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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee Jiwoong Kim Jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment r&d Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process development department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process development department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(Cd)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCd)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of drAM cell blocks,areas previously challenging to inspect with conventional OCd *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3d structures of semiconductor devices.

关键词： metrology resolution enable

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Elucidating solvent effects on the stability of phenoxyl radicals in monohydric alcohols via electron paramagnetic resonance

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Green Chemical Engineering 2024年第4期5卷 483-488页

作者： Xinyu Wang Wenjing Sun Yongtao Wang Haoran Li department of Chemistry Zhejiang University center of Chemistry for Frontier Technologies ZJU-NHU United R&D Center Zhejiang University State Key Laboratory of Chemical Engineering College of Chemical and Biological Engineering Zhejiang University

research on solvent effects is an important and long-standing topic, but there still is some room, especially for the special solvent effect of fluoroalcohols. In this work, we investigated the stability of phenoxyl radical in monohydric alcohol solvents through in-situ electron paramagnetic resonance detections. The decay behavior of phenoxyl radical showed a reasonable relationship with the mesoscopic structure of alcohols, characterized by smalland wide-angle X-ray scattering. Moreover, the distinct solvent effects of fluoroalcohols were emphasized, and the significant influence of van der Waals distance in the solvents was suggested. Overall, the stability of phenoxyl radical in alcohols was quantified and correlated with the solvent structures. We believe that the established method for stability study on radicals will encourage solvent effect studies on various organic reactions, and the proposed solvent effects in fluoroalcohols may inspire the development of green solvents in both industrial conversions and organic synthesis.

关键词： Solvent effect Fluoroalcohol Phenoxyl radical Stability Electron paramagnetic resonance

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discovery and structure-activity relationship studies of novel tetrahydro-β-carboline derivatives as apoptosis initiators for treating bacterial infections

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Journal of Integrative Agriculture 2024年第4期23卷 1259-1273页

作者： Shanshan Su Hongwu Liu Junrong Zhang Puying Qi Yue ding Ling Zhang Linli Yang Liwei Liu Xiang Zhou Song Yang National Key Laboratory of Green Pesticide/Key Laboratory of Green Pesticide and Agricultural Bioengineering Ministry of Education/Center for R&D of Fine ChemicalsGuizhou UniversityGuiyang 550025China

developing and excavating new agrochemicals with highly active and safe is an important tactic for protecting crop health and food *** this paper,to discover the new bactericide candidates,we designed,prepared a new type of1,2,3,4-tetrahydro-β-carboline(THC)derivatives and evaluated the in vitro and in vivo bioactivities against the Xanthomonas oryzae ***(Xoo),Xanthomonas axonopodis ***(Xac),and Pseudomonas syringae ***(Psa).The in vitro bioassay results exhibited that most title molecules possessed good activity toward the three plant pathogenic bacteria,the compound A17 showed the most active against Xoo and Xac with EC50 values of 7.27 and 4.89 mg mL^(-1)respectively,and compound A8 exhibited the best inhibitory activity against Psa with EC50value of 4.87 mg mL^(-1).Pot experiments showed that compound A17 exhibited excellent in vivo antibacterial activities to manage rice bacterial leaf blight and citrus bacterial canker,with protective efficiencies of 52.67 and 79.79%at 200 mgmL^(-1),***,compound A8 showed good control efficiency(84.31%)against kiwifruit bacterial canker at 200 mg mL^(-1).Antibacterial mechanism suggested that these compounds could interfere with the balance of the redox system,damage the cell membrane,and induce the apoptosis of Xoo *** together,our study revealed that tetrahydro-β-carboline derivatives could be a promising candidate model for novel broadspectrum bactericides.

