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以浸没式技术引领光刻设备市场(英文)

电子工业专用设备 2007年第4期36卷 19-21,59页

作者： asml Netherlands asml Netherlands

在过去的几年中,asml公司以创新的浸没式技术引领着光刻设备市场,又一次刷新了半导体制造的路线图。通过对浸没式光刻技术的再现和提升。

关键词： asml 浸没式光刻双扫描台扫描曝光设备二次成像双重曝光极紫外光刻

On robustness of an AMB suspended energy storage flywheel platform under characteristic model based all-coefficient adaptive control laws

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Frontiers of Information Technology & Electronic Engineering 2019年第1期20卷 120-130页

作者： Xujun LYU Long DI Zongli LIN College of Engineering Huazhong Agricultural University asml-HMI Charles L.Brown Department of Electrical and Computer Engineering University of Virginia

A characteristic model based all-coefficient adaptive control law was recently implemented on an experimental test rig for high-speed energy storage flywheels suspended on magnetic bearings. Such a control law is an intelligent control law, as its design does not rely on a pre-established mathematical model of a plant but identifies its characteristic model while the plant is being controlled. Extensive numerical simulations and experimental results indicated that this intelligent control law outperforms a μ-synthesis control law, originally designed when the experimental platform was built in terms of their ability to suppress vibration on the high-speed test rig. We further establish, through an extensive simulation, that this intelligent control law possesses considerable robustness with respect to plant uncertainties, external disturbances, and time delay.

关键词： Intelligent control Robustness Uncertainty Disturbance rejection Active magnetic bearings Energy storage flywheels

Spatial Aberrations in High-Order Harmonic Generation

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Ultrafast Science 2024年第1期4卷 35-43页

作者： Marius Plach Federico Vismarra Elisa Appi Vénus Poulain Jasper Peschel Peter Smorenburg David PO’Dwyer Stephen Edward Yin Tao Rocío Borrego-Varillas Mauro Nisoli Cord LArnold Anne L’Huillier Per Eng-Johnsson Department of Physics Lund UniversityP.0.Box 11822100 LundSweden Department of Physics Politecnico di Milano20133 MilanoItaly Institute for Photonics and Nanotechnologies IFN-CNR20133 MilanoItaly asml Research ASML Netherlands B.V.5504 DRVeldhovenNetherlands

We investigate the spatial characteristics of high-order harmonic radiation generated in argon and observe cross-like patterns in the far *** analytical model describing harmonics from an astigmatic driving beam reveals that these patterns result from the order and generation position-dependent divergence of *** small amounts of driving field astigmatism may result in cross-like patterns,coming from the superposition of individual harmonics with spatial profiles elongated in different *** correcting the aberrations using a deformable mirror,we show that fine-tuning the driving wavefront is essential for optimal spatial quality of the harmonics.

关键词： field. harmonics directions

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光刻永恒

半导体技术 2005年第6期30卷 23-27页

作者：程天风 asml China

由于新近的技术突破,先前应用瓶颈在光刻领域得到解决方案。如今浸没式氟化氩(ArF)光刻技术已经被ITRS列为45nm,甚至于32nm节点的关键技术。如果要达到路图指标,新的介面液体,偏振光应用都需要继续研发。实验室的数据也证实了这些理论... 详细信息

由于新近的技术突破,先前应用瓶颈在光刻领域得到解决方案。如今浸没式氟化氩(ArF)光刻技术已经被ITRS列为45nm,甚至于32nm节点的关键技术。如果要达到路图指标,新的介面液体,偏振光应用都需要继续研发。实验室的数据也证实了这些理论。光刻技术可望继续被延伸到2010年。

关键词：光刻技术 2010年技术突破解决方案关键技术浸没式偏振光实验室应用延伸

Investigation on the influence of vortex generator on particle resuspension

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Particuology 2024年第3期86卷 126-136页

作者： Dongchi Yu Jun-Li Lin Jin-Han Xie asml 80W Tasman DrSan Jose95134CaliforniaUSA Department of Mechanics and Engineering Science at College of Engineering and State Key Laboratory for Turbulence and Complex Systems Peking UniversityBeijing100081China

The vortex generator(VG)and its well-known effect in flow optimization are widely studied and employed across different engineering ***,while the same working principles of VG may be well suited for the applications on surface-cleaning technologies,such promising potential is hardly,if any,explored in the published ***,in the present study,the influence on flow-induced particle resuspension brought by a rectangular vG in a channel flow is investigated with the help of highfidelity computational fluid dynamics *** increases of particle removal forces and resuspension rates are discovered in long,strip-like regions with reduced boundary-layer thickness resulted from the vG-induced vortices,and the enhancement effect is especially significant for configurations with the VG installed at a greater angle of *** is also shown that while the resuspension enhancements on the lower and the upper surfaces of the channel exhibit distinct statistical characteristics,having a VG in the channel improves the overall particle-removing capability of the channel flow by introducing higher surface-averaged removal forces and particle resuspension *** but not least,the increase of resuspension rate is especially significant for the smaller,micron-scale particles which are otherwise hardly disturbed by a VG-less channel flow,and such resuspension-enhancement effectgenerally subsides with increasing particle size.

