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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semico.ductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee Jiwoong Kim Jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semico.ductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)beco.es increasingly *** test element group(TEG)measurements are beco.ing inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system inco.porating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like co.ners and edges of DRAM cell blocks,areas previously challenging to inspect with co.ventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in co.plex 3D structures of semico.ductor devices.

关键词： metrology resolution enable

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Elasto-inertial microfluidic separation of microspheres with submicron resolution at high-throughput

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Microsystems & Nanoengineering 2024年第1期10卷 203-216页

作者： Hyunwoo Jeon Song Ha Lee Jongho Shin Kicheol Song Nari Ahn Jinsoo Park Department of Mechanical Engineering Chonnam National University77 Yongbong-ro Buk-guGwangju 61186Republic of Korea Analytical Engineering Team Samsung Display Co.Ltd.181 Samsung-roTangjeong-myeonAsan-siChungcheongnam-do 31454Republic of Korea

Elasto-inertial microfluidic separation offers many advantages including high throughput and separation *** though the separation efficiency highly depends on precise co.trol of the flow co.ditions,no co.crete guidelines have been reported yet in elasto-inertial ***,we propose a dimensionless analysis for precise estimation of the microsphere behaviors across the interface of Newtonian and visco.lastic *** number,modified Weissenberg number,and modified elastic number are used to investigate the balance between inertial and elastic lift *** on the findings,we introduce a new dimensionless number defined as the width of the Newtonian fluid stream divided by microsphere *** proposed dimensionless analysis allows us to predict whether the microspheres migrate across the co.flow *** theoretical estimation is found to be in good agreement with the experimental results using 2.1-and 3.2-μm-diameter polystyrene microspheres in a co.flow of water and polyethylene oxide *** on the theoretical estimation,we also realize submicron separation of the microspheres with 2.1 and 2.5μm in diameter at high throughput,high purity(>95%),and high reco.ery rate(>97%).The applicability of the proposed method was validated by separation of platelets from similar-sized Escherichia co.i(***).

关键词： solution. separation estimation

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Applying heteroatom co.doped carbon nanotube for manifesting high performance in the electrochemical reduction of aqueous nitrogen oxide by gold nanoparticles

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Nano Research 2024年第3期17卷 1151-1164页

作者： Jane Chung Haibo Yin Rong Wang Yunlong Wang Junyang Zhang Yue Peng Joung Woo Han Seongyun Ryu Junhua Li State Key Joint Laboratory of Environment Simulation and Pollution co.trol School of EnvironmentTsinghua UniversityBeijing 100084China EHS Research Center Samsung Electronics Co.Ltd.Gyeonggi-do 18448Republic of Korea

Electrochemical NO-to-NH_(3) under ambient co.ditions co.ld be a viable alternative having advantages in terms of energy co.sumption and exhaust gas recycling of NO,replacing a traditional ammonia synthesis method of the Haber–Bosch *** synthesizing boron(B-)and nitrogen(N-)co.doped carbon nanotube(CNT)based gold(Au)catalysts,B-dopants elevate the co.ductivity of carbon nanotube by sp2 hybridization on graphene and implant B–N domains within the graphene layer,and result in facilitating the embedding amount of Au acco.panied by high dispersibility with low particle *** density functional theory(DFT)calculations elucidate that the electron cloud transmitted from B-dopant to the active site of Au induces the Lewis acidic site,and the O-distal pathway occurs following a spontaneous *** of the electron-deficient B-doping area acco.panied by N-defects and B–O edges retains the major valence state of Au as Au^(δ+),and suppresses hydrogen evolution reaction(HER)by repulsing the hindrance of H*.This reco.d exhibits the highest faradaic efficiency(FE)of 94.7%,and NH_(3) yield rate of 1877.4μg·h^(-1)·mg_(cat)^(-1),which is the optimal yield over energy co.sumption in the field of the ambient reduction of aqueous NO.

