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Characterization of ZnO:Al films deposited by r.f. magnetron-sputtering at low temperature

Science China Mathematics 2002年第3期45卷 394-399页

作者：郝晓涛马瑾马洪磊田茂华曹宝成叶丽娜程传福滕树云 Institute of Optoelectric Materials and Devices Shandong University Jinan 250100 China Physics Department Shandong Normal University Jinan 250100 China

Transparent conducting ZnO: Al thin films with good adhesion and low resistivity have been prepared on organic substrates and Corning 7059 glass substrates by r.f. magnetron-sputtering technique at low substrate temperature (25-210℃). Structural and photoelectric properties of the deposited films are investigated. The deposited films are polycrystalline with hexagonal structure and a preferred orientation with the c-axis perpendicular to the substrate. Only the (002) peak is observed. High quality films with resistivity as low as 1.0 × 10-3Ω·cm and 8.4 × 10-4Ω·cm, the average transmit-tance over 74% and 85% in the wavelength range of the visible spectrum have been obtained on different substrates.

关键词： organic substrate, aluminum doped zinc oxide film, transparent conductive film.

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Synthesis of vertically aligned carbon nanotube arrays on silicon substrates

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Science China(Technological Sciences) 2004年第5期47卷 616-624页

作者： ZHENG Ruiting1, CHENG Guoan1, PENG Yibin1, 2, ZHAO Yong1, 3, LIU Huaping1 & LIANG Changlin1 1. Key Laboratory of Radiation Beam Technology and Materials Modification of Ministry of Education, Department of Materials Science and Engineering, Beijing Normal University, Beijing 100875, China 2. School of Science, Civil Aviation University of China, Tianjin 300300, China 3. Department of Physics, Nanchang University, Nanchang 330047, China Correspondence should be addressed to Zheng Ruiting Key Laboratory of Radiation Beam Technology and Materials Modification of Ministry of Education Department of Materials Science and Engineering Beijing Normal University

The growth of well-aligned carbon nanotube (CNT) arrays using a heat chemical vapor deposition system on silicon substrates is reported. The growth properties of CNT arrays are studied as a function of synthesis conditions. It is found that 750°C and 10 nm Fe film are suitable conditions for the growth of well-aligned CNT arrays. CNT arrays with a uniform diameter, thick tube wall and firm cohesion to the Si substrate can be grown for C2H2 concentration of 27%. Based on the experiment, the processes of improving the alignment of CNT arrays and cohesion between CNT arrays and Si substrates are discussed.

关键词： carbon nanotubes, vertically aligned, silicon substrate, chemical vapor deposition.

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The growth of γ-LiAlO_2 layer with a highly-preferred orientation on (0001) sapphire

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Science China(Technological Sciences) 2005年第1期48卷 116-120页

作者： LI Shuzhi YANG Weiqiao ZHOU Shengming XU Jun Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800 China Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800 China Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800 China Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800 China

Using vapor transport equilibration (VTE) technique we succeeded in the fabrication of single-phase γ-LiAlO2 layer on (0001) sapphire substrate. X-ray diffraction indicated that the as-fabricated layer was highly textured with [100] orientation at proper VTE treatment temperature range from 1050°C to 1100°C. The main factors affecting the quality of the γ-LiAlO2 layer were investigated by SEM and transmission spectra. These results reveal the possibility of fabricating γ-LiAlO2 (100)// sapphire (0001) composite substrate for GaN-based epitaxial film by VTE.

关键词： γ-LiAlO2, composite substrate, vapor transport equilibration.

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