu College of Engineering and Technology Southwest UniversityChongqingChina International r&d center for New Technologies of smart Grid and Equipment Southwest UniversityChongqingChina

In order to accurately predict the content and variation trend of dissolved gas in trans-former oil and guide the condition maintenance of power transformers,a combined prediction model based on multi-information fusion is proposed and its effectiveness is *** of all,based on the possibility of pathological and missing historical sample data,a detection and filling method based on variable weight combination samples is ***,the authors propose two *** at the non-linear and non-stationary characteristics of gas content,a univariate decomposition prediction mode HBA-VMd-TCN which based on the Honey Badger algorithm,variational mode decomposition and time convolutional network(TCN)is *** the multi-variate Informer prediction model is established for gas content affected by multiple ***,the cross-entropy theory is used to determine the weight coefficients of the two models,and the multi-information fusion combined prediction model is ***,on the basis of the above,a method to determine the time step and the position information of the transition point adaptively in the process of prediction is proposed to further improve the prediction *** results show that,through a series of simulation experiments of model comparison and transformer anomaly prediction,the accuracy and effectiveness of the combined prediction model are verified.

关键词： content prediction dissolved

Performance improvements in complementary metal oxide semiconductor devices and circuits based on fin field-effect transistors using 3-nm ferroelectric Hf_(0.5)Zr_(0.5)O_(2)

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rare Metals 2024年第7期43卷 3242-3249页

作者： Zhao-Hao Zhang Yan-Na Luo Gao-Bo Xu Jia-Xin Yao Zhen-Hua Wu Hong-Bin Zhao Qing-Zhu Zhang Hua-Xiang Yin Jun Luo Wen-Wu Wang Hai-Ling Tu Integrated Circuit Advanced r&d center Institute of Microelectronics of Chinese Academy of SciencesBeijing 100029China School of Integrated Circuits University of Chinese Academy of SciencesBeijing 100049China State Key Laboratory of Advanced Materials for smart sensing General Research Institute for Nonferrous MetalsBeijing 100088China

In this work,a conventional HfO_(2) gate dielectric layer is replaced with a 3-nm ferroelectric(Fe) HZO layer in the gate stacks of advanced fin field-effect transistors(FinFETs).Fe-induced characteristics,e.g.,negative drain induced barrier lowering(N-dIBL) and negative differential resistance(Ndr),are clearly observed for both p-and n-type HZO-based *** characteristics are attributed to the enhanced ferroelectricity of the 3-nm hafnium zirconium oxide(HZO) film,caused by Al doping from the TiAlC capping *** mechanism is verified for capacitors with structures similar to the *** to the enhanced ferroelectricity and N-dIBL phenomenon,the drain current(I_(dS))of the HZO-FinFETs is greater than that of HfO_(2)-FinFETs and obtained at a lower operating ***,circuits based on HZO-FinFET achieve higher performance than those based on HfO_(2)-FinFET at a low voltage drain(V_(dd)),which indicates the application feasibility of the HZO-FinFETs in the ultralow power integrated circuits.

关键词： FinFET Ferroelectric Hafnium zirconium oxide Subthreshold swing Low power

Three-channel CMOS transimpedance amplifier for LidAr sensor receiver

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Journal of Systems Engineering and Electronics 2024年第1期35卷 74-80页

作者： LIU ruqing ZHU Jingguo JIANG Yan LI Feng JIANG Chenghao MENG Zhe Photoelectric r&d center Academy of Opto-ElectronicsChinese Academy of SciencesBeijing 100094China

For time-of-flight(TOF)light detection and ranging(LidAr),a three-channel high-performance transimpedance amplifier(TIA)with high immunity to input load capacitance is presented.A regulated cascade(rGC)as the input stage is at the core of the complementary metal oxide semiconductor(CMOS)circuit chip,giving it more immunity to input photodiode detectors.A simple smart output interface acting as a feedback structure,which is rarely found in other designs,reduces the chip size and power consumption *** circuit is designed using a 0.5μm CMOS process technology to achieve low *** device delivers a 33.87 dB?transimpedance gain at 350 *** a higher input load capacitance,it shows a-3 dB bandwidth of 461 MHz,indicating a better detector tolerance at the front end of the *** a 3.3 V supply voltage,the device consumes 5.2 mW,and the total chip area with three channels is 402.8×597.0μm2(including the test pads).