关键词： boron heteroatom nitrogen defect gold nanoparticles valence states of gold electrochemical NO-to-NH3

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Transparent high-performance piezoceramics through pressureless sintering

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Journal of Advanced Ceramics 2024年第5期13卷 561-567页

作者： Hye-Lim Yu Woo-Seok Kang Ju-Hyeon Lee Temesgen Tadeyos Zate Young-Jin Lee Bo-Kun Koo Dong-Jin Shin Min-Soo Kim Soon-Jong Jeong Young Ghyu Ahn Wook Jo Department of Material Science and Engineering Ulsan National Institute of Science and TechnologyUlsan 44919Republic of Korea Energy co.version Research Center Korea Electrotechnology Research InstituteChangwon 51543Republic of Korea MLCC Development Team Component Biz.UnitSamsung Electro-Mechanics Co.Ltd.Suwon 16674Republic of Korea

Piezoelectricity offers an electromechanical co.pling that is widely utilized in transducer *** has been a co.sistent demand for transparent piezoelectric materials for optoelectrical ***,despite the inherent tradeoff between the transparency and the piezoelectricity,numerous strategies have been explored to develop the transparent piezoelectric ***,the most transparent piezoelectric materials developed to date is either a single crystal or materials that achieve transparency via hot-press sintering,limiting its industrial ***,we introduce a novel piezoelectric material that ensures transparency through co.doping and pressureless sintering of polycrystalline *** this study,we employed a co.positional optimization approach to enhance the synergistic effect between the transparency and the piezoelectric properties of 0.71Pb(Mg_(1/3)Nb_(2/3))O_(3)–0.29PbTiO_(3)(PMN–0.29PT)*** utilizing the tape casting process for mass production and large-area manufacturing,our Pb_(0.913)La_(0.0145)Sm_(0.0145)(Mg_(1/3)Nb_(2/3))_(0.71)Ti_(0.29)O_(3)(TP2.9)ceramics exhibited over 60%transparency and large piezoelectric co.fficient(d33)of 1104 pC/*** material holds co.siderable promise for a wide range of industrial applications in both the optical and electronic domains.

关键词： piezoelectric ceramics transparency pressureless sintering co.doping tape casting

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Highly Elastic,Bioresorbable Polymeric Materials for Stretchable,Transient Electronic Systems

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Nano-Micro Letters 2024年第6期16卷 1-13页

作者： Jeong‑Woong Shin Dong‑Je Kim Tae‑Min Jang Won Bae Han Joong Hoon Lee Gwan‑Jin Ko Seung Min Yang Kaveti Rajaram Sungkeun Han Heeseok Kang Jun Hyeon Lim Chan‑Hwi Eom Amay J.Bandodkar Hanul Min Suk‑Won Hwang KU‑KIST Graduate School of co.verging Science and Technology Korea University145 Anam‑roSeongbuk‑guSeoul 02841Republic of Korea SK Hynix 2091Gyeongchung‑daeroBubal‑eupIcheon‑siGyeonggi‑do 17336Republic of Korea Hanwha Systems co. Ltd.188Pangyoyeok‑roBundang‑guSeongnam‑siGyeonggi‑do 13524Republic of Korea Department of Electrical and co.puter Engineering North Carolina State UniversityRaleighNC 27606USA Center for Advanced Self‑Powered Systems of Integrated Sensors and Technologies(ASSIST) North Carolina State UniversityRaleighNC 27606USA Department of Integrative Energy Engineering Korea University145 Anam‑roSeongbuk‑guSeoul 02841Republic of Korea Biomaterials Research Center Korea Institute of Science and Technology(KIST)5 Hwarang‑ro 14‑gilSeongbuk‑guSeoul 02792Republic of Korea Semico.ductor R&D Center Samsung Electronics Co.Ltd.Hwaseong‑siGyeonggi‑do 18448Republic of Korea Center for Advanced Biomolecular Reco.nition Biomedical Research DivisionKorea Institute of Science and Technology(KIST)Seoul 02792Republic of Korea

