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Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

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IEEE/CAA Journal of Automatica Sinica 2025年第1期 198-214页

作者： Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan IEEE the Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology the State Key Laboratory of Precision Electronic Manufacturing technology and equipment Guangdong University of Technology the Center of Ultraprecision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of UltraPrecision Intelligent Instrumentation Ministry of Industry and Information Technology the Department of Electronic and Information Systems Shibaura Institute of Technology

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread application of iterative learning control(ILC), given the repetitive nature of wafer scanning. ILC enables substantial performance improvement by using past measurement data in combination with the system model knowledge. However, challenges arise in cases where the data is contaminated by the stochastic noise, or when the system model exhibits significant uncertainties, constraining the achievable performance. In response to this issue, an extended state observer(ESO) based adaptive ILC approach is proposed in the frequency *** being model-based, it utilizes only a rough system model and then compensates for the resulting model uncertainties using an ESO, thereby achieving high robustness against uncertainties with minimal modeling effort. Additionally, an adaptive learning law is developed to mitigate the limited performance in the presence of stochastic noise, yielding high convergence accuracy yet without compromising convergence speed. Simulation and experimental comparisons with existing model-based and data-driven inversion-based ILC validate the effectiveness as well as the superiority of the proposed method.

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Atomistic evaluation of tension–compression asymmetry in nanoscale body-centered-cubic AlCrFeCoNi high-entropy alloy

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Chinese Physics B 2024年第1期33卷 613-622页

作者：邢润龙刘雪鹏 Anhui Province Key Laboratory of Aerospace Structural Parts Forming technology and equipment Institute of Industry and Equipment TechnologyHefei University of TechnologyHefei 230009China

The tension and compression of face-centered-cubic high-entropy alloy(HEA) nanowires are significantly asymmetric, but the tension–compression asymmetry in nanoscale body-centered-cubic(BCC) HEAs is still unclear. In this study,the tension–compression asymmetry of the BCC Al Cr Fe Co Ni HEA nanowire is investigated using molecular dynamics simulations. The results show a significant asymmetry in both the yield and flow stresses, with BCC HEA nanowire stronger under compression than under tension. The strength asymmetry originates from the completely different deformation mechanisms in tension and compression. In compression, atomic amorphization dominates plastic deformation and contributes to the strengthening, while in tension, deformation twinning prevails and weakens the HEA *** tension–compression asymmetry exhibits a clear trend of increasing with the increasing nanowire cross-sectional edge length and decreasing temperature. In particular, the compressive strengths along the [001] and [111] crystallographic orientations are stronger than the tensile counterparts, while the [110] crystallographic orientation shows the exactly opposite trend. The dependences of tension–compression asymmetry on the cross-sectional edge length, crystallographic orientation,and temperature are explained in terms of the deformation behavior of HEA nanowire as well as its variations caused by the change in these influential factors. These findings may deepen our understanding of the tension–compression asymmetry of the BCC HEA nanowires.

关键词： high-entropy alloys body-centered-cubic nanowire tension–compression asymmetry atomistic simulations

Effects of carbon content on the microstructure and tensile properties of a low-density steel

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International Journal of Minerals,Metallurgy and Materials 2025年第2期32卷 391-401页

作者： Yongxuan Shang Mingyu Fan Shuyong Jiang Zhongwu Zhang Key Laboratory of Superlight Materials and Surface technology Ministry of EducationCollege of Materials Science and Chemical EngineeringHarbin Engineering UniversityHarbin 150001China State Key Laboratory of Metal Material for Marine equipment and Application Iron&Steel Research Institute of Ansteel Group CorporationAnshan 114009China

Carbon can change the phase components of low-density steels and influence the mechanical *** this study,a new method to control the carbon content and avoid the formation ofδ-ferrite by decarburization treatment was *** microstructural changes and mechanical characteristics with carbon content induced by decarburization were systematically ***-Jaoul(C-J)analysis was employed to examine the work hardening characteristics during the tensile *** decarburization by heat treatments,the carbon content within the austenite phase decreased,while Mn and Al were almost unchanged;this made the steel with full austenite transform into the austenite and ferrite dual ***,(Ti,V)C carbides existed in both matrix phase and the mole fraction almost the *** addition,the formation of other carbides *** loss induced a decrease in strength due to the weakening of the carbon solid *** the steel with the single austinite,the deformation mode of austenite was the dislocation planar glide,resulting in the formation of *** the dual-phase steel,the deformation occurred by the dislocation planar glide of austenite first,with the increase in strain,the cross slip of ferrite took place,forming dislocation cells in *** the late stage of deformation,the work hardening of austinite increased rapidly,while that of ferrite increased slightly.

