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Flexible printed three dimensional(3D) integrated carbon nanotube complementary metal oxide semiconductor(CMOS) thin film transistors and circuits

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Science China(Information Sciences) 2024年第9期67卷 280-293页

作者： Zhaofeng CHEN Jiaqi LI Min LI Hongxuan GUO Jianwen ZHAO SEU-FEI nano-Pico center Key Laboratory of MEMS of Ministry of Education Southeast University Printable Electronics Research center Division of Nanodevices and Related NanomaterialsSuzhou Institute of Nano-Tech and Nano-Bionics Chinese Academy of Sciences School of nano Technology and nano Bionics University of Science and Technology of China

The threshold voltage modulation of carbon nanotube thin-film transistors（TFTs） and flexible three-dimensional（3D） integration circuits has become hot research topics for carbon-based electronics. In this paper, a doping-free gate electrode technology is introduced to significantly modulate the threshold voltage of polymer-sorted semiconducting single-walled carbon nanotube（sc-SWCNT） TFTs in combination with the highly effective gate-controlling ability of solid-state electrolyte thin films as the dielectrics. A systematic investigation was conducted on the impact of printed silver, evaporated silver, and evaporated aluminum（Al） gate electrodes on the threshold voltage of flexible printed bottom-gate and top-gate SWCNT TFTs. The results indicate that the SWCNT TFTs with Al gate electrodes exhibit enhancement-mode characteristics with excellent electrical properties, such as the negative threshold voltages（-0.6 V）, high Ion/Ioff（up to 10～6）, low subthreshold swing(61.4 mV · dec-1), and small hysteresis. It is attributed to either the formation of lower work function thin films（Al2O3） at the electrode/dielectric layer interfaces through the natural oxidation of the Al bottom-gate electrodes or the dipole reaction of the Al top-gate electrodes from X-ray photoelectron spectroscopy（XPS） and ultraviolet photoelectron spectroscopy（UPS） data. In addition, 3D complementary metal-oxide-semiconductor（CMOS） inverters with common gate electrodes were constructed using the resulting enhancement-mode P-type SWCNT TFTs and matched N-type SWCNT TFTs, which shows high voltage gain（34）, rail-to-rail output and high noise margins(80.04%, VDD=-1 V)as well good mechanical flexibility at low operation voltages. It demonstrates that SWCNT TFTs have great advantages for building large-scale 3D flexible integrated circuits.

关键词： three-dimensional CMOS circuits printing technology polymer-sorted semiconducting carbon nanotubes enhancement-mode thin-filmtransistors threshold voltage modulation

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Hybrid 3D printed three-axis force sensor aided by machine learning decoupling

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International Journal of Smart and nano Materials 2024年第2期15卷 261-278页

作者： Guotao Liu Peishi Yu Yin Tao Tao Liu Hezun Liu Junhua Zhao Jiangnan Key Laboratory of Advanced Food manufacturing Equipment and Technology School of Mechanical EngineeringJiangnan UniversityWuxiPR China Jiangsu Province Engineering Research center of Micro-nano Additive and Subtractive manufacturing Institute of Advanced TechnologyJiangnan UniversityWuxiPR China

Identification of magnitude and orientation for spatially applied loading is highly desired in the fields of not only the machinery components but also human-machine *** the fact that the 3-axis force sensor with different structures has been proposed to measure the spatial force,there are still some common limitations including the multi-step manufacturing-assembly processes and complicated testing of decoupling ***,we propose a rapid fabrication strategy with low-cost to achieve high-precision 3-axis force *** sensor is designed to compose of structural Maltese cross base and sensing *** is directly fabricated within one step by a hybrid 3D printing technology combining deposition modeling(FDM)with direct-ink-writing(DIW).In particular,a machine learning(ML)model is used to convert the strain signal to the force *** of a mount of calibration tests,this ML model is trained by sufficient simulation data based on programmed batch finite element *** sensor is capable of continuously identifying a spatial force with varying magnitude and orientation,which successfully quantify the applied force of traditional Chinese medicine physiotherapy including Gua Sha and *** work provides insight for design and rapid fabrication of multi-axis force sensors,as well as potential applications.

