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Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

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Microsystems & Nanoengineering 2023年第2期9卷 1-22页

作者： Zihao Dong Qipei He Dawei Shen Zheng Gong Deyuan Zhang Wenqiang Zhang Takahito Ono Yonggang Jiang institute of bionic and micronano systems School of Mechanical Engineering and AutomationBeihang UniversityBeijing 100191China College of Engineering China Agricultural UniversityBejing 100083China Graduate School of Engineering Tohoku University6-6-01 Aramaki-Aza-AobaAoba-kuSendai980-8579Japan

Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties,including high thermal stability,mechanical strength,and chemical resistance *** the past decade,rapid progress has been made in the microfabrication of ***,enabling technologies,such as laser-induced graphene on polyimide,photosensitive polyimide micropatterning,and 3D polyimide microstructure assembly,have not been reviewed from the perspective of polyimide *** aims of this review are to systematically discuss polyimide microfabrication techniques,which cover flm formation,material conversion,micropatterning,3D microfabrication,and their *** an emphasis on polyimide-based flexible MEMS devices,we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.

关键词： field polyimide fabrication

Hydrodynamic Perception Using an Artificial Lateral Line Device with an Optimized Constriction Canal

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Journal of bionic Engineering 2020年第5期17卷 909-919页

作者： Zhiqiang Ma Yonggang Jiang Zihao Dong Zhiwu Han Deyuan Zhang institute of bionic and Micro-Nano systems School of Mechanical Engineering and AutomationBeihang UniversityBeijing 100191China Key Laboratory for bionic Engineering Ministry of EducationJilin UniversityChangchun 130022China Beijing Advanced Innovation Center for Biomedical Engineering Beihang UniversityBeijing 100191China

To perform flow-related behaviors in darkness,blind cavefish have evolved Lateral Line systems(LLSs)with constriction canals to enhance hydrodynamic sensing *** the design principles,we developed a Canal-type Artificial Lateral Line(CALL)device featuring a biomimetic constriction *** hydrodynamic characterization results revealed that the sensitivity of the canal LLS increases with the decrease in the width(from 1 mm to 0.6 mm)and length(from 3 mm to 1 mm)of the constriction canal,which is in accordance with the modeling results of canal *** CALL device was characterized in Kármán vortex streets generated by a cylinder in a laminar *** CALL device was able to identify the diameter of the cylinder,with a mean identification error of approximately 2.5%.It also demonstrated the identification ability of wake width using the CALL device,indicating the potential for application in hydrodynamic perception.

关键词： lateral line constriction canal biomimetics flow sensor hydrodynamic perception

BTO/P(VDF-TrFE) Nanofiber-based Artificial Lateral Line Sensor with Drag Enhancement Structures

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Journal of bionic Engineering 2020年第1期17卷 64-75页

作者： Zhiqiang Ma Yuanhang Xu Yonggang Jiang Xiaohe Hu Deyuan Zhang institute of bionic and Micro-Nano systems School of Mechanical Engineering and AutomationBeihang UniversityBeijing 100191China Beijing Advanced Innovation Center for Biomedical Engineering Beihang UniversityBeijing 100191China

A flexible Artificial Lateral Line(ALL)sensor is presented in this paper,featuring a barium titanate/polyvinylidene fluoride?trifluoroethylene[BTO/P(VDF?TrFE)]nanofiber mat,a hydrogel cupula,and a constriction structure in the canal..The excellent piezoelectric performance of the BTO/P(VDF-TrFE)nanofiber,superior to that of a pristine P(VDF-TrFE)nanofiber,helps improve the sensitivity of the ALL *** hydrogel cupula imitating the cupula in a fish lateral line system enhances the ALL sensitivity through a material-induced drag enhancement *** constriction mimics the diminution structure found in fish canal lateral line systems,endowing the canal ALL sensor with enhanced sensitivity through a structure-induced drag enhancement *** contributions of the hydrogel cupula and constriction structure in offering an enhanced sensing performance are studied experimentally,in comparison with conventional ALL *** constriction structure in the canal helps modify the frequency response of the canal ALL sensor,i.e.,attenuating low frequencies while amplifying high *** proposed biomimetic flow sensor is expected to aid in the development of smart skins for underwater robotics applications.

