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Flexible pressure sensors with ultrahigh stress tolerance enabled by periodic microslits

Microsystems & nanoengineering 2024年第1期10卷 301-311页

作者： Song Wang Chenying Wang Yifan Zhao Yujing Zhang Yaxin Zhang Xiangyue Xu Qijing Lin Kai Yao Yuheng Wang Feng Han Yu Sun Zhuangde Jiang State Key Laboratory for manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Mechanical EngineeringXi’an Jiaotong UniversityXi’anChina State Key Laboratory for manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Instrument Science and TechnologyXi’an Jiaotong UniversityXi’anChina The Faculty of Electrical Engineering and Computer Science Ningbo UniversityNingboChina Department of Mechanical and Industrial Engineering University of TorontoTorontoCanada

Stress tolerance plays a vital role in ensuring the effectiveness of piezoresistive sensing films used in flexible pressure sensors.However,existing methods for enhancing stress tolerance employ dome-shaped,wrinkle-shaped,and pyramidal-shaped microstructures in intricate molding and demolding processes,which introduce significant fabrication challenges and limit the sensing performance.To address these shortcomings,this paper presents periodic microslits in a sensing film made of multiwalled carbon nanotubes and polydimethylsiloxane to realize ultrahigh stress tolerance with a theoretical maximum of 2.477 MPa and a sensitivity of 18.092 kPa−1.The periodic microslits permit extensive deformation under high pressure(e.g.,400 kPa)to widen the detection range.Moreover,the periodic microslits also enhance the sensitivity based on simultaneously exhibiting multiple synapses within the sensing interface and between the periodic sensing cells.The proposed solution is verified by experiments using sensors based on the microslit strategy for wind direction detection,robot movement sensing,and human health monitoring.In these experiments,vehicle load detection is achieved for ultrahigh pressure sensing under an ultrahigh pressure of over 400 kPa and a ratio of the contact area to the total area of 32.74%.The results indicate that the proposed microslit strategy can achieve ultrahigh stress tolerance while simplifying the fabrication complexity of preparing microstructure sensing films.

关键词： robot shaped stress

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Personal Thermal Management by Radiative Cooling and Heating

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nano-Micro Letters 2024年第8期16卷 225-267页

作者： Shidong Xue Guanghan Huang Qing Chen Xungai Wang Jintu Fan Dahua Shou School of Fashion and Textiles The Hong Kong Polytechnic UniversityHung HomKowloonHong Kong 999077People’s Republic of China Future Intelligent Wear centre The Hong Kong Polytechnic UniversityHung HomKowloonHong Kong 999077People’s Republic of China State Key Laboratory of Precision Electronic manufacturing Technology and Equipment Guangdong University of TechnologyGuangzhou 510006People’s Republic of China Shanghai international Fashion Innovation Center Donghua UniversityShanghai 200051People’s Republic of China research centre of Textiles for Future Fashion The Hong Kong Polytechnic UniversityHung HomKowloonHong Kong 999077People’s Republic of China research Institute for Smart Energy The Hong Kong Polytechnic UniversityHung HomKowloonHong Kong 999077People’s Republic of China

Maintaining thermal comfort within the human body is crucial for optimal health and overall well-being.By merely broadening the setpoint of indoor temperatures,we could significantly slash energy usage in building heating,ventilation,and air-conditioning systems.In recent years,there has been a surge in advancements in personal thermal management(PTM),aiming to regulate heat and moisture transfer within our immediate surroundings,clothing,and skin.The advent of PTM is driven by the rapid development in nano/micro-materials and energy science and engineering.An emerging research area in PTM is personal radiative thermal management(PRTM),which demonstrates immense potential with its high radiative heat transfer efficiency and ease of regulation.However,it is less taken into account in traditional textiles,and there currently lies a gap in our knowledge and understanding of PRTM.In this review,we aim to present a thorough analysis of advanced textile materials and technologies for PRTM.Specifically,we will introduce and discuss the underlying radiation heat transfer mechanisms,fabrication methods of textiles,and various indoor/outdoor applications in light of their different regulation functionalities,including radiative cooling,radiative heating,and dual-mode thermoregulation.Furthermore,we will shine a light on the current hurdles,propose potential strategies,and delve into future technology trends for PRTM with an emphasis on functionalities and applications.

