检索结果-南通市图书馆

Nanoimprint lithography for high-throughput fabrication of metasurfaces

Frontiers of Optoelectronics 2021年第2期14卷 229-251页

作者： Dong Kyo OH Taejun LEE Byoungsu KO Trevon BADLOE Jong G.OK Junsuk RHO Department of Mechanical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673.Republic of Korea Department of Mechanical and Automotive Engineering Seoul National University of Science and Technology(SEOULTECH)Seoul 01811Republic of Korea Department of Chemical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea

Metasurfaces are composed of periodic subwavelength nanostructures and exhibit optical properties that are not found in *** have been widely investigated for optical applications such as holograms,wavefront shaping,and structural color printing,however,electron-beam lithography is not suitable to produce large-area metasurfaces because of the high fabrication cost and low *** alternative optical technologies,such as holographic lithography and plasmonic lithography,can overcome these drawbacks,such methods are still constrained by the optical diffraction *** break through this fundamental problem,mechanical nanopatteming processes have been actively studied in many fields,with nanoimprint lithography(NIL)coming to the *** NIL replicates the nanopattem of the mold regardless of the diffraction limit,NIL can achieve sufficiently high productivity and patterning resolution,giving rise to an explosive development in the fabrication of *** this review,we focus on various NIL technologies for the manufacturing of ***,we briefly describe conventional NIL and then present various NIL methods for the scalable fabrication of *** also discuss recent applications of NIL in the realization of ***,we conclude with an outlook on each method and suggest perspectives for future research on the high-throughput fabrication of active metasurfaces.

关键词： nanoimprint scalable fabrication large-area metasurface tailored nanostructure hierarchical nanostructures

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：