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Chinese Journal of Aeronautics 2021年第4期34卷 192-207页

作者： Tingzhang WANG Henan LIU Chunya WU Jian CHEN Mingjun CHEN Center for precision Engineering Harbin Institute of TechnologyHarbin 150001China

As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to *** to screw theory and grinding kinematics,a mathematical model is established to investigate the interference and grinding characteristics of the ball-end *** relationship between grinding wheel inclination angle,C axis rotation angle,grinding position angle and grinding wheel wear are *** the grinding wheel inclination angle increases,the C axis rotatable range decreases and the grinding position angle *** grinding position angle and wheel radius wear show a negative correlation with the C axis rotation ***,a trajectory planning criteria for increasing grinding speed as much as possible under the premise of avoiding interference is proposed to design the grinding *** grinding point distribution on the ball-end wheel is calculated,and the grinding characteristics,grinding speed and maximum undeformed chip thickness,are ***,a complex structural component can be ground without interference,and surface roughness and profile accuracy are improved to 40.2 nm and 0.399 lm,compared with 556 nm and 3.427 lm before ultra-precision *** mathematical model can provide theoretical guidance for the analysis of interference and grinding characteristics in complex components grinding to improve its grinding quality.

关键词： ultra-precision grinding Complex component Ball-end grinding wheel Interference grinding characteristics

Sensor-Based Inspection of the Formation Accuracy in ultra-precision grinding （UPG） of Aspheric Surface Considering the Chatter Vibration

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Photonic Sensors 2018年第2期8卷 97-102页

作者： Yao LEI Yue BAI Zhijun XU School of Mechanical Engineering and Automation Fuzhou University Fuzhou 350116 China Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130022 China

This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding （UPG） with respect to the chatter vibration. Two factors related to the grinding progress, the grinding speed of grinding wheel and spindle, and the oil pressure of the hydrostatic bearing are taken into account to determining the accuracy. In the meantime, a mathematical model of the radius deviation caused by the micro vibration is also established and applied in the experiments. The results show that the accuracy is sensitive to the vibration and the forming accuracy is much improved with proper processing parameters. It is found that the accuracy of aspheric surface can be less than 4 μm when the grinding speed is 1400r/min and the wheel speed is 100 r/min with the oil pressure being 1.1 MPa.

关键词： Optical aspheric surface micro-vibrations ultra-precision grinding formation accuracy grindingspeed

Research on Large Depth Diameter Ratio ultra-precision Aspheric grinding System

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厦门大学学报（自然科学版） 2002年第S1期41卷 26-27页

作者： CHEN Ming-jun, LI Dan, DONG Shen (precision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China)

In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 *** this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.

关键词： ultra-precision grinding optical aspheric surface precise adjusting mechanism large depth diameter ratio

Hemispherical resonator with low subsurface damage machined by small ball-end fine diamond grinding wheel:A novel grinding technique

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Chinese Journal of Aeronautics 2024年第5期37卷 570-585页

作者： Biao QIN Henan LIU Jian CHENG Jinchuan TIAN Jiangang SUN Zihan ZHOU Chuanzhen MA Mingjun CHEN State Key Laboratory of Robotics and System Harbin Institute of TechnologyHarbin 150001China Center for precision Engineering Harbin Institute of TechnologyHarbin 150001China

As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance of such ***,ultra-precision grinding experiments are carried out to investigate the surface/subsurface quality of the hemispherical resonator machined by the small ball-end fine diamond grinding *** influence of grinding parameters on the surface roughness(SR)and SSD depth of fused silica samples is then *** experimental results indicate that the SR and SSD depth decreased with the increase of grinding speed and the decrease of feed rate and grinding *** addition,based on the material strain rate and the maximum undeformed chip thickness,the effect of grinding parameters on the subsurface damage mechanism of fused silica samples is ***,a multi-step ultra-precision grinding technique of the hemispherical resonator is proposed based on the interaction influence between grinding depth and feed ***,the hemispherical resonator is processed by the proposed grinding technique,and the SR is improved from 454.328 nm to 110.449 nm while the SSD depth is reduced by 94%from 40μm to 2.379μ*** multi-step grinding technique proposed in this paper can guide the fabrication of the hemispherical resonator.

关键词： Fused silica ultra-precision grinding Hemispherical resonator Subsurface damage grinding technique

Research status and challenges in the manufacturing of IR conformal optics

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Defence Technology（防务技术） 2024年第10期40卷 154-172页

作者： Jianbo Zhao Sheng Wang Chunyu Zhang Jinhu Wang Qingliang Zhao Center for precision Engineering School of Mechatronics EngineeringHarbin Institute of TechnologyHarbin 150001China Laser Fusion Research Center China Academy of Engineering PhysicsMianyang 621900China ultra-precision Machining Center College of Mechanical EngineeringZhejiang University of TechnologyHangzhou 310014China

The infrared conformal window is one of the most critical components in *** windows with high performance bring low aberrations,high aerodynamic performance,reliability in extreme working environments,and added value for *** the past decades,remarkable advances have been achieved in manufacturing technologies for conformal windows,where the machining accuracy approaches the nanometer level,and the surface form becomes more *** advances are critical to aircraft development,and these manufacturing technologies also have significant reference values for other directions of the ultra-precision machining *** this review,the infrared materials suitable for manufacturing conformal windows are introduced and compared with insights into their *** remarkable advances and concrete work accomplished by researchers are *** challenges in manufacturing conformal windows that should be faced in the future are discussed.

关键词： Conformal optics Window and dome Infrared material ultra-precision grinding Polishing Measurement

Review on the progress of ultra-precision machining technologies

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Frontiers of Mechanical Engineering 2017年第2期12卷 158-180页

作者： Julong YUAN Binghai LYU Wei HANG Qianfa DENG ultra-precision Machining Center Zhejiang University of Technology Hangzhou 310014 China Key Laboratory of E&M Zhejiang University of Technology (Ministry of Education and Zhejiang Province) Hangzhou 310014 China

ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the develop- ments of ultra-precision machining technologies, espe- cially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.

关键词： ultra-precision grinding ultra-precision cut-ting ultra-precision polishing research status in China,development tendency

Progress of advanced optical manufacturing technology integrated line

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Progress of advanced optical manufacturing technology integr...