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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee Jiwoong Kim Jae-joon Kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak Kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

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Early selective enteral feeding in treatment of acute pancreatitis: A case report

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World Journal of Clinical Cases 2024年第3期12卷 637-642页

作者： Aleksei A Kashintsev Sergey V Anisimov Anastasya Nadeeva Vitali Proutski Sergey V Anisimov Anastasya NadeevaVitali ProutskiPANDICA LTDLondon WC1N 3ESUnited Kingdom

BACKGROUND Early initiation of enteral feeding is recognized to play a crucial role in improving the outcomes of treatment of acute ***,the method of adminis-tration of enteral nutrition remains *** present the experience of treating a patient with moderate-severe acute pancreatitis,at high risk of progressing to a severe or fatal condition,using a novel method of selective feeding with duodenal *** SUMMARY A 27-year-old female patient presented to the emergency unit of the hospital with a typical manifestation of acute *** a conventional treatment,the patient’s condition deteriorated by day 2 of *** an endoscopic approach,a novel catheter PandiCathffwas placed to the duodenum of the patient,isolating its segment between the duodenal bulb and the ligament of *** the isolated area created,a negative pressure was applied,followed by introduction of early selective enteral *** patient’s condition subsequently improved in a rapid manner,and no complications often associated with moderate-to-severe acute pancreatitis *** Within 48 h of starting treatment with the novel method,it can prevent the development of multiple organ failure and,when combined with minimally invasive drainage methods,help prevent infection.

关键词： Acute pancreatitis Enteral feeding Infectious complications Systemic inflammatory response syndrome MODS

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Lithium-ion and solvent co-intercalation enhancing the energy density of fluorinated graphene cathode

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Journal of Energy Chemistry 2024年第2期89卷 208-215,I0006页

作者： Hao Wang Jie Jiang Pengyu Chen Zhenrui Wu Xiaobin Niu Chuying Ouyang Jian Liu Liping Wang School of Materials and Energy University of Electronic Science and Technology of ChinaChengdu 611731SichuanChina School of Engineering Faculty of Applied ScienceThe University of British ColumbiaKelowna V1V 1V7Canada 21C Innovation Laboratory Contemporary Amperex Technology Ltd.(21C LAB)Ningde 352100FujianChina

Fluorinated carbons CF_xhold the highest theoretical energy density(e.g.,2180 W h kg^(-1)when x=1)among all cathode materials of lithium primary ***,the low conductivity and severe polarization limit it to achieve its *** this study,we design a new electrolyte,namely 1 M LiBF_(4)DMSO:DOL(1:9 vol.),achieving a high energy density in Li/CF_xprimary *** DMSO with a small molecular size and high donor number successfully solvates Li^(+)into a defined Li^(+)-solvation *** solvated Li^(+)can intercalate into the large-spacing carbon layers and achieve an improved ***,when discharged to 1.0 V,the CF_(1.12)cathode demonstrates a specific capacity of 1944 m A h g^(-1)with a specific energy density of 3793 W h kg^(-1).This strategy demonstrates that designing the electrolyte is powerful in improving the electrochemical performance of CF_(x) cathode.

关键词： Fluorinated carbon Conversion reaction High-energy-density primary battery Li^(+)-solvation structure Solvent co-intercalation

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Quantification of perfluorinated compounds in atmospheric particulate shows potential connection with environmental event

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Journal of Environmental Sciences 2024年第2期136卷 237-247页

作者： Hua Tang Ying Wang Shengling Si Hongli Li David Da Yong Chen National Institute of Metrology 18 BeisanhuandongluChaoyang DistrictBeijing 100029China School of Chemistry and Materials Science Nanjing Normal UniversityNanjing 210023China Si Chuan Zhong Ce Biao Wu Technology Co.ltd. Sichuan 610052China Department of Chemistry University of British ColumbiaVancouver V6T 1Z1BCCanada

