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Material Modeling in Semiconductor Process Applications

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Journal of Microelectronic Manufacturing 2020年第4期3卷 40-50页

作者： Boris A.Voinov Patrick H.Keys Stephen M.Cea Ananth P.Kaushik Mark A.Stettler logic technology development Intel CorporationHillsboro ORUSA95124 Nonvolatile Memory Solutions Group Intel CorporationSanta ClaraCaliforniaUSA95054 logic technology development Intel CorporationNizhniy NovgorodRussian Federation603024

During the past decade,significant progress has been achieved in the application of material modeling to aid technology development in semiconductor manufacturing companies such as *** this paper,we review examples of applications involving a complex set of material modeling tools and methodologies and share our perspective of the future of the *** are given illustrating the landscape of useful physical models and approaches along with commentary addressing tool relevance and simulation efficiency *** the scope of this paper precludes providing in-depth details,references to more focused publications are ***,we outline how to approach constructing a general infrastructure for supporting TCAD material modeling applications.

关键词： TCAD atomistic modeling density functional theory molecular dynamics kinetic Monte Carlo.

Deadzone and Uncertainties Dynamic Compensation for Missile Servo Control Systems 36

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Deadzone and Uncertainties Dynamic Compensation for Missile ...

Neural-fuzzy control system application for monitoring process response and control of anaerobic hybrid reactor in wastewater treatment and biogas production

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作者： Kunfeng Zhang Donghui Yu Fei Wu Dawei Rao Luoyang Optoelectronic technology development Center

ISBN: (纸本)9781538629185

For deadzone, parameters variations and disturbances in missile servo control system, a robust adaptive fuzzy fast terminal sliding mode controller was proposed to compensate deadzone, uncertainties and other disturbances. An adaptive fuzzy logic controller for the deadzone dynamic compensation was adopted in feedforward loop. The variations of hinge moment were identified online requiring no prior knowledge. The controller also had good regulations to other uncertainties and external disturbances. The closed loop control system was proved to be globally uniform asymptotically stable. The simulation results showed that the designed algorithm was effective in compensating the deadzone, improved tracking performance, shortened settling time, and had good robustness and stability to disturbances and parameters variations.

关键词： deadzone variations of hinge moment adaptive fuzzy fast terminal sliding mode control

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Journal of Environmental Sciences 2010年第12期22卷 1883-1890页

作者： Chaiwat Waewsak Annop Nopharatana Pawinee Chaiprasert Division of Biotechnology School of Bioresources and TechnologyKing Mongkut's University of Technology Thonburi Excellent Center of Waste Utilization and Management Pilot Plant Development and Training InstituteKing Mongkut's University of Technology Thonburi

Based on the developed neural-fuzzy control system for anaerobic hybrid reactor （AHR） in wastewater treatment and biogas production, the neural network with backpropagation algorithm for prediction of the variables pH, alkalinity （Alk） and total volatile acids （TVA） at present day time t was used as input data for the fuzzy logic to calculate the influent feed flow rate that was applied to control and monitor the process response at different operations in the initial, overload influent feeding and the recovery phases. In all three phases, this neural-fuzzy control system showed great potential to control AHR in high stability and performance and quick response. Although in the overloading operation phase II with two fold calculating influent flow rate together with a two fold organic loading rate （OLR）, this control system had rapid response and was sensitive to the intended overload. When the influent feeding rate was followed by the calculation of control system in the initial operation phase I and the recovery operation phase III, it was found that the neural-fuzzy control system application was capable of controlling the AHR in a good manner with the pH close to 7, TVA/Alk 〈 0.4 and COD removal 〉 80% with biogas and methane yields at 0.45 and 0.30 m^3/kg COD removed.

关键词： anaerobic hybrid reactor influent feed flow rate neural-fuzzy control system process response

Planar split dual gate MOSFET

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Science in China(Series F) 2008年第4期51卷 440-448页

作者： XIAO DeYuan CHEN Gary LEE Roger LIU Yung SHEN ChiCheong Memory technology development Center Semiconductor Manufacturing International (Shanghai) Corp.Shanghai 201203 China

A new planar split dual gate （PSDG） MOSFET device, its characteristics and experimental results, as well as the three dimensional device simulations, are reported here for the first time. Both theoretical calculation and 3D simulation, as well as the experiment data, show that the two independent split dual gates can provide dynamical control of the device characteristics, such as threshold voltage （Vt） and sub-threshold swing （SS）, as well as the device saturated current. The PSDG MOSFET transistor leakage current （loft） can be reduced as much as 78% of the traditional single gate MOSFET. The PSDG is fabricated and fully compatible with our conventional 0.18 μm logic process flow.

关键词： novel device MOSFET planar split dual gate tunable sub-threshold swing

Contrary description logic: Gentzen deduction system

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Science China(Information Sciences) 2017年第11期60卷 171-179页

作者： Wei LI Yuefei SUI Jie LUO Bo CHEN State Key Laboratory of Software development Environment Beihang University Key Laboratory of Intelligent Information Processing Institute of Computing TechnologyChinese Academy of Sciences

Traditional description logics are based on complementary rather than contrary concepts. This work proposes a contrary description logic based on the contrary concept constructors ～, ?(instead of ?).A Gentzen-type deduction system is applied to make the system sound and complete with the three-valued semantics of contrary description logic.

