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plasma Science and Technology 2019年第1期21卷 79-86页

作者：李花王正铎杨丽珍陈强 Laboratory of Plasma Physics & Materials Beijing Institute of Graphic Communication

In this paper, we report the modification of polyethylene(45 μm in thickness) webs through a roll-to-roll dielectric barrier discharge plasma treatment in an open atmospheric environment.Our work differs from the normal adopted corona discharge treatment at an atmospheric pressure, in that three monomers: allylamine, acrylic acid, and ethanol, are inlet into the discharge zone by argon(Ar) carrier gas. As a comparison, Ar plasma treatment is also carried out. We focus on the aging properties of treated plastics in the open air. It is found that the modified webs can retain the surface energy as high as 50.0?±?1 mN m^(-1) for more than three months. After characterization of the as-prepared and aged samples by the surface roughness, the wettability, and the chemical structure, the mechanism of retaining high surface energy is then presumed. We think that the initial high surface energy just after plasma treatment is correlated to the grafted functional groups, while the over 50.0 mN m^(-1) remaining surface energy after three month aging is due to the stable concentrations of oxygen-contained and nitrogencontained groups by post-reaction on the surfaces.

关键词： aging atmospheric DBD treatment polyethylene surface energy remaining

Recent progress on non-thermal plasma technology for high barrier layer fabrication

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plasma Science and Technology 2018年第6期20卷 1-16页

作者：张海宝桑利军王正铎刘忠伟杨丽珍陈强 laboratory of plasma physics and materials Beijing Institute of Graphic Communication

This review describes the application of non-thermal plasma(NTP) technology for high barrier layer fabrication in packaging area.NTP technology is considered to be the most prospective approaches for the barrier layer fabrication over the past decades due to unpollution,high speed,low-costing.The applications of NTP technology have achieved numerous exciting results in high barrier packaging area.Now it seemly demands a detailed review to summarize the past works and direct the future developments.This review focuses on the different NTP resources applied in the high barrier area,the role of plasma surface modification on packaging film surface properties,and the deposition of different barrier coatings based on NTP technology.In particular,this review emphasizes the cutting-edge technologies of NTP on interlayer deposition with organic,inorganic for multilayer barriers fabrication.The future prospects of NTP technology in high barrier film areas are also described.

关键词：障碍层技术制造血浆 NTP 高速度包装评论

Investigation of Microwave Surface-Wave plasma Deposited SiO_x Coatings on Polymeric Substrates

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plasma Science and Technology 2014年第1期16卷 37-40页

作者：王欢杨丽珍陈强 laboratory of plasma physics and materials Beijing Institute of Graphic Communication

In this paper, we reported nano-scale SiOx coatings deposited on polyethylene terephthalate(PET) webs by microwave surface-wave assisted plasma enhanced chemical vapor deposition for the purpose of improving their barrier properties. Oxygen(O2) and hexamethyldisiloxane(HMDSO) were employed as oxidant gas and Si monomer during SiOx deposition, respectively. Analysis by Fourier transform infrared spectroscope(FTIR) for chemical structure and observation by atomic force microscopy(AFM) for surface morphology of SiOx coatings demonstrated that both chemical compounds and surface feature of coatings have a remarkable influence on the coating barrier properties. It is noted that the processing parameters play a critical role in the barrier properties of coatings. After optimization of the SiOx coatings deposition conditions, i.e. the discharge power of 1500 W, 2 : 1 of O2 : HMDSO ratio and working pressure of 20 Pa, a better barrier property was achieved in this work.

关键词：等离子体沉积 SiOx 涂层沉积表面波等离子体增强化学气相沉积微波聚对苯二甲酸乙二醇酯六甲基二硅氧烷

Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides

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plasma Science and Technology 2018年第3期20卷 146-150页

作者：熊玉卿高恒蛟任妮刘忠伟 Science and Technology on Vacuum Technology and physics laboratory Lanzhou Institute of Physics laboratory of plasma physics and materials Beijing Institute of Graphic Communication

Copper thin films were deposited by plasma-enhanced atomic layer deposition at low temperature, using copper(I)-N,N′-di-sec-butylacetamidinate as a precursor and hydrogen as a reductive gas. The influence of temperature, plasma power, mode of plasma, and pulse time, on the deposition rate of copper thin film, the purity of the film and the step coverage were studied.The feasibility of copper film deposition on the inner wall of a carbon fibre reinforced plastic waveguide with high aspect ratio was also studied. The morphology and composition of the thin film were studied by atomic force microscopy and x-ray photoelectron spectroscopy,respectively. The square resistance of the thin film was also tested by a four-probe technique. On the basis of on-line diagnosis, a growth mechanism of copper thin film was put forward, and it was considered that surface functional group played an important role in the process of nucleation and in determining the properties of thin films. A high density of plasma and high free-radical content were helpful for the deposition of copper thin films.

