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Fabrication of Diamond Microstructures by Using Dry and Wet Etching Methods

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Plasma Science and Technology 2013年第6期15卷 552-554页

作者：张继成周民杰吴卫东唐永建 research center of laser fusion

Diamond films have great potential for micro-electro-mechanical system（MEMS） *** device realization,precise patterning of diamond films at micrometer scale is *** this paper,simple and facile methods will be demonstrated for smart patterning of diamond films,in which two etching techniques,i.e.,plasma dry etching and chemical wet etching（including isotropic-etching and anisotropic-etching） have been developed for obtaining diamond microstructures with different morphology ***-standing diamond micro-gears and micro-combs were achieved as examples by using the experimental *** is confirmed that as-designed diamond structures with a straight side wall and a distinct boundary can be fabricated effectively and efficiently by using such methods.

关键词： MEMS diamond film free-standing reactive ion etching anisotropic and isotropic wet etching

Radiation Hydrodynamic Simulations in the Planar Scheme for the Fundamental Studies of Shock Ignition

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Plasma Science and Technology 2016年第4期18卷 376-381页

作者：董云松杨家敏宋天明朱托黄成武 Department of Experimental Physics Laser Fusion Research Center

As a fundamental and crucial research topic in the direct-driven inertial confinement fusion（ICF）,especially for shock ignition（SI）,investigation on the laser coupling with planar lowZ targets is beneficial for deep physical comprehension at the primary phase of *** production of the intense shock and the shock coalescence in the multi-layer targets,driven by the 3ω intense laser（351 nm the wavelength）,were studied in detail with the 1D and 2D radiation hydrodynamic *** was inferred that the 1D simulation would overrate the shock velocity and the ablation pressure of the spike;the coalescence time and the velocity of the coalescence shock depended evidently on the pulse shape and the start time of the *** present study can also provide a semi-quantitative reference for the design of the SI decomposition experiments on the Shenguang-III prototype laser facility.

关键词： shock ignition planar scheme radiation hydrodynamic simulation

Experiments and analysis of gold disk targets irradiated by smoothing beams of Xingguang Ⅱ facilities with 350 nm wavelength

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Science China(Physics,Mechanics & Astronomy) 2007年第6期50卷 716-730页

作者： JIANG ShaoEn ZHANG BaoHan LIU ShenYe YANG JiaMin SUN KeXu HUANG TianXuan DING YongKun ZHENG ZhiJian National Key Laboratory of laser fusion Laser Fusion Research CenterMianyang 621900China

Gold disk targets were irradiated using focusing and beam smoothing methods on Xingguang (XG-Ⅱ) laser facilities with 350 nm wavelength,0.6 ns pulse width and 20-80 Joules energies. laser absorption,light scattering and X-ray conversion were experimentally investigated. The experimental results showed that laser ab-sorption and scattered light were about 90% and 10%,respectively,under focusing irradiation,but the laser absorption increased 5%-10% and the scattered light about 1% under the condition of beam smoothing. Compared with the case of fo-cusing irradiation,the laser absorption was effectively improved and the scattered light remarkably dropped under uniform irradiation; then due to the decrease in laser intensity,X-ray conversion increased. This is highly advantageous to the in-ertial confinement fusion. However,X-ray conversion mechanism basically did not change and X-ray conversion efficiency under beam smoothing and focusing irra-diation was basically the same.

关键词： beam smoothing lens array laser absorption scattered light X-ray conversion

Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

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Plasma Science and Technology 2017年第7期19卷 110-117页

作者： Ling ZHANG Guo CHEN Zhibing HE Xing AI Jinglin HUANG Lei LIU Yongjian TANG Xiaoshan HE research center of laser fusion China Academy of Engineering Physics

The effects of working pressure on the component, surface morphology, surface roughness, and deposition rate of glow discharge polymer （GDP） films by a trans-2-butene/hydrogen gas mixture were investigated based on plasma characteristics diagnosis. The composition and ion energy distributions of a multi-carbon （CaHs/H2） plasma mixture at different working pressures were diagnosed by an energy-resolved mass spectrometer （MS） during the GDP film deposition process. The Fourier transform infrared spectroscopy （FT-IR）, field emission scanning electron microscope （SEM） and white-fight interferometer （WLI） results were obtained to investigate the structure, morphology and roughness characterization of the deposited films, respectively. It was found that the degree of ionization of the C4H8/H2 plasma reduces with an increase in the working pressure. At a low working pressure, the C-H fragments exhibited small-mass and high ion energy in plasma. In this case, the film had a low CH3/CH2 ratio, and displayed a smooth surface without any holes, cracks or asperities. While the working pressure increased to 15 Pa, the largest number of large-mass fragments led to the deposition rate reaching a maximum of 2.11 #m h-1, and to hole defects on the film surface. However, continuing to increase the working pressure, the film surface became smooth again, and the interface between clusters became inconspicuous without etching pits.