关键词： Hybrid 3D printing 3-axis force sensor machine learning nonlinear decoupling

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Flexible pressure sensors with ultrahigh stress tolerance enabled by periodic microslits

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Microsystems & nanoengineering 2024年第1期10卷 301-311页

作者： Song Wang Chenying Wang Yifan Zhao Yujing Zhang Yaxin Zhang Xiangyue Xu Qijing Lin Kai Yao Yuheng Wang Feng Han Yu Sun Zhuangde Jiang State Key Laboratory for manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Mechanical EngineeringXi’an Jiaotong UniversityXi’anChina State Key Laboratory for manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Instrument Science and TechnologyXi’an Jiaotong UniversityXi’anChina The Faculty of Electrical Engineering and Computer Science Ningbo UniversityNingboChina Department of Mechanical and Industrial Engineering University of TorontoTorontoCanada

Stress tolerance plays a vital role in ensuring the effectiveness of piezoresistive sensing films used in flexible pressure ***,existing methods for enhancing stress tolerance employ dome-shaped,wrinkle-shaped,and pyramidal-shaped microstructures in intricate molding and demolding processes,which introduce significant fabrication challenges and limit the sensing *** address these shortcomings,this paper presents periodic microslits in a sensing film made of multiwalled carbon nanotubes and polydimethylsiloxane to realize ultrahigh stress tolerance with a theoretical maximum of 2.477 MPa and a sensitivity of 18.092 kPa−*** periodic microslits permit extensive deformation under high pressure(e.g.,400 kPa)to widen the detection ***,the periodic microslits also enhance the sensitivity based on simultaneously exhibiting multiple synapses within the sensing interface and between the periodic sensing *** proposed solution is verified by experiments using sensors based on the microslit strategy for wind direction detection,robot movement sensing,and human health *** these experiments,vehicle load detection is achieved for ultrahigh pressure sensing under an ultrahigh pressure of over 400 kPa and a ratio of the contact area to the total area of 32.74%.The results indicate that the proposed microslit strategy can achieve ultrahigh stress tolerance while simplifying the fabrication complexity of preparing microstructure sensing films.

关键词： robot shaped stress

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manufacturing process of water-soluble salt-based ceramic cores based on vat photopolymerization

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Journal of Advanced Ceramics 2024年第5期13卷 652-665页

作者： Yuzhen Zhang Wenyan Duan Yue Gu Xingyao Sun Shan Li Bingshan Liu Gong Wang Key Laboratory of Space manufacturing Technology(SMT) Technology and Engineering Center for Space UtilizationChinese Academy of SciencesBeijing 100094China University of Chinese Academy of Sciences Beijing 100049China Ministry of Education Key Laboratory for Cross-Scale Micro and nano manufacturing Changchun University of Science and TechnologyChangchun 130022China

Water-soluble salt-based ceramic cores can be recycled and have excellent high-temperature chemical *** this work,vat photopolymerization was successfully applied to water-soluble salt-based ceramic cores for the first *** powder raw materials of the printing suspension were sodium chloride and ***-precision green bodies were manufactured by optimizing suspensions and *** addition,the postprocessing method was optimized according to the microstructure and mechanical *** sintered part had a high bending strength and smooth ***,the dissolution rate and moisture resistance were compared under different dissolution and storage *** to traditional manufacturing methods,vat photopolymerization enables the production of complex structures without molds and reduces production *** technology is suitable for the rapid iteration of complex structural parts and can be applied to precision parts in aerospace,military,and other technical fields with high cost-effectiveness and sustainability.

关键词： vat photopolymerization water-soluble salt-based ceramic cores defect formation control accuracy moisture rate

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Three‑Dimensional nano‑displacement Measurement by Four‑Beam Laser Interferometry

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nanomanufacturing and Metrology 2024年第2期7卷 42-49页

作者： Xu Zhang Zi Wang Mengnan Liu Zhengxun Song Zuobin Wang Litong Dong International Research Centre for nano Handling and manufacturing of China Changchun University of Science and TechnologyChangchun 130022China Centre for Opto/Bio‑nano Measurement and manufacturing Zhongshan Institute of Changchun University of Science and TechnologyZhongshan 528437China Ministry of Education Key Laboratory for Cross‑Scale Micro and nano manufacturing Changchun University of Science and TechnologyChangchun 130022China JR3CN&IRAC University of BedfordshireLuton LU13JUUK

A 3D nano-displacement measurement method,where the difference in phase between the beams in a four-beam laser interference is changed,is *** results demonstrate that the variation of phase difference causes the deviation of the interference pattern in the laser interference *** on this theory,we design and build a four-beam laser interference *** corner cube prism in the optical path is shifted,and the phase of the beam is changed by applying different voltages to a piezoelectric *** phase difference is obtained by analyzing the lattice pattern with subpixel precision,and then the displacement is determined by correlation *** experimental measurement results are consistent with the theoretical analysis,thereby verifying the feasibility of this measurement method.

