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Transient thermal response of micro-thermal conductivity detector (μTCD) for the identification of gas mixtures:An ultra-fast and low power method

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Microsystems & Nanoengineering 2015年第1期1卷 52-58页

作者： Alireza Mahdavifar Milad Navaei Peter J.Hesketh Melvin Findlay Joseph R.Stetter Gary W.Hunter School of Mechanical Engineering Georgia Institute of TechnologyAtlantaGA 30332USA KWJ Engineering Inc. NewarkCA 94560USA NASA Glenn Research Center ClevelandOH 44135USA

Micro-thermal conductivity detector(μTCD)gas sensors work by detecting changes in the thermal conductivity of the surrounding medium and are used as detectors in many applications such as gas chromatography *** TCDs use steady-state resistance(i.e.,temperature)measurements of a *** this work,we developed a new measurement method and hardware configuration based on the processing of the transient response of a low thermal mass TCD to an electric current *** method was implemented for a 100-μm-long and 1-μm-thick micro-fabricated bridge that consisted of doped polysilicon conductive film passivated with a 200-nm silicon nitride *** resistance variations of theμTCD in response to a square current pulse were studied in multiple mixtures of dilute gases in *** and experimental results are presented and compared for the time resolved and steady-state regime of the sensor *** analysis and simulation show that the sensor response is exponential in the transient state,that the time constant of this exponential variation was a linear function of the thermal conductivity of the gas ambient,and that the sensor was able to quantify the mixture *** level of detection in nitrogen was estimated to be from 25 ppm for helium to 178 ppm for carbon *** this novel approach,the sensor requires approximately 3.6 nJ for a single measurement and needs only 300μs of sampling *** is less than the energy and time required for steady-state DC measurements.

关键词： gas sensor MEMS micro-bridge micro-heater μTCD thermal conductivity sensor transient heat transfer modeling

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