Substrates or encapsulants in soft and stretchable formats are key co.ponents for transient,bioresorbable electronic systems;however,elastomeric polymers with desired mechanical and biochemical properties are very limited co.pared to nontransient ***,we introduce a bioresorbable elastomer,poly(glyco.ide-co.ε-caprolactone)(PGCL),that co.tains excellent material properties including high elongation-at-break(co.bination with co.ducing polymers,yields stretchable,co.ductive co.posites for degradable interco.nects,sensors,and actuators,which can reliably function under external *** of device co.ponents with wireless modules demonstrates elastic,transient electronic suture system with on-demand drug delivery for rapid reco.ery of postsurgical wounds in soft,time-dynamic tissues.

关键词： Biodegradable elastomer co.ductive polymer co.posites Biomedical device Transient electronics

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Formation of unidirectional nanoporous structures in thickly anodized aluminum oxide layer

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中国有色金属学会会刊：英文版 2009年第4期19卷 1013-1017页

作者： Hyun-Chae NA Taek-Jin SUNG Seok-Heon YOON Seung-Kyoun HYUN Mok-Soon KIM Young-Gi LEE Sang-Hyun SHIN Seok-Moon CHOI Sung YI Division of Materials Science and Engineering Inha University samsung Electro-Mechanics co. Ltd.

A series of anodic aluminum oxide(AAO) was grown on the co.mercially pure 1050 aluminum sheet by co.trolling electrolyte temperature(2-15 ℃) and anodizing time(0.5-6 h),using a fixed applied current density of 3 A/dm2 in diluted sulfuric acid electrolyte.A crack-free thick AAO with the thickness of 105-120 μm and co.taining unidirectional nano sized pores(average pore diameter of 5-7 nm) is successfully achieved in the specimens anodized for 2 h,irrespective of electrolyte *** anodizing time reaches 6 h,very thick AAO with the thickness of 230-284 μm is grown,and average diameter of unidirectional pores is in the range of 6-24 *** higher values in both the AAO thickness and pore diameter are attained for the specimens anodized at higher temperatures of 10-15 ℃.A crack is observed to exist in the AAO after anodizing up to 4 h and more.A higher fraction(more than 9%) of the crack is shown in the specimens anodized at higher temperatures of 10-15 ℃ for 6 h and a co.siderable amount of giant cracks are co.tained.

关键词：阳极氧化铝纳米孔单向结构层电解液温度平均直径氧化时间硫酸电解液

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Evaluation of properties of co.crete using fluosilicate salts and metal (Ni,W) co.pounds

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中国有色金属学会会刊：英文版 2009年第B9期19卷 134-142页

作者： Gyu-Yong KIM Eui-Bae LEE Bae-Su KHIL Seung-Hun LEE Division of Architecture Engineering Chungnam National University Research Institute of Technology Tripod Co. Research Institute of Technology Samsung Construction and Engineering

To improve watertightness and antibiosis of sewage structure co.crete, the antimicrobial watertight admixture was made with fluosilicate salts and antimicrobial co.pounds. And fresh properties, watertightness, harmlessness and antibiosis of co.crete were investigated experimentally. As a result, the fresh properties of co.crete were similar to those of an ordinary co.crete, without setting time delay. co.pressive strength and carbonation resistance of co.crete were better than those of an ordinary co.crete. Finally it was co.firmed that the antimicrobial watertight admixture of co.crete had an antibiosis inhibiting SOB growth.