关键词： transimpedance amplifier(TIA) three-channel regulated cascade(rGC) light detection and ranging(LidAr)

Transforming waste particles into valuable adsorbents via amyloid-mediated molecular engineering

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Science China Chemistry 2025年第1期68卷 317-328页

作者： Qingmin Yang Jian Zhao Yujia Zhang Xingyu Zhou Hao ren Bowen Hu Zhongli Lei Lixin Chen Peng Yang School of Material and Chemical Engineering Bengbu University Anhui Provincial Engineering Laboratory of Silicon-Based Materials School of Chemistry and Chemical Engineering Northwestern Polytechnical University Key Laboratory of Applied Surface and Colloid Chemistry Ministry of Education School of Chemistry and Chemical EngineeringShaanxi Normal University Xi'an Key Laboratory of Polymeric Soft Matter School of Chemistry and Chemical Engineering Shaanxi Normal University International Joint research center on Functional Fiber and Soft smart Textile School of Chemistry and Chemical EngineeringShaanxi Normal University

The high-value utilization of industrial solid waste using a facile and eco-friendly process is of great interest and significance in reducing environmental pollution and developing a green circular economy. Herein, we propose an amyloid-mediated molecular engineering strategy to transform particulate waste into valuable adsorbents for metal ions. Our method has the advantage of aqueous solution fabrication under mild conditions without the use of high-temperature hydrothermal methods and toxic chemical reagents. Amyloid-mediated molecular engineering manipulates the phase transition of bovine serum albumin(BSA)on particulate waste surfaces, resulting in a remarkable ～3.1 times improvement in the adsorption capacity of fly ash, a typical industrial solid waste for gold ions after modification with the phase-transitioned BSA(PTB). The resultant adsorption ability was 69–1,980 times higher than those of conventional and emerging adsorbent materials such as ion exchange resins, activated carbon(AC), covalent organic frameworks(COFs), and metal-organic frameworks(MOFs). We further demonstrated the application of our PTB-modified materials in the recovery of precious metals from low-grade gold ore and electronic waste leachates. Consequently, this strategy could increase the value of waste materials nearly 27 times. In addition, this method is generally extendable to other conventional industrial adsorbents such as resin, clay, and Al2O3, and enhances their adsorption capabilities at least twofold. Overall, this work provides a simple and green approach for improving the adsorption performance of solid particles, and is expected to develop into a universal strategy for transforming waste particles into high-value-added products.

关键词： amyloid-like protein aggregates surface engineering fly ash solid waste adsorption

k-Nearest Neighbor Query Processing Algorithms for a Query region in road Networks

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Journal of Computer Science & Technology 2013年第4期28卷 585-596页

作者： Hyeong-Il Kim Jae-Woo Chang department of Computer Engineering Chonbuk National University Cloud Open r&d center Chonbuk National University

recent development of wireless communication technologies and the popularity of smart phones .are making location-based services （LBS） popular. However, requesting queries to LBS servers with users＇ exact locations may threat the privacy of users. Therefore, there have been many researches on generating a cloaked query region for user privacy protection. Consequently, an efficient query processing algorithm for a query region is required. So, in this paper, we propose k-nearest neighbor query （k-NN） processing algorithms for a query region in road networks. To efficiently retrieve k-NN points of interest （POIs）, we make use of the Island index. We also propose a method that generates an adaptive Island index to improve the query processing performance and storage usage. Finally, we show by our performance analysis that our k-NN query processing algorithms outperform the existing k-range Nearest Neighbor （krNN） algorithm in terms of network expansion cost and query processing time.

关键词： island index k-nearest neighbor query processing scheme locatiombased service road network

Optimized electrochemical ammonia production:From metal-N_(2)/NO_(x) batteries to aqueous metal-NO_(x)^(–) batteries

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Journal of Energy Chemistry 2024年第11期98卷 541-555页

作者： Feng-Xiao Yan Hao-Yu Wang Yi Feng Hao Wang Zhong-Yong Yuan School of Materials Science and Engineering Smart Sensing Interdisciplinary Science CenterNankai UniversityTianjin 300350China

Ammonia plays a crucial role in contemporary society,impacting medicine,agriculture,and the chemical *** conventional industrial synthesis of NH_(3) through the Haber-Bosch technique,carried out under severe reaction conditions,leads to substantial energy consumption and environmental *** is thus imperative for NH_(3) synthesis methods to be investigated under more favorable *** of ammonia by electrocatalysis can effectively reduce the environmental damage and other urgent problems,which is a promising ***-nitrogen series batteries(M-N batteries),such as metal-nitrogen gas batteries,metal-nitrogen oxide batteries and metal-oxynitride batteries have been regarded recently as an exemplar of concurrent NH_(3) synthesis and energy ***,the large-scale application of these batteries is still limited by numerous challenges are currently existing in building high-efficiency M-N batteries,including poor Faradic efficiency and low NH_(3) ***,a comprehensive overview of M-N batteries is offered,specifically focusing on advanced strategies for designing highly efficient cathode catalysts in anticipation of future *** metal anodes,cathodic electro-reduction reactions,and design principles are encompassed in the discussion,offering detailed insights to enhance ***,feasibility analyses,technoeconomic assessments,device combinations,and comparative evaluations are delved into in the review,contributing to a thorough comprehension of diverse systems and their application *** and opportunities for future research directions are also delineated.

关键词： Metal-N_(2)batteries Metal-NO_(x)^(-)batteries Energy storage Ammonia production Electrocatalysts