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Demonstration of acousto-optical modulation based on a thin-film AlScN photonic platform

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Photonics Research 2024年第6期12卷 1138-1149页

作者： KEWEI BIAN ZHENYU LI YUSHUAI LIU SUMEI XU XINGYAN ZHAO YANG QIU YUAN DONG QIZE ZHONG TAO WU SHAONAN ZHENG TING HU School of Microelectronics Shanghai UniversityShanghai 201800China School of information Science and technology ShanghaiTech UniversityShanghai 201210China shanghai institute of microsystem and information technology Chinese Academy of SciencesShanghai 200050China University of chinese academy of sciences Beijing 100049China

Acousto-optic(AO)modulation technology holds significant promise for applications in microwave and optical signal ***-film scandium-doped aluminum nitride(AlScN),with excellent piezoelectric properties and a wide transparency window,is a promising candidate for achieving on-chip AO modulation with a fabri-cation process compatible with complementary metal-oxide-semiconductor(CMOS)*** study presents,to the best of our knowledge,the first demonstration of AO modulators with surface acoustic wave generation and photonic waveguides monolithically integrated on a 400-nm-thick film of AlScN on an *** intramodal AO modulation is realized based on an AlScN straight waveguide,and the modulation efficiency is significantly enhanced by 12.3 dB through the extension of the AO interaction length and the utilization of bidirectional acoustic *** intermodal AO modulation and non-reciprocity are further demonstrated based on a multi-mode spiral waveguide,achieving a high non-reciprocal contrast(>10 dB)across an optical bandwidth of 0.48 *** research marks a significant stride forward,representing an advancement in the realization of microwave photonic filters,magnet-free isolators,and circulators based on the thin-film AlScN photonic platform.

关键词： waveguide film microwave

Synergy effect of regulated Li-plating and functional solid electrolyte interphase on graphite anodes

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Nano Research 2024年第9期17卷 8077-8085页

作者： Panpan Wang Baojia Xia Jianling Li State Key Laboratory of Advanced Metallurgy University of Science and Technology BeijingBeijing 100083China shanghai institute of microsystem and information technology Chinese Academy of SciencesShanghai 201800China

The growth of Li dendrites poses potential safety hazard to lithium-ion batteries(LIBs),and eliminating Li dendrites thoroughly stills face tough difficulties ***,regulating Li-plating is a critical optimization-direction to address the ***,a“graphite-Li hybrid”anode with high reversibility is realized under the constant-capacity lithiation(CCL).Within CCL,the uniform distribution of Li-plating on the graphite surface is successfully *** evolution in different states of solid electrolyte interphase(SEI)is investigated in detail to study the interaction between the potentials and impedance during the process of Liintercalation and *** the potential below 0 V and the state of charge(SOC)of 110%relative to the theoretical capacity,the F-rich SEI with high stability is constructed to hinder the emergency of Li dendrites and maintain the intact structure of graphite anode under long *** cell presents more than 100%Coulombic efficiency(CE)with the 900 cycles,demonstrating the reversible Li-plating and the utilization of *** the CCL half-cell provides a good cycling performance and specific capacity of 900 cycles at 0.5 C,it is attributed to the synergy effect of stable inorganic-rich SEI and regulated active Li-plating.

关键词： "graphite-Li hybrid"anode Li-plating reversibility solid electrolyte interphase(SEI)

How do high-voltage cathode and PEO electrolyte get along well?EIS analysis mechanism&potentiometric control strategy

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Journal of Energy Chemistry 2024年第9期96卷 424-436页

作者： Xiaodong Bai Chaoliang Zheng Heng Zhang Jian Liu Panpan Wang Baojia Xia Jianling Li State Key Laboratory of Advanced Metallurgy University of Science and Technology BeijingBeijing 100083China shanghai institute of microsystem and information technology Chinese Academy of SciencesShanghai 201800China

PEO-based all-solid-state electrolytes are extensively utilized and researched owing to their exceptional safety,low-mass-density,and ***,the low oxidation potential of PEO makes the interface problem with the high-voltage cathode extremely *** this work,the impedance of PEO-based all-solid-state batteries with high-voltage cathode(NCM811)was studied at different *** Nyquist plots displayed a gyrate arc at low-frequencies for NCM811/PEO *** on the kinetic modeling,it was deduced that there is a decomposition reaction of PEO-matrix in addition to de-embedded reaction of NCM811,and the PEO intermediate product(dehydra-PEO)adsorbed on the electrode surface leading to low-frequency inductive ***,the distribution of relaxation time shows the dehydra-PEO results in the kinetic tardiness of the charge transfer process in the temporal ***,an artificial interface layer(CEI_(x))was modified on the surface of NCM811 to regulate the potential of cathode/electrolyte interface to prevent the high-voltage deterioration of ***/CEI_(x)/PEO batteries exhibit capacity retentions of 96.0%,84.6%,and 76.8%after undergoing 100 cycles at cut-off voltages of 4.1,4.2,and 4.3 V,***,here the failure mechanism of high-voltage PEO electrolyte is investigated by EIS and a proposed solving strategy is presented.