关键词： low-density steels carbon content decarburization strengthening mechanisms work hardening behavior

Short-term Scheduling of Steam Power System in Iron and Steel industry under Time-of-use Power Price

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Journal of Iron and Steel Research International 2015年第9期22卷 795-803页

作者： Yu-jiao ZENG Yan-guang SUN State Key Laboratory of Hybrid Process industry Automation System and equipment technology Automation Research and Design Institute of Metallurgical Industry

A generalized formulation for short-term scheduling of steam power system in iron and steel industry under the time-of-use（TOU）power price was presented,with minimization of total operational cost including fuel cost,equipment maintenance cost and the charge of exchange power with main *** model took into account the varying nature of surplus byproduct gas flows,several practical technical constraints and the impact of TOU power *** major types of utility equipments,involving boilers,steam turbines,combined heat and power（CHP）units,and waste heat and energy recovery generators（WHERG）,were separately modeled using thermodynamic balance equations and regression *** order to solve this complex nonlinear optimization model,a new improved particle swarm optimization（IPSO）algorithm was proposed by incorporating time-variant parameters,a selfadaptive mutation scheme and efficient constraint handling ***,a case study for a real industrial example was used for illustrating the model and validating the effectiveness of the proposed approach.

关键词： short-term optimization byproduct gas distribution steam and power dispatch CHP iron and steel industry time-of-use power price

Experimental evaluation and modeling of liquid jet penetration to estimate droplet size in a three-phase riser reactor

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Chinese Journal of Chemical Engineering 2016年第2期24卷 293-309页

作者： Ali Akbar Jamali Shahrokh Shahhosseini Yaghoub Behjat School of Chemical Engineering Iran University of Science and Technology (IUST) Process Development and equipment technology Division Research Institute of Petroleum Industry

In this work, the effects of injecting an evaporating liquid jet into solid-gas flow are experimentally investigated. A new model （SHED model） and a supplementary model （spray model） have also been proposed to investigate some flow-field characteristics in three-phase fluidized bed with the mean relative error 4.3% between model and measured results. Some experiments were conducted to study the influences of flow-field parameters such as liquid volumetric flow rate, injection velocity, jet angle and gas superficial velocity as well as solid mass flux on the jet penetration depth （JPD）. In addition, independent variables were experimentally employed to propose two empirical correlations for JPD by using multiple regression method and spray cone angle （SCA） by using dimensional analysis technique. The mean relative errors between the JPD and SCA correlations versus ex- perimental data were 7.5% and 3.9%, respectively. In addition, in order to identify the variable effect, a parametric study was carried out. Applying the proposed model can avoid direct use of expensive devices to measureJPD and to nredict dronlet size.

关键词： FC-C riser reactor Hydrod ynamics Heterogeneous vaporization Jet penetration depth (JPD) Spray cone angle (SCA)

Boosting Photocatalytic Performance of Cu-Mn Co-doped CeO2 Nanoparticles for Tetracycline Degradation

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Journal of Wuhan University of technology(Materials Science) 2025年第1期 42-48页

作者：徐荣琪 MI Jianxin 王树林徐慢 ZHU Li BAI Lei TANG Dandan LEI Yu Engineering Research Center of Environmental Materials and Membrane technology of Hubei Province School of Materials Science and Engineering Wuhan Institute of Technology Shaanxi Coal Chemical industry technology Research institute Co. Ltd.

Cu-Mn co-doped CeO2photocatalyst was successfully synthesized by the sol-gel method to assess its capability in degrading *** and TEM results showed that Cu and Mn were successfully co-doped into CeO2without forming heterostructure,XPS and photoelectrochemical results revealed that Mn ions doping amplified the generation of photo-induced charge carriers,while Cu ions doping significantly facilitated the interfacial charge transfer ***,the optimized Cu3Mn2CeO2nanoparticles exhibited the highest TC removal efficiency,achieved a rate of 78.18% and maintained a stable cycling performance.

