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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee Jiwoong Kim Jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

Unmanned Ship Identification Based on Improved YOLOv8s Algorithm

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Computers, Materials & Continua 2024年第3期78卷 3071-3088页

作者： Chun-Ming Wu Jin Lei Wu-Kai Liu Mei-Ling Ren Ling-Li Ran Key Laboratory of Modern Power System Simulation and Control&Renewable Energy Technology School of Electrical EngineeringNortheast Electric Power UniversityJilin132012China School of Biomedical Engineering Taiyuan University of TechnologyTaiyuan030600China

Aiming at defects such as low contrast in infrared ship images,uneven distribution of ship size,and lack of texture details,which will lead to unmanned ship leakage misdetection and slow detection,this paper proposes an infrared ship detection model based on the improved YOLOv8 algorithm(R_YOLO).The algorithm incorporates the Efficient Multi-Scale Attention mechanism(EMA),the efficient Reparameterized Generalized-feature extraction module(CSPStage),the small target detection header,the Repulsion Loss function,and the context aggregation block(CABlock),which are designed to improve the model’s ability to detect targets at multiple scales and the speed of model *** algorithm is validated in detail on two vessel *** comprehensive experimental results demonstrate that,in the infrared dataset,the YOLOv8s algorithm exhibits improvements in various performance ***,compared to the baseline algorithm,there is a 3.1%increase in mean average precision at a threshold of 0.5(mAP(0.5)),a 5.4%increase in recall rate,and a 2.2%increase in mAP(0.5:0.95).Simultaneously,while less than 5 times parameters,the mAP(0.5)and frames per second(FPS)exhibit an increase of 1.7%and more than 3 times,respectively,compared to the CAA_YOLO ***,the evaluation indexes on the visible light data set have shown an average improvement of 4.5%.

关键词： Unmanned ships R_YOLO EMA CSPStage YOLOv8s

Geophysical prediction of organic matter abundance in source rocks based on geochemical analysis:A case study of southwestern Bozhong Sag,Bohai Sea,China

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Petroleum Science 2024年第1期21卷 31-53页

作者： Xiang Wang Guang-Di Liu Xiao-Lin Wang Jin-Feng Ma Zhen-Liang Wang Fei-Long Wang Ze-Zhang Song Chang-Yu Fan State Key Laboratory of Petroleum Resources and Prospecting China University of Petroleum(Beijing)Beijing102249China College of Geosciences China University of Petroleum(Beijing)Beijing102249China State Key Laboratory of Continental Dynamics Northwest UniversityXi'an710069ShaanxiChina Department of Geology Northwest UniversityXi'an710069ShaanxiChina CNOOC Tianjin Branch Company Tianjin300459China

The Bozhong Sag is the largest petroliferous sag in the Bohai Bay Basin,and the source rocks of Paleogene Dongying and Shahejie Formations were buried *** of the drillings were located at the structural high,and there were few wells that met good quality source rocks,so it is difficult to evaluate the source rocks in the study area precisely by geochemical analysis *** on the Rock-Eval pyrolysis,total organic carbon(TOC)testing,the organic matter(OM)abundance of Paleogene source rocks in the southwestern Bozhong Sag were evaluated,including the lower of second member of Dongying Formation(E_(3)d2L),the third member of Dongying Formation(E_(3)d_(3)),the first and second members of Shahejie Formation(E_(2)s_(1+2)),the third member of Shahejie Formation(E_(2)s_(3)).The results indicate that the E_(2)s_(1+2)and E_(2)s_(3)have better hydrocarbon generative potentials with the highest OM abundance,the E_(3)d_(3)are of the second good quality,and the E_(3)d2L have poor to fair hydrocarbon generative ***,the well logs were applied to predict TOC and residual hydrocarbon generation potential(S_(2))based on the sedimentary facies classification,usingΔlogR,generalizedΔlogR,logging multiple linear regression and BP neural network *** various methods were compared,and the BP neural network method have relatively better prediction *** on the pre-stack simultaneous inversion(P-wave impedance,P-wave velocity and density inversion results)and the post-stack seismic attributes,the three-dimensional(3D)seismic prediction of TOC and S_(2)was carried *** results show that the seismic near well prediction results of TOC and S_(2)based on seismic multi-attributes analysis correspond well with the results of well logging methods,and the plane prediction results are identical with the sedimentary facies map in the study *** TOC and S_(2)values of E_(2)s_(1+2)and E_(2)s_(3)are higher than those in E_(3)d_(3)and E_(3)d_(2)L,basicall

