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Sensitivity Improvements for Picosecond Ultrasonic Thickness Measurements in Gold and Tungsten Nanoscale Films

Nanomanufacturing and Metrology 2024年第2期7卷 1-12页

作者： Jiaqi Dong Chengyuan Yao Yuanhao Zhu Shaojie Li Bowen Liu JinTao Fan Chunguang Hu Youjian Song Minglie Hu Key Laboratory of Opto-Electronic Information Science and Technology of Ministry of Education School of Precision Instruments and Opto-Electronics EngineeringTianjin UniversityTianjin 300072China State Key Laboratory of Precision Measuring Technology and instruments Tianjin UniversityTianjin 300072China

Picosecond ultrasonics,as a nondestructive and noncontact method,can be employed for nanoscale metallic film thickness *** sensitivity of the system,which determines the measurement precision and practicability of this technique,is often limited by the weak intensity of the ultrasonic *** solve this problem,we investigate the distinct mechanisms involved in picosecond ultrasonic thickness measurement for two types of metals,namely tungsten(W)and gold(Au).For thickness measurement in W films,theory and simulation show that optimizing the pump and probe laser wavelengths,which determine the intensity and shape of the ultrasonic signal,is critical to improving measurement sensitivity,while for Au film measurements,where acoustic-induced beam distortion is dominant,the signal intensity can be optimized by selecting an appropriate aperture size and sample *** above approaches are validated in experiments.A dual-wavelength pump-probe system is constructed based on a passively mode-locked ytterbium-doped fiber *** smoothing method and multipeak Gaussian fitting are employed for the extraction of ultrasonic *** measurement precision is achieved in a series of W and Au films with thicknesses of 43-750 *** work can be applied to various high-precision,noncontact measurements of metal film thickness in the semiconductor industry.

关键词： Picosecond ultrasonics Thickness measurement optical pump-probe Beam distortion technique

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Terahertz wide-angle metalens with nearly ideal object-image relation

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Chinese Optics Letters 2024年第1期22卷 147-152页

作者：王宇程洁嵘冀允允范飞常胜江 Institute of Modern Optics Nankai UniversityTianjin 300350China Tianjin Key Laboratory of micro-scale optical Information Science and Technology Tianjin 300350China Tianjin Key Laboratory of Optoelectronic Sensor and Sensing Network Technology Tianjin 300350China

Metalenses are essential components in terahertz imaging ***,without careful design,they show limited field of view and their practical applications are ***,a wide-angle metalens is proposed whose structure is optimized for focusing within the incident angles of±25°.Simulation and experiment results show that the focusing efficiency,spot size,and modulation transfer function of this lens are not sensitive to the incident *** importantly,this wide-angle metalens follows the ideal Gaussian formula for the object-image relation,which ensures a wider field of view and better contrast in the imaging experiment.

关键词： terahertz metalens wide-angle Gaussian formula

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一种用于大视场成像和偏振光谱探测的微型可重构超构光学系统

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Engineering 2024年第4期35卷 67-73页

作者： Fei Zhang Minghao Liao Mingbo Pu Yinghui Guo Lianwei Chen Xiong Li Qiong He Tongtong Kang Xiaoliang Ma Yuan Ke Xiangang Luo State Key Laboratory of optical Technologies on Nano-Fabrication and micro-Engineering Institute of Optics and ElectronicsChinese Academy of SciencesChengdu 610209China National Key Laboratory of optical Field Manipulation Science and Technology Chinese Academy of SciencesChengdu 610209China School of Optoelectronics University of Chinese Academy of SciencesBeijing 100049China Research Center on Vector optical Fields Institute of Optics and ElectronicsChinese Academy of SciencesChengdu 610209China Tianfu Xinglong Lake Laboratory Chengdu 610299China