关键词： glow discharge polymer films plasma diagnosis working pressure surfacemorphology surface roughness

The application of proton spectrometers at the SG-III facility for ICF implosion areal density diagnostics

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High Power laser Science and Engineering 2015年第4期3卷 10-18页

作者： Xing Zhang Jianhua Zheng Ji Yan Zhenghua Yang Ming Su Yudong Pu Pin Yang Xufei Xie Li Chen Ming Chen Tianxuan Huang Shao'en Jiang Shenye Liu Jiamin Yang laser fusion research center Chinese Academy of Engineering Physics

Charged particle diagnostics is one of the required techniques for implosion areal density diagnostics at the SG-III *** proton spectrometers are under development, and some preliminary areal density diagnostics have been carried out. The response of the key detector, CR39, to charged particles was investigated in detail. A new track profile simulation code based on a semi-empirical model was developed. The energy response of the CR39 detector was calibrated with the accelerator protons and alphas from a241 Am source. A proton spectrometer based on the filtered CR39 detector was developed, and D–D primary proton measurements were implemented. A step range filter spectrometer was developed,and preliminary areal density diagnostics was carried out. A wedged range filter spectrometer array made of Si with a higher resolution was designed and developed at the SG-III facility. A particle response simulation code by the Monte Carlo method and a spectra unfolding code were developed. The capability was evaluated in detail by simulations.

关键词： areal density diagnostics CR39 detector SRF proton spectrometer WRF proton spectrometer

Synthesis and Characterization of Bi-functional Photorefractive Polymers with High Molecular Weight and Low Glass Transition Temperature

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Chinese Journal of Polymer Science 2014年第5期32卷 577-586页

作者：陈姝帆孙连来 Xuan Luo Xiao-dong Jiang Wei-dong Wu Yu Fang Chuan-qun Huang Rui-zhuang Yang Qing-jun Zhang research center of laser fusion China Academy of Engineering Physics

Carbazole-based bi-functional photorefractive polyacrylates were prepared via free radical polymerization and post-azo-coupling reaction. The structure of polymers was characterized by Fourier transform infrared spectroscopy （FTIR） and proton nuclear magnetic resonance （^1H-NMR） spectroscopy. The differential scanning calorimetry （DSC） and the thermal gravimetric analysis （TGA） were used to characterize the thermal property of polymers. The results indicate that though the glass transition temperature （Tg） of polymers increases with increasing the ratio of NLO groups, the polymers with different ratios of NLO groups still all show low glass transition temperatures around 60 ℃, and good thermal stability, which are favorable to the practical application of these polymers. The gel permeation chromatographic （GPC） result indicates that these polymers all have high-molecular-weight which is favorable to the long term stability of the material. Further, these polymers have good solubility in chloroform solvent, and the solutions can easily be fabricated into optically transparent films. Gain coefficients of 75 cm^-1, 185 cm^-1 and 66 cm^-1 can be observed at zero external electric field without any addition agent or pre-poling for polymers P-2, P-3 and P-4 respectively. The different contents of NLO groups result in the different properties of polymers P-2, P-3 and P-4.

关键词： Photorefractive Polyacrylate Post-azo-coupling reaction High molecular weight Low Tg.

Continued Study on Hohlraum Radiation Source with Approximately Constant Radiation Temperature

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Plasma Science and Technology 2016年第4期18卷 342-345页

作者：宋天明杨家敏朱托李志超黄成武 laser fusion research center Mianyang 621900 China

An experiment was performed on the Shenguang III prototype laser facility to continue the study on hohlraum radiation source with approximately constant radiation temperature using a continuously shaped laser pulse.A radiation source with a flattop temperature of about130 e V that lasted about 5 ns was *** previous analytical iteration method based on power balance and self-similar solution of ablation was modified taking into account the plasma movements and it was used to design the laser pulse shape for experiment.A comparison between experimental results and simulation is presented and better agreement was achieved using the modified *** improvements are discussed.

关键词： X-ray radiation source laser pulse shaping power balance

Effect of Hydrophobic Modification on the Durability and Environmental Properties of Porous MgF_2 Antireflective Films

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Acta Metallurgica Sinica(English Letters) 2014年第4期27卷 649-655页

作者： Lianghong Yan Nan Liu Songnan Zhao Hongwei Yan Haibing L Xiaodong Yuan research center of laser fusion China Academy of Engineering Physical

Conventional porous MgF2 antireflective films show poor environmental durability due to its hydrophilic *** improve the film environmental durability,hydrophobic porous MgF2 antireflective films are prepared by a methyl silicone-modified MgF2 *** of the methyl silicone proportions on the film properties are examined in order to control the wettability,peak transmittance,and environmental durability of the *** modification of methyl silicone can increase the film hydrophobicity,thus decreases the adsorption of water,and improves the environmental ***,large amounts of methyl silicone could increase the film refractive index,resulting in the decrease in peak transmittance for films on BK7 *** with 40% silicone show water contact angle of 110°,peak transmittance of 98.7%,and good environmental *** results of accelerated test show that the environmental durability of the porous MgF2 films modified with 40% methyl silicone is six times higher than that of the conventional films.

关键词： Porous MgF2 Antireflective film Environmental durability Hydrophobicity

Space-Resolved Spectrum Diagnose by Soft X-Ray Transmission Grating Spectrometer

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Plasma Science and Technology 2011年第1期13卷 36-39页

作者：尚万里赵阳熊刚杨家敏朱托 research center of laser fusion China Academy of Engineering Physics

A space-resolving transmission grating spectrometer is established on the ＂Shenguang-III＂ prototype laser facility and an iterative procedure for unfolding the X-ray spectrum with spatial resolution is described. The diagnostics is applied to measure the X-ray spectrum from laser-entered gold target and the typical space-resolved spectrum is provided. The relative standard uncertainty of the X-ray spectrum from the laser-generated plasma is also determined.

关键词： transmission grating spectrometer numerical simulation spectrum diagnose