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MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

Microsystems & Nanoengineering 2021年第4期7卷 1-22页

作者： Hoa Thanh Le Rubaiyet I.Haque Ziwei Ouyang Seung Woo Lee Shelley I.Fried Ding Zhao Min Qiu Anpan Han The Rowland Institute at Harvard Harvard UniversityCambridgeMAUSA Department of Mechanical Engineering Technical University of DenmarkLyngbyDenmark Department of Electrical Engineering Technical University of DenmarkLyngbyDenmark Department of neurosurgery Massachusetts General HospitalHarvard Medical SchoolBostonMAUSA Boston VA Healthcare System BostonMAUSA Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of EngineeringWestlake UniversityHangzhouChina Institute of Advanced Technology Westlake Institute for Advanced StudyHangzhouChina

MEMS inductors are used in a wide range of applications in micro-and nanotechnology,including RF MEMS,sensors,power electronics,and *** technologies set the boundary conditions for inductor design and their electrical and mechanical *** review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication,presents recent advances in 3D additive fabrication technologies,and discusses the challenges and opportunities of MEMS inductors for two emerging applications,namely,integrated power electronics and *** the four top-down MEMS fabrication approaches,3D surface micromachining and through-substrate-via(TSV)fabrication technology have been intensively studied to fabricate 3D inductors such as solenoid and toroid in-substrate TSV *** 3D inductors are preferred for their high-quality factor,high power density,and low parasitic capacitance,in-substrate TSV inductors offer an additional unique advantage for 3D system integration and efficient thermal *** features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power *** another perspective,3D bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS ***,we discuss inspiring and emerging research opportunities for MEMS inductors.

关键词： inductor power lithography

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Bringing sensation to prosthetic hands-chronic assessment of implanted thin-film electrodes in humans

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npj Flexible Electronics 2023年第1期7卷 32-45页

作者： PaulČvančara Giacomo Valle Matthias Müller Inga Bartels Thomas Guiho Arthur Hiairrassary Francesco Petrini Stanisa Raspopovic Ivo Strauss Giuseppe Granata Eduardo Fernandez Paolo M.Rossini Massimo Barbaro Ken Yoshida Winnie Jensen Jean-Louis Divoux David Guiraud Silvestro Micera Thomas Stieglitz Laboratory for Biomedical Microtechnology Department of Microsystems Engineering-IMTEKAlbert-Ludwig-University FreiburgFreiburgGermany Center for Neuroprosthetics and Institute of Bioengineering School of EngineeringÉcole Polytechnique Fédérale de Lausanne(EPFL)LausanneSwitzerland The Biorobotics Institute Scuola Superiore Sant’AnnaPisaItaly Camin Team INRIAUniversity of MontpellierMontpellierFrance Institute of Neurology Catholic University of the Sacred HeartRomaItaly Institute of neurosurgery Catholic University of the Sacred HeartRomaItaly Department of Neuroscience&Neurorehabilitation IRCCS San Raffaele Roma00166 RomeItaly Department of Electrical and Electronic Engineering University of CagliariCagliariItaly Biomedical Engineering Department Indiana University-Purdue UniversityIndianapolisINUSA SMI Dept.Health Science and TechnologyAalborg UniversityAalborgDenmark AXONIC/Groupe MXM VallaurisFrance BrainLinks-BrainTools Albert-Ludwig-University FreiburgFreiburgGermany Bernstein Center Freiburg Albert-Ludwig-University FreiburgFreiburgGermany Present address:Laboratory for Neuroengineering Department of Health Sciences and TechnologyInstitute for Robotics and Intelligent SystemsETH ZürichZürichSwitzerland

Direct stimulation of peripheral nerves with implantable electrodes successfully provided sensory feedback to amputees while using hand *** of the electrodes is key to success,which we have improved for the polyimide-based transverse intrafascicular multichannel electrode(TIME).The TIMEs were implanted in the median and ulnar nerves of three trans-radial amputees for up to six *** present a comprehensive assessment of the electrical properties of the thin-film metallization as well as material status post *** TIMEs stayed within the electrochemical safe limits while enabling consistent and precise amplitude *** lead to a reliable performance in terms of eliciting *** signs of corrosion or morphological change to the thin-film metallization of the probes was observed by means of electrochemical and optical *** presented longevity demonstrates that thin-film electrodes are applicable in permanent implant systems.

