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Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

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IEEE/CAA Journal of Automatica Sinica 2025年第1期12卷 198-214页

作者： Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan IEEE the Center of Ultra-precision optoelectronic instrument Engineering Harbin Institute of Technology the key laboratory of Ultra-precision Intelligent instrumentation Ministry of Industry and Information Technology the State key laboratory of precision Electronic Manufacturing technology and Equipment Guangdong University of Technology the Center of Ultraprecision optoelectronic instrument Engineering Harbin Institute of Technology the key laboratory of Ultraprecision Intelligent instrumentation Ministry of Industry and Information Technology the Department of Electronic and Information Systems Shibaura Institute of Technology

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread application of iterative learning control(ILC), given the repetitive nature of wafer scanning. ILC enables substantial performance improvement by using past measurement data in combination with the system model knowledge. However, challenges arise in cases where the data is contaminated by the stochastic noise, or when the system model exhibits significant uncertainties, constraining the achievable performance. In response to this issue, an extended state observer(ESO) based adaptive ILC approach is proposed in the frequency *** being model-based, it utilizes only a rough system model and then compensates for the resulting model uncertainties using an ESO, thereby achieving high robustness against uncertainties with minimal modeling effort. Additionally, an adaptive learning law is developed to mitigate the limited performance in the presence of stochastic noise, yielding high convergence accuracy yet without compromising convergence speed. Simulation and experimental comparisons with existing model-based and data-driven inversion-based ILC validate the effectiveness as well as the superiority of the proposed method.

关键词： Extended state observer learning control model uncertainties motion control stochastic noise

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Planar Hall plateau in magnetic Weyl semimetals

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Science Bulletin 2025年第2期70卷 187-192页

作者： Lei Li Chaoxi Cui Run-Wu Zhang Zhi-Ming Yu Yugui Yao Centre for Quantum Physics Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement(MOE)School of PhysicsBeijing Institute of TechnologyBeijing 100081China Beijing key Lab of Nanophotonics&Ultrafine optoelectronic Systems School of PhysicsBeijing Institute of TechnologyBeijing 100081China International Center for Quantum Materials Beijing Institute of TechnologyZhuhai 519000China

Despite the rapid progress in the study of planar Hall effect(PHE)in recent years,all the previous works only showed that the PHE is connected to local geometric quantities,such as Berry ***,for the first time,we point out that the PHE in magnetic Weyl semimetals is directly related to a global quantity,namely,the Chern number of the Weyl *** leads to a remarkable consequence that the PHE observation predicted here is robust against many system details,including the Fermi *** main difference between non-magnetic and magnetic Weyl points is that the latter breaks time-reversal symmetry T,thus generally possessing an energy *** semiclassical Boltzmann theory,we investigate the PHE in generic magnetic Weyl models with energy tilt and arbitrary Chern *** find that by aligning the magnetic and electric fields in the same direction,the trace of the PHE conductivity contributed by Berry curvature and orbital moment is proportional to the Chern number and the energy tilt of the Weyl points,resulting in a previously undiscovered quantized PHE plateau by varying the Fermi *** further confirm the existence of PHE plateaus in a more realistic lattice model without T *** proposing a new quantized physical quantity,our work not only provides a new tool for extracting the topological character of the Weyl points but also suggests that the interplay between topology and magnetism can give rise to intriguing physics.

关键词： Magnetic Weyl semimetals Planar Hall effect Quantized plateau Chern number

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On the ionospheric response in the Taiwan region to Typhoon Meranti in September 2016

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Geodesy and Geodynamics 2025年第1期16卷 29-41页

作者： Peng Chen Mingzhu Xiong Yibin Yao Hao Chen Fucai Tang Liangcai Qiu Yuchen Zhang College of Geomatics Xi'an University of Science and Technology State key laboratory of Geodesy and Earth's Dynamics Innovation Academy for Precision Measurement Science and Technology Chinese Academy of Science School of Geodesy and Geomatics Wuhan University key laboratory of Geospace Environment and Geodesy Ministry of Education Wuhan University

Previous studies have revealed that typhoons can affect the ionosphere. This paper uses GNSS observations provided by GNSS tracking stations of Taiwan region, ERA5 gravity wave dissipation products,and Himawari-8 band 07 brightness temperature observation data to analyze the impact of Typhoon Meranti on Taiwan region's ionosphere from September 13 to 15, 2016. In addition to the daily effects of traveling ionospheric disturbances(TIDs), TIDs of various intensities caused by Meranti-induced gravity waves were observed during this period, which is inseparable from the state of the typhoon and the topographic features during its progress. The ionospheric disturbance caused by the edge of a typhoon is usually larger than that at the typhoon eye. When the typhoon approached Taiwan region with high intensity on September 14, it was observed that the gravity waves caused by the typhoon had a wavelength of about 174-293 km, a period of 13.5-23.5 min, and a propagation speed of 142-302 m/s. When the vortex structure of a typhoon interacts with complex surfaces such as mountains, it is easier to excite more medium-scale gravity waves. The origin that excites gravity waves and causes ionospheric anomalies is different from the location of the typhoon eye and changes over time. The gravity waves caused by the typhoon lasted for three days in the central mountains of Taiwan region. Still, background wind conditions restricted the propagation of gravity waves from the mesosphere to the thermosphere and led to TID predominantly concentrated between 06:00 and 13:00 UT each day.