关键词： lateral line flow sensor biomimetics piezoelectric nanofiber enhanced perception

Ironing effect on surface integrity and fatigue behavior during ultrasonic peening drilling of Ti-6Al-4V

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Chinese Journal of Aeronautics 2023年第5期36卷 486-498页

作者： Yihang LIU Deyuan ZHANG Daxi GENG Zhenyu SHAO Zehua ZHOU Zhefei SUN Yonggang JIANG Xinggang JIANG School of Mechanical Engineering and Automation Beihang UniversityBeijing 100191China institute of bionic and Micro-Nano systems Beihang UniversityBeijing 100191China Aerospace Times Feihong Technology Company Limited Beijing 100094China

Imposing compressive residual stress field around a fastening hole serves as a universal method to enhance the hole fatigue strength in the aircraft assembly *** Peening Drilling(UPD)is a recently proposed hybrid hole making process,which can achieve an integration of strengthening and precision-machining with a one-shot-drilling *** to the ironing effect of tool flank surface,UPD introduces large compressive residual stress filed in hole *** order to reveal the strengthening mechanism of UPD,the influence of ultrasonic vibration and tool dynamic relief angle on ironing coverage rate and its corresponding effect on surface integrity in UPD were *** experiments were conducted to verify the influence of ironing effect on surface integrity and fatigue behavior of Ti-6Al-4V hole in *** results indicate that the specimen features smaller surface roughness,higher micro-hardness,plastic deformation degree and circumferential compress residual stress under higher ironing coverage *** fatigue life increases with the raise of ironing coverage rate,and the fatigue source site in UPD shifts from surface to subsurface comparing with that without vibration *** results demonstrates that a better strengthening effect can be obtained by reasonably controlling the ironing coverage rate in UPD.

关键词： Fatigue strength Surface integrity Titanium alloy Tool relief angle Ultrasonic Peening Drilling(UPD)

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Bending Resistance and Anisotropy of Basalt Fibers Laminate Composite with bionic Helical Structure

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Journal of bionic Engineering 2022年第3期19卷 799-815页

作者： Binjie Zhang Qigang Han Hanlin Qin Junqiu Zhang Shichao Niu Zhiwu Han Luquan Ren Key Laboratory of bionic Engineering(Ministry of Education China)Jilin UniversityChangchun130022China College of Materials Science and Engineering Jilin UniversityChangchun130022China Weihai institute for bionic Jilin UniversityWeihai264200China

The appendages of mantis shrimp often bear bending loads from different directions during the in the process of preying on prey with its grazing ***,it has excellent bending resistance and isotropy to confront complex and changeable external *** outstanding performance owes to the helical Bouligand structure with a certain interlayer corner,which is also widely found in other natural ***,the bio-inspired materials with basalt fiber are fabricated with outstanding bending resistance,isotropy and *** research shows laminates with 18°interlayer corners exhibit relatively excellent bending resistance and isotropy,and the laminate with 11.25°interlayer corner has best *** with traditional composites,average bending strength along different loading direction of bio-inspired materials increased by 28%,and anisotropy decreased by 86%.Besides,the maximum toughness of laminates can increase to 1.7 times of the *** the introduction of interlayer corners,the bio-inspired composite tends to be *** explore the reason for the change of the isotropic performance caused by diverse interlayer corners,the Finite Element Analysis based on classical laminate theory and Tsai–Wu and Tsai–Hill failure ***,further experiments and observations are conducted to explore possible *** conclusion,following the introduction of interlayer corners,the bio-inspired composites tend to be *** bio-inspired composites are expected to be applied to various complex modern engineering fields,such as vehicle,rail transit and aerospace.

关键词： Helical Bouligand structure Bio-inspired composites Bending resistance Isotropy

Vector field path following for a micro flapping-wing robot

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Science China(Information Sciences) 2024年第6期67卷 442-444页

作者： Haifeng HUANG Yingte LIU Tao NIU Chang WANG Yao ZOU Wei HE School of Intelligence Science and Technology University of Science and Technology Beijing institute of Artificial Intelligence University of Science and Technology Beijing Key Laboratory of Intelligent bionic Unmanned systems Ministry of EducationUniversity of Science and Technology Beijing

Flapping-wing robots mimic the flight patterns of natural flying creatures,granting them natural *** hold promising applications in the military reconnaissance,urban surveillance,and various other fields[1–3].However... 详细信息

关键词： micro vector robot field path flapping-wing following

Chatter stability and precision during high-speed ultrasonic vibration cutting of a thin-walled titanium cylinder

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Chinese Journal of Aeronautics 2020年第12期33卷 3535-3549页

作者： Zhenlong PENG Deyuan ZHANG Xiangyu ZHANG School of Mechanical Engineering and Automation Beihang UniversityBeijing 100083China institute of bionic and Micro-Nano systems Beihang UniversityBeijing 100083China Beijing Advanced Innovation Center for Biomedical Engineering Beihang UniversityBeijing 100083China

