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Efficient measurement and optical proximity correction modeling to catch lithography pattern shift issues of arbitrarily distributed hole layer

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FRONTIERS OF MECHANICAL ENGINEERING 2024年第4期19卷 24-24页

作者： Feng, Yaobin Liu, Jiamin Song, Zhiyang Jiang, Hao Liu, Shiyuan huazhong univ sci & technol State Key Lab Intelligent Mfg Equipment & Technol Wuhan 430074 Peoples R China Opt Valley Lab Wuhan 430074 Peoples R China

With the continued shrinking of the critical dimensions (CDs) of wafer patterning, the requirements for modeling precision in optical proximity correction (OPC) increase accordingly. This requirement extends beyond CD controlling accuracy to include pattern alignment accuracy because misalignment can lead to considerable overlay and metal-via coverage issues at advanced nodes, affecting process window and yield. This paper proposes an efficient OPC modeling approach that prioritizes pattern-shift-related elements to tackle the issue accurately. Our method integrates careful measurement selection, the implementation of pattern-shift-aware structures in design, and the manipulation of the cost function during model tuning to establish a robust model. Confirmatory experiments are performed on a via layer fabricated using a negative tone development. Results demonstrate that pattern shifts can be constrained within a range of +/- 1 nm, remarkably better than the original range of +/- 3 nm. Furthermore, simulations reveal notable differences between post OPC and original masks when considering pattern shifts at locations sensitive to this phenomenon. Experimental validation confirms the accuracy of the proposed modeling approach, and a firm consistency is observed between the simulation results and experimental data obtained from actual design structures.

关键词： computational lithography optical proximity correction modeling pattern shift metrology AERIAL IMAGE OPC

Inhibiting Voltage Decay in Li-Rich Layered Oxide Cathode: From O3-Type to O2-Type Structural Design

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NANO-MICRO LETTERS 2024年第1期16卷 1-22页

作者： Zhang, Guohua Wen, Xiaohui Gao, Yuheng Zhang, Renyuan Huang, Yunhui Tongji univ Inst New Energy Vehicles Sch Mat Sci & Engn Shanghai Key Lab R&D & Applicat Met Funct Mat Shanghai 201804 Peoples R China Contemporary Amperex technol Co Ltd Ningde 352100 Peoples R China huazhong univ sci & technol Sch Mat Sci & Engn State Key Lab Mat Proc & Die & Mould Technol Wuhan 430074 Hubei Peoples R China

This review systematically compares the different effects of O2-type and O3-type structures on voltage decay for Li-rich layered oxide (LRLO) *** development of O2-type materials and the corresponding mechanisms for addressing voltage decay are comprehensively *** perspectives and challenges for designing high-performance O2-type LRLO cathodes without voltage decay are proposed. Li-rich layered oxide (LRLO) cathodes have been regarded as promising candidates for next-generation Li-ion batteries due to their exceptionally high energy density, which combines cationic and anionic redox activities. However, continuous voltage decay during cycling remains the primary obstacle for practical applications, which has yet to be fundamentally addressed. It is widely acknowledged that voltage decay originates from the irreversible migration of transition metal ions, which usually further exacerbates structural evolution and aggravates the irreversible oxygen redox reactions. Recently, constructing O2-type structure has been considered one of the most promising approaches for inhibiting voltage decay. In this review, the relationship between voltage decay and structural evolution is systematically elucidated. Strategies to suppress voltage decay are systematically summarized. Additionally, the design of O2-type structure and the corresponding mechanism of suppressing voltage decay are comprehensively discussed. Unfortunately, the reported O2-type LRLO cathodes still exhibit partially disordered structure with extended cycles. Herein, the factors that may cause the irreversible transition metal migrations in O2-type LRLO materials are also explored, while the perspectives and challenges for designing high-performance O2-type LRLO cathodes without voltage decay are proposed.

关键词： Lithium-ion batteries Li-rich layered oxide Voltage decay Migration of transition metal ions O2-type structural design RECHARGEABLE LITHIUM BATTERIES ANIONIC REDOX CHEMISTRY ION-EXCHANGE INTERCALATION COMPOUNDS ELECTRONIC-STRUCTURE O2 STRUCTURE CAPACITY ORIGIN CHALLENGES MECHANISM

Preface to the "Theory and Applications of Flexoelectricity" Special Issue of Acta Mechanica Solida Sinica

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ACTA MECHANICA SOLIDA SINICA 2024年第4期37卷 519-520页

作者： Deng, Qian Zheng, Yue Shen, Shengping huazhong univ sci & technol Sch Aerosp Engn Wuhan 430074 Peoples R China Sun Yat Sen univ Sch Phys Guangzhou 510275 Peoples R China Xi An Jiao Tong univ Sch Aerosp Engn Xian 710049 Peoples R China

Flexoelectricity refers to the electric polarization generated by non-uniform mechanical strains within dielectric materials and *** intriguing effect bridges the fields of materials science,mechanical engineering,and applied physics,offering a promising avenue for innovation in sensor technology,energy harvesting,multiphysics field coupling,among others.