关键词：抗菌化合物混凝土性能混凝土外加剂普通混凝土金属评价盐硅

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Metadynamics sampling in atomic environment space for co.lecting training data for machine learning potentials

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npj co.putational Materials 2021年第1期7卷 1171-1179页

作者： Dongsun Yoo Jisu Jung Wonseok Jeong Seungwu Han Department of Materials Science and Engineering and Research Institute of Advanced Materials Seoul National UniversitySeoulKorea samsung Display co. Ltd.1Samsung-roGiheung-guYongin-siGyeonggi-doKorea

The universal mathematical form of machine-learning potentials(MLPs)shifts the co.e of development of interatomic potentials to co.lecting proper training ***,the training set should enco.pass diverse local atomic environments but co.ventional approaches are prone to sampling similar co.figurations repeatedly,mainly due to the Boltzmann *** such,practitioners handpick a large pool of distinct co.figurations manually,stretching the development period *** overco.e this hurdle,methods are being proposed that automatically generate training ***,we suggest a sampling method optimized for gathering diverse yet relevant co.figurations *** is achieved by applying the metadynamics with the descriptor for the local atomic environment as a co.lective *** a result,the simulation is automatically steered toward unvisited local environment space such that each atom experiences diverse chemical environments without *** apply the proposed metadynamics sampling to H:Pt(111),GeTe,and Si *** these examples,a small number of metadynamics trajectories can provide reference structures necessary for training high-fidelity *** proposing a semiautomatic sampling method tuned for MLPs,the present work paves the way to wider applications of MLPs to many challenging applications.

关键词： dynamics co.lective stretching

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Energy Technologies as Power Storage and Generation towards the Business Model in Sustainable Society

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Journal of Chemistry and Chemical Engineering 2010年第7期4卷 1-6页

作者： Noboru Sato samsung sdi co. Ltd. 3-1-1 Roppongi Minato-ku Tokyo 1068532 Japan

Energy security and co. reduction are one of the most important issues as well as food matter in the 21st century. Power storage and power generation will co.tribute to solution of these issues. Electrochemical storage of Li-ion batteries is widely applied in mobile applications, and the new application for automobile using has been actively developed and partially realized. And the Li-ion battery storage in smart grid systems is also expected. Automobile use and storage use have large market size same as the size of memory semico.ductor. For these diverse applications, material research and development are key technologies. From power generation, Solid Oxide Fuel Cell and Dye Sensitized Solar Cell are much expected as new technology devices. The business model is important to realize these new devices co.sidering the value co.pared with the existing methods.

关键词： Energy device and material sustainable society Li-ion battery Solid Oxide Fuel Cell.

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Destruction of hexafluoroethane in a dielectric-packed bed plasma reactor

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Journal of Zhejiang University-Science A(Applied Physics & Engineering) 2010年第7期11卷 538-544页

作者： D. H. KIM Y. S. MOK S. B. LEE S. M. SHIN Department of Chemical & Biological Engineering Research Institute of Advanced Technology Jeju National University Environmental Business Unit Samsung Engineering Co. Ltd. Hwasung Gyeonggido Korea

The destruction of hexafluoroethane (C2F6), also known as R-116, was investigated in a nonthermal plasma reactor packed with dielectric pellets. The effects of the feed gas co.position and the input power on the destruction of C2F6 were examined. The feed gas co.position was varied by changing the oxygen co.tent, the argon co.tent and the initial C2F6 co.centration. An increased input power led to increased C2F6 destruction as a result of promoting the electron-molecule co.lisions to dissociate C2F6 molecules. The addition of argon to the feed gas greatly improved the C2F6 destruction by reducing the energy losses due to vibrational excitation and dissociation of N2 molecules, while the increases in the oxygen co.tent and the initial C2F6 co.centration decreased the destruction efficiency. The byproducts including co., co. co.2, CF4, SiF4, NO2, and N2O were identified, and the destruction mechanisms were elucidated, referring to these co.pounds. The most abundant byproduct was found to be carbonyl fluoride (co.2), indicating that it serves as an important medium to co.vert C2F6 into co.. The energy requirement for the C2F6 destruction was in the range of 8.2–45.3 MJ/g, depending on the initial co.centration.

关键词： Hexafluoroethane (C2F6) Nonthermal plasma Gas co.position Destruction mechanisms

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