Wide-angle imaging and spectral detection play vital roles in tasks such as target tracking,object classification,and ***,limited by their intrinsically different architectures,as determined by frequency dispersion requirements,their simultaneous implementation in a shared-aperture system is ***,we propose a novel concept to realize reconfigurable dual-mode detection based on electrical-control tunable *** a proof-of-concept demonstration,the simultaneous implementation of wide-angle imaging and polarization-spectral detection in a miniature sharedaperture meta-optical system is realized for the first time via the electrical control of cascaded catenary-like *** proposed system supports the imaging(spectral)resolution of approximately 27.8 line-pairs per millimeter(lp·mm^(-1);~80 nm)for an imaging(spectral)mode from 8 to 14 μ*** system also bears a large field of view of about 70°,enabling multi-target recognition in both *** work may promote the miniaturization of multifunctional optical systems,including spectrometers and polarization imagers,and illustrates the potential industrial applications of meta-optics in biomedicine,security,space exploration,and more.

关键词： Metasurfaces Reconfigurable Imaging Spectral

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Optoelectronic tuning of plasmon resonances via optically modulated hot electrons

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National Science Review 2024年第5期11卷 134-141页

作者： Jiacheng Yao Cheng Wang Chi Zhang Song Ma Li Zhou Ti Wang Ququan Wang Hongxing Xu Tao Ding Key Laboratory of Artificial micro Nano Structure of Ministry of Education School of Physics and Technology Wuhan University Department of Physics Southern University of Science and Technology

Fast optical modulation of nanoplasmonics is fundamental for on-chip integration of all-optical *** various strategies have been proposed for dynamic modulation of surface plasmons, critical issues of device compatibility and extremely low efficiency in the visible spectrum hamper the application of optoplasmonic nanochips. Here we establish an optoplasmonic system based on Au@Cu2–xS hybrid core–shell nanoparticles. The optical excitation of hot electrons and their charge transfer to the semiconductor coating(Cu2–xS) lead to lowered electron density of Au, which results in the red shift of the localized surface plasmon resonance. The hot electrons can also transport through the Cu2–xS layer to the metal substrate, which increases the conductance of the nanogap. As such, the coupled gap plasmon blue-shifts with a magnitude of up to ～15 nm, depending on the excitation power and the thickness of the coatings, which agrees with numerical simulations. All of this optoelectronic tuning process is highly reversible, controllable and fast with a modulated laser beam, which is highly compatible and sufficiently useful for on-chip integration of nanophotonic devices.

关键词： hot carriers plasmon switching optoplasmonics circuit modelNPoM

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Random Raman Fiber Laser as a Liquid Refractive Index Sensor

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Photonic Sensors 2024年第1期14卷 13-22页

作者： Bing HAN Yuxi MA Han WU Yong ZHAO College of Information Science and Engineering Northeastern UniversityShenyang 110819China Hebei Key Laboratory of micro-Nano Precision optical Sensing and Measurement Technology Qinhuangdao 066004China College of Electronics and Information Engineering Sichuan UniversityChengdu 610064China

In this paper,a new concept of forward-pumped random Raman fiber laser(RRFL)-based liquid refractive index sensing is proposed for the first *** liquid refractive index sensing,the flat fiber end immersed in the liquid can act as the point reflector for generating random fiber lasing and also as the sensing *** to the high sensitivity of the output power of the RRFL to the reflectivity provided by the point reflector in the ultralow reflectivity regime,the proposed RRFL is capable of achieving liquid refractive index sensing by measuring the random lasing output *** theoretically investigate the effects of the operating pump power and fiber length on the refractive index sensitivity for the proposed *** a proof-of-concept demonstration,we experimentally realize high-sensitivity half-open short-cavity RRFL-based liquid refractive index sensing with the maximum sensitivity and the sensing resolution of-39.88W/RIU and 2.5075×10^(-5) RIU,*** also experimentally verify that the refractive index sensitivity can be enhanced with the shorter fiber length of the *** work extends the application of the random fiber laser as a new platform for highly-sensitive refractive index sensing in chemical,biomedical,and environmental monitoring applications,etc.