关键词： offering bridges harvesting

Manipulating photogenerated electron flow in nickel single-atom catalysts for photocatalytic CO2 reduction into tunable syngas

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CARBON ENERGY 2024年第8期6卷 205-213页

作者： Zhang, Yida Wang, Qingyu Wu, Lihui Pan, Haibin Liu, Chengyuan Lin, Yue Wang, Gongming Zheng, Xusheng univ sci & technol China Natl Synchrotron Radiat Lab Hefei 230029 Anhui Peoples R China univ sci & technol China Coll Chem & Mat Sci Hefei Anhui Peoples R China univ sci & technol China Hefei Natl Res Ctr Phys Sci Microscale Dept Chem Hefei Anhui Peoples R China

The key to designing photocatalysts is to orient the migration of photogenerated electrons to the target active sites rather than dissipate at inert sites. Herein, we demonstrate that the doping of phosphorus (P) significantly enriches photogenerated electrons at Ni active sites and enhances the performance for CO2 reduction into syngas. During photocatalytic CO2 reduction, Ni single-atom-anchored P-modulated carbon nitride showed an impressive syngas yield rate of 85 mu mol g(cat)(-1) h(-1) and continuously adjustable CO/H-2 ratios ranging from 5:1 to 1:2, which exceeded those of most of the reported carbon nitride-based single-atom catalysts. Mechanistic studies reveal that P doping improves the conductivity of catalysts, which promotes photogenerated electron transfer to the Ni active sites rather than dissipate randomly at low-activity nonmetallic sites, facilitating the CO2-to-syngas photoreduction process.

关键词： carbon nitride CO2 photoreduction electron flow Ni single atoms syngas GRAPHITIC CARBON NITRIDE CHARGE-TRANSFER ENVIRONMENTAL REMEDIATION WATER

Crucial role played by CK8+cells in mediating alveolar injury remodeling for patients with COVID-19

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VIROLOGICA SINICA 2024年第3期39卷 390-402页

作者： Li, Yufeng Hu, Hengrui Liu, Jia Ma, Longda Wang, Xi Liu, Liang Liu, Qian Ren, Liang Li, Jiang Deng, Fei Hu, Zhihong Zhou, Yiwu Wang, Manli Chinese Acad sci State Key Lab Virol Ctr Biosafety Megasci Wuhan Inst Virol Wuhan 430071 Peoples R China univ Chinese Acad sci Beijing 100049 Peoples R China huazhong univ sci & technol Dept Forens Med Tongji Med Coll Wuhan 430010 Peoples R China

The high risk of SARS-CoV-2 infection and reinfection and the occurrence of post-acute pulmonary sequelae have highlighted the importance of understanding the mechanism underlying lung repair after injury. To address this concern, comparative and systematic analyses of SARS-CoV-2 infection in COVID-19 patients and animals were conducted. In the lungs of nine patients who died of COVID-19 and one recovered from COVID-19 but died of unrelated disease in early 2020, damage-related transient progenitor (DATP) cells expressing CK8 marker proliferated signi ficantly. These CK8 + DATP cells were derived from bronchial CK5 + basal cells. However, they showed different cell fate toward differentiation into type I alveolar cells in the deceased and convalescent patients, respectively. By using a self-limiting hamster infection model mimicking the dynamic process of lung injury remodeling in mild COVID-19 patients, the accumulation and regression of CK8 + cell marker were found to be closely associated with the disease course. Finally, we examined the autopsied lungs of two patients who died of infection by the recent Omicron variant and found that they only exhibited mild pathological injury with no CK8 + cell proliferation. These results indicate a clear pulmonary cell remodeling route and suggest that CK8 + DATP cells play a primary role in mediating alveolar remodeling, highlighting their potential applications as diagnostic markers and therapeutic targets.