关键词： Four-beam laser interferometry Phase difference 3D displacement Correlation operation

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Precipitates Generation Mechanism and Surface Quality Improvement for Aluminum Alloy 6061 in Diamond Cutting

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Journal of Wuhan University of Technology(Materials Science) 2024年第1期39卷 150-159页

作者：王海龙 DENG Wenping 王素娟 State Key Laboratory of Precision Electronic manufacturing Technology and Equipment Guangdong University of TechnologyGuangzhou 510006China Guangdong Provincial Key Laboratory of Micro-nano manufacturing Technology and Equipment School of Electromechanical EngineeringGuangdong University of TechnologyGuangzhou 510006China

To improve the surface quality for aluminum alloy 6061(Al6061) in ultra-precision machining, we investigated the factors affecting the surface finish in single point diamond turning(SPDT)by studying influence of the precipitates generation of Al6061 on surface integrity and surface *** on the Johnson-Mehl-Avrami solid phase transformation kinetics equation, theoretical and experimental studies were conducted to build the relationship between the aging condition and the type, size and number of the precipitates for Al6061. Diamond cutting experiments were conducted to machine Al6061 samples under different aging conditions. The experimental results show that, the protruding on the chip surface is mainly Mg_(2)Si and the scratches on the machined surface mostly come from the iron-containing phase(α-, β-AlFeSi).Moreover, the generated Mg_(2)Si and α-, β-AlFeSi affect the surface integrity and the diamond turned surface roughness. Especially, the achieved surface roughness in SPDT is consistent with the variation of the number of AlFeSi and Mg_(2)Si with the medium size(more than 1 μm and less than 2 μm) in Al6061.

关键词： Al6061 precipitates aging treatment diamond cutting surface roughness

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In-situ analysis of laser-induced breakdown spectra for online monitoring of femtosecond laser machining of sapphire

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Science China(Technological Sciences) 2024年第1期67卷 73-82页

作者： SHANGGUAN ShiYong ZHANG JianGuo LI ZhanZhu SHI Wei WANG WenKe QI DongFeng ZHENG HongYu center for Advanced Laser manufacturing(CALM) Shandong University of TechnologyZibo 255000China

Laser-induced breakdown spectroscopy(LIBS)is widely used for elemental ***,its application for monitoring and analyzing a laser machining process by examining the changes in spectral information warrants further *** this study,we investigate the effect of laser parameters on the spectra,variations in the time-resolved plasma emission spectra,and the relationship between the morphology of craters and plasma plume evolution during the femtosecond(fs)laser ablation of *** Boltzmann plot method and Stark’s broadening model are employed to estimate the temporal temperature and electron density of the plasma plume,revealing the process of plasma *** study aims to demonstrate the feasibility of LIBS for online monitoring of laser processing through experimental data and theoretical explanations.

关键词： laser-induced breakdown spectroscopy plasma plume online monitoring sapphire

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Manipulating the Macroscopic and Microscopic Morphology of Large-Area Gravure-Printed ZnO Films for High-Performance Flexible Organic Solar Cells

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Energy & Environmental Materials 2024年第2期7卷 229-239页

作者： Zhenguo Wang Jingbo Guo Yaqin Pan Jin Fang Chao Gong Lixin Mo Qun Luo Jian Lin Changqi Ma School of nano-Tech and nano-Bionics University of Science and Technology of ChinaHefei 230026China i-Lab&Printable Electronics Research center Suzhou Institute of Nano-Tech and Nano-BionicsChinese Academy of Sciences(CAS)Suzhou 215123China Beijing Engineering Research center of Printed Electronics Beijing Institute of Graphic CommunicationBeijing 102600China Jiangxi Institute of nanotechnology Chinese Academy of Sciences(CAS)Nanchang 330200China