关键词： tetrahydro-β-carboline derivatives antibacterial activity rOS cell apoptosis

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Bactericidal bissulfone B7 targets bacterial pyruvate kinase to impair bacterial biology and pathogenicity in plants

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Science China(Life Sciences) 2024年第2期67卷 391-402页

作者： Awei Zhang Haizhen Zhang ronghua Wang Hongfu He Baoan Song runjiang Song National Key Laboratory of Green Pesticide Key Laboratory of Green Pesticide and Agricultural BioengineeringMinistry of EducationCenter for R&D of Fine Chemicals of Guizhou UniversityGuiyang 550025China

The prevention and control of rice bacterial leaf blight(BLB)disease has not yet been achieved due to the lack of effective agrochemicals and available ***,we develop a series of novel bissulfones and a novel target with a unique mechanism to address this *** developed bissulfones can control Xanthomonas oryzae ***(Xoo),and 2-(bis(methylsulfonyl)methylene)-N-(4-chlorophenyl)hydrazine-1-carboxamide(B_(7))is more effective than the commercial drugs thiodiazole copper(TC)and bismerthiazol(BT).Pyruvate kinase(PYK)in Xoo has been identified for the first time as the target protein of our bissulfone B_(7).PYK modulates bacterial virulence via a CrP-like protein(Clp)/two-component system regulatory protein(reg r)*** elucidation of this pathway facilitates the use of B_(7)to reduce PYK expression at the transcriptional level,block PYK activity at the protein level,and impair the interaction within the PYK-Clp-reg r complex via competitive inhibition,thereby attenuating bacterial biology and *** study offers insights into the molecular and mechanistic aspects underlying anti-Xoo strategies that target *** believe that these valuable discoveries will be used for bacterial disease control in the future.

关键词： 2-bissulfone-N-phenylhydrazine-1-carboxamide derivatives Xoo antibacterial activities pyruvate kinase regulatory mechanism

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Microstructure evolution and phase transformation of the mushy zone in a quenchedβ-solidifying TiAl alloy

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Journal of Materials Science & Technology 2024年第2期169卷 28-41页

作者： Fuqiang Zhang Xianfei ding Leming Xu Xin Feng Hai Nan Jianping He Yongfeng Liang Junpin Lin State Key Laboratory for Advanced Metals and Materials University of Science and Technology BeijingBeijing 100083China Cast Titanium Alloy r&d center Beijing Institute of Aeronautical MaterialsBeijing 100095China

This study investigates the phase constitutions and transformations that occur in the mushy zone and in the adjacent phase fields of a directionally solidified Ti-44Al-8Nb-1Cr alloy via quenching *** results indicate that the mushy zone consists of unmeltedβdendrites and interdendritic liquid,whose formation can be attributed to the difference in melting point aroused by local heterogeneity in ***βdendrite is composed of numerous subgrains with various *** quenching,theβdendrite transforms into Widmanstättenαvia a precipitation reaction,owing to the decreasing cooling rate caused by heat transfer from the surrounding ***,after quenching,the interdendritic liquid is transformed intoγ*** the singleβphase field and the lower part of the mushy zone,a massive transformation ofβtoγ***,in theβ+αphase field,bothβandαphases are retained to ambient *** the heating process,the transformation ofα→βgives rise to the formation ofβvariants,which affects the orientation ofβdendrites in the mushy *** growth kinematics of theα→βtransformation was elucidated,revealing the preferential growth directions of111and112forβ***,this study presents an illustration of the formation process of the mushy zone and the microstructural evolution during the heating and quenching process.

关键词： Titanium aluminides Mushy zone Quenching Electron backscattering diffraction Phase transformation

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Hexamerin and allergen are required for female reproduction in the American cockroach,Periplaneta americana

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Insect Science 2024年第1期31卷 186-200页

作者： Shiming Zhu Xiaoyi Chen Sishi Xia Qin Li Ziqi Ye Shaoting Zhao Kexin Liu Fangfang Liu Guangdong Provincial Key Laboratory of Insect developmental Biology and Applied Technology Institute of Insect Science and TechnologyInstitute of Insect Science and Technology&School of Life SciencesSouth China Normal UniversityGuangzhouChina guangmeiyuan r&d center Guangdong Provincial Key Laboratory of Insect Developmental Biology and Applied TechnologySouth China Normal UniversityMeizhouGuangdong ProvinceChina Guangdong Laboratory for Lingnan Modern Agriculture South China Agricultural UniversityGuangzhouChina

