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control Theory and Technology 2025年第1期23卷 28-48页

作者： Amit Pandey Dipak M.Adhyaru department of Electronics and instrumentation engineering Institute of TechnologyNirma UniversityAhmedabadGujarat382481India

The electromagnetic levitation system(EMLS)serves as the most important part of any magnetic levitation ***,its characteristics are defined by its highly nonlinear dynamics and ***,the uncertainties in the dynamics of an electromagnetic levitation system make the controller design more ***,it is necessary to design a robust control law that will ensure the system’s stability in the presence of these *** this framework,the dynamics of an electromagnetic levitation system are addressed in terms of matched and unmatched *** robust control problem is translated into the optimal control problem,where the uncertainties of the electromagnetic levitation system are directly reflected in the cost *** optimal control method is used to solve the robust control *** solution to the optimal control problem for the electromagnetic levitation system is indeed a solution to the robust control problem of the electromagnetic levitation system under matched and unmatched *** simulation and experimental results demonstrate the performance of the designed control *** performance indices such as integral absolute error(IAE),integral square error(ISE),integral time absolute error(ITAE),and integral time square error(ITSE)are compared for both uncertainties to showcase the robustness of the designed control scheme.

关键词： Nonlinear system Robust control Optimal control HJB equation Lyapunov stability Electromagnetic levitation system

Beyond Performance of Learning control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

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IEEE/CAA Journal of Automatica Sinica 2025年第1期12卷 198-214页

作者： Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan IEEE the Center of Ultra-precision Optoelectronic Instrument engineering Harbin Institute of Technology the Key Laboratory of Ultra-Precision Intelligent instrumentation Ministry of Industry and Information Technology the State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Guangdong University of Technology the Center of Ultraprecision Optoelectronic Instrument engineering Harbin Institute of Technology the Key Laboratory of UltraPrecision Intelligent instrumentation Ministry of Industry and Information Technology the department of Electronic and Information Systems Shibaura Institute of Technology

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread application of iterative learning control(ILC), given the repetitive nature of wafer scanning. ILC enables substantial performance improvement by using past measurement data in combination with the system model knowledge. However, challenges arise in cases where the data is contaminated by the stochastic noise, or when the system model exhibits significant uncertainties, constraining the achievable performance. In response to this issue, an extended state observer(ESO) based adaptive ILC approach is proposed in the frequency *** being model-based, it utilizes only a rough system model and then compensates for the resulting model uncertainties using an ESO, thereby achieving high robustness against uncertainties with minimal modeling effort. Additionally, an adaptive learning law is developed to mitigate the limited performance in the presence of stochastic noise, yielding high convergence accuracy yet without compromising convergence speed. Simulation and experimental comparisons with existing model-based and data-driven inversion-based ILC validate the effectiveness as well as the superiority of the proposed method.

关键词： Extended state observer learning control model uncertainties motion control stochastic noise

Some Investigations on Fuzzy P+Fuzzy I+Fuzzy D controller for Non-stationary Process

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International Journal of Automation and computing 2012年第5期9卷 449-458页

作者： Vineet Kumar B. C. Nakra A. P. Mittal Division of instrumentation and control engineering Netaji Subhas Institute of Technology Delhi University department of Mechanical engineering Institute of Technology and Management University Division of instrumentation and control engineering Netaji Subhas Institute of TechnologyDelhi University

The paper addresses the adaptive behaviour of parallel fuzzy proportional plus fuzzy integral plus fuzzy derivative (FP+FI+FD) controller. The parallel FP+FI+FD controller is actually a non-linear adaptive controller whose gain changes continuously with output of the process under control. Two non-stationary processes, whose characteristics change with time, are considered for simulation study. Simulation is performed using software LabVIEW TM . The set-point tracking response of parallel FP+FI+FD is compared with conventional parallel proportional plus integral plus derivative (PID) controller, tuned with the Ziegler-Nichols (Z-N) tuning technique. Simulation results show that conventional PID controller fails to track the set-point and becomes unstable as the process changes its characteristic with time. But the parallel FP+FI+FD controller shows considerably much better set-point tracking response and does not deviate from steady state. Also, a huge spike is observed in the output of PID controller as the reference set-point and process parameters are changed, while the FP+FI+FD controller gives spike free control signal.