关键词： SARS-CoV-2 CK8+DATP cells Cell proliferation Lung injury-remodeling Autopsy Hamster infection model

Metal-N4 model single-atom catalyst with electroneutral quadri-pyridine macrocyclic ligand for CO2 electroreduction

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CARBON ENERGY 2024年第8期6卷 122-133页

作者： Peng, Jian-Zhao Li, Yin-Long Cheng, Yao-Ti Li, Fu-Zhi Cao, Bo Wang, Qing Yue, Xian Lai, Guo-Tao Wang, Yang-Gang Gu, Jun Southern univ sci & technol Dept Chem Shenzhen Guangdong Peoples R China Southern univ sci & technol Dept Chem Shenzhen 518055 Guangdong Peoples R China Hokkaido univ Inst Catalysis Sapporo Japan

Metal-N-C single-atom catalysts, mostly prepared from pyrolysis of metal-organic precursors, are widely used in heterogeneous electrocatalysis. Since metal sites with diverse local structures coexist in this type of material and it is challenging to characterize the local structure, a reliable structure-property relationship is difficult to establish. Conjugated macrocyclic complexes adsorbed on carbon support are well-defined models to mimic the single-atom catalysts. Metal-N-4 site with four electroneutral pyridine-type ligands embedded in a graphene layer is the most commonly proposed structure of the active site of single-atom catalysts, but its molecular counterpart has not been reported. In this work, we synthesized the conjugated macrocyclic complexes with a metal center (Co, Fe, or Ni) coordinated with four electroneutral pyridinic ligands as model catalysts for CO2 electroreduction. For comparison, the complexes with anionic quadri-pyridine macrocyclic ligand were also prepared. The Co complex with the electroneutral ligand expressed a turnover frequency of CO formation more than an order of magnitude higher than that of the Co complex with the anionic ligand. Constrained ab initio molecular dynamics simulations based on the well-defined structures of the model catalysts indicate that the Co complex with the electroneutral ligand possesses a stronger ability to mediate electron transfer from carbon to CO2.

关键词： ab initio molecular dynamics CO2 reduction electrocatalysis model catalyst single-atom catalyst EFFICIENT ELECTROREDUCTION REDUCTION SITES COORDINATION ELECTROCATALYSTS CARBON

Highly efficient vanadium redox flow batteries enabled by a trilayer polybenzimidazole membrane assembly

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CARBON ENERGY 2024年第7期6卷 191-204页

作者： Bui, Trung Tuyen Shin, Mingyu Rahimi, Mohammad Bentien, Anders Kwon, Yongchai Henkensmeier, Dirk Korea Inst sci & technol KIST Hydrogen Fuel Cell Res Ctr Seoul South Korea univ sci & technol KIST Sch Div Energy & Environm Technol Seoul South Korea Korea univ Grad Sch Energy & Environm Seoul South Korea Korea Inst sci & technol KIST Hydrogen Fuel Cell Res Ctr Seoul 02792 South Korea Seoul Natl univ sci & technol Dept Chem & Biomol Engn Seoul South Korea Seoul Natl univ sci & technol Dept Chem & Biomol Engn 232 Gongneung ro Seoul 01811 South Korea Aarhus univ Dept Biol & Chem Engn Aarhus Denmark

A novel polybenzimidazole (PBI)-based trilayer membrane assembly is developed for application in vanadium redox flow battery (VRFB). The membrane comprises a 1 mu m thin cross-linked poly[2,2'-(p-oxydiphenylene)-5,5'-bibenzimidazole] (OPBI) sandwiched between two 20 mu m thick porous OPBI membranes (p-OPBI) without further lamination steps. The trilayer membrane demonstrates exceptional properties, such as high conductivity and low area-specific resistance (ASR) of 51 mS cm(-1) and 81 m Omega cm(2), respectively. Contact with vanadium electrolyte increases the ASR of trilayer membrane only to 158 m Omega cm(2), while that of Nafion is 193 m Omega cm(2). VO2+ permeability is 2.73 x 10(-9) cm(2) min(-1), about 150 times lower than that of Nafion NR212. In addition, the membrane has high mechanical strength and high chemical stability against VO2+. In VRFB, the combination of low resistance and low vanadium permeability results in excellent performance, revealing high Coulombic efficiency (>99%), high energy efficiency (EE; 90.8% at current density of 80 mA cm(-2)), and long-term durability. The EE is one of the best reported to date.

关键词： polybenzimidazole porous membrane proton conductivity trilayer VRFBs PROTON-EXCHANGE MEMBRANES CONDUCTIVITY PERFORMANCE DEGRADATION STABILITY MECHANISM SOLVENT STORAGE ENERGY

Performance evaluation of the effect of humic acid on Anammox granular sludge: Apparent morphology, nitrogen removal and microbial community

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JOURNAL OF ENVIRONMENTAL sciENCES 2024年第10期144卷 148-158页