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CFD simulation of gas-solid flow patterns in a downscaled combustor-style FCC regenerator

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Particuology 2018年第4期16卷 96-108页

作者： Abbas Azarnivand Yaghoub Behjat Ali Akbar Safekordi Department of Chemical and Petroleum Engineering SharifUniversity of Technology Tehran lran Process Development and equipment technology Division Research Institute of Petroleum Industry Tehran Iran

To investigate the gas-solid flow pattern of a combustor-style fluid catalytic cracking regenerator, a laboratory-scale regenerator was designed. In scaling down from an actual regenerator, large-diameter hydrodynamic effects were taken into consideration. These considerations are the novelties of the present study. Applying the Eulerian-Eulerian approach, a three-dimensional computational fluid dynamics （CFD） model of the regenerator was developed. Using this model, various aspects of the hydrodynamic behavior that are potentially effective in catalyst regeneration were investigated. The CFD simulation results show that at various sections the gas-solid flow patterns exhibit different behavior because of the asymmetric location of the catalyst inlets and the lift outlets. The ratio of the recirculated catalyst to spent catalyst determines the quality of the spent and recirculated catalyst mixing and distribution because the location and quality of vortices change in the lower part of the combustor. The simulation results show that recirculated catalyst considerably reduces the air bypass that disperses the catalyst particles widely over the cross section. Decreasing the velocity of superficial air produces a complex flow pattern whereas the variation in catalyst mass flux does not alter the flow pattern significantly as the flow is dilute.

关键词： Fluid catalytic cracking Combustor-style regeneratorLarge-diameter fluidized bed Hydrodynamics Gas-solid flow patternRecirculated catalyst

Multi-receptive field interaction network for shape from polarization

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Science China(Information Sciences) 2025年第1期 394-395页

作者： Yini PENG Rui LIU Zhiyuan ZHANG Zhongyuan WANG Jiayi MA Xin TIAN Electronic Information School Wuhan University Computer Science School Wuhan University Wuhan institute of Quantum technology

Shape from polarization (SfP) method can use the polarization information in reflected light to estimate the surface normal of the target,which can further reconstruct the shape of the *** a simple image capture process,it can use low-cost equipment to meet a high precision imaging requirement,which can be used in remote scenes and other applications.

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Dried bonito flakes-inspired moisture-responsive actuator with a gradient structure for smart devices

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Journal of Materials Science & technology 2023年第36期167卷 152-160页

作者： Zhong Chen Qingyu Peng Ying Hu Zonglin Liu Xu Zhao Pengyang Li Liangliang Xu Haowen Zheng Fuhua Xue Renjie Ding Xiaodong He National Key Laboratory of Science and technology on Advanced Composites in Special Environments Center for Composite Materials and StructuresHarbin Institute of TechnologyHarbin 150080China institute of industry&equipment technology Hefei University of TechnologyHefei 230009China

Exploring high-performance soft actuators from biomass resources is significant for developing eco-friendly smart *** bonito(DB)flake is a common food as well as a biomass material,and it can produce irregular motion in changed moisture,just like *** by this intriguing phenomenon,a cost-effective,biocom patible,and biodegradable moisture-responsive DB film actuator with a gradient structure is *** DB film actuator exhibits rapid and reversible bending deformation triggered by a humidity gradient with a high bending speed(40°s-1)and a maximum bending angle(180°).More-over,the DB film actuator shows large bending deformation(-71°to+51°)with a high actuation force(214.7 Pa)in response to changes in relative ***,the actuation performance can be also tuned by adjusting the thickness of the *** applications of this actuator,including smart grippers,crawling robots,and biomimetic flowers for visible humidity sensing,are *** importantly,smart sweat-responsive wearables that automatically deform to promote sweat evaporation and convection during exercise are constructed based on the actuator,making it promising for adaptive personal thermal *** work offers an easily processable,cost-effective,and environmentally benign strategy to construct moisture-responsive actuators for future eco-friendly smart devices.

关键词： Moisture-responsive Dried bonito flakes Actuators Smart wearables Soft robots