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Tip-and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Nanomanufacturing and Metrology 2021年第3期4卷 132-148页

作者： Ingo Ortlepp Thomas Frohlich Roland FuBl Johann Reger Christoph Schaffel Stefan Sinzinger Steffen Strehle ReneTheska Lena Zentner Jens-Peter Zollner Ivo WRangelow Carsten Reinhardt Tino Hausotte Xinrui Cao Oliver Dannberg Florian Fern David Fischer Stephan Gorges Martin Hofmann Johannes Kirchner Andreas Meister Taras Sasiuk Ralf Schienbein Shraddha Supreeti Laura Mohr-Weidenfeller Christoph Weise Christoph Reuter Jaqueline Stauffenberg Eberhard Manske Institute of Process Measurement and Sensor Technology Technische Universitat IlmenauEhrenbergstrasse 2998693 IlmenauGermany Control Engineering Group Technische Universitat IlmenauIlmenauGermany Optical Engineering Group.technische Universitat ilmenau IlmenauGermany Microsystems Technology Group.technische Universitat ilmenau IlmenauGermany Precision Engineering Group.technische Universitat ilmenau IlmenauGermany Compliant Systems Group Technische Universitat IlmenauIlmenauGermany Micro-and Nanoelectronic Systems Group Technische Universitat IlmenauIlmenauGermany Nanoscale Systems Group.technische Universitat ilmenau IlmenauGermany Division for Research Service and Technology Transfer Technische Universitat IlmenauIlmenauGermany Electronics Technology Group.technische Universitat ilmenau IlmenauGermany IMMS Institut flir Mikroelektronik-und Mechatronik-Systeme Gemeinniitzige gmbh(IMMS gmbh) IlmenauGermany Fachgebiet technische Physik City University of Applied SciencesBremenGermany Lehrstuhl fiir Fertigungsmesstechnik Friedrich-Alexander-U niversitat(FAU)Erlangen-NiirnbergGermany JUMO gmbh&Co.KG FuldaGermany Asphericon gmbh JenaGermany

The field of optical lithography is subject to intense research and has gained enormous ***,the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional *** effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable:custom design and solutions for specific applications will dominate future development(Fritze in:Panning EM,Liddle JA(eds)Novel patterning *** society for optics and ***,Bellingham,***://***/10.1117/12.2593229).For this reason,new aspects arise for future lithography,which is why enormous effort has been directed to the development of alternative fabrication ***,the technologies emerging from this process,which are promising for coping with the current resolution and accuracy challenges,are only demonstrated as a proof-of-concept on a lab scale of several square *** scale is not adequate for the requirements of modern lithography;therefore,there is the need for new and alternative cross-scale solutions to further advance the possibilities of unconventional *** challenges arise because of the technical progress in various other fields,realizing new and unique functionalities based on nanoscale effects,e.g.,in nanophotonics,quantum computing,energy harvesting,and life *** platforms for basic research in the field of scale-spanning nanomeasuring and nanofabrication are necessary for these tasks,which are available at the technische Universitiit ilmenau in the form of nanopositioning and nanomeasuring(NPM)*** this equipment,the limits of technical structurability are explored for high-performance tip-based and laser-based processes for enabling real 3D nanofabrication with the highest precision in an adequate working range of several thousand cubic millimete

关键词： Nanomeasuring Nanopositioning Nanomanufacturing Scale-spanning Tip-based Laser-based Nanofabrication

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Electromagnetic Processing of Materials at the Department Inorganic-Nonmetallic Materials

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Journal of Iron and Steel Research International 2012年第S1期19卷 135-140页

作者： HALBEDEL Bernd KRIEGER Uwe WERNER Michael TORRES Jose Oskar SCHADEWALD Uwe QUIROZ Pamela ilmenau University of Technology P.O. 100565D-98684 IlmenauGermany ilmenau technische glaswerke ilmenau gmbh Am Vogelherd 7D-98684 IlmenauGermany

This paper illustrates an overview of current research activities in the working group 'Electromagnetic Processing of Materials' of the department Inorganic-Nonmetallic *** are 'Electromagnetic module to flow impact in special melting plants for the production of High-tech glasses', 'Numerical study of EM controlled flow in crystallizers of inorganic materials', 'Design,test and optimization of sophisticated magnet systems for Lorentz force velocimetry in electrially low conducting fluids', 'Magnetic ion manipulation in glass melts with Kelvin force', 'Electromechanical dry t'me milling of raw materials' and 'Synthesis,characterization and application of Titatium doped hexaferrites'.The primary results are presented here.

