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Review of self-referenced measurement algorithms： Bridging lateral shearing interferometry and multi-probe error separation

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Frontiers of Mechanical Engineering 2017年第2期12卷 143-157页

作者： Dede ZHAI Shanyong CHEN Ziqiang YIN Shengyi LI College of Mechatronic Engineering and Automation National University of Defense Technology Changsha 410073 China Hu'nan Key Laboratory of Ultra-precision Machining Technology Changsha 410073 China

With the development of new materials and ultra-precision processing technology, the sizes of mea- sured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference datum is inadequate for measuring a high-precision object when the quality of the reference datum is approximately within the same order as that of the object. self-referenced measurement techniques provide an effective means when the direct reference-based method cannot satisfy the required measurement or calibration accuracy. This paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral shearing interferometry and multi-probe error separation. In lateral shearing interferometry, the reconstruction algorithms are generally categorized into modal or zonal methods. The multi-probe error separation techniques for straightness measurement are broadly divided into two-point and three-point methods. The common features of the lateral sheafing interferometry method and the multi-probe error separation method are identified. We conclude that the reconstruction principle in lateral shearing interferometry is similar to the two-point method in error separation on the condition that no yaw error exists. This similarity may provide a basis or inspiration for the development of both classes of methods.

关键词： self-referenced measurement lateral sheafing interferometry multi-probe error separation surfacemetrology

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