关键词：原子层电影波导铜墙光电子光谱生长机制低温度

Study of axial double layer in helicon plasma by optical emission spectroscopy and simple probe

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plasma Science and Technology 2018年第7期20卷 106-111页

作者：赵高朱婉莹王慧慧陈强谭畅欧阳吉庭 School of physics Beijing Institute of Technology Laboratory of Plasma Physics & Materials Beijing Institute of Graphic Communication Shanxi Key laboratory of plasma physics and Applied Technology Xi'an Aerospace Propulsion Institute

In this work we used a passive measurement method based on a high-impedance electrostatic probe and an optical emission spectroscope(OES) to investigate the characteristics of the double layer(DL) in an argon helicon plasma. The DL can be confirmed by a rapid change in the plasma potential along the axis. The axial potential variation of the passive measurement shows that the DL forms near a region of strong magnetic field gradient when the plasma is operated in wavecoupled mode, and the DL strength increases at higher powers in this experiment. The emission intensity of the argon atom line, which is strongly dependent on the metastable atom concentration, shows a similar spatial distribution to the plasma potential along the axis. The emission intensity of the argon atom line and the argon ion line in the DL suggests the existence of an energetic electron population upstream of the DL. The electron density upstream is much higher than that downstream, which is mainly caused by these energetic electrons.

关键词：血浆排放光谱学轴探查学习电子密度氩原子

Atmospheric Pressure Radio Frequency Dielectric Barrier Discharges in Nitrogen/Argon

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plasma Science and Technology 2013年第9期15卷 871-874页

作者：刘忠伟杨丽珍王正铎桑利军朱强李森 laboratory of plasma physics and materials Beijing Institute of Graphic Communication

This work reports the experimental results on the characteristics of radio frequency dielectric barrier N2 /Ar discharges.Depending on the nitrogen content in the feed gas and the input power,the discharge can operate in two diferent modes: a homogeneous glow discharge and a constricted discharge.With increasing input power,the number of discharge columns increases.The discharge columns have starlike structures and exhibit symmetric self-organized arrangement.Optical emission spectroscopy was performed to estimate the plasma temperature.Spatially resolved gas temperature measurements,determined from NO emission rotational spectroscopy were taken across the 4.4 mm gap filled by the discharge.Gas temperature in the middle of the gas gap is lower than that close to the electrodes.

关键词：介质阻挡放电射频大气压氩气氮气等离子体温度输入功率发射光谱

Reversal of radial glow distribution in helicon plasma induced by reversed magnetic field

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plasma Science and Technology 2017年第2期19卷 15-19页

作者：王宇赵高牛晨刘忠伟欧阳吉庭陈强 School of physics Beijing institute of technology Laboratory of Plasma Physics & Materials Beijing Institute of Graphic Communication

In this work,the reversal of radial glow distribution induced by reversed magnetic field is reported.Based on the Boswell antenna which is symmetric and insensitive to the magnetic field direction,it seems such a phenomenon in theory appears impossible.However,according to the diagnostic of the helicon waves by magnetic probe,it is found that the direction of magnetic field significantly affects the propagation characteristic of helicon waves,i.e.,the interchange of the helicon waves at the upper and the lower half of tube was caused by reversing the direction of magnetic field.It is suggested that the variation of helicon wave against the direction of magnetic field causes the reversed radial glow distribution.The appearance of the traveling wave does not only improve the discharge strength,but also determines the transition of the discharge mode.

