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Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

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Microsystems & Nanoengineering 2021年第6期7卷 185-196页

作者： Jinying Zhang Defang Li Zhuo Li Xin Wang Suhui Yang Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology School of Optics and PhotonicsBeijing Institute of Technology100081 BeijingP.R.China Yangtze Delta Region Academy of Beijing Institute of Technology 314001 JiaxingP.R.China Institute of Semiconductors Chinese Academy of Sciences100083 BeijingP.R.China

Large-pixel-array infrared emitters are attractive in the applications of infrared imaging and detection.However,the array scale has been restricted in traditional technologies.Here,we demonstrated a light-driven photothermal transduction approach for an ultralarge pixel array infrared emitter.A metal-black coating with nanoporous structures and a silicon(Si)layer with microgap structures were proposed to manage the thermal input and output issues.The effects of the nanoscale structures in the black coating and microscale structures in the Si layer were investigated.Remarkable thermal modulation could be obtained by adjusting the nanoscale and microscale structures.The measured stationary and transient results of the fabricated photothermal transducers agreed well with the simulated results.From the input view,due to its wide spectrum and high absorption,the black coating with nanoscale structures contributed to a 5.6-fold increase in the temperature difference compared to that without the black coating.From the output view,the microgap structures in the Si layer eliminated the in-plane thermal crosstalk.The temperature difference was increased by 340%by modulating the out-of-plane microstructures.The proposed photothermal transducer had a rising time of 0.95 ms and a falling time of 0.53 ms,ensuring a fast time response.This method is compatible with low-cost and mass manufacturing and has promising potential to achieve ultralarge-array pixels beyond ten million.

关键词： coating thermal structures

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Capillary-force-induced collapse lithography for controlled plasmonic nanogap structures

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Microsystems & Nanoengineering 2020年第1期6卷 404-412页

作者： Inki Kim Jungho Mun Wooseup Hwang Younghwan Yang Junsuk Rho Department of Mechanical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Department of Chemical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Department of Chemistry Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea National Institute of Nanomaterials and Technology(NINT) Pohang 37673Republic of Korea

The capillary force effect is one of the most important fabrication parameters that must be considered at the micro/nanoscale because it is strong enough to deform micro/nanostructures.However,the deformation of micro/nanostructures due to such capillary forces(e.g.,stiction and collapse)has been regarded as an undesirable and uncontrollable obstacle to be avoided during fabrication.Here,we present a capillary-force-induced collapse lithography(CCL)technique,which exploits the capillary force to precisely control the collapse of micro/nanostructures.CCL uses electron-beam lithography,so nanopillars with various shapes can be fabricated by precisely controlling the capillary-force-dominant cohesion process and the nanopillar-geometry-dominant collapse process by adjusting the fabrication parameters such as the development time,electron dose,and shape of the nanopillars.CCL aims to achieve sub-10-nm plasmonic nanogap structures that promote extremely strong focusing of light.CCL is a simple and straightforward method to realize such nanogap structures that are needed for further research such as on plasmonic nanosensors.

关键词： capillary structures collapse

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Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

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Microsystems & Nanoengineering 2020年第1期6卷 1176-1186页

作者： Shu Ni Erwin J.W.Berenschot Pieter J.Westerik Meint Jde Boer Rene Wolf Hai Le-The Han J.G.E.Gardeniers Niels R.Tas Mesoscale Chemical System Group MESA+InstituteUniversity of Twente7522 NB EnschedeThe Netherlands Inorganic Materials Science Group MESA+InstituteUniversity of Twente7522 NB EnschedeThe Netherlands NanoLab Cleanroom MESA+InstituteUniversity of Twente7522 NB EnschedeThe Netherlands Physics of Fluids Group MESA+Institute&Max Planck Center for Complex Fluid DynamicsUniversity of Twente7522 NB EnschedeThe Netherlands BIOS Lab-on-a-Chip Group MESA+Institute&Max Planck Center for Complex Fluid DynamicsUniversity of Twente7522 NB EnschedeThe Netherlands

The current progress of system miniaturization relies extensively on the development of 3D machining techniques to increase the areal structure density.In this work,a wafer-scale out-of-plane 3D silicon(Si)shaping technology is reported,which combines a multistep plasma etching process with corner lithography.The multistep plasma etching procedure results in high aspect ratio structures with stacked semicircles etched deep into the sidewall and thereby introduces corners with a proper geometry for the subsequent corner lithography.Due to the geometrical contrast between the gaps and sidewall,residues are left only inside the gaps and form an inversion mask inside the semicircles.Using this mask,octahedra and donuts can be etched in a repeated manner into Si over the full wafer area,which demonstrates the potential of this technology for constructing high-density 3D structures with good dimensional control in the bulk of Si wafers.