关键词： Particle resuspension Vortexgenerator CFD Surface cleaning

Characteristic model based all-coefficient adaptive control of an AMB suspended energy storage flywheel test rig

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Science China(Information Sciences) 2018年第11期61卷 113-127页

作者： Xujun LYU Long DI Zongli LIN Yefa HU Huachun WU School of Mechanical and Electronic Engineering Wuhan University of Technology Hubei Provincial Engineering Technology Research Center for Magnetic Suspension asml-HMI 1762 Automation Pkwy 4. Charles L.Brown Department of Electrical and Computer Engineering University of Virginia

Feedback control of active magnetic bearing(AMB) suspended energy storage flywheel systems is critical in the operation of the systems and has been well studied. Both the classical proportional-integralderivative(PID) control design method and modern control theory, such as H∞ control and μ-synthesis,have been explored. PID control is easy to implement but is not effective in handling complex rotordynamics. Modern control design methods usually require a plant model and an accurate characterization of the uncertainties. In each case, few experimental validation results on the closed-loop performance are available because of the costs and the technical challenges associated with the construction of experimental test *** this paper, we apply the characteristic model based all-coefficient adaptive control(ACAC) design method for the stabilization of an AMB suspended flywheel test rig we recently constructed. Both simulation and experimental results demonstrate strong closed-loop performance in spite of the simplicity of the control design and implementation.

关键词： adaptive control characteristic modeling energy storage flywheels active magnetic bearings

Application of resist-profile-aware source optimization in 28 nm full chip optical proximity correction

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Journal of Semiconductors 2017年第7期38卷 83-88页

作者： Jun Zhu David Wei Zhang Chinte Kuo Qing Wang Fang Wei Chenming Zhang Han Chen Daquan He Stephen D.Hsu State Key Laboratory of ASIC and System School of Microelectronics Fudan University Shanghai 200433 China Shanghai Huali Microelectronics Corp. Shanghai 200433 China asml Brion USA

As technology node shrinks, aggressive design rules for contact and other back end of line（BEOL）layers continue to drive the need for more effective full chip patterning optimization. Resist top loss is one of the major challenges for 28 nm and below technology nodes, which can lead to post-etch hotspots that are difficult to predict and eventually degrade the process window significantly. To tackle this problem, we used an advanced programmable illuminator（FlexRay） and Tachyon SMO（Source Mask Optimization） platform to make resistaware source optimization possible, and it is proved to greatly improve the imaging contrast, enhance focus and exposure latitude, and minimize resist top loss thus improving the yield.

关键词： integrated circuits OPC source optimization lithography resist top loss

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用于图像传感器制造的光刻技术

中国集成电路 2007年第1期16卷 47-51页

作者： Geoffrey Phillipps Rudy Pellens asml Netherlands B.V asml

引言任何一种数字成像的核心都是图像传感器.它的基本结构包括一个能把光转换为图像的有源像素矩阵.数码相机和带相机的移动电话带动了图像传感器需求市场的快速增长,它们已成为主要IC制造商大量生产的产品之一.

关键词：图像传感器制造商光刻技术数码相机数字成像像素矩阵需求市场光转换

80nm应用中的高数位孔径,双载具193nm TWINSCAN扫描分步投影机

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半导体技术 2004年第2期29卷 7-11,34页

作者：程天风 asml阿斯麦光刻设备有限公司

针对次100nm的生产,asml研发了一个新光刻系统,其中克服了许多底k1解晰度的挑战。其中包含0.85NA双载具193nmTWINSCAN的设计、性能与一些初步的量测数据。80nm的生产必须要有多方面的量测与控制来达到高准确度的线宽(CD)与对准(Overlay... 详细信息

针对次100nm的生产,asml研发了一个新光刻系统,其中克服了许多底k1解晰度的挑战。其中包含0.85NA双载具193nmTWINSCAN的设计、性能与一些初步的量测数据。80nm的生产必须要有多方面的量测与控制来达到高准确度的线宽(CD)与对准(Overlay)的要求水平。本机台拥有高成熟度的双载具平台,稳定的系统动态质(MSD),一惯性的光量递输等功能,幷包含了一个内建侦测回送系统来自动调控投影镜的像差(aberrations),来达到最佳的影像保真度。

关键词：光刻技术 TWINSCAN 光量递输投影机半导体线宽控制