关键词： Fiber optic sensors refractive index measurements fiber lasers Rayleigh scattering stimulated Raman scattering

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micro-vibration suppression and compensation techniques for in-orbit satellite:A review

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Chinese Journal of Aeronautics 2024年第9期37卷 1-19页

作者： Weida XING Weixiao TUO Xingfei LI Tianyu WANG Chenxi YANG State Key Laboratory of Precision Measurement Technology and instruments Tianjin UniversityTianjin 30072China Taihu Laboratory of Deepsea Technological Science Wuxi 214123China

micro-vibration is an important factor affecting the imaging quality and pointing accu-racy of the in-orbit *** address the problem of micro-vibration compensation,a general summary for modeling,analysis,suppression,and compensation approach should be *** this review,micro-vibration characteristics and its impacts on the payloads are firstly ***,methods for micro-vibration measurement are *** detail,the principles and practical applications of these methods are ***,advanced technologies for micro-vibration suppression are summarized from micro-vibration source attenuation,transfer path opti-mization and sensitive load *** approaches have been found to be effective for micro-vibration *** one is the Line-of-Sight(LOS)stabilization assisted with Inertial Ref-erence Unit(IRU).The other is using image restoration technology to remove the blur caused by platform *** compensation technique and research status of the two techniques are *** work will provide researchers with technical guidelines for micro-vibration suppression.

关键词： In-orbit Satellite micro-vibration suppression Compensation technique Vibration isolation Path optimization

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Heterometallic Ti-Zr oxo nanocluster photoresists for advanced lithography

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Science China Materials 2024年第10期67卷 3132-3141页

作者： Yang Qiao Guangyue Shi Ou Zhang You Li Michaela Vockenhuber Yasin Ekinci Feng Luo Lei Zhang School of Materials Science and Engineering Nankai UniversityTianjin 300350China Institute of Modern Optics College of Electronic Information and Optical EngineeringNankai UniversityTianjin 300350China Paul Scherrer Institute Laboratory for Micro and NanotechnologyVilligen CH-5232Switzerland

Extreme ultraviolet lithography(EUVL)and electron beam lithography(EBL)are considered to be crucial lithography techniques utilized in the fabrication of nanoscale semiconductor ***,the industry currently faces a scarcity of EUV photoresists that meet the increasingly challenging standards in terms of resolution,sensitivity and *** oxo nanoclusters have garnered significant interest in the field of EUV photoresist due to their relatively stronger absorption cross-section for extreme ultraviolet light and lower *** this study,we utilize a heterometallic nanocluster strategy by a combination of titanium and zirconium metals to investigate their solubility,assess the suitability of various developers,and evaluate their performance in electron-beam and EUVL,as well as study their etch resistance for pattern *** demonstrate that R-4 is able to get a critical dimension(CD)of 25 nm at low doses under EBL,as well as 50 nm resolution at EUVL with a remarkable sensitivity of 19.7 mJ cm−*** study offers an efficient heterometallic method for optimizing the lithographic performance of metal oxo nanocluster photoresists,which can benefit the development of commercially viable next-generation EUV photoresists.

关键词： heterometallic nanocluster photoresists electron beam lithography extreme ultraviolet lithography

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Vortex excites unidirectional water waves near ancient Luoyang Bridge

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Frontiers of physics 2024年第3期19卷 163-165页

作者： Yichen Li Xinhua Hu Department of Materials Science and Key Laboratory of micro-and Nano-Photonic Structures(Ministry of Education) Fudan UniversityShanghai 200433China

Since the discovery of generalized Snell’s law in 2011[1],metasurfaces have opened up the mainstream of arbitrary wavefront manipulation in *** a gradient-index metasurface,the parallel wavenumber kx of reflected wave can be not equal to the incident one(kx=ξ+k0sinθi,where k0 andθi are the incident wavenumber and angle,andξis the phase gradient of metasurface in its supercell)[1].Whenξ>k0,the reflected wave becomes a surface wave bounded on the metasurface(where|kx|>k0,kz is imaginary,and z is normal to the metasurface)[2].However,as research of metasurfaces continually evolves,some articles have pointed out that such graded metasurfaces suffer from a series of problems[3-6].In particular,multiple metallic resonators are adopted in a subwavelength supercell,resulting in impedance mismatch,moderate conversion efficiency,wave absorption,and fabrication ***,although the approach of graded metasurfaces has been demonstrated in the microwave regime,it is hard to extend to infrared and optical ranges with shorter *** solve this problem,Ra’di et al.[7]devised metagratings with periodic arrays of bianisotropic scatterers and showed that they enable wave front engineering with unitary efficiency and significantly lower fabrication demands.