reproduction is of great importance for the continuation of the *** insects,the fat body is the major tissue for nutrient storage and involved in vitellogenesis,which is essential for female ***,2 proteins,hexamerin and allergen,were separated from the fat bodies of adult female American cockroaches(Periplaneta americana)and identified as storage proteins,encoding for 733 amino acids with molecular weight of 87.88 kda and 686 amino acids with molecular weight of 82.18 kda,*** encoding genes of these 2 storage proteins are mainly expressed in the fat *** interference-mediated knockdown of Hexamerin and Allergen in the early stage of the first reproductive cycle in females suppressed vitellogenesis and ovarian maturation,indicating that these storage proteins are involved in controlling ***,the expression of Hexamerin and Allergen was repressed by knockdown of the juvenile hormone(JH)receptor gene Met and the primary response gene Kr-h1,and was induced by methoprene,a JH analog,in both in vivo and in vitro ***,we have determined that hexamerin and allergen are identified as storage proteins and play an important role in promoting female reproduction in the American *** expression of their encoding genes is induced by JH *** data reveal a novel mechanism by which hexamerin and allergen are necessary for JH-stimulated female reproduction.

关键词： fat body juvenile hormone ovary reproduction storage protein vitellogenesis

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Effect of CO_(2)flooding in an oil reservoir with strong bottom-water drive in the Tahe Oilfield,Tarim Basin,Northwest China

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Energy Geoscience 2024年第1期5卷 230-233页

作者： Li Zhang Haiying Liao Maolei Cui r&d center of Sustainable development of Continental Sandstone Mature Oilfield Beijing100083China Petroleum Exploration and Production research Institute SinopecBeijing100083China

The dissolution and diffusion of CO_(2)in oil and water and its displacement mechanism were investigated by laboratory experiment and numerical simulation for Block 9 in the Tahe oilfield,a sandstone oil reservoir with strong bottom-water drive in Tarim Basin,Northwest *** parameters were analyzed as solubility ratio of CO_(2)in oil,gas and water,interfacial tension,in-situ oil viscosity distribution,remaining oil saturation distribution,and oil *** results show that CO_(2)flooding could control water coning and increase oil *** the early stage of the injection process,CO_(2)expanded vertically due to gravity differentiation,and extended laterally under the action of strong bottom water in the intermediate and late *** CO_(2)got enriched and extended at the oil-water interface,forming a high interfacial tension zone,which inhibited the coning of bottom water to some extent.A miscible region with low interfacial tension formed at the gas injection front,which reduced the in-situ oil viscosity by about 50%.The numerical simulation results show that enhanced oil recovery(EOr)is estimated at 5.72%and the oil exchange ratio of CO_(2)is 0.17 t/t.

关键词： Strong bottom-water drive reservoir CO_(2)flooding Enhanced oil recovery Coning of bottom water Tahe oilfield Tarim Basin Northwest China

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Mn-doped SrCoO_(3-δ) Perovskite Oxides for Ethylene Production via Chemical Looping Oxidative dehydrogenation of Ethane

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China Petroleum Processing & Petrochemical Technology 2024年第3期26卷 53-62页

作者： Li Zhi Liu Linjiao Hao daijun ren Xiaohang Shen Fangxia Li Xin Yu Anping Luoyang r&d center of Technology of Sinopec Engineering(Group)Co.Ltd. Luoyang 471003China

Chemical looping oxidative dehydrogenation (CL-OdH) is an economically promising method for convertingethane into higher value-added ethylene utilizing lattice oxygen in redox catalysts, also known as oxygen carriers. Inthis study, perovskite-type oxide SrCoO_(3-δ) and B-site Mn ion-doped oxygen carriers (SrCo_(1-x)MnxO_(3-δ), x=0.1, 0.2, 0.3)were prepared and tested for the CL-OdH of ethane. The oxygen-deficient perovskite SrCoO_(3-δ) exhibited high ethyleneselectivity of up to 96.7% due to its unique oxygen vacancies and lattice oxygen migration rates. However, its low ethyleneyield limits its application in the CL-OdH of ethane. Mn doping promoted the reducibility of SrCoO_(3-δ) oxygen carriers,thereby improving ethane conversion and ethylene yield, as demonstrated by characterization and evaluation experiments.X-ray diffraction results confirmed the doping of Mn into the lattice of SrCoO_(3-δ), while X-ray photoelectron spectroscopy(XPS) indicated an increase in lattice oxygen ratio upon incorporation of Mn into the SrCoO_(3-δ) lattice. Additionally, H2temperature-programmed reduction (H2-TPr) tests revealed more peaks at lower temperature reduction zones and a declinein peak positions at higher temperatures. Among the four tested oxygen carriers, SrCo0.8Mn0.2O_(3-δ) exhibited satisfactoryperformance with an ethylene yield of 50% at 710 °C and good stability over 20 redox cycles. The synergistic effect of Mnplays a key role in increasing ethylene yields of SrCoO_(3-δ) oxygen carriers. Accordingly, SrCo0.8Mn0.2O_(3-δ) shows promisingpotential for the efficient production of ethylene from ethane via CL-OdH.