关键词： helicon plasma reversal of radial glow distribution the direction of magnetic field

plasma-Assisted ALD of an Al_2O_3 Permeation Barrier Layer on Plastic

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plasma Science and Technology 2012年第2期14卷 129-133页

作者：雷雯雯李兴存陈强王正铎 laboratory of plasma physics and materials Beijing Institute of Graphic Communication

Atomic layer deposition(ALD) technique is used in the preparation of organic/inorganic layers,which requires uniform surfaces with their thickness down to several nanometers.For film with such thickness,the growth mode defined as the arrangement of clusters on the surface during the growth is of significance.In this work,Al 2 O 3 thin film was deposited on various interfacial species of pre-treated polyethylene terephthalate(PET,12 μm) by plasma assisted atomic layer deposition(PA-ALD),where trimethyl aluminium was used as the Al precursor and O 2 as the oxygen source.The interfacial species,-NH 3,-OH,and-COOH as well as SiCHO(derived from monomer of HMDSO plasma),were grafted previously by plasma and chemical treatments.The growth mode of PA-ALD Al 2 O 3 was then investigated in detail by combining results from in-situ diagnosis of spectroscopic ellipsometry(SE) and ex-situ characterization of as-deposited layers from the morphologies scanned by atomic force microscopy(AFM).In addition,the oxygen transmission rates(OTR) of the original and treated plastic films were measured.The possible reasons for the dependence of the OTR values on the surface species were explored.

关键词：等离子体辅助塑料薄膜氧化铝 ALD 聚对苯二甲酸乙二醇酯阻隔层原子层沉积渗透

Characteristics and Temperature Measurement of a Non-Transferred Cascaded DC plasma Torch

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plasma Science and Technology 2010年第2期12卷 181-187页

作者： B.BORA N.AOMOA M.KAKATI Thermal plasma Processed materials laboratory Centre of Plasma Physics Institute for Plasma Research Department of physics Dibrugarh University

Dependence of the current-voltage characteristics of a non-transferred DC cascadedplasma torch used for nanoparticle synthesis, on the plasma current and the plasma argon gas flowrate are reported in this paper. The potential structure inside the torch and its dependence on theplasma current and gas flow rate are also investigated. The arc voltage is seen to exhibit negativecharacteristic for a current below 150 A and positive characteristic above that current value. Thevoltage drop near the electrodes is found to decrease with the increase in plasma current. 25%of the total voltage is dropped near the cathode at a plasma current of 50 A and a argon plasmagas flow rate of 10 liter per minute (LPM), and it decreases to 12% with the current increasing to300 A, and to 17% with a gas flow rate of 25 LPM. The variation in the torch efficiency with thegas flow rate and plasma current is also reported. The efficiency of the torch is found to be between36% and 48%. In addition, the plasma gas temperature at various positions of the reactor andfor different currents and voltages are measured by calorimetric estimation with a heat balancetechnique.

关键词：电流电压特性直流等离子体等离子体炬温度测量级联等离子体电流等离子体反应器气体流量

Kinetic Migration of Diethylhexyl Phthalate in Functional PVC Films

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plasma Science and Technology 2012年第2期14卷 152-156页

作者：费斐刘忠伟陈强刘福平 laboratory of plasma physics and materials Beijing Institute of Graphic Communication

Plasticizers that are generally used in plastics to produce flexible food packaging materials have proved to cause reproductive system problems and women's infertility.A longterm consumption may even cause cancer diseases.Hence a nano-scale layer,named as functional barrier layer,was deposited on the plastic surface to prevent plasticizer diethylhexyl phthalate's(DEHP) migration from plastics to foods.The feasibility of functional barrier layer i.e.SiO x coating through plasma enhanced chemical vapor deposition(PECVD) process was then described in this paper.We used Fourier transform infrared spectroscopy(FTIR) to analyze the chemical composition of coatings,scanning electron microscope(SEM) to explore the topography of the coating surfaces,surface profilemeter to measure thickness of coatings,and high-performance liquid chromatography(HPLC) to evaluate the barrier properties of coatings.The results have clearly shown that the coatings can perfectly block the migration of the DEHP from plastics to their containers.It is also concluded that process parameters significantly influence the block efficiency of the coatings.When the deposition conditions of SiO x coatings were optimized,i.e.50 W of the discharge power,4:1 of ratio of O 2:HMDSO,and ca.100 nm thickness of SiO x,71.2% of the DEHP was effectively blocked.

关键词：邻苯二甲酸二乙基等离子体增强化学气相沉积 PVC薄膜迁移动力学傅里叶变换红外光谱塑料增塑剂