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Field effect transistor-based tactile sensors: From sensor configurations to advanced applications

InfoMat 2023年第1期5卷 1-61页

作者： Jian Wang Shuyan Xu Congcong Zhang Ailing Yin Mingyuan Sun Hongru Yang Chenguo Hu Hong Liu Institute for Advanced Interdisciplinary Research(iAIR) Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of ShandongUniversity of JinanJinanPeople's Republic of China Department of Applied Physics State Key Laboratory of Power Transmission Equipment&System Security and New TechnologyChongqing UniversityChongqingPeople's Republic of China Department of Physics School of Physical Science and TechnologyUniversity of JinanJinanPeople's Republic of China State key Laboratory of Crystal Materials Shandong UniversityJinanPeople's Republic of China

The past several decades have witnessed great progress in high-performance field effect transistors(FET)as one of the most important electronic *** the same time,due to their intrinsic advantages,such as multiparameter accessibility,excellent electric signal amplification function,and ease of large-scale manufacturing,FET as tactile sensors for flexible wear-able devices,artificial intelligence,Internet of Things,and other fields to per-ceive external stimuli has also attracted great attention and become a significant field of general *** importantly,FET has a unique three-terminal structure,which enables its different components to detect external mechanics through different sensing *** one hand,it provides an important platform to shed deep insights into the underlying mechanisms of the tactile *** the other hand,these properties could in turn endow excellent components for the construction of tactile matrix sensor arrays with high *** special emphasis on the configuration of FETs,this review classified and summarized structure-optimized FET tactile sensors with gate,dielectric layer,semiconductor layer,and source/drain electrodes as sensing active components,*** working principles and the state-of-the-art protocols in terms of high-performance tactile sensors are detail discussed and highlighted,the innovative pixel distribution and integration analysis of the transistor sensor matrix array concerning flexible electronics are also *** hope that the introduction of this review can provide some inspiration for future researchers to design and fabricate high-performance FET-based tactile sensor chips for flexible electronics and other fields.

关键词： field-effect transistor flexible electronics tactile matrix sensor array tactile sensors

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