关键词： ethane ethylene perovskite chemical looping oxidative dehydrogenation

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Fabricating functionally graded Fe-Cr-Co permanent magnetic alloys via laser powder bed fusion

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Journal of Iron and Steel research International 2024年第3期31卷 729-737页

作者： Ya-zhou He Ya-qing Hou Peng Shen Hao Zhang dong Zhou Hang Su Central Iron and Steel research Institute Co. Ltd.Beijing 100081China Material digital r&d center China Iron and Steel Research Institute Group Co.Ltd.Beijing 100081China

Laser powder bed fusion(LPBF)in-situ alloying technology offers the possibility to construct gradient materials with varied structures and *** graded Fe-Cr-Co permanent magnetic alloys were fabricated by LPBF and in-situ alloying mixed powders of Fe,Cr,and Co *** effects of different Fe,Cr and Co contents on the microstructure,magnetic properties and hardness of Fe-Cr-Co alloys prepared by LPBF were *** as-built Fe-Cr-Co alloys present a single body-centered-cubic phase and have a homogeneous distribution of *** mechanical properties and magnetic properties of the compositionally graded sample show a gradient *** the increase in Cr content,the Vickers hardness of the sample increases,and the saturation magnetization of the sample *** optimal magnetic properties in an isotropic state are given as coercivity HcB=21.65 kA/m,remanence Br=0.70 T and energy product(BH)_(max)=5.35 kJ/m^(3),which are comparable to or higher than the reported magnetic properties in an isotropic state prepared by traditional powder *** in-situ alloying technology has the potential to further explore Fe-Cr-Co magnetic materials,such as those consisting of multiple or more constituent elements,and to maximize the compositional flexibility of magnetic materials.

关键词： Fe-Cr-Co alloy Laser powder bed fusion In-situ alloying Functional material Magnetic property

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Case retrieval Strategy of Turning Process Based on Grey relational Analysis

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Computer Modeling in Engineering & Sciences 2024年第2期138卷 1663-1678页

作者： Jianfeng Zhao Yunliang Huo Ji Xiong Junbo Liu Zhixing Guo Qingxian Li School of Mechanical Engineering Sichuan UniversityChengdu610065China Sichuan Engineering Technology research center of Intelligent design and Service for Cutting Tools Yibin R&D Park of Sichuan UniversityYibin644000China department of r&d Pengxi Heye High-Tech Co.Ltd.Suining629000China

To solve the problem of long response time when users obtain suitable cutting parameters through the Internet based platform,a case-based reasoning framework is ***,a Hamming distance and Euclidean distance combined method is designed to measure the similarity of case features which have both numeric and category *** addition,AHP(Analytic Hierarchy Process)and entropy weight method are integrated to provide features weight,where both user preferences and comprehensive impact of the index have been *** relation analysis is used to obtain the similarity of a new problem and alternative ***,a platform is also developed on Visual Studio 2015,and a case study is demonstrated to verify the practicality and efficiency of the proposed *** method can obtain cutting parameters which is suitable without iterative *** with the traditional PSO(Particle swarm optimization algorithm)and GA(Genetic algorithm),it can obtain faster response *** method can provide ideas for selecting processing parameters in industrial *** guaranteeing the characteristic information is similar,this approach can select processing parameters which is the most appropriate for the production process and a lot of time can be saved.

关键词： CBr turning process grey relation AHP entropy weight

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