关键词： PEo-based electrolyte High-voltage cathode Electrochemical impedance spectroscopy Mechanism research Electrochemical characteristic

Through-polymer,via technology-enabled,flexible,lightweight,and integrated devices for implantable neural probes

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microsystems & Nanoengineering 2024年第2期10卷 279-291页

作者： Cunkai Zhou Ye Tian Gen Li Yifei Ye Lusha Gao Jiazhi Li Ziwei Liu Haoyang Su Yunxiao Lu Meng Li Zhitao Zhou Xiaoling Wei Lunming Qin Tiger H.Tao Liuyang Sun College of Electronics and information Engineering Shanghai University of Electric PowerShanghaiChina 2020 X-Lab Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghaiChina School of Graduate Study University of Chinese Academy of SciencesBeijingChina State Key Laboratory of Transducer technology Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghaiChina Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijingChina School of Physical Science and technology ShanghaiTech UniversityShanghaiChina Center for Excellence in Brain Science and Intelligence technology Chinese Academy of SciencesShanghaiChina Neuroxess Co. Ltd.(Jiangxi)NanchangJiangxiChina Guangdong institute of Intelligence Science and technology HengqinZhuhaiGuangdongChina Tianqiao and Chrissy Chen institute for Translational Research ShanghaiChina

In implantable electrophysiological recording systems,the headstage typically comprises neural probes that interface with brain tissue and integrated circuit chips for signal *** advancements in MEMS and CMOS technology have significantly improved these components,their interconnection still relies on conventional printed circuit boards and sophisticated *** conventional approach adds considerable weight and volume to the package,especially for high channel count *** address this issue,we developed a through-polymer via(TPV)method inspired by the through-silicon via(TSV)technique in advanced three-dimensional *** innovation enables the vertical integration of flexible probes,amplifier chips,and PCBs,realizing a flexible,lightweight,and integrated device(FLID).The total weight of the FLIDis only 25%that of its conventional counterparts relying on adapters,which significantly increased the activity levels of animals wearing the FLIDs to nearly match the levels of control animals without ***,by incorporating a platinum-iridium alloy as the top layer material for electrical contact,the FLID realizes exceptional electrical performance,enabling in vivo measurements of both local field potentials and individual neuron action *** findings showcase the potential of FLIDs in scaling up implantable neural recording systems and mark a significant advancement in the field of neurotechnology.

关键词： alloy neural recording

Superconducting single-photon detector with a speed of 5 GHz and a photon number resolution of 61

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Photonics Research 2024年第6期12卷 1328-1333页

作者： TIANZHU ZHANG JIA HUANG XINGYU ZHANG CHAOMENG DING HUIQIN YU YOU XIAO CHAOLIN LV XIAOYU LIU ZHEN WANG LIXING YOU XIAOMING XIE HAO LI shanghai Key Laboratory of Superconductor Integrated Circuit technology Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China Photon technology(Zhejiang)Co. Ltd.Jiaxing 314100China

Rapid detection and discrimination of single photons are pivotal in various applications,such as deep-space laser communication,high-rate quantum key distribution,and optical quantum ***,conventional single-photon detectors(SPDs),including semiconducting and recently developed superconducting detectors,have limited detection speed and photon number resolution(PNR),which pose significant challenges in practical *** this paper,we present an efficient,fast SPD with good PNR,which has 64 paralleled,sandwiched superconducting nanowires fabricated on a distributed Bragg *** detector is operated in a compact Gifford–McMahon cryocooler that supports 64 electrical channels and has a minimum working temperature of 2.3 *** combined detector system shows a functional nanowire yield of 61/64,a system detection efficiency of 90%at 1550 nm,and a maximum count rate of 5.2 ***,it has a maximum PNR of 61,corresponding to the operating *** SPD signifies a substantial improvement in quantum detector technology,with potential applications in deep-space laser communication,high-speed quantum communication,and fundamental quantum optics experiments.

关键词： communication photon quantum

Chalcogenide Ovonic Threshold Switching Selector

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Nano-Micro Letters 2024年第5期16卷 1-40页

作者： Zihao Zhao Sergiu Clima Daniele Garbin Robin Degraeve Geoffrey Pourtois Zhitang Song Min Zhu National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050People’s Republic of China University of chinese academy of sciences Beijing 100029People’s Republic of China IMEC Kapedreef 75LeuvenBelgium

Today’s explosion of data urgently requires memory technologies capable of storing large volumes of data in shorter time frames,a feat unattain-able with Flash or *** Optane,commonly referred to as three-dimensional phase change memory,stands out as one of the most promising *** Optane with cross-point architecture is constructed through layering a storage element and a selector known as the ovonic threshold switch(OTS).The OTS device,which employs chalcogenide film,has thereby gathered increased attention in recent *** this paper,we begin by providing a brief introduction to the discovery process of the OTS ***,we summarize the key elec-trical parameters of OTS devices and delve into recent explorations of OTS materials,which are categorized as Se-based,Te-based,and S-based material ***,we discuss various models for the OTS switching mechanism,including field-induced nucleation model,as well as several carrier injection ***,we review the progress and innovations in OTS mechanism ***,we highlight the successful application of OTS devices in three-dimensional high-density memory and offer insights into their promising performance and extensive prospects in emerging applications,such as self-selecting memory and neuromorphic computing.