关键词： lithography high structures

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Discovering unusual structures from exception using big data and machine learning techniques

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Science Bulletin 2019年第9期64卷 612-616页

作者： Jianshu Jie Zongxiang Hu Guoyu Qian Mouyi Weng Shunning Li Shucheng Li Mingyu Hu Dong Chen Weiji Xiao Jiaxin Zheng Lin-Wang Wang Feng Pan School of Advanced Materials Peking UniversityShenzhen Graduate School Materials Science Division Lawrence Berkeley National Laboratory

Recently, machine learning(ML) has become a widely used technique in materials science study. Most work focuses on predicting the rule and overall trend by building a machine learning model. However,new insights are often learnt from exceptions against the overall trend. In this work, we demonstrate that how unusual structures are discovered from exceptions when machine learning is used to get the relationship between atomic and electronic structures based on big data from high-throughput calculation database. For example, after training an ML model for the relationship between atomic and electronic structures of crystals, we find AgO2 F, an unusual structure with both Ag3+and O22à, from structures whose band gap deviates much from the prediction made by our model. A further investigation on this structure might shed light into the research on anionic redox in transition metal oxides of Li-ion batteries.

关键词： Machine learning Gradient boosting decision tree Band gap Unusual structures

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Inkjet printing-based fabrication of microscale 3D ice structures

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Microsystems & Nanoengineering 2020年第1期6卷 305-314页

作者： Fengyi Zheng Zhongyan Wang Jiasheng Huang Zhihong Li National Key Laboratory of Science and Technology on Micro/Nano Fabrication Institute of MicroelectronicsPeking UniversityBeijing 100871China

This study proposed a method for fabricating 3D microstructures of ice without a supporting material.The inkjet printing process was performed in a low humidity environment to precisely control the growth direction of the ice crystals.In the printing process,water droplets(volume=hundreds of picoliters)were deposited onto the previously formed ice structure,after which they immediately froze.Different 3D structures(maximum height=2000µm)could be formed by controlling the substrate temperature,ejection frequency and droplet size.The growth direction was dependent on the landing point of the droplet on the previously formed ice structure;thus,3D structures could be created with high degrees of freedom.

关键词： printing structures hundreds

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Mapping theme trends and knowledge structures for human neural stem cells:a quantitative and co-word biclustering analysis for the 2013-2018 period

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Neural Regeneration Research 2019年第10期14卷 1823-1832页

作者： Wen-Juan Wei Bei Shi Xin Guan Jing-Yun Ma Ya-Chen Wang Jing Liu Stem Cell Clinical Research Center the First Affiliated Hospital of Dalian Medical UniversityDalianLiaoning ProvinceChina National Joint Engineering Laboratory the First Affiliated Hospital of Dalian Medical UniversityDalianLiaoning ProvinceChina Department of Physiology China Medical UniversityShenyangLiaoning ProvinceChina

Neural stem cells,which are capable of multi-potential differentiation and self-renewal,have recently been shown to have clinical potential for repairing central nervous system tissue damage.However,the theme trends and knowledge structures for human neural stem cells have not yet been studied bibliometrically.In this study,we retrieved 2742 articles from the PubMed database from 2013 to 2018 using "Neural Stem Cells" as the retrieval word.Co-word analysis was conducted to statistically quantify the characteristics and popular themes of human neural stem cell-related studies.Bibliographic data matrices were generated with the Bibliographic Item Co-Occurrence Matrix Builder.We identified 78 high-frequency Medical Subject Heading(MeSH)terms.A visual matrix was built with the repeated bisection method in gCLUTO software.A social network analysis network was generated with Ucinet 6.0 software and GraphPad Prism 5 software.The analyses demonstrated that in the 6-year period,hot topics were clustered into five categories.As suggested by the constructed strategic diagram,studies related to cytology and physiology were well-developed,whereas those related to neural stem cell applications,tissue engineering,metabolism and cell signaling,and neural stem cell pathology and virology remained immature.Neural stem cell therapy for stroke and Parkinson’s disease,the genetics of microRNAs and brain neoplasms,as well as neuroprotective agents,Zika virus,Notch receptor,neural crest and embryonic stem cells were identified as emerging hot spots.These undeveloped themes and popular topics are potential points of focus for new studies on human neural stem cells.

