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two-dimensional Fluid Simulation of Collisional Plasma sheath over rf Powered Electrode with Cylindrical Hole

Plasma Science and Technology 2004年第4期6卷 2404-2410页

作者：侯璐景王友年 Z.L.Miskvic State Key Lab of Materials Modification by Beams Department of PhysicsDalian University of TechnologyDalian 116023China Department of Applied Mathematics University of WaterlooWaterlooOntarioCanada N2L 3G1he characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent fluid equations coupled with Poisson equation. In addition an equivalent-circuit model is coupled to the fluid equations in order to self-consistently determine re-lationship between the instantaneous potential at the rf-biased electrode and the sheath thickness. Two-dimensional profiles of the potential the ion fluid velocity and the distributions of the ion and electron densities within the sheath are computed under various discharge conditions such as the discharge powers and the gas pressures. The results show that the existence of the cylindrical hole on the electrode significantly affects the sheath structure and generates a potential trap in the horizontal direction which is particularly strong when the sheath thickness is comparable to the depth of the hole. Moreover it is found that the collisional effects have a significant influence on the sheath characteristics.

The characteristics of collisional radio-frequency (rf) sheath dynamics over an elec-trode with a cylindrical hole is simulated by means of a self-consistent model which consists of two-dimensional time-dependent fluid equations coupled with Poisson equation. In addition, an equivalent-circuit model is coupled to the fluid equations in order to self-consistently determine re-lationship between the instantaneous potential at the rf-biased electrode and the sheath thickness. two-dimensional profiles of the potential, the ion fluid velocity, and the distributions of the ion and electron densities within the sheath are computed under various discharge conditions, such as the discharge powers and the gas pressures. The results show that the existence of the cylindrical hole on the electrode significantly affects the sheath structure and generates a potential trap in the horizontal direction, which is particularly strong when the sheath thickness is comparable to the depth of the hole. Moreover, it is found that the collisional effects have a significant influence on the sheath characteristics.

关键词： two-dimensional sheath numerical simulation dusty plasma

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