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Microsphere-assisted,nanospot,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2022年第2期11卷 262-275页

作者： Soonyang Kwon Jangryul Park Kwangrak Kim Yunje Cho Myungjun Lee Equipment r&d team 4 Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-roHwaseong-siGyeonggi-do 18848Republic of Korea

As smaller structures are being increasingly adopted in the semiconductor industry,the performance of memory and logic devices is being continuously improved with innovative 3d integration schemes as well as shrinking and stacking *** to the increasing complexity of the design architectures,optical metrology techniques including spectroscopic ellipsometry(SE)and reflectometry have been widely used for efficient process development and yield ramp-up due to the capability of 3d structure ***,there has been an increasing demand for a significant reduction in the physical spot diameter used in the SE technique;the spot diameter should be at least 10 times smaller than the cell dimension(~30×40μm2)of typical dynamic random-access memory to be able to measure in-cell critical dimension(Cd)*** this end,this study demonstrates a novel spectrum measurement system that utilizes the microsphere-assisted super-resolution effect,achieving extremely small spot spectral metrology by reducing the spot diameter to~210 nm,while maintaining a sufficiently high signal-to-noise *** addition,a geometric model is introduced for the microsphere-based spectral metrology system that can calculate the virtual image plane magnification and depth of focus,providing the optimal distance between the objective lens,microsphere,and sample to achieve the best possible imaging *** proof of concept was fully verified through both simulations and experiments for various ***,owing to its ultra-small spot metrology capability,this technique has great potential for solving the current metrology challenge of monitoring in-cell Cd variations in advanced logic and memory devices.

关键词： metrology dimension utilize

Capacitive Control of Spontaneously Induced Electrical Charge of droplet by Electric Field-Assisted Pipetting

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Nano-Micro Letters 2015年第4期7卷 341-346页

作者： Horim Lee dongwhi Choi dong Sung Kim Geunbae Lim department of Mechanical Engineering Pohang University of Science and Technology (POSTECH) Analysis Science & Engineering team Semiconductor R&D Center Samsung Electronics Co. Ltd.

The spontaneously generated electrical charge of a droplet dispensed from conventional pipetting is undesirable and unpredictable for most experiments that use ***,a method for controlling and removing the electrical charge needs to be *** this study,by using the electrode-deposited pipet tip(E-pipet tip),the charge-controlling system is newly developed and the electrical charge of a droplet is precisely *** effect of electrolyte concentration and volume of the transferred solution to the electrical charge of a dispensed droplet is theoretically and experimentally investigated by using the equivalent capacitor ***,a proof-of-concept example of the self-alignment and self-assembly of sequentially dispensed multiple droplets is demonstrated as one of the potential *** that the electrical charge of the various aqueous droplets can be precisely and simply controlled,the fabricated E-pipet tip can be broadly utilized not only as a general charge-controlling platform of aqueous droplets but also as a powerful tool to explore fundamental scientific research regarding electrical charge of a droplet,such as the surface oscillation and evaporation of charged droplets.

关键词： Pipet tip Capacitive control Electrical charge Self-assembly

New Precoded Spatial-Multiplexing for an Erasure Event in Single Frequency Networks

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China Communications 2018年第4期15卷 130-140页

作者： hojun kim seyoung kim yulong shang seunghyeon kim taejin jung department of Electronics and Computer Engineering Chonnam National University Gwangju 61186 Republic of Korea r＆d Planning and Management team Giga KOREA Foundation Daejcon 34054 Republic of Korea

In this paper, we propose a new spatial-multiplexing(SM) scheme employing an orthogonal precoder over rayleigh-fading channels for an erasure event in single frequency networks(SFN). To optimize the precoder, the average bit error rate(BEr) is evaluated and minimized through a mathematical analysis. Compared to an ordinary SM, the proposed scheme guarantees identical BEr performance under non-erasure fading channels and achieves a greatly improved performance under erasure fading channels, especially for a higher erasure-ratio and SNr values. This improvement is mainly due to the increase in the diversity gain incurred by the optimized precoder over the erasure event. We also compare the performance of the proposed SM to that of the conventional constellation-rotation(Cr) scheme applied to the single antenna SFN systems. The results of a computer simulation show that the performance of the new scheme is more effective than that of a conventional Cr across all simulation cases.

关键词： Spatial-multiplexing single fre-quency network rayleigh fading constella-tion-rotation broadcasting systems.

domain-Oriented Software defined Computing Architecture

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China Communications 2019年第6期16卷 162-172页

作者： Ping lv Qinrang Liu Hongchang Chen Ting Chen National digital Switching System Engineering and Technical r&d Center

With the introduction of software defined hardware by dArPA Electronics resurgence Initiative,software definition will be the basic attribute of information *** from boundary certainty and algorithm aggregation of domain applications,domain-oriented computing architecture has become the technical direction that considers the high flexibility and efficiency of information *** at the characteristics of data-intensive computing in different scenarios such as Internet of Things(IoT),big data,artificial intelligence(AI),this paper presents a domain-oriented software defined computing architecture,discusses the hierarchical interconnection structure,hybrid granularity computing element and its computational kernel extraction method,finally proves the flexibility and high efficiency of this architecture by experimental comparison.