关键词： film electrodes sensation

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Microfabricated intracortical extracellular matrix-microelectrodes for improving neural interfaces

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Microsystems & Nanoengineering 2018年第1期4卷 141-155页

作者： Wen Shen Suradip Das Flavia Vitale Andrew Richardson Akshay Ananthakrishnan Laura A.Struzyna Daniel P.Brown Naixin Song Murari Ramkumar Timothy Lucas DKacy Cullen Brian Litt Mark G.Allen Krishna P.Singh Center for Nanotechnology University of PennsylvaniaPhiladelphiaPA 19104USA Department of neurosurgery Perelman School of MedicineUniversity of PennsylvaniaPhiladelphiaPA 19104USA Department of Neurology Perelman School of MedicineUniversity of PennsylvaniaPhiladelphiaPA 19104USA Department of Mechanical Engineering and Applied Mechanics School of Engineering and Applied ScienceUniversity of PennsylvaniaPhiladelphiaPA 19104USA Department of Bioengineering School of Engineering and Applied ScienceUniversity of PennsylvaniaPhiladelphiaPA 19104USA Department of Electrical and Systems Engineering School of Engineering and Applied ScienceUniversity of PennsylvaniaPhiladelphiaPA 19104USA Department of Materials Science and Engineering School of Engineering and Applied ScienceUniversity of PennsylvaniaPhiladelphiaPA 19104USA Present address:Department of Mechanical and Aerospace Engineering University of Texas at ArlingtonArlingtonTX 76019USA

Intracortical neural microelectrodes,which can directly interface with local neural microcircuits with high spatial and temporal resolution,are critical for neuroscience research,emerging clinical applications,and brain computer interfaces(BCI).However,clinical applications of these devices remain limited mostly by their inability to mitigate inflammatory reactions and support dense neuronal survival at their *** we report the development of microelectrodes primarily composed of extracellular matrix(ECM)proteins,which act as a bio-compatible and an electrochemical interface between the microelectrodes and physiological *** ECM-microelectrodes are batch fabricated using a novel combination of micro-transfer-molding and excimer laser micromachining to exhibit final dimensions comparable to those of commercial silicon-based *** are further integrated with a removable insertion stent which aids in intracortical *** from electrochemical models and in vivo recordings from the rat’s cortex indicate that ECM encapsulations have no significant effect on the electrochemical impedance characteristics of ECM-microelectrodes at neurologically relevant ***-microelectrodes are found to support a dense layer of neuronal somata and neurites on the electrode surface with high neuronal viability and exhibited markedly diminished neuroinflammation and glial scarring in early chronic experiments in rats.

关键词： markedly neural matrix

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Analysis of clinical characteristics and risk factors of stroke-associated pneumonia in patients with acute carebral hemorrhage

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China Medical Abstracts (Internal Medicine) 2017年第2期 124-124页

作者：李海燕 dept Neurol Beijing Shijitan HospCapital Med Univ

Objective To explore the clinical characteristics and risk factors of stroke-associated pneumonia(SAP)in patients with acute cerebral *** A total of 375 patients with acute cerebral hemorrhage were selected from the d... 详细信息

关键词： in of SAP with

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A case control study of distance change of bilateral internal carotid artery in acromegaly

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China Medical Abstracts(Internal Medicine) 2019年第1期36卷 60-60页

作者： JIANG Changzhen dept Neurosurg 1st Affil HospFujian Med Univ

Objective To investigate the distance change of bilateral internal carotid artery in acromegalic *** Twenty patients with acromegaly were included in this study from August 2016 to March 2018 in Department of Neurosur... 详细信息

关键词： investigate artery University

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neurosurgery Cerebrovascular disorder

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China Medical Abstracts 2006年第3期15卷 216-216页

作者：喻博 dept Neurosurg 2nd Affil Hasp Chin Med Univ Shenyang 110004

Objective To investigate the application of Onyxin the treatment of brain artefiovenous malformations （BAVMs） and the combined therapy of BAVMs. Methods 19 cases of cerebral BAVMs were embolized with Onyx. In one high flow BAVM, before using Onyx, we make use of coils to slow down the flow. The average injection time was 30 minutes. Results In 2 cases, more than 95% nidus were occluded; in 8 cases more than 70 % nidus were occluded and in 9 cases less than 70 % were occluded. Hemorrhagic complication was observed in 2 cases and microcatheter was preserved in 1 case.

关键词：脑疾病动静脉畸形治疗临床

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Clinical and pathological features of 166 patients with nonfunctioning pituitary adenomas

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China Medical Abstracts(Internal Medicine) 2021年第1期38卷 28-28页

作者： WANG Linjie dept Endocrinol Key Endocrinol LabNatl Health CommissionPUMC&CAMSBeijing 100730

Objective To investigate the clinical features and pathological classification of patients with nonfunctional pituitary adenomas (NFPAs) in single medical center according to 2017 World Health *** The clinical and pathological characteristics of 166 patients with NFPAs diagnosed by neurosurgery in Peking Union Medical College Hospital from April 2019 to January 2020 were analyzed retrospectively.