关键词： Personal thermal management Radiative cooling and heating Thermal comfort Dynamic thermoregulation

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Recent advances and applications of single atom catalysts based electrochemical sensors

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nano research 2024年第4期17卷 2994-3013页

作者： Mingyue Wang Mingfu Ye Jieyue Wang Yong Xu Zhendong Wang Xinyue Tong Xinya Han Kui Zhang Wenhai Wang Konglin Wu Xianwen Wei Institute of Clean Energy and Advanced nanocatalysis(iClean) School of Chemistry and Chemical EngineeringAnhui University of TechnologyMaanshan 243002China School of Materials Science and Engineering Anhui University of TechnologyMaanshan 243002China Anhui international research Center of Energy materials green manufacturing and biotechnology School of Chemistry and Chemical EngineeringAnhui University of TechnologyMaanshan 243002China Carbon Cycle and Emission Control research Center Low-Carbon Research InstituteAnhui University of TechnologyMaanshan 243002China

Single atom catalysts(SACs)have attracted considerable attention due to their unique structures and excellent catalytic performance,especially in the area of catalysis science and energy conversion and storage.In recent years,SACs have emerged as a new type of sensing material for constructing electrochemical sensors(ECSs),presenting excellent sensitivity,selectivity,and stability.Herein,we review the recent advances of SACs in electrochemical sensing and discuss the status quo of current SAC-based ECSs.Specifically,the fundamentals of SAC-based ECSs are outlined,including the involved central metal atoms and various supports of SACs in this field,the detection mechanisms,and improving strategies of SAC-based ECSs.Moreover,the important applications of SAC-based ECSs are listed and classified,covering the detection of reactive oxygen and nitrogen species,environmental pollutants,disease biomarkers,and pharmaceuticals.Last,based on abundant reported cases,the current conundrums of SAC-based ECSs are summarized,and the prediction of their future developing trends is also put forward.

关键词： single atom catalysts(SACs) electrochemical sensors(ECSs) reactive oxygen and nitrogen species environmental pollutants disease biomarkers pharmaceuticals

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Direct observation of oxygen vacancy formation and migration over ceria surface by in situ environmental transmission electron microscopy

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Journal of Rare Earths 2024年第4期42卷 676-682页

作者： Dawei Pang Wei Li Ningqiang Zhang Hong He Shengcheng Mao Yanhui Chen Liwei Cao Chong Li Ang Li Xiaodong Han Beijing Key Laboratory of Solid Microstructure and Properties Department of Materials and ManufacturingBeijing University of TechnologyBeijing 100124China Beijing Key Laboratory for Green Catalysis and Separation The Faculty of Environment and LifeBeijing University of TechnologyBeijing10124China international Joint research Laboratory for Quantum Functional Materials of Henan School of Physics and MicroelectronicsZhengzhou UniversityZhengzhou450001China

The extremely high structural tolerance of ceria to oxygen vacancies(Ov)has made it a desirable catalytic material for the hydrocarbon oxidation to chemicals and pharmaceuticals and the reduction of gaseous pollutants.It is proposed that the formation and diffusion of Ov originate from its outstanding reduction property.However,the formation and diffusion process of Ov over the surface of ceria at the atomic level is still unknown.Herein,the structural and valence evolution of CeO_(2)(111)surfaces in reductive,oxidative and vacuum environments from room temperature up to 700℃was studied with in situ aberration-corrected environmental transmission electron microscopy(ETEM)experiments.Ov is found to form under a high vacuum at elevated temperatures;however,the surface can recover to the initial state through the adsorption of oxygen atoms in an oxygen-contained environment.Furthermore,in hydrogen environment,the step-CeO_(2)(111)surface is not stable at elevated temperatures;thus,the steps tend to be eliminated with increasing temperature.Combined with first-principles density function calculations(DFT),it is proposed that O-terminated surfaces would develop in a hypoxic environment due to the dynamic diffusion of Ov from the outer surface to the subsurface.Furthermore,in a reductive environment,H2 facilitates the formation and diffusion of Ov while Ce-terminated surfaces develope.These results reveal dynamic atomic-scale interplay between the nanoceria surface and gas,thereby providing fundamental insights into the Ov-dependent reaction of nano-CeO_(2) during catalytic processes.