关键词： Non-volatile memory Ovonic threshold switch(OTS) Chalcogenide Selector

Power Allocation for SE Maximization in Uplink Massive MIMO System Under Minimum Rate Constraint

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China Communications 2024年第3期21卷 104-117页

作者： Wang Hui Yu Xiangbin Liu Fuyuan Bai Jiawei College of Electronic and information Engineering Nanjing University of Aeronautics and AstronauticsNanjing 211106China Key Laboratory of Wireless Sensor Network and Communication Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China

In this paper,we optimize the spectrum efficiency(SE)of uplink massive multiple-input multiple-output(MIMO)system with imperfect channel state information(CSI)over Rayleigh fading *** SE optimization problem is formulated under the constraints of maximum power and minimum rate of each ***,we develop a near-optimal power allocation(PA)scheme by using the successive convex approximation(SCA)method,Lagrange multiplier method,and block coordinate descent(BCD)method,and it can obtain almost the same SE as the benchmark scheme with lower *** this scheme needs three-layer iteration,a suboptimal PA scheme is developed to further reduce the complexity,where the characteristic of massive MIMO(i.e.,numerous receive antennas)is utilized for convex reformulation,and the rate constraint is converted to linear *** suboptimal scheme only needs single-layer iteration,thus has lower complexity than the near-optimal ***,we joint design the pilot power and data power to further improve the performance,and propose an two-stage algorithm to obtain joint *** results verify the effectiveness of the proposed schemes,and superior SE performance is achieved.

关键词： imperfect CSI massive MIMO minimum rate constraint power allocation spectral efficiency

High-precision X-ray characterization for basic materials in modern high-end integrated circuit

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Journal of Semiconductors 2024年第7期45卷 12-24页

作者： Weiran Zhao Qiuqi Mo Li Zheng Zhongliang Li Xiaowei Zhang Yuehui Yu National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China School of Physical Science and technology ShanghaiTech UniversityShanghai 201210China shanghai Synchrotron Radiation Facility Shanghai Advanced Research InstituteChinese Academy of SciencesShanghai 201204China Beijing Synchrotron Radiation Facility Institute of High Energy PhysicsChinese Academy of ScienceBeijing 100049China

Semiconductor materials exemplify humanity's unwavering pursuit of enhanced performance,efficiency,and functionality in electronic *** its early iterations to the advanced variants of today,this field has undergone an extraordinary *** the reliability requirements of integrated circuits continue to increase,the industry is placing greater emphasis on the crystal ***,conducting a range of characterization tests on the crystals has become *** paper will examine the correlation between crystal quality,device performance,and production yield,emphasizing the significance of crystal characterization tests and the important role of high-precision synchrotron radiation X-ray topography characterization in semiconductor ***,we will cover the specific applications of synchrotron radiation characterization in the development of semiconductor materials.

关键词： X-ray topography synchrotron radiation semiconductor materials crystal defects

Enhancing the Interaction of Carbon Nanotubes by Metal-Organic Decomposition with Improved Mechanical Strength and Ultra-Broadband EMI Shielding Performance

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Nano-Micro Letters 2024年第7期16卷 281-294页

作者： Yu-Ying Shi Si-Yuan Liao Qiao-Feng Wang Xin-Yun Xu Xiao-Yun Wang Xin-Yin Gu You-Gen Hu Peng-Li Zhu Rong Sun Yan-Jun Wan Shenzhen institute of Advanced Electronic Materials Shenzhen Institutes of Advanced TechnologyChinese Academy of SciencesShenzhen 518055People’s Republic of China Southern University of Science and technology Shenzhen 518055People’s Republic of China National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050People’s Republic of China

The remarkable properties of carbon nanotubes(CNTs)have led to promising applications in the field of electromagnetic inter-ference(EMI)***,for macroscopic CNT assemblies,such as CNT film,achieving high electrical and mechanical properties remains challenging,which heavily depends on the tube-tube interac-tions of ***,we develop a novel strategy based on metal-organic decomposition(MOD)to fabricate a flexible silver-carbon nanotube(Ag-CNT)*** Ag particles are introduced in situ into the CNT film through annealing of MOD,leading to enhanced tube-tube *** a result,the electrical conductivity of Ag-CNT film is up to 6.82×10^(5) S m^(-1),and the EMI shielding effectiveness of Ag-CNT film with a thickness of~7.8μm exceeds 66 dB in the ultra-broad frequency range(3-40 GHz).The tensile strength and Young’s modulus of Ag-CNT film increase from 30.09±3.14 to 76.06±6.20 MPa(~253%)and from 1.12±0.33 to 8.90±0.97 GPa(~795%),***,the Ag-CNT film exhibits excellent near-field shield-ing performance,which can effectively block wireless *** innovative approach provides an effective route to further apply macroscopic CNT assemblies to future portable and wearable electronic devices.

关键词： EMI shielding Mechanical strength Carbon nanotubes Metal-organic decomposition Flexibility