关键词： Lorentz force Kelvin force magnet system glass melt crystallization grinding synthesis hexaferrite

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Highly efficient passive Tesla valves for microfluidic applications

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Microsystems & Nanoengineering 2022年第5期8卷 125-136页

作者： Sebastian Bohm Hai Binh Phi Ayaka Moriyama Erich Runge Steffen Strehle Jörg König Christian Cierpka Lars Dittrich Theoretical Physics I Technische Universität IlmenauWeimarer Straße 2598693 IlmenauGermany Research and Development 5microns GmbHMargarethenstraße 698693 IlmenauGermany Institute of Micro-and Nanotechnologies Gustav-Kirchhoff-Straße 798693 IlmenauGermany Microsystems Engineering Technische Universität IlmenauMax-Planck-Ring 1298693 IlmenauGermany Physics and Astronomy Carleton CollegeOne North CollegeNorthfield 55057 MinnesotaUSA Engineering Thermodynamics Technische Universität IlmenauAm Helmholtzring 198693 IlmenauGermany

A multistage optimization method is developed yielding Tesla valves that are efficient even at low flow rates,characteristic,e.g.,for almost all microfluidic systems,where passive valves have intrinsic advantages over active *** report on optimized structures that show a diodicity of up to 1.8 already at flow rates of 20μl s^(−1) corresponding to a Reynolds number of *** of the design is a topological optimization based on the finite element *** is set-up to yield easy-to-fabricate valve structures with a small footprint that can be directly used in microfluidic *** numerical two-dimensional optimization takes into account the finite height of the channel approximately by means of a so-called shallow-channel *** on the threedimensionally extruded optimized designs,various test structures were fabricated using standard,widely available microsystem manufacturing *** manufacturing process is described in detail since it can be used for the production of similar cost-effective microfluidic *** the experimentally fabricated chips,the efficiency of the different valve designs,i.e.,the diodicity defined as the ratio of the measured pressure drops in backward and forward flow directions,respectively,is measured and compared to theoretical predictions obtained from full 3D calculations of the Tesla *** agreement is *** addition to the direct measurement of the diodicities,the flow profiles in the fabricated test structures are determined using a two-dimensional microscopic particle image velocimetry(μPIV)***,a reasonable good agreement of the measured flow profiles with simulated predictions is observed.

关键词： backward Highly optimization

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Theoretical and Numerical Stability Analysis of the Liquid Metal Pinch Using the Shallow Water Approximation

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Journal of Thermal Science 2008年第3期17卷 261-266页

作者： E. Zienicke Ben-Wen Li A. Thess A. Krazschmar P. Terhoeven Institut fur Physik Technische Universitat Ilmenau PF 100565 D-98684 Ilmenau Germany Key Laboratory of National Education Ministry for Electromagnatic Processing of Materials POB 314 NortheasternUniversity Shenyang 110004 China Fakultat Maschinenbau Technische Universitat Ilmenau PF 100565 D-98684 Ilmenau Germany Moeller gmbh Hein Moeller Str. 7-11 D-53115 Bonn Germany

The pinch instability for a cylindrical jet of liquid metal passed through by an axial electrical current is investigated. Besides the pinch effect originating from surface tension, the Lorentz force, created by the axial current density and the corresponding azimuthal magnetic field, causes an electromagnetic pinch effect. This effect has drawn attention in electrical engineering, because it can be used in the construction of liquid metal current limit- ers with self-healing properties. In this paper a simple model is derived using the shallow water approximation： the equations describing the full system are reduced to two one-dimensional evolution equations for the axial velocity and the radius of the jet. A stability analysis for this reduced system is carried out yielding critical current density and the growth rate for the instability. To investigate the nonlinear behaviour of the pinch instability for finite perturbations simulations, the shallow water model are performed.