关键词： Proportional plus integral plus derivative (PID) controller fuzzy proportional plus fuzzy integral plus fuzzy derivative (FP+FI+FD) controller non-stationary process adaptive control self-tuning

A robust test of uncertain linear systems

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控制理论与应用（英文版） 2009年第3期7卷 277-280页

作者： Yogesh V. HOTE D. Roy CHOUDHURY J. R. P. GUPTA department of instrumentation and control engineering Delhi University department of Computer engineering I. P. University

In this paper, it is shown that for low-order uncertain systems, there is no need to calculate all the minimum and maximum values of the coefficients for a perturbed system which is expressed in terms of polynomials and hence no need to formulate and test all the four Kharitonov＇s polynomials. Furthermore, for higher-order systems such as n ≥ 5, the usual four Kharitonov＇s polynomials need not be tested initially for sufficient condition of perturbed systems; rather, the necessary condition can be checked before going for sufficient condition. In order to show the effectiveness of the proposed method, numerical examples are shown and computational efficiency is highlighted.

关键词： Kharitonov's theorem Robust stability Routh criterion

Retraction control of motorized seat belt system with linear state observer

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Journal of Central South university 2013年第2期20卷 385-392页

作者： LEE Kang-seok CHOI Chin-chul LEE Woo-taik department of control and instrumentation engineering Changwon National University

A design and verification of linear state observers which estimate state information such as angular velocity and load torque for retraction control of the motorized seat belt (MSB) system were described. The motorized seat belt system provides functions to protect passengers and improve passenger's convenience. Each MSB function has its own required belt tension which is determined by the function's purpose. To realize the MSB functions, state information, such as seat belt winding velocity and seat belt tension are required. Using a linear state observer, the state information for MSB operations can be estimated without sensors. To design the linear state observer, the motorized seat belt system is analyzed and represented as a state space model which contains load torque as an augmented state. Based on the state space model, a linear state observer was designed and verified by experiments. Also, the retraction control of the MSB algorithm using linear state observer was designed and verified on the test bench. With the designed retraction control algorithm using the linear state observer, it is possible to realize various types of MSB functions.

关键词： motorized seat belt system motorized seat belt (MSB) system linear state observer state space model augmented state retraction control

A Robust Fractional Order Fuzzy P ＋ Fuzzy I ＋ Fuzzy D controller for Nonlinear and Uncertain System

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International Journal of Automation and computing 2017年第4期14卷 474-488页

作者： Vineet Kumar K. P. S. Rana Jitendra Kumar Puneet Mishra Sreejith S Nair Division of instrumentation and control engineering Netaji Subhas Institute of Technology (NSIT) University of Delhi New Delhi 110078 India

In this paper, a robust fractional order fuzzy P ＋ fuzzy I ＋ fuzzy D （FOFP ＋ FOFI ＋ FOFD） controller is presented for a nonlinear and uncertain 2-1ink planar rigid manipulator. It is a nonlinear fuzzy controller with variable gains that makes it self- adjustable or adaptive in nature. The fractional order operators further make it more robust by providing additional degrees of freedom to the design engineer. The integer order counterpart, fuzzy P ＋ fuzzy I ＋ fuzzy D （FP ＋ FI ＋ FD） controller, for a comparative study, was realized by taking the integer value for the fractional order operators in FOFP ＋ FOFI ＋ FOFD controller. The performances of both the fuzzy controllers are evaluated for reference trajectory tracking and disturbance rejection with and without model uncertainty and measurement noise. Genetic algorithm was used to optimize the parameters of controller under study for minimum integral of absolute error. Simulation results demonstrated that FOFP ＋ FOFI ＋ FOFD controller show much better performance as compared to its counterpart FP ＋ FI ＋ FD controller in servo as well as the regulatory problem and in model uncertainty and noisy environment FOFP ＋ FOFI ＋ FOFD controller demonstrated more robust behavior as compared to the FP ＋ FI ＋ FD controller. For the developed controller bounded-input and bounded-output stability conditions are also developed using Small Gain Theorem.

关键词： Fuzzy P + fuzzy I + fuzzy D (FP + FI + FD) controller fractional order fuzzy P + fuzzy I + fuzzy D (FOFP + FOFI+ FOFD) controller fractional order operator robust control model uncertainty noise suppression.

A High Speed Autofocusing System for Micro System Applications

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Journal of Electronic Science and Technology 2016年第1期14卷 73-79页

作者： Phuchong Sripolsaen Pradit Mittrapiyanuruk Pakorn Keawtrakulpong the Deptartment of control System and instrumentation engineering Faculty of EngineeringKing Mongkut’s University of Technology Thonburi (KMUTT) the department of Mathematics Faculty of ScienceSrinakharinwirot University the department of control System and instrumentation engineering Faculty of EngineeringKMUTT

In this paper,we present a high speed autofocus system for micro system applications and design a look-up-table based autofocusing algorithm for applications when a target object is always visible,e.g.,manufacturing parts with alignment *** perform an evaluation of 24 focus measures to verify that which focus measure is the best for the look-up-table based *** the evaluation,we find that the Chebyshev moments-based focus measure（CHEB） is the most ***,we also develop a look-up-table based autofocus system that uses CHEB as the focus *** training phase,we offline construct a table from training images of an object that are captured at several lens *** entry of table consists of focus measure computed from image and lens *** working phase,given an input image,the algorithm first computes the focus measure and then finds the best match focus measure from the table and looks up the corresponding lens position for moving it into the in-focus *** algorithm can perform autofocusing within only 2 steps of lens *** experiment shows that the system can perform high speed autofocusing of micro objects.