关键词： graded reflected imaginary

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Critical Solvation Structures Arrested Active Molecules for Reversible Zn Electrochemistry

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Nano-micro Letters 2024年第8期16卷 64-78页

作者： Junjie Zheng Bao Zhang Xin Chen Wenyu Hao Jia Yao Jingying Li Yi Gan Xiaofang Wang Xingtai Liu Ziang Wu Youwei Liu Lin Lv Li Tao Pei Liang Xiao Ji Hao Wang Houzhao Wan Hubei Yangtze Memory Laboratories Wuhan 430205People’s Republic of China Hubei Key Laboratory of micro‑Nanoelectronic Materials and Devices School of MicroelectronicsHubei UniversityWuhan 430062People’s Republic of China School of Physical and Mathematical Sciences Nanyang Technological UniversitySingapore 637371Singapore School of optical and Electronic Information Huazhong University of Science and TechnologyWuhan 430074People’s Republic of China Institute of Optoelectronics Technology China Jiliang UniversityHangzhou 310018People’s Republic of China

Aqueous Zn-ion batteries(AZIBs)have attracted increasing attention in next-generation energy storage systems due to their high safety and ***,the side reactions,dendrites and hydrogen evolution effects at the zinc anode interface in aqueous electrolytes seriously hinder the application of aqueous zinc-ion ***,we report a critical solvation strategy to achieve reversible zinc electrochemistry by introducing a small polar molecule acetonitrile to form a“catcher”to arrest active molecules(bound water molecules).The stable solvation structure of[Zn(H_(2)O)_(6)]^(2+)is capable of maintaining and completely inhibiting free water ***[Zn(H_(2)O)_(6)]^(2+)is partially desolvated in the Helmholtz outer layer,the separated active molecules will be arrested by the“catcher”formed by the strong hydrogen bond N-H bond,ensuring the stable desolvation of Zn^(2+).The Zn||Zn symmetric battery can stably cycle for 2250 h at 1 mAh cm^(-2),Zn||V_(6)O_(13) full battery achieved a capacity retention rate of 99.2%after 10,000 cycles at 10 A g^(-1).This paper proposes a novel critical solvation strategy that paves the route for the construction of high-performance AZIBs.

关键词： Zinc-ion battery Critical solvation Helmholtz layer Arrest active molecule Reversible zinc anode

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Localization effect in single crystal of RuAs2

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Chinese Physics B 2024年第4期33卷 620-625页

作者：易哲铠刘琪光双魁徐升岳小宇梁慧李娜周颖吴丹丹孙燕李秋菊程鹏夏天龙孙学峰王义炎 Anhui Key Laboratory of Magnetic Functional Materials and Devices Institute of Physical Science and Information TechnologyAnhui University Department of Physics and Key Laboratory of Strongly-Coupled Quantum Matter Physics (CAS) University of Science and Technology of China Department of Physics and Beijing Key Laboratory of Opto-electronic Functional Materials & micro-nano Devices Renmin University of China School of optical and Electronic Information Suzhou City University School of Physics and Optoelectronic Engineering Anhui University Collaborative Innovation Center of Advanced microstructures Nanjing University

We report the magnetotransport and thermal properties of RuAs2single crystal. RuAs2exhibits semiconductor behavior and localization effect. The crossover from normal state to diffusive transport in the weak localization（WL） state and then to variable range hopping（VRH） transport in the strong localization state has been observed. The transitions can be reflected in the measurement of resistivity and Seebeck coefficient. Negative magnetoresistance（NMR） emerges with the appearance of localization effect and is gradually suppressed in high magnetic field. The temperature dependent phase coherence length extracted from the fittings of NMR also indicates the transition from WL to VRH. The measurement of Hall effect reveals an anomaly of temperature dependent carrier concentration caused by localization effect. Our findings show that RuAs2is a suitable platform to study the localized state.

关键词： weak localization variable range hopping RuAs_2 single crystal

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