关键词： software defined hardware software defined computing architecture hierarchical interconnection mixed-granular computing element

Evaluation of mitral chordae tendineae length using four-dimensional computed

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World Journal of Cardiology 2024年第5期16卷 274-281页

作者： Takuya Mori Satoshi Matsushita Terumasa Morita Abulaiti Abudurezake Junji Mochizuki Atsushi Amano department of Cardiovascular Surgery Juntendo University Faculty of MedicineTokyo 113-8421Japan department of Cardiovascular Surgery JACCT Japan Animal Cardiovascular Care TeamOsaka 533-0033Japan department of radiology Minamino Cardiovascular HospitalTokyo 192-0918Japan

BACKGrOUNd Mitral valvuloplasty using artificial chordae tendineae represents an effective surgical approach for treating mitral *** precise measurements of artificial chordae tendineae length(CL)is an important factor in the procedure;however,no objective index currently exists to facilitate this ***,preoperative assessment of CL is critical for surgical planning and ***-dimensional x-ray micro-computed tomography(4d-CT)may be useful for accurate CL measurement considering that it allows for dynamic three-dimensional(3d)evaluation compared to that with transthoracic echocardiography,a conventional inspection *** To investigate the behavior and length of mitral chordae tendineae during systole using *** Eleven adults aged>70 years without mitral valve disease were evaluated.A 64-slice CT scanner was used to capture 20 phases in the cardiac cycle in electrocardiographic *** length of the primary chordae tendineae was measured from early systole to early diastole using the 3d *** primary chordae tendineae originating from the anterior papillary muscle and attached to the A1-2 region and those from the posterior papillary muscle and attached to the A2-3 region were designated as cA and cP,*** behavior and maximum lengths[cA(ma),cP(max)]were compared,and the correlation with body surface area(BSA)was *** In all cases,the mitral anterior leaflet chordae tendineae could be *** most cases,the cA and cP chordae tendineae could be measured *** mean cA(max)and cP(max)were 20.2 mm±1.95 mm and 23.5 mm±4.06 mm,***(max)was significantly *** correlation coefficients(r)with BSA were 0.60 and 0.78 for cA(max)and cP(max),*** cA and cP exhibited constant variation in CL during systole,with a maximum 1.16-fold increase in cA and a 1.23-fold increase in cP from early to *** cP,CL reached a plateau at 15%and remaine

关键词： Mitral valve Chordae tendineae Computed tomography Four-dimensional Cardiac cycle

Thin layers of Fe doped ZnO deposited by spin-coating for electrolysis and photodetector applications

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Transactions of Nonferrous Metals Society of China 2024年

作者： dikra BOUrAS Mamoun FELLAH regis BArILLE Amjad IQBAL Hamadi FOUZIA Obrosov ALEKSEI Gamal A.EL-HITI Faculty of Science and Technology， University of Souk-Ahras Mechanical Engineering department， ABBES Laghrour University Biomaterial， Synthesis and Tribology research team， ABBES Laghrour-University MOLTECH-Anjou， Université d'Angers/UMr CNrS 6200 department of Materials Technologies， Faculty of Materials Engineering， Silesian University of Technology Matter science department， ABBES Laghrour University Brandenburg University of Technology Cottbus-Senftenberg department of Optometry， College of Applied Medical Sciences， King Saud University

ZnO is nowadays not only used as an additive for the copper and cement industry， but also in medicine and cosmetic industry as part of the substitute materials of choice for the field of new technologies such as renewable energy. This study aims to investigate the effect of iron concentration on the microstructural and structural properties of ZnO for Electrolysis and Photodetector Applications. The Thin layers of un-doped and doped ZnO with different percentages of Fe （2， 4， and 6 wt.%） were deposited by spin-coating on glass substrates. Sample characterization was done by X-ray diffraction （Xrd）， Atomic force microscopy （AFM）， Scanning electron microscopy （SEM）， energy-dispersive X-ray spectroscopy （EdS）， UV-visible absorption spectra and X-ray photoelectron spectroscopy （XPS）. Structural measurements by Xrd show that all the layers are polycrystalline with a hexagonal Wurtzite structure. Two new peaks were also discovered after the doping process （400） and （440） belonging to the Fe2O4crystal phase spectrum. Morphological analysis showed that the surface roughness values of ZnO layers ranged between 8 and 45 nm. XPS studies confirmed the presence of Fe in +3 states in ZnO layers. An average transmittance of 90% was measured by UV- in the wavelength range of 200-900 nm. The values of the energy gap （Eg） decreased with an increase in the concentration of Fe. AFM topography results confirmed that ZnO-based thin layers have a relatively uniform surface. The efficiency of these samples has been confirmed for their use in many electrical applications， including photodetectors and electrolysis of contaminated solutions.