关键词： description logics contradictory contrary soundness completeness

A computational framework for Karl Popper's logic of scientific discovery

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Science China(Information Sciences) 2018年第4期61卷 97-106页

作者： Wei LI Yuefei SUI State Key Laboratory of Software development Environment Beihang University Key Laboratory of Intelligent Information Processing Institute of Computing TechnologyChinese Academy of Sciences

Belief revision is both a philosophical and logical problem. From Popper’s logic of scientific discovery, we know that revision is ubiquitous in physics and other sciences. The AGM postulates and Rcalculus are approaches from logic, where the R-calculus is a Gentzen-type concrete belief revision *** deduction is undecidable in first-order logic, we apply approximate deduction to derive an R-calculus that is computational and has finite injury. We further develop approximation algorithms for SAT problems to derive a feasible R-calculus based on the relation between deduction and satisfiability. In this manner, we provide a full spectrum of belief revision: from philosophical to feasible revision.

关键词： belief revision logic of scientific discovery approximate deduction approximation algorithms feasible computation

New aspects of HCI test for ultra-short channel n-MOSFET devices

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Chinese Physics B 2006年第11期15卷 2742-2745页

作者：马晓华郝跃王剑屏曹艳荣陈海峰 Microelectronics Institute Xidian University Xi'an 710071 China Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices Xidian University Xi'an 710071 China logic technology development Center SMIC Shanghai 201203 China

Hot carriers injection （HCI） tests for ultra-short channel n-MOSFET devices were studied. The experimental data of short channel devices （75-90 nm）, which does not fit formal degradation power law well, will bring severe error in lifetime prediction. This phenomenon usually happens under high drain voltage （Vd） stress condition. A new model was presented to fit the degradation curve better. It was observed that the peak of the substrate current under low drain voltage stress cannot be found in ultra-short channel device. Devices with different channel lengths were studied under different Vd stresses in order to understand the relations between peak of substrate current （/sub） and channel length/stress voltage.

关键词： HCI n-MOSFET short channel

CASA:A New IFU Architecture for Power-Efficient Instruction Cache and TLB Designs

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Journal of Computer Science & technology 2008年第1期23卷 141-153页

作者：孙含欣杨鲲鹏赵雨来佟冬程旭 Microprocessor Research and development Center Peking University

The instruction fetch unit （IFU） usually dissipates a considerable portion of total chip power. In traditional IFU architectures, as soon as the fetch address is generated, it needs to be sent to the instruction cache and TLB arrays for instruction fetch. Since limited work can be done by the power-saving logic after the fetch address generation and before the instruction fetch, previous power-saving approaches usually suffer from the unnecessary restrictions from traditional IFU architectures. In this paper, we present CASA, a new power-aware IFU architecture, which effectively reduces the unnecessary restrictions on the power-saving approaches and provides sufficient time and information for the power-saving logic of both instruction cache and TLB. By analyzing, recording, and utilizing the key information of the dynamic instruction flow early in the front-end pipeline, CASA brings the opportunity to maximize the power efficiency and minimize the performance overhead. Compared to the baseline configuration, the leakage and dynamic power of instruction cache is reduced by 89.7% and 64.1% respectively, and the dynamic power of instruction TLB is reduced by 90.2%. Meanwhile the performance degradation in the worst case is only 0.63%. Compared to previous state-of-the-art power-saving approaches, the CASA-based approach saves IFU power more effectively, incurs less performance overhead and achieves better scalability. It is promising that CASA can stimulate further work on architectural solutions to power-efficient IFU designs.

关键词： computer architecture instruction cache instruction TLB instruction fetch unit power-efficient design dynamic voltage scaling

A decomposition based algorithm for maximal contractions

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Frontiers of Computer Science 2013年第6期7卷 801-811页

作者： Dongchen JIANG Wei LI Jie LUO Yihua LOU Zhengzhong LIAO State Key Laboratory of Computer Architecture Institute of Computing Technology Chinese Academy of Sciences Beijing 100190 China State Key Laboratory of Software development Environment Beihang University Beijing 100191 China Tencent technology (Beijing) Company Limited Beijing 100080 China

This paper proposes a decomposition based algo- rithm for revision problems in classical propositional logic. A set of decomposing rules are presented to analyze the satis- fiability of formulas. The satisfiability of a formula is equivalent to the satisfiability of a set of literal sets. A decomposing function is constructed to calculate all satisfiable literal sets of a given formula. When expressing the satisfiability of a formula, these literal sets are equivalent to all satisfied models of such formula. A revision algorithm based on this decomposing function is proposed, which can calculate maximal contractions of a given problem. In order to reduce the memory requirement, a filter function is introduced. The improved algorithm has a good performance in both time and space perspectives.

关键词： belief change maximal contraction decomposing rules revision algorithm