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AlScN films prepared by alloy targets and SAW device characteristics

Journal of Rare Earths 2023年第3期41卷 434-439,I0004页

作者： Kuo Men Hao Liu Xingquan Wang Qian Jia Zhaochong Ding Huating Wu Daogao Wu Yuhua Xiong State Key Laboratory of advanced materials for Smart Sensing GRINM Group Co.Ltd.Beijing 100088China GRIMAT Engineering Institute co. Ltd.Beijing 101402China State Key Laboratory of Non-ferrous Metals and Processes GRINM Group Co.Ltd.Beijing 100088China grikin advanced material co.ltd. Beijing 100220China GRIREM advanced materials co.ltd. Beijing 100088China

In this paper,we reported a surface acoustic wave(SAW)device prepared and optimized by piezoelectric films containing AIN,AIScN(Sc-20 at%)and AIScN(Sc-30 at%)by reactive magnetron sputtering using Al and AISc alloy targets.We calculated the material intrinsic electromechanical coupling coefficient k_(t)^(2) of AlScN(Sc-20 at%)and AlScN(Sc-30 at%)which are much better than AIN.It can be explained by the lattice softening.Furtherly,the results were confirmed by transmission electron microscopy(TEM)observation of the microstructure.Then the SAW devices based on three thin films were tested by vector network analysis obtaining the device equivalent electro mechanical coupling coefficient k_(eff)^(2).The value of AIScN(Sc-20 at%)k_(eff)^(2),which equals to 1.94%,is higher than that of AIN and AIScN(Sc-30 at%)while the value of AIScN(Sc-30 at%)k_(t)^(2) is higher than that of others.It is shown in our study that the crystallinity and orientation of the material still have a greater impact on k_(eff)^(2) but it does not have influence on k_(t)^(2) in the actual device preparation process.

关键词： AlScN film Alloy targets SAW Electromechanical coupling coefficient k_(t)^(2) Crystallinity Orientation

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Novel twinned Al3Sc dendrites in as-casted Al-Sc alloy

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Rare Metals 2023年第3期42卷 838-843页

作者： Xing-Quan Wang Yu Wang Qian Jia Zhao-Chong Ding Jin-Jiang He Song-Xiao Hui State Key Laboratory of Nonferrous Metals and Processes GRIMAT Engineering Institute Co.Ltd.Beijing 101407China grikin advanced material co. Ltd. Beijing Technology Research Center for Sputtering Target material Engineering of High Pure Metals

Al-Sc alloys with high Sc contents are served as sputtering targets for making high-performance piezoelectric devices.The micro structure of these alloys would affect the sputtering process and the final quality of the functional devices.In this study,the microstructure in as-c as ted Al-20%Sc(in atomic ratio)alloys is characterized and the feathery Al3Sc grains with twin relationships are reported for the first time.The crystallographic features of twined structures and growth directions are quantitatively analyzed by electron backscatter diffraction(EBSD)technique.

关键词： Al3Sc alloys twin

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Preparation and Electrochemical Properties of Porous Platinum Electrode

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贵金属 2012年第A1期33卷 79-84页

作者： HE Xin CHEN Boxun CHEN Qiao General Research Institute for Nonferrous Metals GRIKIN Advanced Materials Co.Ltd.Beijing 100088China

Porous platinum electrodes were prepared by adding YSZ,as an active material,in platinum paste.Relationship between microstructure and electrochemical performance of O 2(g),Pt/YSZ electrode have been characterized by SEM and cyclic voltammetry.Results showed that the microstructure of platinum electrode is a significant impact on the cyclic voltammetry.With the increase of platinum electrode's porosity,the area of three-phase boundary of O 2(g) /Pt/YSZ was increased.The electrochemical reactivity was also enhanced.These were presented as the increase of current density and cathode voltage in cyclic voltammetry.

关键词： porous platinum electrode electrochemical performance microstructure cyclic voltammetry

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