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Performance improvements in complementary metal oxide semiconductor devices and circuits based on fin field-effect transistors using 3-nm ferroelectric Hf0.5Zr0.5O2

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rare Metals 2024年第7期43卷 3242-3249页

作者： Zhao-Hao Zhang Yan-Na Luo Gao-Bo Xu Jia-Xin Yao Zhen-Hua Wu Hong-Bin Zhao Qing-Zhu Zhang Hua-Xiang Yin Jun Luo Wen-Wu Wang Hai-Ling Tu integrated circuit advanced r&d center Institute of Microelectronics of Chinese Academy of Sciences School of integrated circuits University of Chinese Academy of Sciences State Key Laboratory of advanced Materials for Smart Sensing General Research Institute for Nonferrous Metals

In this work,a conventional HfO2gate dielectric layer is replaced with a 3-nm ferroelectric（Fe） HZO layer in the gate stacks of advanced fin field-effect transistors（FinFETs）.Fe-induced characteristics,e.g.,negative drain induced barrier lowering（N-dIBL） and negative differential resistance（Ndr）,are clearly observed for both p-and n-type HZO-based *** characteristics are attributed to the enhanced ferroelectricity of the 3-nm hafnium zirconium oxide（HZO） film,caused by Al doping from the TiAlC capping *** mechanism is verified for capacitors with structures similar to the *** to the enhanced ferroelectricity and N-dIBL phenomenon,the drain current(IdS)of the HZO-FinFETs is greater than that of HfO2-FinFETs and obtained at a lower operating ***,circuits based on HZO-FinFET achieve higher performance than those based on HfO2-FinFET at a low voltage drain(Vdd),which indicates the application feasibility of the HZO-FinFETs in the ultralow power integrated circuits.

关键词： FinFET Ferroelectric Hafnium zirconium oxide Subthreshold swing Low power

Effects of the VGS sweep range on the short channel effect in negative capacitance FinFETs

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Science China(Information Sciences) 2024年第6期 463-464页

作者： Fan ZHANG Zhaohao ZHANG Jiaxin YAO Qingzhu ZHANG Gaobo XU Zhenhua WU Huan LIU Genquan HAN Yan LIU Huaxiang YIN integrated circuit advanced process r&d center State Key Lab of Fabrication Technologies for Integrated CircuitsInstitute of Microelectronics of Chinese Academy of Sciences School of Microelectronics Xidian University School of integrated circuits University of Chinese Academy of Sciences

As the CMOS technology scaling is reaching fundamental limits,there is a substantial demand for energy-efficient devices with lower operating *** capacitance field-effect transistors （NCFETs） exhibit the capability to amplify the gate voltage and become promising candidates for future advanced process *** （FE） HfO2-based materials,

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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwono Youngjun Lee Jiwoong Kim Jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment r&d Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea process development department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea process development department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(Cd)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCd)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of drAM cell blocks,areas previously challenging to inspect with conventional OCd *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3d structures of semiconductor devices.

关键词： metrology resolution enable

Three-channel CMOS transimpedance amplifier for LidAr sensor receiver

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Journal of Systems Engineering and Electronics 2024年第1期35卷 74-80页

作者： LIU ruqing ZHU Jingguo JIANG Yan LI Feng JIANG Chenghao MENG Zhe Photoelectric r&d center Academy of Opto-ElectronicsChinese Academy of SciencesBeijing 100094China

For time-of-flight(TOF)light detection and ranging(LidAr),a three-channel high-performance transimpedance amplifier(TIA)with high immunity to input load capacitance is presented.A regulated cascade(rGC)as the input stage is at the core of the complementary metal oxide semiconductor(CMOS)circuit chip,giving it more immunity to input photodiode detectors.A simple smart output interface acting as a feedback structure,which is rarely found in other designs,reduces the chip size and power consumption *** circuit is designed using a 0.5μm CMOS process technology to achieve low *** device delivers a 33.87 dB?transimpedance gain at 350 *** a higher input load capacitance,it shows a-3 dB bandwidth of 461 MHz,indicating a better detector tolerance at the front end of the *** a 3.3 V supply voltage,the device consumes 5.2 mW,and the total chip area with three channels is 402.8×597.0μm2(including the test pads).