关键词： nerve regeneration human neural stem cells PubMed bibliometric analysis biclustering analysis co-word analysis strategic diagram analysis social network analysis hot research topics mapping theme trends knowledge structures neural regeneration

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Probing the effects of lithium doping on structures, properties, and stabilities of magnesium cluster anions

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Chinese Physics B 2023年第6期32卷 395-403页

作者：张小义赵亚儒李红星成凯格刘子锐刘芷萍何航 College of Physics and Optoelectronics Technology Baoji University of Arts and SciencesBaoji 721016China

Bimetallic clusters have aroused tremendous interest because the property changes like structure,size,and composition have occurred.Herein,a structural search of the global minimum for anionic LiMg_(n)^(-)(n=2-11) clusters is performed using an efficient crystal structure analysis by particle swarm optimization(CALYPSO) structural searching program with subsequent density functional theory(DFT) calculations.A great variety of low energetic isomers are converged,and the most stable ones are confirmed by comparing their total energy of each size.It is found that the LiMg_(n)^(-)clusters are structurally consistent with corresponding Mg clusters anions except for LiMg_(5)^(-)and LiMg_(7)^(-).In all the doped clusters,the Li atom prefers to occupy the convex position.Simulated photoelectron spectra(PES),Infrared(IR),and Raman spectra of LiMg_(n)^(-)could be used as an essential evidence for identifying cluster structures experimentally in the future.Stability study reveals that a tower-like structure of LiMg_(9)^(-)has prominent stability and can be identified as a magic number cluster.The reason might be that there are both closed-shell 1S^(2)1P^(6)1D^(10)2S^(2) electronic configurations and stronger Li-Mg bonds caused by sp hybridization in the LiMg_(9)^(-)cluster.

关键词： LiMg_(n)^(-)clusters crystal structure analysis by particle swarm optimization(CALYPSO) structures electronic properties

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Subwavelength hybrid plasmonic structures for nonlinear nanophotonics

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Light(Science & Applications) 2021年第3期10卷 307-309页

作者： Ann-Katrin U.Michel Optical Materials Engineering Laboratory Department of Mechanical and Process EngineeringETH ZurichZurichSwitzerland

Plasmonic structures made of a semiconductor-insulator-metal hybrid provide efficient routes for second-harmonic and sum-frequency generation in sub-micrometer structures,which ultimately may boost on-chip integrated ... 详细信息

关键词： structures nonlinear plasmon

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Pressure-induced evolution of stoichiometries and electronic structures of host-guest Na-B compounds

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Matter and Radiation at Extremes 2023年第6期8卷 101-110页

作者： Zixuan Guo Xing Li Aitor Bergara Shicong Ding Xiaohua Zhang Guochun Yang State Key Laboratory of Metastable Materials Science&Technology and Key Laboratory for Microstructural Material Physics of Hebei Province School of ScienceYanshan UniversityQinhuangdao 066004China Departamento de Física and EHU-Quantum Center Universidad del País Vasco-Euskal Herriko UnibertsitateaUPV/EHU48080 BilbaoSpain Donostia International Physics Center(DIPC) 20018 DonostiaSpain Centro de Física de Materiales CFM Centro Mixto CSIC-UPV/EHU20018 DonostiaSpain

Superionic and electride behaviors in materials,which induce a variety of exotic physical properties of ions and electrons,are of great importance both in fundamental research and for practical applications.However,their coexistence in hot alkali-metal borides has not been observed.In this work,we apply first-principles structure search calculations to identify eight Na-B compounds with host-guest structures,which exhibit a wide range of building blocks and interesting properties linked to the Na/B composition.Among the known borides,Na-rich Na9B stands out as the composition with the highest alkali-metal content,featuring vertex-and face-sharing BNa16 polyhedra.Notably,it exhibits electride characteristics and transforms into a superionic electride at 200 GPa and 2000 K,displaying unusual Na atomic diffusion behavior attributed to the modulation of the interstitial anion electrons.It demonstrates semiconductor behavior in the solid state,and metallic properties associated with Na 3p/3s states in the superionic and liquid regions.On the other hand,B-rich NaB7,consisting of a unique covalent B framework,is predicted to exhibit low-frequency phonon-mediated superconductivity with a T_(c) of 16.8 K at 55 GPa.Our work advances the understanding of the structures and properties of alkali-metal borides.

关键词： alkali structures compounds

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Preface to the special issue on seismic performance of underground structures: From experiments to analysis

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Earthquake Research Advances 2022年第4期2卷 1-2页

作者： Su Chen Key Laboratory of Urban Security and Disaster Engineering of the Ministry of Education Beijing University of TechnologyBeijing100124China

Urban underground structures, especially tunnels, subways, and pipeline systems, are all crucial parts of the infrastructure of modern society. By the end of 2021, China had opened rail transit operations in51 cities with a total mileage of 8708 km. Considering their importance for life safety and the economy, appropriate seismic design is of prior necessity.

关键词： underground seismic structures

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