关键词： MHD pinch instability analysis electric current limiter numerical simulation Fourier spectralmethod

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Development and Implementation of a Rotating Nanoimprint Lithography Tool for Orthogonal Imprinting on Edges of Curved Surfaces

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Nanomanufacturing and Metrology 2021年第3期4卷 175-180页

作者： Shraddha Supreeti Ralf Schienbein Patrick FeBer Florian Fern Martin Hoffmann Stefan Sinzinger Electronics Technology Group Technical University of IlmenauIlmenauGermany Institute for Design and Precision Engineering Technical University of IlmenauIlmenauGermany Technical Optics Group Technical University of IlmenauIlmenauGermany JUMO gmbh&Co.KG FuldaGermany Microsystems Technology Group Ruhr-University BochumBochum.Germany

Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect of nanoimprint lithography(NIL).This study describes the development of a NIL tool and its integration into a nanopositioning and nanomeasuring machine to achieve high-precision orthogonal molding and demolding for soft ultraviolet-assisted NIL(soft UV-NIL).The process was implemented primarily on the edges of highly curved plano-convex substrates to demonstrate structure uniformity on the ***-resolution nanostructures of sub-200-nm lateral dimension and microstructures in the range of tens of microns were ***,the nanostructures on the edges of the large,curved substrates were difficult to characterize ***,microstructures were used to measure the structure fidelity and were characterized using profilometry,white light interferometry,and confocal laser scanning *** of the restricted imaging capabilities at high inclinations for high-resolution nanostructures,the scanning electron microscope(SEM)imaging of the structures on top of the lens substrate and at an inclination of 45°was *** micro and nanostructures were successfully imprinted on the edges of the plano-convex lens at angles of 45°,60°,and 90°from the center of rotation of the rotating NIL *** method enables precise imprinting at high inclinations,thereby presenting a different approach to soft UV-NIL on curved surfaces.

关键词： Nanoimprint lithography Rotating NIL tool Curved surface Imprinting Nanopositioning

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Estimating the Limits in System Design for 48 V Automotive Power Applications

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Journal of Electrical Engineering 2017年第2期5卷 100-113页

作者： Ulf Schwalbe Marco Schilling Tobias Reimann ISLE gmbh Ilmenau 98693 Germany technische Universitat ilmenau Ilmenau 98693 Germany

The design process in power electronics is driven by increased utilisation level of the used components to gain performance whilst keeping cost low. This article provides an overview on challenges in low-voltage high-current systems, e.g. used in automotive applications. The main content points are： topology selection--single systems vs. cascaded systems, PCB manufacturing technology overview, current measurement methods, bulk capacitor design （ceramic DC link） and PCB design instructions for high-current systems. The PCB design instructions target on optimised thermal design for maximised PCB utilisation and on optimised track design for a low inductance DC link interconnection. The paper bases on calculations, measurements and simulations.

关键词： High current application 48V system DC link optimization PCB optimization current carrying capability

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Controlling and regulation of integrated aquaponic production systems – An approach for a management execution system (MES)

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Information Processing in Agriculture 2019年第3期6卷 326-334页

作者： Olaf Witzel Stefan Wilm Divas Karimanzira Daniela Baganz Automation&Software Gunther Tausch gmbh Bassower Str.217034 NeubrandenburgGermany Gesellschaft fur Informationsverarbeitung Fertigungssteuerung und Qualita tssicherungIFQ GmbH WismarAlter Holzhafen 17a23966 WismarGermany Department of Surface and Maritime Systems Fraunhofer I0SB-ASTIlmenauAm Vogelherd 5098689 IlmenauGermany Department of Biology and Ecology of Fishes Leibniz-Institute of Freshwater Ecology and Inland FisheriesBerlinGermany

