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deposition of thin Titania films by Dielectric Barrier Discharge at Atmospheric Pressure

Plasma Science and Technology 2006年第3期8卷 292-296页

作者：徐绍魁徐金洲彭晓波张菁 Plasma and Surface Engineer Centre College of Sciences Donghua University Shanghai 20051 China

A homogeneous atmospheric pressure dielectric barrier discharge is studied. It is in argon with small admixtures of titanium tetrachloride vapour and oxygen for the deposition of thin titania films on glass substrates. A special electrode configuration was applied in order to deposit the titania film uniformly. The sustaining voltage （6 kV to 12 kV）, current density （about 3 mA/cm^2） and total optical emission spectroscopy were monitored to characterize the discharge in the gap of 2 mm. Typical deposition rates ranged from approximately 30 nm/min to 120 nm/min. The film morphology was investigated by using scanning electron microscopy （SEM） and the composition was determined with an energy dispersive x-ray spectroscopy （EDS） analysis tool attached to the SEM. The crystal structure and phase composition of the films were studied by x-ray diffraction （XRD）. Several parameters such as the discharge power, the ratio of carrier gas to the precursor gas, the deposition time on the crystallization behavior, the deposition rate and the surface morphology of the titania film were extensively studied.

关键词： dielectric barrier discharge atmospheric pressure thin film deposition titania film

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Progress in flexible perovskite solar cells with improved efficiency

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Journal of Semiconductors 2021年第10期42卷 103-118页

作者： Hua Kong Wentao Sun Huanping Zhou School of Materials Science and Engineering Peking UniversityBeijing 100871China Key Laboratory for the Physics and Chemistry of Nanodevices Department of Electronics Peking UniversityBeijing 100871China

Perovskite solar cell has emerged as a promising candidate in flexible electronics due to its high mechanical flexibility,excellent optoelectronic properties,light weight and low *** the rapid development of the device structure and materials processing,the flexible perovskite solar cells(FPSCs)deliver 21.1%power conversion *** review introduces the latest developments in the efficiency and stability of FPSCs,including flexible substrates,carrier transport layers,perovskite films and *** suggestions on how to further improve the efficiency,environmental and mechanical stability of FPSCs are ***,we considered that to elevate the performance of FPSCs,it is crucial to substantially improve film quality of each functional layer,develop more boost encapsulation approach and explore flexible transparent electrodes with high conductivity,transmittance,low cost and expandable processability.

关键词： perovskite solar cells flexible electronics thin film deposition carrier transport

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