Titanium alloys are widely used in the aviation and aerospace industries due to their unique mechanical and physical ***,thin-walled titanium(Ti)cylinders have received increasing attention for their applications as rocket engine casings,aircraft landing gear,and aero-engine hollow shaft due to their observed improvement in the thrust-to-weight ***,the conventional cutting(CC)process is not appropriate for thin-walled Ti cylinders due to its low thermal conductivity,high strength,and low ***,high-speed ultrasonic vibration cutting(HUVC)assisted processing has recently proved highly effective for Ti-alloy *** this study,HUVC technology is employed to perform external turning of a thinwalled Ti cylinder,which represents a new application of ***,the kinematics,tool path,and dynamic cutting thickness of HUVC are ***,the phenomenon of mode-coupling chatter is analyzed to determine the effects and mechanism of HUVC by establishing a critical cutting thickness *** can increase the critical cutting thickness and effectively reduce the average cutting force,thus reducing the energy intake of the ***,comparison experiments are conducted between HUVC and CC *** results indicate that the diameter error rate is 10%or less for HUVC and 51%for the CC method due to a 40%reduction in the cutting *** addition,higher machining precision and better surface roughness are achieved during thin-walled Ti cylinder manufacturing using HUVC.

关键词： High-speed machining Minimum chip thickness Mode-coupling Thin-walled cylinder Ultrasonic vibration cutting

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Exquisite structure of the lateral line system in eyeless cavefish Sinocyclocheilus tianlinensis contrast to eyed Sinocyclocheilus macrophthalmus(Cypriniformes:Cyprinidae)

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Integrative Zoology 2020年第4期15卷 314-328页

作者： Zhiqiang MA Hendrik HERZOG Yonggang JIANG Yahui ZHAO Deyuan ZHANG institute of bionic and Micro-Nano systems Beihang UniversityBeijingChina institute of Zoology University of BonnBonnGermany Key Laboratory of Zoological Systematics and Evolution Institute of ZoologyChinese Academy of SciencesBeijingChina Beijing Advanced Innovation Center for Biomedical Engineering Beihang UniversityBeijingChina

In this study,the lateral line systems in Chinese cavefish eyeless Sinocyclocheilus tianlinensis and eyed Sinocyclocheilus macrophthalmus were investigated to reveal their morphological changes to survive in harsh environ*** with the eyed cavefish ***(atypical),the lateral line system in the eyeless cave-fish ***(typical)has certain features to adapt to the dark cave environments:the superficial lateral line system in the eyeless species possesses a higher number of superficial neuromasts and more hair cells within an individual neuromast,and the trunk lateral line canal system in *** exhibits larger canal pores,higher canal diameter and more pronounced ***–structure interaction analysis suggested that the trunk lateral line canal system in the eyeless *** should be more sensitive than that in the eyed ****** morphological features of the lateral line system in the eyeless *** probably enhance the functioning of the lateral line system and compensate for the lack of *** revelation of the form–function relationship in the cavefish lateral line system provides inspiration for the design of sensitive artificial flow sensors.

关键词： cavefish flow sensor form-function lateral line neuromast

Effects of bionic non-smooth surface on reducing soil resistance to disc ploughing

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Science China(Technological Sciences) 2010年第11期53卷 2960-2965页

作者： CHIRENDE Benard SIMALENGA Timothy Emmanuel Key Laboratory for bionic Engineering of Ministry of Education of China Jilin University Agricultural Research Council Institute for Agricultural Engineering(South Africa)

Past researches have shown that the non-smooth body surfaces of soil burrowing animals help to reduce soil resistance. In this research, this concept of bionic non-smooth surface was applied to disc ploughs and an experiment was conducted in an indoor soil bin to find out the effects of different bionic units on reducing soil resistance to disc ploughing. Horizontal force acting on the disc plough during soil deformation was measured using a 5 kN sensor. Convex and concave bionic units were used and the material used for making convex ones is ultra high molecular weight polyethylene (UHMWPE) which is hydrophobic. From the experiment results, higher or deeper bionic units always resulted in less soil resistance. Convex bionic units gave the highest resistance reduction reaching a maximum of 19% reduction (from 1715.36 N to 1383.65 N) compared to concave bi-onic units. Also, samples with a bionic unit density of 30% gave the highest resistance reduction compared to the other two, which were either plain or had 10% density. In conclusion, the concept of bionic non-smooth units can be applied to disc ploughs in order to reduce soil resistance.

关键词： bionics disc plough soil resistance convex units concave units non-smooth surface

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