A method of quantification of perfluorinated compounds(PFCs)from atmospheric particulate matter(APM)is described.A single step pretreatment method,selective pressurized liquid extraction(SPLE),was developed to reduce the high matrix background and avoid contamination from commonly used multiple sample pretreatment *** effective sorbent was selected to purify the PFCs during SPLE,followed by liquid chromatography-tandem mass spectrometry(LC–MS/MS),for quantification of *** affecting the SPLE efficiency,including temperature,static extraction time,and number of extraction cycles used,were *** optimum conditions were found to be 120℃,10 min,and 3 cycles,***-MS/MS method was developed to obtain the optimal sensitivity specific to *** method detection limits(MDLs)were 0.006 to 0.48 ng/g for the PFCs studied and the linear response range was from 0.1 to 100 ng/*** ensure accurate values were obtained,each step of the experiment was evaluated and controlled to prevent *** optimized method was tested by performing spiking experiments in natural particulate matter matrices and good rates of recovery and reproducibility were obtained for all target ***,the method was successfully used to measure 16 PFCs in the APM samples collected in Beijing over five years from 2015 to *** is observed that some PFCs follow the trend of total PFC changes,and can be attributed to the environment influencing events and policy enforcement,while others don't seem to change as much with time of the year or from year to year.

关键词： Selective pressurized liquid extraction Liquid chromatography-mass spectrometry Perfluorinated compounds Atmospheric particulate matter Pollution control

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Effects of the nozzle structure and fluidized gas composition on the gas-particle two-phase jet characteristic in a powder fuel scramjet

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Particuology 2024年第9期92卷 166-179页

作者： Changfei Zhuo Hongming Ding Xiaobin Ren Hanyu Deng Xiong Chen School of Mechanical and Engineering Key Laboratory of Special Engine TechnologyMinistry of EducationNanjing University of Science and TechnologyNanjing210094China Department of Mechanical Engineering National University of Singapore9 Engineering Drive 1Singapore117576 Shanxi North Xing'an Chemical Industry Co. Ltd.Taiyuan030008China

The interaction between nozzle design and fluidization gas composition significantly influences the dynamics within a powder fuel scramjet's combustion *** investigate this relationship,an experimental study utilized high-speed shadow imaging technology to explore the macroscopic aspects of powder fuel *** investigation examined various convergence angles,nozzle throat lengths,and fluidized gas *** findings include:During jet development,powder fuel initially concentrates near the axis,with non-convergence angle nozzles exhibiting longer concentrated distribution periods than convergence angle *** nozzle convergence angles lead to increased penetration distance,frontal velocity,and radial diffusion distance during the initial stages of jet ***,stable jet shapes show larger divergence angles as nozzle convergence angle decreases,with the largest divergence angle observed atα=60°.In the initial 0-7 ms of jet development,the powder fuel jet demonstrates greater penetration distance and frontal velocity under certain ***,penetration distance and frontal velocity increase with throat length from 7 to 20 ms,accompanied by changes in divergence ***,at a throat length(l)of 2 mm,the near-field divergence angle measures 46.50°,and the far-field divergence angle is 22.25°.Conversely,at l=8mm,the near-field divergence angle is 33.49°,and the far-field divergence angle is 23.21°.The fluidization gas composition minimally affects jet penetration distance and frontal velocity during the initial 0-3 ***,due to hydrogen's low density,hydrogen/powder fuel jets exhibit shorter distances and velocities compared to nitrogen/powder fuel *** fluidization also results in larger divergence angles,particularly in the near *** findings underscore the importance of nozzle design and fluidization gas composition in optimizing scramjet performance and efficiency.