关键词： Total organic carbon(TOC) Residual hydrocarbon generation potential(S_(2)) Geophysical prediction Seismic attribute Bozhong Sag Bohai Bay Basin

Regenerative medicine strategies for chronic complete spinal cord injury

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Neural Regeneration Research 2024年第4期19卷 818-824页

作者： Shogo Hashimoto Narihito Nagoshi Masaya Nakamura Hideyuki Okano Department of Orthopedic Surgery Keio University School of Medicine Department of Physiology Keio University School of Medicine

Spinal cord injury is a condition in which the parenchyma of the spinal cord is damaged by trauma or various *** rapid progress has been made in regenerative medicine for spinal cord injury that was previously untreatable,most research in this field has focused on the early phase of incomplete ***,the majority of patients have chronic severe injuries;therefore,treatments for these situations are of fundamental *** reason why the treatment of complete spinal cord injury has not been studied is that,unlike in the early stage of incomplete spinal cord injury,there are various inhibitors of neural ***,we assumed that it is difficult to address all conditions with a single treatment in chronic complete spinal cord injury and that a combination of several treatments is essential to target severe ***,we established a combination therapy of cell transplantation and drug-releasing scaffolds,which contributes to functional recovery after chronic complete transection spinal cord injury,but we found that functional recovery was limited and still needs further ***,for the further development of the treatment of chronic complete spinal cord injury,we review the necessary approaches to the different pathologies based on our findings and the many studies that have been accumulated to date and discuss,with reference to the literature,which combination of treatments is most effective in achieving functional recovery.

关键词： cell transplantation chronic phase complete transection regenerative medicine spinal cord injury

To improve robustness of mechanical properties of semi-solid cast A356 alloy using taguchi design method

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China Foundry 2024年第2期21卷 175-184页

作者： Yi-wu Xu Hong-yi Zhan Wei Tong Jin-ping Li Le-peng Zhang De-jiang Li Xiao-qin Zeng School of Materials Science and Engineering Shanghai Jiao Tong UniversityShanghai 200240China China Science Lab General Motors Global Research&DevelopmentShanghai 201206China General Motors(China)Investment Co. Ltd.Shanghai 201206China China International Intellectech Corporation(CIIC) Beijing 100004China

Mechanical properties of semi-solid casting are dependent on multiple processing parameters,and improper processing parameters will not only reduce mean data but also increase *** present study investigated the impact of parameters in slurry preparation and heat treatment on the yield strength and ductility of T6 heat-treated A356 Al-Si alloy using rapid slurry forming(RSF)semi-solid *** focus was primarily on the robustness of mechanical properties based on Taguchi design *** analyzing signal-to-noise ratio and minimum value calculated from-3S,the optimum slurry preparation parameters and heat treatment parameters were determined to be no quench,enthalpy exchange material(EEM)temperature of 140℃,EEM-to-melt ratio of 6mass%,stirring time of 18 s,solution heat treated at 520℃ for 2 h,and ageing heat treated at 190℃ for 6 *** a small batch validation,the-3S yield strength and-3S elongation reach 256.1 MPa and 5.03% respectively,showing a satisfactory *** hardness and microstructure of heat-treated samples with the best and worst properties were characterized to gain insight into the underlying mechanisms affecting the mean value and variations of mechanical properties.

关键词： semi-solid casting taguchi design method signal-to-noise ratio mechanical property microstructure

Distributed Resource Allocation in Dispersed Computing Environment Based on UAV Track Inspection in Urban Rail Transit

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Computers, Materials & Continua 2024年第7期80卷 643-660页

作者： Tong Gan Shuo Dong Shiyou Wang Jiaxin Li Division of Consulting Beijing Metro Consultancy Corporation Ltd.Beijing100037China Department of Computer and Communication Engineering University of Science and Technology BeijingBeijing100083China

With the rapid development of urban rail transit,the existing track detection has some problems such as low efficiency and insufficient detection coverage,so an intelligent and automatic track detectionmethod based onUAV is urgently needed to avoid major safety *** the same time,the geographical distribution of IoT devices results in the inefficient use of the significant computing potential held by a large number of *** a result,the Dispersed Computing(DCOMP)architecture enables collaborative computing between devices in the Internet of Everything(IoE),promotes low-latency and efficient cross-wide applications,and meets users’growing needs for computing performance and service *** paper focuses on examining the resource allocation challenge within a dispersed computing environment that utilizes UAV inspection ***,the system takes into account both resource constraints and computational constraints and transforms the optimization problem into an energy minimization problem with computational *** Markov Decision Process(MDP)model is employed to capture the connection between the dispersed computing resource allocation strategy and the system ***,a method based on Double Deep Q-Network(DDQN)is introduced to derive the optimal ***,an experience replay mechanism is implemented to tackle the issue of increasing *** experimental simulations validate the efficacy of the method across various scenarios.