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Zeolite-confined Fe-site Catalysts for the Hydrogenation of CO_(2) to Produce High-value Chemicals

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Chemical research in Chinese Universities 2024年第1期40卷 78-95页

作者： HAN Xiaoyang XIA Huicong TU Weifeng WEI Yifan XUE dongping LI Minhan YAN Wenfu ZHANG Jia-Nan HAN Yi-Fan College of Materials Science and Engineering Zhengzhou UniversityZhengzhou450001P.R.China State Key Laboratory of Coking Coal resources Green Exploitation Zhengzhou UniversityZhengzhou450001P.R.China Engineering research Center of Advanced Functional Material Manufacturing of Ministry of Education School of Chemical EngineeringZhengzhou UniversityZhengzhou450001P.R.China State Key Laboratory of Inorganic Synthesis and Preparative Chemistry and College of Chemistry Jilin UniversityChangchun130012P.R.China State Key Laboratory of Chemical Engineering East China University of Science and TechnologyShanghai200237P.R.China

Zeolite-confined Fe-site catalysts(ZFCs)have emerged as superior materials for sustainably producing high-value chemicals through CO_(2) hydrogenation,owing to their adaptable framework,customizable composition,and thermal *** excel in activating,adsorbing,and converting CO_(2) with remarkable efficiency and consistency in *** has sparked a surge in research interest in recent *** review delves into the latest advancements in CO_(2) catalytic hydrogenation to olefins,alcohols,aromatics,and other liquid hydrocarbons,examining the synthesis,modification tactics,and the correlation between structure and performance across various ***,it underscores the pivotal factors affecting performance and sheds light on the mechanisms behind selectivity control in the CO_(2) hydrogenation process facilitated by *** conclude,it presents pressing challenges and strategic recommendations to inspire the development of high-performance,durable ZFCs for CO_(2) hydrogenation applications.

关键词： Zeolite-confined Fe-site catalyst CO_(2) hydrogenation Modification strategy High-value chemical

Analysis of the Sloshing Flows of a LNG Cargo Tank

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Journal of Thermal Science 2011年第5期20卷 442-448页

作者： deog Hee doh Hyo Je Jo Byeong rog Shin Min Cheol ryu Yoon Sik Hwang division of Mechanical and Information Eng. Korea Maritime University division of Naval Architecture and Ocean Systems Eng. Korea Maritime University department of Mechanical Engineering Changwon National University Fluid dynamics r&d team DSMEGeoje-siKorea

The sloshing flows in a LNG cargo tank model （1/50 scale） of a ship are measured by an embedded pano- ramicPIV system. The measurement system consists of a Nd-Yag laser（120mJ, 15Hz）, two cameras（lk x lk） and a host computer. Four experimental cases were tested for the tank model, in which swaying motions are made by a 6 dOF-motion platform. The amplitudes of swaying are 9.76mm and 29.29mm, and the swaying frequencies are 0.633Hz and 0.828Hz. The measurement regions are the vertical plane 50ram away from the front wall of the tank where a pump tower is installed. It was verified that the flow patterns of the sloshing are similar to each other when the swaying amplitudes are similar.

关键词： Sloshing Model Ship Cargo Tank Embedded Panoramic PIV Swaying Motion

rapid synthesis of MoS_(2)-Ag nanocomposites via photoreduction for optical tuning and surface-enhanced raman scattering applications

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Journal of Materiomics 2023年第2期9卷 229-234页

作者： Yoonkyung Lee Eunpa Kim Hyeongkeun Kim Kyunghoon Kim School of Mechanical Engineering Sungkyunkwan UniversitySuwon16419Republic of Korea Samsung Electronics Semiconductor R&DAdvanced Manufacturing Engineering TeamPyeongtaek17786Republic of Korea Korea Electronics Technology Institute Seongnam13509Republic of Korea

Semiconductoremetal nanocomposites have been widely investigated to modify the intrinsic properties of materials used for optoelectronic devices and sensing *** this study,a method for rapid synthesis of MoS_(2)-Ag nanocomposites via laser-assisted photoreduction was *** the photoreduction process,we used AgNO_(3)solution as a metal *** laser irradiation,Ag ions were easily reduced on MoS_(2)by photo-generated electrons from MoS_(2).The optical properties of MoS_(2)-Ag nanocomposites were easily controlled by simple adjustment of the photoreduction *** investigate the surface-enhanced raman scattering(SErS)effect of the MoS_(2)-Ag nanocomposites,the SErS spectra of methylene blue(MB)on MoS_(2)-Ag nanocomposites were measured,and the nanocomposites were found to enhance the raman scattering intensity of MB up to~***,the laser-assisted photoreduction method has great potential for rapid synthesis and optical tuning of semiconductoremetal nanocomposites.

关键词： Molybdenum disulfide(MoS2) Silver(Ag) Photoreduction Optical tuning Surface-enhanced raman scattering(SErS)