关键词： pituitary patients adenoma

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No association between Parkinson disease and autoantibodies against NMDA-type glutamate receptors

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Translational Neurodegeneration 2019年第1期8卷 127-133页

作者： Franziska Hopfner Stefanie HMüller Dagmar Steppat Joanna Miller Nele Schmidt Klaus-Peter Wandinger Frank Leypoldt Daniela Berg Andre Franke Wolfgang Lieb Lukas Tittmann Monika Balzer-Geldsetzer Simon Baudrexel Richard Dodel Ruediger Hilker-Roggendorf Elke Kalbe Jan Kassubek Thomas Klockgether Inga Liepelt-Scarfone Brit Mollenhauer Petra Neuser Kathrin Reetz Oliver Riedel Claudia Schulte Jörg BSchulz Annika Spottke Alexander Storch Claudia Trenkwalder Hans-Ulrich Wittchen Karsten Witt Ullrich Wüllner Günther Deuschl Gregor Kuhlenbäumer Department of Neurology University Hospital Schleswig HolsteinArnold-Heller Str.324105 KielGermany Center of Blood Transfusion University Hospital Schleswig HolsteinKiel&LübeckGermany Department of Clinical Chemistry University Hospital Schleswig-HolsteinKielGermany Institute of Clinical Molecular Biology University Hospital Schleswig-HolsteinKielGermany Institute of Epidemiology University Hospital Schleswig-HolsteinKielGermany Chair of Geriatric Medicine University Hospital EssenEssenGermany Department of Neurology Philipps-University MarburgMarburgGermany Department of Neurology Goethe UniversityFrankfurt/MainGermany Brain Imaging Center Goethe UniversityFrankfurt/MainGermany Department of Medical Psychology|Neuropsychology and Gender Studies&Center for Neuropsychological Diagnostics and Intervention(CeNDI) University Hospital CologneCologneGermany Psychological Gerontology Institute of GerontologyUniversity of VechtaVechtaGermany Department of Neurology University of UlmUlmGermany Department of Neurology University of Bonnand German Center for Neurodegenerative Diseases(DZNE)BonnGermany Center for Neurology Hertie Institute for Clinical Brain ResearchDepartment of Neurodegenerative DiseasesUniversity of TübingenTübingenGermany DZNE German Center for Neurodegenerative DiseasesTübingenGermany Paracelsus-Elena-Klinik KasselGermany Institute of Neuropathology and Department of neurosurgery University Medical Center GöttingenGöttingenGermany Coordinating Centre for Clinical Trials Philipps-UniversityMarburgGermany Department of Neurology RWTH Aachen UniversityAachenGermany JARA-BRAIN Institute of Molecular Neuroscience and Neuroimaging Forschungszentrum Jülich GmbH and RWTH Aachen UniversityAachenGermany Leibniz Institute for Prevention Research and Epidemiology-BIPS Achterstrasse 3028359 BremenGermany Department of Neurology Technische Universität Dresden01307 DresdenGermany German Center for Neurodegenerative Diseases(DZNE) Research Site Rostock18147 RostockGerma

Background:IgG-class autoantibodies to N-Methyl-D-Aspartate(NMDA)-type glutamate receptors define a novel entity of autoimmune *** examining the prevalence of NMDA IgA/IgM antibodies in patients with Parkinson disease with/without dementia produced conflicting *** measured NMDA antibodies in a large,well phenotyped sample of Parkinson patients without and with cognitive impairment(n=296)and controls(n=295)free of neuropsychiatric *** phenotyping and large numbers allowed statistically meaningful correlation of antibody status with diagnostic subgroups as well as quantitative indicators of disease severity and cognitive ***:NMDA antibodies were analysed in the serum of patients and controls using well established validated *** used anti-NMDA antibody positivity as the main independent variable and correlated it with disease status and phenotypic ***:The frequency of NMDA IgA/IgM antibodies was lower in Parkinson patients(13%)than in controls(22%)and higher than in previous studies in both *** IgA/IgM antibodies were neither significantly associated with diagnostic subclasses of Parkinson disease according to cognitive impairment,nor with quantitative indicators of disease severity and cognitive impairment.A positive NMDA antibody status was positively correlated with age in controls but not in Parkinson ***:It is unlikely albeit not impossible that NMDA antibodies play a significant role in the pathogenesis or progression of Parkinson disease *** Parkinson disease with dementia,while NMDA IgG antibodies define a separate disease of its own.

关键词： NMDA antibody NMDA IgA/IgM antibodies Parkinson disease Cognitive impairment

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