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Particle-in-Cell/Monte Carlo Collision simulation of planar DC magnetron sputtering

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Chinese Physics B 2008年第4期17卷 1475-1479页

作者：赵华玉牟宗信 State Key Laboratory of Materials Modification by Laser Ion and Electron BeamsSchool of Physics and Optoelectronic TechnologyDalian University of Technology

In this paper a numerical simulation of a planar DC magnetron discharge is performed with the Particle-in Cell/Monte Carlo Collision （PIC/MCC） method. The magnetic field used in the simulation is calculated with finite element method according to experimental configuration. The simulation is carried out under the condition of gas pressure of 0.665 Pa and voltage magnitude of 400V. Typical results such as the potential distribution, charged particle densities, the discharge current density and ion flux onto the target are calculated. The erosion profile from the simulation is compared with the experimental data. The maximum erosion position corresponds to the place where the magnetic field lines are parallel to the target surface.

关键词： magnetron sputtering PIC/MCC sputtering yield

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Deuterium Retention and Physical sputtering of Low Activation Ferritic Steel

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Plasma Science and Technology 2005年第2期7卷 2737-2740页

作者： T.Hino K.Yamaguchi Y.Yamauchi Y.Hirohata K.Tsuzuki Y.Kusama Department of Nuclear Engineering Hokkaido University Sapporo060-8628 JapanDepartment of Nuclear Engineering Hokkaido UniversitySapporo060-8628 JapanDepartment of Nuclear Engineering Hokkaido UniversitySapporo060-8628 JapanDepartment of Nuclear Engineering Hokkaido UniversitySapporo060-8628 JapanJapan Atomic Energy Research Institute NakaIbaraki-ken311-0193 JapanJapan Atomic Energy Research Institute NakaIbaraki-ken311-0193 Japan

Low activation materials have to be developed toward fusion demonstrationreactors. Ferritic steel, vanadium alloy and SiC/SiC composite are candidate materials of the firstwall, vacuum vessel and blanket components, respectively. Although changes of mechanical-thermalproperties owing to neutron irradiation have been investigated so far, there is little data for theplasma material interactions, such as fuel hydrogen retention and erosion. In the present study,deuterium retention and physical sputtering of low activation ferritic steel, F82H, wereinvestigated by using deuterium ion irradiation apparatus. After a ferritic steel sample wasirradiated by 1.7 keV D^+ ions, the weight loss was measured to obtain the physical sputteringyield. The sputtering yield was 0.04, comparable to that of stainless steel. In order to obtain theretained amount of deuterium, technique of thermal desorption spectroscopy (TDS) was employed to theirradiated sample. The retained deuterium desorbed at temperature ranging from 450 K to 700 K, inthe forms of DHO, D_2, D_2O and hydrocarbons. Hence, the deuterium retained can be reduced by bakingwith a relatively low temperature. The fluence dependence of retained amount of deuterium wasmeasured by changing the ion fluence. In the ferritic steel without mechanical polish, the retainedamount was large even when the fluence was low. In such a case, a large amount of deuterium wastrapped in the surface oxide layer containing O and C. When the fluence was large, the thickness ofsurface oxide layer was reduced by the ion sputtering, and then the retained amount in the oxidelayer decreased. In the case of a high fluence, the retained amount of deuterium became comparableto that of ferritic steel with mechanical polish or SS 316 L, and one order of magnitude smallerthan that of graphite. When the ferritic steel is used, it is required to remove the surface oxidelayer for reduction of fuel hydrogen retention. Ferritic steel sample was exposed to the envi

关键词： ferritic steel fuel hydrogen retention sputtering yield first wall fusionreactor

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Molecular dynamics simulation for the sputtering of an Al2O3 sample bombarded with MeV Si ions

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Chinese Physics B 2002年第12期11卷 1267-1271页

作者：薛建明今西信嗣 InstituteofHeavyionphysics pekinguniveristyBeijing100871China DepartmentofNuclearEngineering KyotoUniversityKyoto606-8501Japan

sputtering yield and kinetic energy distribution (KED) of Al particles from an Al2Oa sample bombarded with 1-5 MeV Si ions have been simulated using the molecular dynamics method. These have also been measured experimentally with a conventional time-of-flight facility. In the simulation, a new interatomic potential specific to the Al2O3 target was developed, and both the nuclear energy loss Sn and electronic energy loss Se were taken into consideration. By carefully adjusting the simulation parameters, the simulated sputtering yields fit well with the experimental results, and the simulated KED of Al particles also fits roughly with the experimental KED after being modified theoretically.

关键词： sputtering MD simulation kinetic energy distribution sputtering yield

Microstructures of TiN,TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering

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Transactions of Nonferrous Metals Society of China 2014年第8期24卷 2559-2565页

作者：王翠凤欧士辅邱锡荣福建信息职业技术学院机电工程系福州350003 高雄应用科技大学模具工程系高雄80706

In order to study the effect of the microstructure with Al and V added TiN coatings, TiN, TiAlN and TiAlVN coatings were deposited on AISI M2 high-speed steels by magnetron reactive sputtering. The microstructures of all the coatings were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The results indicate that the addition of Al into TiN coatings reduces their lattice constant, but a further addition of V into TiAlN coatings increases their lattice constant. Moreover, the growth morphologies for TiN, TiAlN, and TiAlVN indicate that adding Al and V has a tendency to improve the columnar structure. The (111) and (200) orientations of TiN, TiAlN, and TiAlVN are identified. Theε(Fe3N-Fe2N) phase occurs because a small amount of Fe is present in the coatings. The interlayers of TiAlN and TiAlVN have the preferred (01 1 0) orientation. The texture (columnar) structure of the (111) and (200) orientations is observed in the TiAlN and TiAlVN coatings. An orientation relationship of (01 1 0)α-Ti//(110)T.M occurs between the interlayer and tempered martensite (T.M) in TiAlVN.

关键词： coating TiAlVN coating sputtering yield crystallographic relationship

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