关键词： Ceria Direct observation In situ ETEM Oxygen vacancy Density function calculations Rareearths

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Electrical uniformity analyses on 12-inch Si-based Hf0.5Zr0.5O2 ferroelectric capacitor devices by atomic layer deposition

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Progress in Natural Science:Materials international 2024年第3期34卷 598-605页

作者： Wen-Juan Ding Yu Liu Zhi-Qiang Xiao Li Gao Yu-Chen Li Lin Zhu Xiang Li Wei-Min Li Shuang Chen Ai-Dong Li National Laboratory of Solid State Microstructures College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced MicrostructuresNanjing University Jiangsu Leadmicro nano-Technology Co. Ltd. Semiconductor manufacturing North china Corp. Kuang Yaming Honors School Nanjing University

The study on the uniformity of electrical performance of large wafer-scale Hf0.5Zr0.5O2（HZO） ferroelectric capacitors is still lacking yet now. In this work, TiN/HZO/TiN metal-ferroelectric-metal（MFM） devices on 12-inch silicon wafers have been fabricated by thermal atomic layer deposition. The correlation of thickness uniformity with device-to-device variation of electrical properties and yield of the 12-inch MFM system was investigated. It was found that the uniformity of ferroelectric properties is closely related to the variation of HZO thickness of the MFM system, the concentration of oxygen vacancies in the micro-region of the HZO film, and the ferroelectric phase micro-distribution on 12-inch Si wafer. This work provides some important information for the performance optimization of HfO2-based ferroelectric random access memories.

关键词： 12-Inch Si wafer Atomic layer deposition Electrical uniformity Ferroelectric random access memory Hf0.5Zr0.5O2 ferroelectric thin film

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Highly Thermally Conductive and Structurally Ultra‑Stable Graphitic Films with Seamless Heterointerfaces for Extreme Thermal Management

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nano-Micro Letters 2024年第3期16卷 383-397页

作者： Peijuan Zhang Yuanyuan Hao Hang Shi Jiahao Lu Yingjun Liu Xin Ming Ya Wang Wenzhang Fang Yuxing Xia Yance Chen Peng Li Ziqiu Wang Qingyun Su Weidong Lv Ji Zhou Ying Zhang Haiwen Lai Weiwei Gao Zhen Xu Chao Gao MOE Key Laboratory of Macromolecular Synthesis and Functionalization Department of Polymer Science and EngineeringKey Laboratory of Adsorption and Separation Materials and Technologies of Zhejiang ProvinceZhejiang University38 Zheda RoadHangzhou 310027People’s Republic of China Shanxi-Zheda Institute of Advanced Materials and Chemical Engineering Taiyuan 030032People’s Republic of China Beijing Spacecrafts manufacturing Co. LtdBeijing Friendship Road 104Haidian DistrictBeijing 100094People’s Republic of China Beijing Institute of Space Mechanics and Electricity Beijing Friendship Road 104Haidian DistrictBeijing 100094People’s Republic of China china Academy of Aerospace Aerodynamics Beijing 100074People’s Republic of China Hangzhou Gaoxi Technol Co. LtdHangzhou 311113People’s Republic of China international research Center for X Polymers International CampusZhejiang UniversityHaining 314400People’s Republic of China

Highly thermally conductive graphitic film(GF)materials have become a competitive solution for the thermal management of high-power electronic devices.However,their catastrophic structural failure under extreme alternating thermal/cold shock poses a significant challenge to reliability and safety.Here,we present the first investigation into the structural failure mechanism of GF during cyclic liquid nitrogen shocks(LNS),which reveals a bubbling process characterized by“permeation-diffusion-deformation”phenomenon.To overcome this long-standing structural weakness,a novel metal-nanoarmor strategy is proposed to construct a Cu-modified graphitic film(GF@Cu)with seamless heterointerface.This well-designed interface ensures superior structural stability for GF@Cu after hundreds of LNS cycles from 77 to 300 K.Moreover,GF@Cu maintains high thermal conductivity up to 1088 W m^(−1)K^(−1)with degradation of less than 5%even after 150 LNS cycles,superior to that of pure GF(50%degradation).Our work not only offers an opportunity to improve the robustness of graphitic films by the rational structural design but also facilitates the applications of thermally conductive carbon-based materials for future extreme thermal management in complex aerospace electronics.