关键词： Typhoon GNSS TEC TID Gravity waves

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Continuously adjustable mechanical metamaterial based on planetary gear trains and external meshing gears

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Applied Mathematics and Mechanics(English Edition) 2025年第2期46卷 233-252页

作者： Shuai MO Xu TANG Keren CHEN H. HOUJOH Wei ZHANG State key laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures School of Mechanical Engineering Guangxi University State key laboratory of precision Manufacturing for Extreme Service Performance Central South University State key laboratory of Digital Manufacturing Equipment and technology Huazhong University of Science and Technology precision and Intelligence laboratory Tokyo Institute of Technology

The metamaterial based on external meshing gears(MEG) is designed based on the principle of external meshing gear transmission. Based on the meshing transmission principle of external meshing gears and planetary gear trains, the internal and external gear rings are designed. Based on the internal and external gear rings, the metamaterial based on inner and outer planetary gear trains(MIP) is designed to study the shear modulus, Young's modulus, and amplitude-frequency characteristics of the metamaterial based on gears at different angles. The effects of the number of planetary gears on the physical characteristics of the MIP are studied. The results show that the MEG can be continuously adjusted by adjusting the shear modulus and Young's modulus due to its meshing characteristics. With the same number of gears, the adjustment range of the MIP is larger than the adjustment range of the MEG. When the number of planetary gears increases, the adjustment range of the MIP decreases. Moreover, when the metamaterial based on gears rotates, the harmonic response changes with the change of the angle.

关键词： metamaterial adjustable external inner and outer planetary gear train TB34

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Double[5]carbohelicene:facile synthesis,chiroptical properties,isomerization study,and lasing application

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Science China Chemistry 2025年第1期68卷 233-240页

作者： Peipei Liu Yantong Li Meng-Xiang Wu Hao Kang Xiao-Li Zhao Lin Xu Linlin Liu Xiaodong Li Junfeng Fang Zhiwei Fang Ya Cheng Hai-Bo Yang Huakang Yu Xueliang Shi State key laboratory of Petroleum Molecular&Process Engineering Shanghai Key Laboratory of Green Chemistry and Chemical ProcessesSchool of Chemistry and Molecular EngineeringEast China Normal UniversityShanghai 200062China School of Physics and optoelectronics South China University of TechnologyGuangzhou 510640China School of Physics and Electronic Science Engineering Research Center of Nanophotonics&Advanced InstrumentMinistry of EducationEast China Normal UniversityShanghai 200241China State key laboratory of precision Spectroscopy School of Physics and Electronic ScienceEast China Normal UniversityShanghai 200241China Institute of Polymer optoelectronic Materials&Devices State Key Laboratory of Luminescent Materials&DevicesSouth China University of TechnologyGuangzhou 510640China

Double carbohelicenes have attracted considerable attention due to their aesthetic structures,distinctπ-conjugation extension,inherent chirality,and intriguing optical and electronic ***,the concise de novo synthesis of a new double[5]carbohelicene 1 together with its chiroptical properties,isomerization process and lasing application is presented.1 was synthesized by a simple protocol involving the formation of a 6,6′-bipentacene as the key *** is worth noting that1 existed as two diastereomers 1-PP/MM and 1-PM,which were successfully isolated and unambiguously confirmed by Xray *** optical resolution of the racemic 1-PP/MM was successfully achieved by chiral-phase highperformance liquid chromatography(HPLC),and 1-PP and 1-MM were characterized by circular ***,it was found that 1-PP/MM could be completely isomerized to 1-PM upon heating,and the detailed thermodynamics and kinetics of the isomerization process were systematically investigated.1-PM exhibited deep-red luminescence with emission maximum at 723 nm and fluorescence quantum yield as high as 32.95%.Consequently,we can showcase the lasing application of 1-PM by doping with epoxy resin to assemble a bottle microlaser spontaneously,which the lasing wavelength is 796.6 nm at a threshold of 0.8 m J cm^(-2).We believe that our studies,including the facile synthesis methodology,detailed isomerization studies,and lasing application,will shed some light on the design and synthesis of novel carbohelical systems with more functions.