Manufacturing execution systems(MESs)play a significant role in the manufacturing *** is there to link between the Enterprise Resource Planning(ERP)systems and the plant equipment control or Supervisory Control and Data Acquisition(SCADA)*** this paper the MES of the INAPRO aquaponics system which was developed to support and advise the aquaponics managers in operating the complex aquaponic farms,will be *** important feature of the INAPRO aquaponics system is to minimize fresh water<3%,energy and nutrient *** can only be achieved by appropriate design of the fish and crop mixture,considering the fish to crop ratio,when to sow the crops *** to monitor the system to see whether it performing as designed or ***,the MES has a view to show the designed system with all the material flow(water,energy and nutrients)balances and also how the system will be performing for a given predictive *** the future developments of the system,the operator can taking corrective measures to make sure that the system is behaving as *** example of water balance of a system with 40 m3 fish tanks coupled with a hydroponic NFT system with 1,000 m2 which can produce five tons of Tilapia and 75 tons of tomato yearly is given.

关键词： Aquaponics Manufacturing execution system Predictive analytics

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带Boost型PFC和单开关DC／DC变流器的优越的1000W AC／DC电源能够替代有多开关拓扑的电源

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电力电子 2005年第3期3卷 53-56页

作者： Dipl.-Ing Ande＇ Müller ISLE gmbh Werner-von-Siemens-Str. 1698693 ilmenau

本文分析了一个由Boost型PFC和前向变流器组成的单开关SMPS的电能容量。由于使用了现代无源和有源设备 (磁性材料,半导体),这种拓扑的电能应用范围延伸到了通常应用多开关拓扑的领域(大约1kW)。文章对现今关于简单SMPS拓扑的限制进行了... 详细信息

本文分析了一个由Boost型PFC和前向变流器组成的单开关SMPS的电能容量。由于使用了现代无源和有源设备 (磁性材料,半导体),这种拓扑的电能应用范围延伸到了通常应用多开关拓扑的领域(大约1kW)。文章对现今关于简单SMPS拓扑的限制进行了理论分析,实际设计,并对一个变流器进行测试。文章最后提出了一些单开关电源拓扑的设计原则。

关键词： Boost型 AC/DC电源开关电源变流器 PFC DC/DC 拓扑 SMPS 电能应用

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Internet of radio and light:5G building network radio and edge architecture

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Intelligent and Converged Networks 2020年第1期1卷 37-57页

作者： Yue Zhang Hequn Zhang John Cosmas Nawar Jawad Kareem Ali Ben Meunier Adam Kapovits Li-Ke Huang Wei Li Lina Shi Xun Zhang Jintao Wang Israel Koffman Muller Robert Charilaos C.Zarakovitis School of Engineering University of LeicesterLeicesterLE17RHUK Brunel University LondonUB83PHUK Eurescom gmbh Heidelberg 69123Germany Viavi Solutions StevenageSG12ANUK Institut Sup′erieur D’′electronique De Paris Paris 75006France Department of Electronic Engineering Tsinghua UniversityBeijing 100084China RunEL Ltd Rishon Lezion 7565502Israel Fraunhofer IIS Ilmenau 98693Germany National Centre of Scientific Research Demokritos Agia Paraskevi 15341Greece

The Internet of Radio-Light(IoRL)is a cutting-edge system paradigm to enable seamless 5G service provision in indoor environments,such as homes,hospitals,and *** system draws on innovative architectural structure that sits on the synergy between the Radio Access Network(RAN)technologies of millimeter Wave communications(mmWave)and Visible Light Communications(VLC)for improving network throughput,latency,and coverage compared to existing *** aim of this paper is to introduce the IoRL system architecture and present the key technologies and techniques utilised at each layer of the *** emphasis is given in detailing the IoRL physical layer(Layer 1)and Medium Access Control layer(MAC,Layer 2)by means of describing their unique design characteristics and interfaces as well as the robust IoRL methods of improving the estimation accuracy of user positioning relying on uplink mmWave and downlink VLC measurements.

关键词： 5G Internet of Radio-Light(IoRL) Visible Light Communications(VLC) millimeterWave communications(mmWave) Remote Radio Light Head(RRLH) Network Function Virtualization(NFV) Software Defined Network(SDN) positioning

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