关键词： Highly thermally conductive Structurally ultra-stable Graphitic film Extreme thermal management Liquid nitrogen bubbling

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Regulate electric double layer for one-step synthesize and modulate the morphology of(oxy)hydroxides

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nano research 2024年第5期17卷 3675-3683页

作者： Jiaxin Liu Yue Shi Yanli Gu Zheng Lv Liang Zhao Yu Yang Tianrong Zhan Jianping Lai Lei Wang State Key Laboratory Base of Eco-Chemical Engineering International Science and Technology Cooperation Base of Eco-chemical Engineering and Green ManufacturingCollege of Chemistry and Molecular EngineeringQingdao University of Science and TechnologyQingdao 266042China Shandong Engineering research Center for Marine Environment Corrosion and Safety Protection College of Environment and Safety EngineeringQingdao University of Science and TechnologyQingdao 266042China

FeOOH have received considerable attention due to their natural abundance and cost-effectiveness.Despite the significant progress achieved,the one-step synthesis of integrated FeOOH is still a major challenge.Meanwhile,the current research on FeOOH catalyst still suffers from the unclear mechanism of controlling morphology.Here,density functional theory(DFT)calculations and X-ray photoelectron spectroscopy(XPS)demonstrated the strong electron-capturing and hydrogen absorption ability of Co in FeOOH,which further promotes the formation and stabilization of FeOOH.We used a one-step electrodeposition method to synthesize Co introduced FeOOH integrated electrocatalyst and propose to introduce ions with different valence states to regulate the morphology of FeOOH by precise modulation of electric double layer(EDL)composition and thickness.The prepared Co-FeOOH-K^(+)has a larger electrochemically active surface area(ECSA)(325 cm^(2))and turnover frequency(TOF)value(0.75 s^(-1)).In the electrochemical experiments of an alkaline anion exchange membrane electrolyzer,Co-FeOOH-K^(+)shows better oxygen evolution performance than commercial RuO_(2) under industrial production conditions and has good industrial application prospects.

关键词： integrated(oxy)hydroxides electrodeposition electric double layer(EDL) oxygen evolution reaction(OER) morphology regulation

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基于创新性内侧壁成型工艺的多光学通道微型碱金属原子气室

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Engineering 2024年第4期35卷 46-55页

作者： Mingzhi Yu Yao Chen Yongliang Wang Xiangguang Han Guoxi Luo Libo Zhao Yanbin Wang Yintao Ma Shun Lu Ping Yang Qijing Lin Kaifei Wang Zhuangde Jiang international Joint Laboratory for Micro/nano manufacturing and Measurement Technologies Xi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green manufacturing Yantai 265503China Moon Environment Technology Co. Ltd.Yantai 264000China Emergency Department The First Affiliated Hospital of Xi’an Jiaotong UniversityXi’an 710061China

Existing microfabricated atomic vapor cells have only one optical channel,which is insufficient for supporting the multiple orthogonal beams required by atomic devices.In this study,we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an innovative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements.Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel.In addition,the construction of an integrated processing platform enables multilayer non-isothermal anode bonding,the filling of inert gases,and the recovery and recycling of noble gases.Measurements of the absorption spectra and free-induction decay signals of xenon-129(^(129)Xe)and xenon-131(^(131)Xe)under different pump-probe schemes demonstrate the suitability of our vapor cell for use in atomic devices including atomic gyroscopes,dual-beam atomic magnetometers,and other optical/atomic devices.The proposed micromolding technology has broad application prospects in the field of optical-device processing.