关键词： double carbohelicene optical resolution organic laser isomerization X-ray diffraction

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Efficient implementation of quantum permutation algorithm using a polar SrO molecule in pendular states

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Communications in Theoretical Physics 2025年第2期77卷 41-53页

作者： Jie-Ru Hu Zuo-Yuan Zhang Jin-Ming Liu State key laboratory of precision Spectroscopy School of Physics and Electronic Science East China Normal University School of Physical Science and technology Yangzhou University Chongqing key laboratory of precision Optics Chongqing Institute of East China Normal University

Quantum algorithms offer more enhanced computational efficiency in comparison to their classical counterparts when solving specific tasks. In this study, we implement the quantum permutation algorithm utilizing a polar molecule within an external electric field. The selection of the molecular qutrit involves the utilization of field-dressed states generated through the pendular modes of SrO. Through the application of multi-target optimal control theory, we strategically design microwave pulses to execute logical operations, including Fourier transform,oracle Ufoperation, and inverse Fourier transform within a three-level molecular qutrit *** observed high fidelity of our outcomes is intricately linked to the concept of the quantum speed limit, which quantifies the maximum speed of quantum state manipulation. Subsequently,we design the optimized pulse sequence to successfully simulate the quantum permutation algorithm on a single SrO molecule, achieving remarkable fidelity. Consequently, a quantum circuit comprising a single qutrit suffices to determine permutation parity with just a single function evaluation. Therefore, our results indicate that the optimal control theory can be well applied to the quantum computation of polar molecular systems.

关键词： polar molecule optimal control quantum permutation algorithm pendular states

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Microstructure evolution of 7050 aluminum forgings during surface cumulative plastic deformation

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Transactions of Nonferrous Metals Society of China 2025年第1期35卷 45-59页

作者： Jian-liang HU Ze-xiong ZHANG Cheng XING Xiu-jiang WU Shi-quan HUANG Hong BO key laboratory of Advanced Forging&Stamping technology and Science Ministry of EducationYanshan UniversityQinhuangdao 066004China State key laboratory of precision Manufacturing for Extreme Service Performance Central South UniversityChangsha 410083China College of Mechanical Engineering Yanshan UniversityQinhuangdao 066004China Hebei Engineering technology Research Center of Metal precision Plastic Processing Yanshan UniversityQinhuangdao 066004China State key laboratory of Metastable Materials Science and technology Yanshan UniversityQinhuangdao 066004China

To elucidate the mechanisms of regulating the microstructure uniformity in 7050 aluminum forgings through surface cumulative plastic deformation(SCPD),the microstructure under different solution treatments was investigated using metallographic observation(OM),electron backscatter diffraction(EBSD),transmission electron microscopy(TEM),and X-ray diffraction(XRD).The findings demonstrate that the most uniform microstructure in the forgings is achieved with a solution treatment at 470℃for 30 *** SCPD process generates a significant number of needle-shaped precipitates,resulting in a higher dislocation density and stored *** treatments alleviate the pinning effect of second-phase particles and facilitate static recrystallization(SRX)in forgings,leading to a reduction in grain ***,mechanical testing results demonstrate 7%−13%increase in tensile strength and more uniform elongation of the forgings in different directions.

关键词： microstructure homogeneity surface cumulative plastic deformation(SCPD) static recrystallization(SRX) dislocation density

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Anisotropic transport properties and topological Hall effect in the annealed kagome antiferromagnet FeGe

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Science China(Physics,Mechanics & Astronomy) 2025年第3期68卷 153-160页

作者： Jiajun Ma Chenfei Shi Yantao Cao Yuwei Zhang Yazhou Li Jiaxing Liao Jialu Wang Wenhe Jiao Hanjie Guo Chenchao Xu Shixun Cao Jianhui Dai Jin-Ke Bao Yuke Li School of Physics Hangzhou Key Laboratory of Quantum MattersHangzhou Normal UniversityHangzhou311121China Department of Physics Materials Genome Institute and International Center for Quantum and Molecular StructuresShanghai UniversityShanghai200444China key laboratory of Quantum precision measurement of Zhejiang Province Department of Applied PhysicsZhejiang University of TechnologyHangzhou310023China Songshan Lake Materials laboratory Dongguan523808China School of Physical Science and technology Lanzhou UniversityLanzhou730000China

