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A review of ultrafast laser micro/nano fabrication:Material processing,surface/interface controlling,and devices fabrication

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Nano Research 2024年第7期17卷 6212-6230页

作者： Heng Guo Jiawang Xie Guangzhi He Dezhi Zhu Ming Qiao Jianfeng Yan Jiachen Yu Jiaqun Li Yuzhi Zhao Ma Luo Haoze Han State Key Laboratory of Tribology in Advanced Equipment Department of Mechanical EngineeringTsinghua UniversityBeijing 100084China

Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material *** processing abilities and applications of the ultrafast laser still need more *** the field of material processing,controlling the atomic scale structure in nanomaterials is *** effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as *** the ultrafast laser fabrication of micro functional devices,the processing ability needs to be ***,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices *** useful ultrafast laser processing methods and applications in these areas are *** various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.

关键词： ultrafast laser micro/nano fabrication material processing surface/interface controlling devices fabrication

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