关键词： Microfabricated atomic vapor cells Inner-sidewall molding Multiple optical channels Quantum sensing

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Oxygen vacancy boosting Fenton reaction in bone scaffold towards fighting bacterial infection

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international Journal of Extreme manufacturing 2024年第1期6卷 296-311页

作者： Cijun Shuai Xiaoxin Shi Feng Yang Haifeng Tian Pei Feng State Key Laboratory of Precision manufacturing for Extreme Service Performance College of Mechanical and Electrical EngineeringCentral South UniversityChangsha 410083People’s Republic of China Institute of Additive manufacturing Jiangxi University of Science and TechnologyNanchang 330013People’s Republic of China College of Mechanical Engineering Xinjiang UniversityUrumqi 830017People’s Republic of China

Bacterial infection is a major issue after artificial bone transplantation due to the absence of antibacterial function of bone scaffold,which seriously causes the transplant failure and even amputation in severe cases.In this study,oxygen vacancy(OV)defects Fe-doped Ti O2(OV-FeTiO2)nanoparticles were synthesized by nano TiO2and Fe3O4via high-energy ball milling,which was then incorporated into polycaprolactone/polyglycolic acid(PCLGA)biodegradable polymer matrix to construct composite bone scaffold with good antibacterial activities by selective laser sintering.The results indicated that OV defects were introduced into the core/shell-structured OV-FeTiO2nanoparticles through multiple welding and breaking during the high-energy ball milling,which facilitated the adsorption of hydrogen peroxide(H2O2)in the bacterial infection microenvironment at the bone transplant site.The accumulated H2O2could amplify the Fenton reaction efficiency to induce more hydroxyl radicals(·OH),thereby resulting in more bacterial deaths through·OH-mediated oxidative damage.This antibacterial strategy had more effective broad-spectrum antibacterial properties against Gram-negative Escherichia coli(E.coli)and Gram-positive Staphylococcus aureus(S.aureus).In addition,the PCLGA/OV-FeTiO2scaffold possessed mechanical properties that match those of human cancellous bone and good biocompatibility including cell attachment,proliferation and osteogenic differentiation.

关键词： bacterial infection bone scaffold selective laser sintering Fenton reaction antibacterial properties

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Recent progress in bio-inspired macrostructure array materials with special wettability—from surface engineering to functional applications

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international Journal of Extreme manufacturing 2024年第1期6卷 208-256页

作者： Zhongxu Lian Jianhui Zhou Wanfei Ren Faze Chen Jinkai Xu Yanling Tian Huadong Yu School of Mechanical and Aerospace Engineering Jilin UniversityChangchun 130022People’s Republic of China Ministry of Education Key Laboratory for Cross-Scale Micro and nano manufacturing Changchun University of Science and TechnologyChangchun 130022People’s Republic of China College of Mechanical and Electrical Engineering Changchun University of Science and TechnologyChangchun 130022People’s Republic of China School of Mechanical Engineering Tianjin UniversityTianjin 300350People’s Republic of China School of Engineering University of WarwickCoventry CV47ALUnited Kingdom

Bio-inspired macrostructure array(MAA,size:submillimeter to millimeter scale)materials with special wettability(MAAMs-SW)have attracted significant research attention due to their outstanding performance in many applications,including oil repellency,liquid/droplet manipulation,anti-icing,heat transfer,water collection,and oil–water separation.In this review,we focus on recent developments in the theory,design,fabrication,and application of bio-inspired MAAMs-SW.We first review the history of the basic theory of special wettability and discuss representative structures and corresponding functions of some biological surfaces,thus setting the stage for the design and fabrication of bio-inspired MAAMs-SW.We then summarize the fabrication methods of special wetting MAAs in terms of three categories:additive manufacturing,subtractive manufacturing,and formative manufacturing,as well as their diverse functional applications,providing insights into the development of these MAAMs-SW.Finally,the challenges and directions of future research on bio-inspired MAAMs-SW are briefy addressed.Worldwide efforts,progress,and breakthroughs from surface engineering to functional applications elaborated herein will promote the practical application of bio-inspired MAAMs-SW.

关键词： macrostructure arrays superhydrophobic 3D printing laser droplet manipulation

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