关键词： transimpedance amplifier(TIA) three-channel regulated cascade(rGC) light detection and ranging(LidAr)

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Microstructure evolution and phase transformation of the mushy zone in a quenchedβ-solidifying TiAl alloy

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Journal of Materials Science & Technology 2024年第2期169卷 28-41页

作者： Fuqiang Zhang Xianfei ding Leming Xu Xin Feng Hai Nan Jianping He Yongfeng Liang Junpin Lin State Key Laboratory for advanced Metals and Materials University of Science and Technology BeijingBeijing 100083China Cast Titanium Alloy r&d center Beijing Institute of Aeronautical MaterialsBeijing 100095China

This study investigates the phase constitutions and transformations that occur in the mushy zone and in the adjacent phase fields of a directionally solidified Ti-44Al-8Nb-1Cr alloy via quenching *** results indicate that the mushy zone consists of unmeltedβdendrites and interdendritic liquid,whose formation can be attributed to the difference in melting point aroused by local heterogeneity in ***βdendrite is composed of numerous subgrains with various *** quenching,theβdendrite transforms into Widmanstättenαvia a precipitation reaction,owing to the decreasing cooling rate caused by heat transfer from the surrounding ***,after quenching,the interdendritic liquid is transformed intoγ*** the singleβphase field and the lower part of the mushy zone,a massive transformation ofβtoγ***,in theβ+αphase field,bothβandαphases are retained to ambient *** the heating process,the transformation ofα→βgives rise to the formation ofβvariants,which affects the orientation ofβdendrites in the mushy *** growth kinematics of theα→βtransformation was elucidated,revealing the preferential growth directions of111and112forβ***,this study presents an illustration of the formation process of the mushy zone and the microstructural evolution during the heating and quenching process.

关键词： Titanium aluminides Mushy zone Quenching Electron backscattering diffraction Phase transformation

A new type of lipophilic hydrophobic self-repairing cellulose insulating paper developed with ST-110/FAS/PTFE ternary system as coating substrate

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High Voltage 2024年第2期9卷 474-483页

作者： Zhenglin Zeng Jinshan Qin Zuhao Wang Weimin Tan Chao Tang College of Engineering and Technology Southwest UniversityChongqingChina International r&d center for New Technologies of Smart Grid and Equipment ChongqingChina

The moisture generated by the ageing of the oil-paper insulating system can easily lead to the deterioration of the performance of the insulating *** order to alleviate the impact of moisture on the performance of the insulating paper,we developed a kind of lipophilic hydrophobic self-repairing cellulose insulating paper(new insulating paper)based on the ternary system of polytetrafluoroethylene,fluorocarbon surfactant and fluorinated alkyl silane,and accelerated thermal ageing test for 45 days at 130°C was carried *** experimental results show that the new insulating paper with excellent lipophilic property can realise hydrophobic self-repairing through heat treatment after physical *** tensile strength and elongation at break of the new insulating paper increased by 5%–8%and 6.25%–27%respectively compared with the original cellulose insulating *** the end of ageing,the relative dielectric constant and dielectric loss factor of new insulating paper are 10.4%and 9.9%lower than that of the original cel-lulose insulating paper,while the breakdown voltage is 6.8%*** acid and moisture content produced during the ageing process of the insulating oil impregnated with new insulating paper are also less,indicating that the coating can delay the ageing of the insulating paper.

关键词： coating moisture cellulose

Effect of CO_(2)flooding in an oil reservoir with strong bottom-water drive in the Tahe Oilfield,Tarim Basin,Northwest China

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Energy Geoscience 2024年第1期5卷 230-233页

作者： Li Zhang Haiying Liao Maolei Cui r&d center of Sustainable development of Continental Sandstone Mature Oilfield Beijing100083China Petroleum Exploration and Production research Institute SinopecBeijing100083China

