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CNT micro-focus X-ray source and in-situ pressure measurement

CNT micro-focus X-ray source and in-situ pressure measuremen...

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第十七届中国体视学与图像分析学术会议

作者：董长昆 HUANG Weijun KANG Song LIU Ruizi QIAN Weijin Wenzhou Key Lab of Micro-nano Optoelectronic Devices Wenzhou University

The micro-focus X-ray source with miniature pressure sensor was developed based on the multiwalled carbon nanotube(MWNT) field *** field emitters for both X-ray cathode and the pressure sensor were synthesized by direct chemical vapor deposition growth of MWNTs on catalytic *** exhibited excellent field emission properties with the threshold field at 10 mA/cm2 of 2.30 V/μm,and the high current density of 10 A/cm2 could be reached at the field of 4.36 V/μ*** field emission electron gun was constructed with the aid of electrostatic simulations on the electron beam trajectories and the focal spot size(FSS) on the target with the demagnification factor of *** practical objects,including the semiconductor chip and the ceramic heating element,were tested by the X-ray source with the spatial resolution of less than 35 μ*** mini-type vacuum sensor was developed based upon current enhancement from gas adsorption for MWNT field *** first-principles simulations indicate that the energy barrier reductions,which are related to the surface energy well from nitrogen adsorption and the work function reduction for hydrogen adsorption,are attributed to the sensing *** field emission energy distribution(FEED)measurement demonstrated the reductions of electron tunneling energy barriers in H and N *** miniature sensor in millimeter dimensions based on MWNT field emitter with simple diode configuration can operate in a wide vacuum range from 10 to 10 *** sensor was assembled inside the X-ray tube to measure the in-situ device vacuumduring the processing and after the sealing-off,and the pressures in the sealed sources were generally in 10 Pa level and could rise to 10 Pa level during the *** sensor showed great potentials for vacuum electronic device applications.

关键词： multi-walled carbon nanotube field emission Micro-focus X-ray source vacuum sensor

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