关键词： UAV track inspection dispersed computing resource allocation deep reinforcement learning Markov decision process

IMpower210:A phase Ⅲ study of second-line atezolizumab vs. docetaxel in East Asian patients with non-small cell lung cancer

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Chinese Journal of Cancer Research 2024年第2期36卷 103-113页

作者： Yi-Long Wu Shun Lu Gongyan Chen Jianxing He Jifeng Feng Yiping Zhang Liyan Jiang Hongming Pan Jianhua Chang Jian Fang Amy Cai Lilian Bu Jane Shi Jinjing Xia Guangdong Lung Cancer Institute Guangdong Provincial Key Laboratory of Translational Medicine in Lung CancerGuangdong Provincial People's Hospital&Guangdong Academy of Medical SciencesSouthern Medical UniversityGuangzhou 510080China Shanghai Lung Cancer Center Shanghai Chest HospitalSchool of MedicineShanghai Jiao Tong UniversityShanghai 200025China Department of Respiration Harbin Cancer HospitalHarbin Medical UniversityHarbin 150081China Department of Thoracic Oncology and Surgery the First Affliated Hospital of Guangzhou Medical UniversityGuangzhou 510120China Department of Medical Oncology Jiangsu Cancer HospitalNanjing 210009China Department of Medical Oncology Zhejiang Cancer HospitalHangzhou 330022China Department of Pulmonary Medicine Shanghai Chest HospitalShanghai Jiao Tong UniversityShanghai 200030China Department of Medical Oncology Sir Run Run Shaw HospitalZhejiang University School of MedicineHangzhou 310016China Department of Medical Oncology Shenzhen HospitalCancer Hospital of Chinese Academy of Medical SciencesShenzhen 518116China Department of Thoracic Oncology Beijing Cancer HospitalBeijing 100142China Product Development Shanghai Roche Pharmaceutical LtdShanghai 201203China

Objective: IMpower210(NCT02813785) explored the efficacy and safety of single-agent atezolizumab *** as second-line treatment for advanced non-small cell lung cancer(NSCLC) in East Asian ***: Key eligibility criteria for this phase Ⅲ, open-label, randomized study included age ≥18 years;histologically documented advanced NSCLC per the Union for International Cancer Control/American Joint Committee on Cancer staging system(7th edition);Eastern Cooperative Oncology Group performance status of 0 or 1;and disease progression following platinum-based chemotherapy for advanced or metastatic NSCLC. Patients were randomized 2:1 to receive either atezolizumab(1,200 mg) or docetaxel(75 mg/m^(2)). The primary study endpoint was overall survival(OS) in the intention-to-treat(ITT) population with wild-type epidermal growth factor receptor expression(ITT EGFR-WT) and in the overall ITT ***: Median OS in the ITT EGFR-WT population(n=467) was 12.3 [95% confidence interval(95% CI),10.3-13.8] months in the atezolizumab arm(n=312) and 9.9(95% CI, 7.8-13.9) months in the docetaxel arm[n=155;stratified hazard ratio(HR), 0.82;95% CI, 0.66-1.03]. Median OS in the overall ITT population was 12.5(95% CI, 10.8-13.8) months with atezolizumab treatment and 11.1(95% CI, 8.4-14.2) months(n=377) with docetaxel treatment(n=188;stratified HR, 0.87;95% CI, 0.71-1.08). Grade 3/4 treatment-related adverse events(TRAEs) occurred in 18.4% of patients in the atezolizumab arm and 50.0% of patients in the docetaxel ***: IMpower210 did not meet its primary efficacy endpoint of OS in the ITT EGFR-WT or overall ITT populations. Atezolizumab was comparatively more tolerable than docetaxel, with a lower incidence of grade3/4 TRAEs.