关键词： Multiphase flows Gas-particle two-phase jet Nozzle contraction angle Powder fuel scramjet

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Pilot Test of Preparing 2-Alkylanthraquinone Using Alkylation-Oxidation Technology

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China Petroleum Processing & Petrochemical Technology 2024年第1期26卷 88-97页

作者： Zheng Bo Qian Jianguo Shi Peng Pan Zhiyong Qie Siyuan Zhang Yueqin Fei Jianqi Qiao Liang Zong Baoning SINOPEC Research Institute of Petroleum Processing Co. LtdBeijing 100083 Shijiazhuang United Petrochemical Co. LtdShijiazhuang 050011

To expedite the development of industrial technology for producing 2-alkylanthraquinone,a novel pilot test of alkylation-oxidation technology was *** process mainly included anthracene alkylation,separation of anthracene and 2-alkylanthracene,oxidation of 2-alkylanthracene,and product *** alkylation conditions yielded a 91.1%conversion of anthracene and a 71.73%selectivity for *** address the separation problem of anthracene and 2-alkylanthracene,solvent-assisted distillation technology was developed,resulting in a 98.9%purity of 2-alkylanthracene and a 91.82%separation *** the molar ratio of H2O_(2) to 2-alkylanthracene was 7:1,a 98.96%conversion of 2-alkylanthracene and a 99.94%selectivity for 2-alkylanthraquinone were achieved.A novel composition of 2-alkylanthraquinone,including 2-tert-butylanthraquinone,2-tert-amylanthraquinone,and 2-hexylanthraquinone,was *** composition could be effectively separated and purified through a combination of crystallization and washing *** elemental composition of the product met the existing standards,and its hydrogenation performance closely matched that of commercially available 2-tert-amylanthraquinone products.

关键词： anthracene 2-alkylanthracene 2-alkylanthraquinone alkylation oxidation hydrogen peroxide

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Tungsten separation behavior on preparation of high-purity cerium by combined vacuum gravity sedimentation-directional solidification

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Journal of Rare Earths 2024年第6期42卷 1182-1186,I0007页

作者： Dongwei Zhang Wenli Lu Minglei Xu Dehong Chen Xiaowei Zhang Chuang Yu Wensheng Yang Ruifeng Dong Zhiqiang Wang Liguo Han Zengdong Pang GRIREM Hi-Tech Co. Ltd.Langfang065201China National Engineering Research Center for Rare Earth China GRINM Group Co.Ltd.Beijing100088China GRIREM Advanced Materials Co. Ltd.Beijing100088China

In light of the difficult removal of harmful impurity tungsten(W)in Ce metal,in this paper a combined vacuum gravity sedimentation-directional solidification method was innovatively designed and the W separation behavior was *** reducing the electron beam power instantly and gradually at reduction rates of 1,3 and 5 kW/min,it is found that W is enriched at the bottom of ingots as the melt *** enrichment effect is much better than that of single purification method and the enrichment degree increases as the beam reduction rate decreases,attributed to the k0(W)>1 andρ(W)>ρ(Ce).Overall,the minimum content of W impurity can decrease from 630 to 0.1 ppm at the top of the ingot,and the purity of Ce increases from 99.932 wt%to 99.995 wt%by this combined ***,this paper provides a new method for the removal of high density and low evaporation coefficient impurities in low vapor pressure rare earth metals.

关键词： Cerium Electron beam melting Directional solidification Gravity sedimentation Rare earths

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How to Construct a Lower Risk FOF Based on Correlation Network? The Method of Principal Component Risk Parity Asset Allocation

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Journal of Systems Science & Complexity 2024年第3期37卷 1052-1079页

作者： BAI Wei ZHANG Junting LIU Haifei LIU Kai School of Management and Engineering Nanjing UniversityNanjing 210093China Postdoctoral Workstation of Bank of Jiangsu Co. LtdNanjing 210006China College of Finance Nanjing Agricultural UniversityNanjing 210095China University of Prince Edward Island 550 University AveCharlottetownPE C1A4P3Canada