Electron correlation often gives birth to various orders in quantum ***,a strongly correlated kagome antiferromagnet Fe Ge is discovered to undergo a charge density wave transition inside the A-type antiferromagnetic state,providing an opportunity to explore the interplay between charge order and ***,we reported the observation of anisotropic resistivity and Hall effect,along with a topological Hall effect,in the annealed Fe Ge *** the current flows along the abplane,the temperature dependence ofρ_(ab)exhibits a distinct resistivity loop related to a first-order transition at T_(cdw).The applied magnetic fields do not alter T_(cdw)but can induce a spin-flop transition at H_(sf).Consequently,a field-induced large topological Hall effect is observed in the canting antiferromagnetic(CAFM)state below T_(cant),which is possibly attributed to the non-trivial spin texture during the spin-flop ***,as current is parallel to c-axis,both the field-induced transitions inρ_(c)andχ_(c)***,the Hall resistivity in the annealed Fe Ge significantly exhibits a deviation from the linear *** findings provide valuable insight into revealing the interplay among magnetism,charge order and topology in the kagome magnets.

关键词： charge density wave Hall effect transport properties kagome magnet

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Lightweight Al-Nb-Ti-V-Cr high entropy alloys with high hardness and enhanced mechanical properties via doping Co

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China Foundry 2025年

作者： Fang-dong Xu De-zhi Chen Rui-run Chen Bin Gan Jing-yue Yu National key laboratory for precision Hot Processing of Metals Harbin Institute of Technology Suzhou laboratory

To develop high-hardness and high-strength lightweight high entropy alloys （LHEAs）,a series of CoxAlNbTiVCr alloys were *** phase constitution,distribution,and crystal structure of the Laves phase in alloys can be altered by adjusting the composition of HEAs,which in turn influences their mechanical *** Nb Ti VCr （x=0,0.5,1,1.5,and 2,atomic ratio percentage） LHEAs were designed and prepared to characterize the microstructure and tailor the mechanical *** introduction of Co changes the microstructure of LHEAs from a single B2 structure to a mixture dendrite structure,which consists of B2 phase,C14 and C15 Laves *** the C14 and C15 Laves phases exhibit coupled *** parameters including mixing enthalpy (ΔHmix),valence electron concentration （VEC）,atomic radius size （δ）,mixing entropy （ΔS）,and electronegativity difference （Δχ） are used to predict the formation of B2 and Laves phase in *** the Co content increases from 0 to 1.5at.%,Laves phase volume fraction gradually increases,which leads to an enhancement in the compressive strength from 1,520.8 MPa to 1,844.4 ***1.5Al Nb Ti VCr alloy exhibits the maximum Vickers hardness of 699.4 *** improvement of mechanical properties mainly originates from solid solution strengthening and second phase strengthening.

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Calibration of the Solar X-ray Detector on-board the Macao Science Satellite-1B for Soft X-ray Detection

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Science China Earth Sciences 2025年第1期68卷 11-26页

作者： Man-Hei NG Xiaoping ZHANG Jianwu CHEN Yongqiang SHI Fuchang ZUO Wenxi PENG Weichun FU Liansheng LI Pengwei LUO Chi-Long TANG Guozheng ZHANG Zhiwu MEI Li WANG Cunhui LI Jiaming OU Yanyan Xu State key laboratory of Lunar and Planetary Sciences Macao University of Science and TechnologyMacao999078China Space optoelectronic measurement and Perception laboratory Beijing Institute of Control EngineeringBeijing100190China Institute of High Energy Physics Chinese Academy of SciencesBeijing100049China Science and technology on Vacuum technology and Physics laboratory Lanzhou Institute of PhysicsLanzhou730000China China National Space Administration(CNSA) Macao Center for Space Exploration and ScienceMacao999078China

The Solar X-ray Detector(SXD)on-board the Macao Science Satellite-1B(MSS-1B)was successfully launched via the Chinese Long March-2C rocket on 21 May 2023,and commenced operations in early June of the same *** MSS-1B/Soft X-ray Detection Units(SXDUs)employ two silicon drift detectors(SDDs),providing a wide range of energy spectra spanning from 0.7 to 24 ***,the SXDUs deliver a high-resolution capability of 0.14 keV@5.9 keV and operate with a time cadence of 1 ***,we perform thorough calibrations of the MSS-1B/SXDUs,employing a combination of ground experiments and *** addition,quantitative analysis comparing the flux measurements obtained by the MSS-1B/SXDUs to the data collected by the Geostationary Operational Environmental Satellite(GOES),provides compelling evidence of their ***,the preliminary spectral analysis results showcase the robustness and expected performance of the MSS-1B/SXDUs,unlocking their potential for facilitating the study of dynamic evolution of solar ***,the innovative MSS-1B/Solar X-ray Detector facilitates concurrent observations of solar soft and hard X-rays,thereby making valuable contributions to the advancements in solar research.

关键词： Macao Science Satellite-1B(MSS-1B) Calibration Solar X-Ray Detector Spectrometer Soft X-rays Solar flares Solar abundances

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