关键词： Atezolizumab East Asia non-small cell lung cancer programmed death-ligand 1 inhibitors monoclonal antibody

Effect of cooling method on TiN precipitation behavior of high-titanium high-strength steel during solidification

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Journal of Iron and Steel Research International 2024年第7期31卷 1692-1703页

作者： Xue-jian Zhang Guang-wei Yang Yong Wan Yong-hong Wen Chuan-sheng Tang Ming-qi Liu Li-jie Tian Key Laboratory of Metallurgical Emission Reduction and Resources Recycling Anhui University of TechnologyMa'anshan 243002AnhuiChina School of Metallurgical Engineering Anhui University of TechnologyMa'anshan 243002AnhuiChina Baosteel Central Research Institute Baoshan Iron and Steel Co.Ltd.Shanghai 201999China

Metallographic microscopy,scanning electron microscopy and TiN growth thermodynamic and kinetic equations were used to investigate the morphology,quantity,and size of TiN in the center of high-titanium high-strength steels under different solidification cooling *** results showed that TiN in the center of the experimental steels mainly existed in three forms:single,composite(Al2O3-TiN),and multi-particle *** began precipitating at around 1497℃(solidification fraction of 0.74).From the end of melting to solidification for 180 s,the cooling rates in the center of the experimental steels for furnace cooling,air cooling,refractory mold cooling,and cast iron mold cooling tended to stabilize at 0.17,0.93,1.65,and 2.15℃/s,*** size of TiN in the center of the experimental steel cooled using furnace cooling was mainly concentrated in the 5-15 pm *** contrast,the size of TiN in the center of the experimental steels cooled using air cooling,refractory mold cooling,and cast iron mold cooling were mainly concentrated in the 1-5 pm *** addition,their density of TiN in the center of the experimental steels is signif-icantly higher than that of the furnace-cooled experimental *** and kinetic precipitation models of TiN established predicted the growth size of TiN in a high-titanium high-strength steel when the solidification cooling rates are not below 0.93℃/s.

关键词： High-titanium steel Cooling method TiN Thermodynamics Kinetics

Nab-paclitaxel plus capecitabine as first-line treatment for advanced biliary tract cancers:An open-label,non-randomized,phase II clinical trial

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World Journal of Gastroenterology 2024年第30期30卷 3564-3573页

作者： Ling-Xiao Xu Jia-Jia Yuan Ran Xue Jun Zhou Department of Gastrointestinal Oncology Key Laboratory of Carcinogenesis and Translational Research(Ministry of Education/Beijing)Peking University Cancer Hospital and InstituteBeijing 100142China

BACKGROUND Biliary tract cancers(BTCs)are a heterogeneous group of tumors with high malignancy,poor prognosis,and limited treatment *** To explore the efficacy and safety of nab-paclitaxel plus capecitabine as first-line treatment for advanced and metastatic *** This open-label,non-randomized,double-center,phase II clinical trial recruited systemic therapy-naive patients with unresectable or metastatic BTCs between April 2019 and June 2022 at Beijing Cancer Hospital and the First Hospital of China Medical *** patients were administered nab-paclitaxel(150 mg/m^(2),day 1)and capecitabine(2000 mg/m^(2),twice daily,days 1-7)in 14-day cycles until experiencing intolerable toxicity or disease *** primary outcome was the objective response rate(ORR).The secondary outcomes included the disease control rate(DCR),overall survival(OS),progression-free survival(PFS),and *** A total of 44 patients successfully completed the trial,with a median age of 64.00 years(interquartile range,35.00-76.00),and 26(59.09%)were *** response assessment was impeded for one patient due to premature demise from tumor *** the remaining 43 patients undergoing at least one imaging assessment,the ORR was 23.26%[95%confidence interval(CI):11.80%-38.60%],and the DCR was 69.77%(95%CI:53.90%-82.80%).The median OS was 14.1 months(95%CI:8.3-19.9),and the median PFS was 4.4 months(95%CI:2.5-6.3).A total of 41 patients(93.18%)experienced at least one adverse event(AE),with 10 patients(22.73%)encountering grade≥3 AEs,and the most frequent AEs of any grade were alopecia(79.50%),leukopenia(54.55%),neutropenia(52.27%),and liver dysfunction(40.91%),and no treatment-related deaths were *** Nab-paclitaxel plus capecitabine may be an effective and safe first-line treatment strategy for patients with advanced or metastatic BTCs.

关键词： Nab-paclitaxel Capecitabine Biliary tract cancer Objective response rate Phase II clinical trial