In order to build a low-risk Fund of Funds(FOF), from the perspective of correlation, the principal component factor is used to improve the traditional risk parity model. Principal component analysis is used to decompose the underlying assets and generate unrelated principal component factors,and then the authors can construct a principal component risk parity portfolio. The proposed empirical results based on China’s mutual fund market show that the performance of principal component risk parity portfolio(PCRPP) is better than that of equal weight portfolio(EWP) and traditional risk parity portfolio(RPP). That is to say, not only the PCRPP in this paper has much lower risk than EWP and RPP, but also slightly better than EWP and RPP in terms of average return. Moreover, the study of dividing the underlying assets shows that the PCRPP in this paper is not sensitive to the underlying assets. The PCRPP in this paper is better than EWP and RPP for both the better performing funds and the worse performing funds. In addition, the empirical results on dynamic portfolio adjustments show that it is not appropriate to adjust asset allocation too frequently when the expected rate of return is calculated using the arithmetic mean.

关键词： Fund of funds(FOF) mutual funds portfolio risk principal component analysis risk parity portfolio

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Solidification behaviour and hot cracking susceptibility of a novel Ni-based superalloy

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Journal of Iron and Steel Research International 2024年第4期31卷 956-966页

作者： Yue Chen Shao-min Lv Xing-fei Xie Xiao-can Wen Jng-long Qu Jin-hui Du High-Temperature Materials Institute China Iron and Steel Research Institute Group Co.Ltd.Beijing 100081China Beijing GAONA Materials and Technology Co. Ltd.Beijing 100081China Sichuan CISRI-GAONA Forging Co. Ltd.Deyang 610000SichuanChina

A novel Ni-based superalloy GH4151,with a γ′ volume fraction of about 55%and a service temperature capability up to 8oo oC,was *** to the different cooling conditions of various regions during the solidification of ingots,significant cooling rate variations may lead to the occurrence of hot *** scanning laser microscope was utilised to investigate the solidification process and phase precipitation behaviour of the GH4151 under wide range cooling *** characteristics of L→γ transformation were analysed,and the growth rates of at each stage were *** segregation behaviour was predicted using the Scheil equation,and the predicted results match well with the experimental *** sensitivity coefficient for hot cracking was modified,and cracking sensitivity coefficient values for the alloy under different cooling rates were computed,revealing that the alloy is most susceptible to hot cracking at 10℃/min cooling ***,controlling the cooling rate can reduce the possibility of hot cracking in ingot.

关键词： Ni-based superalloy Solidification behaviour In-situ observation Clyne and Davies's criterion:Hot cracking susceptibility

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Transient Damping of Virtual Synchronous Generator for Enhancing Synchronization Stability during Voltage Dips

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CES Transactions on Electrical Machines and Systems 2024年第2期8卷 143-151页

作者： Shitao Sun Yu Lei Guowen Hao Yi Lu Jindong Liu Zhaoxin Song Jie Zhang North China Electric Power Research Institute Co. Ltd.Beijing 100045China State Grid Xinyuan Co. Ltd.Beijing 100761China Hebei Fengning Pumped Storage Energy Co.ltd. Chengde 068350China

Virtual synchronous generators(VSGs)are widely introduced to the renewable power generation,the variablespeed pumped storage units,and so on,as a promising gridforming *** is noted that VSGs can provide virtual inertia for frequency support,but the larger inertia would worsen the synchronization stability,referring to keeping synchronization with the grid during voltage ***,this paper presents a transient damping method of VSGs for enhancing the synchronization stability during voltage *** is revealed that the loss of synchronization(LOS)of VSGs always accompanies with the positive frequency deviation and the damping is the key factor to remove LOS when the equilibrium point *** order to enhance synchronization stability during voltage dips,the transient damping is proposed,which is generated by the frequency deviation in active power ***,the proposed method can realize seamless switching between normal state and grid ***,detailed control design for transient damping gain is given to ensure the synchronization stability under different inertia requirements during voltage ***,the experimental results are presented to validate the analysis and the effectiveness of the improved transient damping method.

关键词： Virtual synchronous generator(VSG) Transient damping Synchronization stability Voltage dips

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