Gravure printing is a promising large-scale fabrication method for flexible organic solar cells(FOSCs)because it is compatible with two-dimension patternable roll-to-roll ***,the unsuitable rheological property of ZnO nanoinks resulted in unevenness and looseness of the gravure-printed ZnO interfacial *** we propose a strategy to manipulate the macroscopic and microscopic of the gravure-printed ZnO films through using mixed solvent and poly(vinylpyrrolidone)(PVP)*** regulation of drying speed effectively manipulates the droplets fusion and leveling process and eliminates the printing ribbing structure in the macroscopic *** additive of PVP effectively regulates the rheological property and improves the microscopic compactness of the *** this method,large-area ZnO∶PVP films(28×9 cm^(2))with excellent uniformity,compactness,conductivity,and bending durability were *** power conversion efficiencies of FOSCs with gravure-printed AgNWs and ZnO∶PVP films reached 14.34%and 17.07%for the 1 cm^(2)PM6:Y6 and PM6∶L8-BO flexible *** efficiency of 17.07%is the highest value to date for the 1 cm^(2)*** use of mixed solvent and PVP addition also significantly enlarged the printing window of ZnO ink,ensuring high-quality printed thin films with thicknesses varying from 30 to 100 nm.

关键词： flexible organic solar cell gravure printing large-area flexible interfacial layer rheology properties zinc oxide

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An origami shield with supporting frame structures optimized by a feature-driven topology optimization method

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Defence Technology（防务技术） 2024年第1期31卷 447-456页

作者： Dongsheng Jia Pengcheng Feng Liangdi Wang Longcan Chen Jun Wang Jihong Zhu Yingjie Xu Weihong Zhang State IJR center of Aerospace Design and Additive manufacturing Northwestern Polytechnical UniversityXi'an710072China

In this paper,the design,manufacture and testing of an origami protective shield with a supporting frame structure are *** consists of an origami shield surface and a deployable supporting frame structure that needs to be portable and sufficiently ***,for the design of the shield surface,a threestage origami crease pattern is developed to reduce the shield size in the folded *** shield surface consists of several stiff modular panels and layered with flexible *** modular panels are made of a multi-layer composite where a ceramic layer is made of small pieces to improve durability as those small pieces enable restriction of crack ***,the supporting frame structure is designed as a chain-of-bars structure in order to fold into a highly compact state as a bundle of bars and deploy in ***,a feature-driven topology structural optimization method preserving component sequence is developed where the inter-dependence of sub-structures is taken into account.A bar with semi-circular ends is used as a basic design *** positions of the bar’s end points are treated as design variables and the width of the bars is kept ***,a constraint on the total length of the chain of bars is ***,the modular panels made of multi-layer composite and the full-scale prototype of the origami shield are fabricated and tested to verify the bullet-proof performance.

关键词： Origami Deployable structure Structure design Shield Composite materials

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Solar manipulations of perpendicular magnetic anisotropy for flexible spintronics

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Frontiers of physics 2024年第4期19卷 73-79页

作者： Zhexi He Yifan Zhao Yujing Du Meng Zhao Yuxuan Jiang Ming Liu Ziyao Zhou State Key Laboratory for manufacturing Systems Engineering Electronic Materials Research LaboratoryKey Laboratory of the Ministry of Education&International Center for Dielectric ResearchSchool of Electronic Science and EngineeringThe International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologyXi’an Jiaotong UniversityXi’an 710049China School of Materials Science&Engineering Changzhou UniversityChangzhou 213164China

Flexible electronics/spintronics attracts researchers’attention for their application potential abroad in wearable devices,healthcare,and other *** devices’performance(speed,energy consumption)is highly dependent on manipulating information bits(spin-orientation in flexible spintronics).In this work,we established an organic photovoltaic(OPV)/ZnO/Pt/Co/Pt heterostructure on flexible PET substrates with perpendicular magnetic anisotropy(PMA).Under sunlight illumination,the photoelectrons generated from the OPV layer transfer into the PMA heterostructure,then they reduce the PMA strength by enhancing the interfacial Rashba field *** coercive field(Hc)reduces from 800 Oe to 500 Oe at its maximum,and the magnetization can be switched up and down *** stability of sunlight control of magnetization reversal under various bending conditions is also tested for flexible spintronic ***,the voltage output of sunlight-driven PMA is achieved in our prototype device,exhibiting an excellent angular dependence and opening a door towards solar-driven flexible spintronics with much lower energy consumption.

关键词： interfacial magnetoelectric coupling perpendicular magnetic anisotropy deterministic magnetization reversal photovoltaic control of magnetism

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