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Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

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Plasma Science and Technology 2017年第7期19卷 110-117页

作者： Ling ZHANG Guo CHEN Zhibing HE Xing AI Jinglin HUANG Lei LIU Yongjian TANG Xiaoshan HE Research Center of Laser Fusion China Academy of Engineering Physics

The effects of working pressure on the component, surface morphology, surface roughness, and deposition rate of glow discharge polymer （GDP） films by a trans-2-butene/hydrogen gas mixture were investigated based on plasma characteristics diagnosis. The composition and ion energy distributions of a multi-carbon （CaHs/H2） plasma mixture at different working pressures were diagnosed by an energy-resolved mass spectrometer （MS） during the GDP film deposition process. The Fourier transform infrared spectroscopy （FT-IR）, field emission scanning electron microscope （SEM） and white-fight interferometer （WLI） results were obtained to investigate the structure, morphology and roughness characterization of the deposited films, respectively. It was found that the degree of ionization of the C4H8/H2 plasma reduces with an increase in the working pressure. At a low working pressure, the C-H fragments exhibited small-mass and high ion energy in plasma. In this case, the film had a low CH3/CH2 ratio, and displayed a smooth surface without any holes, cracks or asperities. While the working pressure increased to 15 Pa, the largest number of large-mass fragments led to the deposition rate reaching a maximum of 2.11 #m h-1, and to hole defects on the film surface. However, continuing to increase the working pressure, the film surface became smooth again, and the interface between clusters became inconspicuous without etching pits.

关键词： glow discharge polymer films plasma diagnosis working pressure surfacemorphology surface roughness

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Isothermal oxidation behavior of a new Re-free nickel-based single-crystal superalloy at 950℃

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Rare Metals 2017年第8期36卷 617-621页

作者： Xue-Feng Zhou Guang Chen Ya-Ya Feng Zhi-Xiang Qi Min-Zhi Wang Pei Li Jia-Lin Cheng Engineering Research Center of Materials Behavior and Design Ministry of Education Nanjing University of Science and TechnologyNanjing 210094China School of Chemistry and Materials Engineering Changshu Institute of TechnologyChangshu 215500China School of Materials Science and Engineering Nanjing Instituteof TechnologyNanjing 211167China

The isothermal oxidation behavior of a new Refree nickel-based single-crystal superalloy in air at 950 ℃ for 200 h was studied by scanning electron microscopy（SEM）with energy-dispersive spectroscopy（EDS）and X-ray diffraction（XRD）.The results indicate that oxidation kinetics obeys parabolic law approximately,and the mass gain increases rapidly during initial oxidation stage and then gradually slows *** oxidation scales are composed of three layers：the outer layer mainly consists of NiO with a small amount of CoO;the intermediate layer is mainly composed of Cr_2O_3 with a small amount of spinel compounds such as CrTaO_4,NiCr_2O_4,CoCrAl_2O_4,CoAl_2O_4,and NiAl_2O_4;and the inner layer is composed of Al_2O_*** Al_2O_3 layer suppresses the diffusion of elements between oxygen and alloy elements,slows down the alloy oxidation speed,and also suppresses the growth of the oxide scale and reduces the oxidation rate,which is agreeable with the oxidation kinetics.

关键词： Nickel-based single-crystal superalloy Isothermal oxidation Oxidation kinetic surfacemorphology

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Analysis on Structure and Electrial Conductivity of Pulse Plating Ni-Mo alloy

Analysis on Structure and Electrial Conductivity of Pulse Pl...

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中国力学学会学术大会'2009

作者： Fan Qingxi,Pan Yong,Du Chao Faculty of Materials,Optoelectronics and Physics, Xiangtan University,Key Laboratory of Low Dimensional Materials and Application Technology,Xiangtan University,Ministry of Education,Xiangtan 411105,China

Ni-Mo alloy thin films were prepared by pulse plating method on stainless *** crystallinity, composition,surface morphology and crys-talline size were characterized by XRD,EDS,SEM and AFM *** electrical conductivity o... 详细信息

关键词： Ni-Moalloy pulse plating surfacemorphology resistively

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Al Film Surface and Electrical Resistively Characterized by Fractal

Al Film Surface and Electrical Resistively Characterized by ...

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中国力学学会学术大会'2009

作者： Du Chao,PAN Yong,Wang Jianxing Faculty of Materials,Optoelectronics and Physics, Xiangtan University,Key Laboratory of Low Dimensional Materials and Application Technology,Xiang- tan University,Ministry of Education,Xiangtan,Hunan 411105,China

Al films were deposited on Si(100) substrates by magnetron *** order to acquire fractal dimension(FD) of the surface,height-height corre-lation function were applied to analyze the atomic force microscopy(AFM) *** ele... 详细信息

关键词： fractal Alfilm surfacemorphology resistively

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