关键词： High speed autofocusing look-up table micro system

Joint tracking algorithm using particle filter and mean shift with target model updating

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Chinese Optics Letters 2006年第10期4卷 569-572页

作者：张波田蔚风金志华 Laboratory of Navigation and control Department of Instrumentation EngineeringShanghai Jiao Tong UniversityShanghai 200240 Laboratory of Navigation and control Department of Instrumentation Engineering Shanghai Jiao Tong University Shanghai 200240

Roughly, visual tracking algorithms can be divided into two main classes： deterministic tracking and stochastic tracking. Mean shift and particle filter are their typical representatives, respectively. Recently, a hybrid tracker, seamlessly integrating the respective advantages of mean shift and particle filter （MSPF） has achieved impressive success in robust tracking. The pivot of MSPF is to sample fewer particles using particle filter and then those particles are shifted to their respective local maximum of target searching space by mean shift. MSPF not only can greatly reduce the number of particles that particle filter required, but can remedy the deficiency of mean shift. Unfortunately, due to its inherent principle, MSPF is restricted to those applications with little changes of the target model. To make MSPF more flexible and robust, an adaptive target model is extended to MSPF in this paper. Experimental results show that MSPF with target model updating can robustly track the target through the whole sequences regardless of the change of target model.

关键词： Algorithms Targets

Neural network and principal component regression in non-destructive soluble solids content assessment:a comparison

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Journal of Zhejiang university-Science B(Biomedicine & Biotechnology) 2012年第2期13卷 145-151页

作者： Kim-seng CHIA Herlina ABDUL RAHIM Ruzairi ABDUL RAHIM department of control and instrumentation Faculty of Electrical EngineeringUniversiti Teknologi Malaysia

Visible and near infrared spectroscopy is a non-destructive,green,and rapid technology that can be utilized to estimate the components of interest without conditioning it,as compared with classical analytical *** objective of this paper is to compare the performance of artificial neural network(ANN)(a nonlinear model)and principal component regression(PCR)(a linear model)based on visible and shortwave near infrared(VIS-SWNIR)(400-1000 nm)spectra in the non-destructive soluble solids content measurement of an ***,we used multiplicative scattering correction to pre-process the spectral ***,PCR was applied to estimate the optimal number of input ***,the input variables with an optimal amount were used as the inputs of both multiple linear regression and ANN *** initial weights and the number of hidden neurons were adjusted to optimize the performance of *** suggest that the predictive performance of ANN with two hidden neurons outperforms that of PCR.

关键词： Artificial neural network (ANN) Principal component regression (PCR) Visible and shortwave nearinfrared (VIS-SWNIR) Spectroscopy Apple Soluble solids content (SSC)

Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C_6F_(12)O with a low global warming potential

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Plasma Science and Technology 2020年第10期22卷 135-144页

作者： Junmyung LEE Yunho NAM Jongchan LEE Hyun Woo LEE Kwang-Ho KWON department of control and instrumentation engineering Korea UniversitySejong 30019Republic of Korea department of Aeronautic Computer engineering Hanseo UniversitySeosan 31962Republic of Korea

Perfluorocarbon gas is widely used in the semiconductor ***,perfluorocarbon has a negative effect on the global environment owing to its high global warming potential(GWP) *** alternative solution is ***,we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF_3 with C_6F_(12)O,which has a low GWP and is in a liquid state at room *** this study,silicon oxynitride(SiON) films were plasma-etched using inductively coupled CF4+C_6F_(12)O+O_2 mixed ***,the etching characteristics of the film,such as etching rate,etching profile,selectivity over Si,and photoresist,were investigated.A double Langmuir probe was used and optical emission spectroscopy was performed for plasma *** addition,a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film ***,the etching characteristics of the C_6F_(12)O mixed plasma exhibited a lower etching rate,higher SiON/Si selectivity,lower plasma damage,and more vertical etched profiles than the conventional CHF_3 mixed *** addition,the C_6F_(12)O gas can be recovered in the liquid state,thereby decreasing global *** results confirmed that the C_6F_(12)O precursor can sufficiently replace the conventional etching gas.

关键词： global warming potential perfluorocarbon silicon oxynitride etching characteristics liquid-state perfluorocarbon