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Chip-compatible wide-field 3D nanoscopy through tunable spatial frequency shift effect

Science China(Physics,Mechanics & Astronomy) 2021年第9期64卷 41-50页

作者： Xiaowei Liu Mingwei Tang Chao Meng Chenlei Pang Cuifang Kuang Wei Chen Clemens F.Kaminski Qing Yang Xu Liu State Key Lab of Modern Optical Instrumentation College of Optical Science and EngineeringInternational Research Center for Advanced PhotonicsZhejiang UniversityHangzhou 310058China Research Center for Inteligent Sensing Zhejiang LabHangzhou 311100China Department of Cell Biology Department of Cardiology of the Second Affiliated HospitalSchool of MedicineZhejiang UniversityHangzhou 310058China Department of Chemical Engineering and Biotechnology University of CambridgeCambridge CB30ASUK

spatial frequency shift(SFS) microscopy with evanescent wave illumination shows intriguing advantages, including large field of view(FOV), high speed, and good modularity. However, a missing band in the spatial frequency domain hampers the SFS superresolution microscopy from achieving resolution better than 3 folds of the Abbe diffraction limit. Here, we propose a novel tunable large-SFS microscopy, making the resolution improvement of a linear system no longer restricted by the detection numerical aperture(NA). The complete wide-range detection in the spatial frequency domain is realized by tuning the illumination spatial frequency actively and broadly through an angle modulation between the azimuthal propagating directions of two evanescent waves. The vertical spatial frequency is tuned via a sectional saturation effect, and the reconstructed depth information can be added to the lateral superresolution mask for 3D imaging. A lateral resolution of λ/9, and a vertical localization precision of ~λ/200(detection objective NA = 0.9) are realized with a gallium phosphide(GaP) waveguide. Its unlimited resolution enhancing capability is demonstrated by introducing a designed metamaterial chip with an unusual large refractive index. Besides the great resolution enhancement, this method shows better anti-noise capability than classical structured illumination microscopy without SFS tunability. This method is chip-compatible and can potentially provide a massproducible illumination chip module achieving the fast, large-FOV, and deep-subwavelength 3D nanoscopy.

关键词： superresolution spatial frequency shift evanescent wave wide-field microscopy chip-compatible microscopy

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