The dissolution and diffusion of CO_(2)in oil and water and its displacement mechanism were investigated by laboratory experiment and numerical simulation for Block 9 in the Tahe oilfield,a sandstone oil reservoir with strong bottom-water drive in Tarim Basin,Northwest *** parameters were analyzed as solubility ratio of CO_(2)in oil,gas and water,interfacial tension,in-situ oil viscosity distribution,remaining oil saturation distribution,and oil *** results show that CO_(2)flooding could control water coning and increase oil *** the early stage of the injection process,CO_(2)expanded vertically due to gravity differentiation,and extended laterally under the action of strong bottom water in the intermediate and late *** CO_(2)got enriched and extended at the oil-water interface,forming a high interfacial tension zone,which inhibited the coning of bottom water to some extent.A miscible region with low interfacial tension formed at the gas injection front,which reduced the in-situ oil viscosity by about 50%.The numerical simulation results show that enhanced oil recovery(EOr)is estimated at 5.72%and the oil exchange ratio of CO_(2)is 0.17 t/t.

关键词： Strong bottom-water drive reservoir CO_(2)flooding Enhanced oil recovery Coning of bottom water Tahe oilfield Tarim Basin Northwest China

Case retrieval Strategy of Turning process Based on Grey relational Analysis

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Computer Modeling in Engineering & Sciences 2024年第2期138卷 1663-1678页

作者： Jianfeng Zhao Yunliang Huo Ji Xiong Junbo Liu Zhixing Guo Qingxian Li School of Mechanical Engineering Sichuan UniversityChengdu610065China Sichuan Engineering Technology research center of Intelligent design and Service for Cutting Tools Yibin R&D Park of Sichuan UniversityYibin644000China department of r&d Pengxi Heye High-Tech Co.Ltd.Suining629000China

To solve the problem of long response time when users obtain suitable cutting parameters through the Internet based platform,a case-based reasoning framework is ***,a Hamming distance and Euclidean distance combined method is designed to measure the similarity of case features which have both numeric and category *** addition,AHP(Analytic Hierarchy process)and entropy weight method are integrated to provide features weight,where both user preferences and comprehensive impact of the index have been *** relation analysis is used to obtain the similarity of a new problem and alternative ***,a platform is also developed on Visual Studio 2015,and a case study is demonstrated to verify the practicality and efficiency of the proposed *** method can obtain cutting parameters which is suitable without iterative *** with the traditional PSO(Particle swarm optimization algorithm)and GA(Genetic algorithm),it can obtain faster response *** method can provide ideas for selecting processing parameters in industrial *** guaranteeing the characteristic information is similar,this approach can select processing parameters which is the most appropriate for the production process and a lot of time can be saved.

关键词： CBr turning process grey relation AHP entropy weight

Improving lipid production by rhodotorula glutinis for renewable fuel production based on machine learning

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Frontiers of Chemical Science and Engineering 2024年第5期18卷 23-35页

作者： Lihe Zhang Changwei Zhang Xi Zhao Changliu He Xu Zhang National Energy r&d center for Biorefinery Beijing University of Chemical TechnologyBeijing 100029China Collage of Life Science and Technology Beijing University of Chemical TechnologyBeijing 100029China Beijing Key Laboratory of Bioprocess Beijing University of Chemical TechnologyBeijing 10029China

Microbial lipid fermentation encompasses intricate complex cell growth processes and heavily relies on expert experience for optimal *** modeling of the fermentation process assists researchers in making intelligent decisions,employing logical reasoning and strategic planning to optimize lipid *** this study,the effects of medium components and concen-trations on lipid fermentation were investigated,*** then,leveraging the collated data,a variety of machine learning algorithms were used to model and optimize the lipid fermentation *** models,based on artificial neural networks and support vector machines,achieved r?values all higher than 0.93,ensuring accurate predictions of the fermentation *** linear regression was used to evaluate the respective target parameter,which were affected by the medium components of lipid ***,single and multi-objective optimiza-tion were conducted for lipid fermentation using the genetic *** results demonstrated the maximum biomass of 50.3 g·L^(-1) and maximum lipid concentration of 14.1 g:L^(-1) with the error between the experimental and predicted values less than 5%.The results of the multi-objective optimization reveal the synergistic and competitive relationship between biomass,lipid concentration,and conversion rate,which lay a basis for in-depth optimization and amplification.

关键词： microbial lipid machine learning artificial neural network support vector machine genetic algorithm