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Direct discrimination between semiconducting and metallic single-walled carbon nanotubes with high spatial resolution by SEM

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Nano Research 2017年第6期10卷 1896-1902页

作者： Dongqi Li Yang Wei Jin Zhang Jiangtao Wang Yinghong Lin Peng Liu Shoushan Fan Kaili Jiang State Key Laboratory of Low-Dimensional Quantum Physics Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center Tsinghua University Beijing 100084 China Collaborative Innovation Center of Quantum Matter Beijing 100084 China FEI Company Building No. 8 No. 399 Shengxia Road Pudong Shanghai 201210 China

single-walled carbon nanotube （SWCNT） films with a high density exhibit broad functionality and great potential in nanodevices, as SWCNTs can be either metallic or semiconducting in behavior. The films greatly benefit from characterization technologies that can efficiently identify and group SWCNTs based on metallic or semiconducting natures with high spatial resolution. Here, we developed a facile imaging technique using scanning electron microscopy （SEM） to discriminate between semiconducting and metallic SWCNTs based on black and white colors. The average width of the single-SWCNT image was reduced to -9 nm, -1/5 of previous imaging results. These achievements were attributed to reduced surface charging on the SiOdSi substrate under enhanced accelerating voltages. With this identification technique, a CNT transistor with an on/off ratio of 〉10s was fabricated by identifying and etching out the white metallic SWCNTs. This improved SEM imaging technique can be widely applied in evaluating the selective growth and sorting of SWCNTs.

关键词： single-walled carbonnanotube scanning electronmicroscopy surface charging transistor

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Scanning electron microscopy imaging of single-walled carbon nanotubes on substrates

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Nano Research 2017年第5期10卷 1804-1818页

作者： Dongqi Li Jin Zhang Yujun He Yan Qin Yang Wei Peng Liu Lina Zhang Jiaping Wang Qunqing Li Shoushan Fan Kaili Jiang State Key Laboratory o fLow-Dimensional Quantum Physics Department of Physics and Tsinghua-Fo~conn Nanotechnology Research Center Tsinghua University Beijing 100084 China Sunwoda Electronic Co. Ltd. Shenzhen 518108 China Graduate School at Shenzhen Tsinghua University Shenzhen 518055 China Carl Zeiss Shanghai Co. Ltd. Beijing Office No. 1221 North Area Building B 768 Creative Industry Park A-5 Xueyuan Rd. Haidian Dist. Beijing 100083 China Collaborative Innovation Center of Quantum Matter Beijing 100084 China

Scanning electron microscopy （SEM） plays an indispensable role in nanoscience and nanotechnology because of its high efficiency and high spatial resolution in characterizing nanomaterials. Recent progress indicates that the contrast arising from different conductivities or bandgaps can be observed in SEM images if single-walled carbon nanotubes （SWCNTs） are placed on a substrate. In this study, we use SWCNTs on different substrates as model systems to perform SEM imaging of nanomaterials. Substantial SEM observations are conducted at both high and low acceleration voltages, leading to a comprehensive understanding of the effects of the imaging parameters and substrates on the material and surface-charge signals, as well as the SEM imaging. This unified picture of SEM imaging not only furthers our understanding of SEM images of SWCNTs on a variety of substrates but also provides a basis for developing new imaging recipes for other important nanomaterials used in nanoelectronics and nanophotonics.

关键词： single-walled carbonnanotube scanning electronmicroscopy imaging surface charging

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Metal-film-assisted ultra-clean transfer of single-walled carbon nanotubes

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Nano Research 2014年第7期7卷 981-989页

作者： Yujun He Dongqi Li Tianyi Li Xiaoyang Lin Jin Zhang Yang Wei Peng Liu Lina Zhang Jiaping Wang Qunqing Li Shoushan Fan Kaili Jiang State Key Laboratory of Low-Dimensional Quantum Physics Department of Physics & Tsinghua-Foxconn Nanotechnology ResearchCenter Tsinghua University Beijing 100084 China

Transfer printing of nanomaterials onto target substrates has been widely used in the fabrication of nanodevices, but it remains a challenge to fully avoid contamination introduced in the transfer process. Here we report a metal-film- assisted method to realize an ultra-clean transfer of single-walled carbon nanotubes （SWCNTs） mediated by poly（methyl methacrylate）（PMMA）. The amount of PMMA residue can be greatly reduced due to its strong physical adhesion to the metal film, leading to ultra-clean surfaces of both the SWCNTs and the substrates. This metal-film-assisted transfer method is efficient, nondestructive, and scalable. It is also suitable for the transfer of graphene and other nanostructures. Furthermore, the relatively low temperature employed allows this technique to be compatible with nanomaterial-based flexible electronics.

关键词： metal-film-assisted single-walled carbonnanotube transfer flexible substrate Schottky barrier

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