作者： Huang, Wenhui Xu, Peiling Li, Xiang Huang, Yong Sun, Hao Li, Wei Zhang, Mao Shi, Miao Yuan, Yan Suzhou univ sci & technol Sch Environm Sci & Engn Suzhou 215009 Peoples R China Suzhou Tianjun Environm technol Ltd Co Suzhou 215011 Peoples R China Suzhou univ sci & technol Jiangsu Collaborat Innovat Ctr Technol & Mat Water Suzhou 215009 Peoples R China Suzhou Hongyu Environm technol Co Ltd Shares Suzhou 215011 Peoples R China

Humic acid (HA) is a typical refractory organic matter, so it is of great significance to investigate its effect on the performance of Anammox granular sludge. When the dosage of HA day). When HA was between 50 and 100 mg/L, the NRR of Anammox was stable. At this time, the adsorption of HA causes the sludge to gradually turn from red to brown, but the activities of heme and enzymes showed that its capacity was not affected. When HA levels reached 250 mg/L, the NRR dropped to 0.11 kg/(m(3)day). Moderate HA levels promoted the release of extracellular polymeric substance (EPS), but excessive HA levels lead to a decrease in EPS concentrations. HA inhibited Anammox activity, which indirectly hindered the transmission of substrate and accumulated substrate toxicity. Although HA promoted the increase of heterotrophic microbial abundance in Anammox system, the microbial diversity decreased gradually. With the increase of HA concentration, the abundance of Candidatus_Brocadia, the main functional microorganism of Anammox system, decreased gradually, while the abundance of Candidatus_Kuenenia increased gradually. (c) 2024 The Research Center for Eco-Environmental sciences, Chinese Academy of sciences. Published by Elsevier B.V.

关键词： Anammox Landfill leachate Humic acid Heme Microbial community Enzyme activity MATURE LANDFILL LEACHATE PARTIAL NITRIFICATION-ANAMMOX HEAVY-METALS OZONATION IMPACT REDUCTION OXIDATION EFFICIENT BIOFILM AMMONIA

Enhancing Defect-Induced Dipole Polarization Strategy of SiC@MoO3 Nanocomposite Towards Electromagnetic Wave Absorption

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NANO-MICRO LETTERS 2024年第1期16卷 1-21页

作者： Wang, Ting Zhao, Wenxin Miao, Yukun Cui, Anguo Gao, Chuanhui Wang, Chang Yuan, Liying Tian, Zhongning Meng, Alan Li, Zhenjiang Zhang, Meng Qingdao univ sci & technol Coll Chem Engn Qingdao 266042 Peoples R China Qingdao univ sci & technol Coll Mat Sci & Engn Qingdao 266042 Peoples R China Qingdao univ sci & technol Coll Electromech Engn Shandong Engn Lab Preparat & Applicat High Perform Qingdao 266061 Peoples R China Qingdao univ sci & technol Coll Chem & Mol Engn Key Lab Opt Elect Sensing & Analyt Chem Life Sci Shandong Key Lab Biochem AnalMOE Qingdao 266042 Peoples R China

Defect engineering in transition metal oxides semiconductors (TMOs) is attracting considerable interest due to its potential to enhance conductivity by intentionally introducing defects that modulate the electronic structures of the materials. However, achieving a comprehensive understanding of the relationship between micro-structures and electromagnetic wave absorption capabilities remains elusive, posing a substantial challenge to the advancement of TMOs absorbers. The current research describes a process for the deposition of a MoO3 layer onto SiC nanowires, achieved via electro-deposition followed by high-temperature calcination. Subsequently, intentional creation of oxygen vacancies within the MoO3 layer was carried out, facilitating the precise adjustment of electromagnetic properties to enhance the microwave absorption performance of the material. Remarkably, the SiC@MO-t4 sample exhibited an excellent minimum reflection loss of - 50.49 dB at a matching thickness of 1.27 mm. Furthermore, the SiC@MO-t6 sample exhibited an effective absorption bandwidth of 8.72 GHz with a thickness of 2.81 mm, comprehensively covering the entire Ku band. These results not only highlight the pivotal role of defect engineering in the nuanced adjustment of electromagnetic properties but also provide valuable insight for the application of defect engineering methods in broadening the spectrum of electromagnetic wave absor ption effectiveness. SiC@MO-t samples with varying concentrations of oxygen vacancies were prepared through in-situ etching of the SiC@MoO3 nanocomposite. The presence of oxygen vacancies plays a crucial role in adjusting the band gap and local electron distribution, which in turn enhances conductivity loss and induced polarization loss capacity. This finding reveals a novel strategy for improving the absorption properties of electromagnetic waves through defect engineering.

关键词： Defect engineering Oxygen vacancies SiC@MoO3 nanocomposite Electromagnetic wave absorption Induced dipole polarization MICROWAVE-ABSORPTION PERFORMANCES COMPOSITES ABSORBERS NANOWIRES