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2009中国控制与决策会议

作者： JIA Li~1,SHI Jiping~1,SONG Yang,~1,CHIU Min-Sen~2 1.Shanghai Key Laboratory of Power Station Automation Technology,Department of Automation,College of Mechatronics Engineering and Automation,Shanghai University,Shanghai 200072,China 2.Faculty of Engineering,National University of Singapore,Singapore

＜正＞In this paper,a run-to-run control with neuro-fuzzy model updating mechanism is *** strategy features the ability to learn from previous batches to obtain iteratively the optimal control profile and adjust the neuro-fuzzy model *** addition,an updating algorithm guaranteeing the global convergence of the weights of the model is developed based on the Lyapunov *** a result,model uncertainties can be *** results show that by updating the model from batch to batch,the control profile converges to the corresponding suboptimal one in the subsequent batches.

关键词： batch processes neuro-fuzzy system run-to-run control global convergence

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A Survey of run-to-run control Algorithms for High-mix Semiconductor Manufacturing Processes

A Survey of Run-to-Run Control Algorithms for High-mix Semic...

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第三十届中国控制会议

作者： MA Ming-Da,ZENG Xian-Lin,DUAN Guang-Ren 1.Center for control and Guidance Technology,Harbin Institute of Technology,Harbin 150001,P.R.China

The modeling and control of high-mix production system in semiconductor manufacturing impose great challenge for process *** different methods have been proposed to improve control performance of the high-mix *** this paper,an overview of the recent control algorithms for high-mix system is *** thread-based methods and the non-threaded state estimation methods which are studied and practiced widely in semiconductor manufacturing are discussed in *** research directions for the run-to-run control of mixed product system are pointed out based on the extensive study of current literatures.

关键词： run-to-run control Semiconductor Manufacturing High-mix process control Threads State Estimation

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run to run control Based on Adaptive Cluster Method for High-mix Semiconductor Manufacturing Processes

Run to Run Control Based on Adaptive Cluster Method for High...

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第二十九届中国控制会议

作者： David Shan-Hill WONG Shi-Shang JANG Department of Chemical Engineering National Tsing-Hua University

In the semiconductor manufacturing process,products with different recipe will be produced on the same tool or products with same recipe will be produced on different tools due to the capacity of ***,it is difficult to control a mixed run production process containing low production frequency products with high *** proposed a control scheme which combines adaptive k-means cluster method and run-to-run control to improve the performance of low frequency products in the mixed run *** products could be classified into the same group adaptively and be controlled by a EWMA *** cluster controller is updated by large and small frequency products,so the low frequency products can be improved by the information from similar large frequency *** proposed control scheme is also evaluated by an industrial application.

关键词： run-to-run control EWMA Mix Product Process k-means Cluster

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Integrated Product and Process control for Sustainable Semiconductor Manufacturing

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Chinese Journal of Chemical Engineering 2011年第2期19卷 192-198页

作者：陈良 Yinlun Huang College of Mechanical-Electrical Engineering Soochow University Suzhou 215021 China Department of Chemical Engineering and Materials Science Wayne State University Detroit USA

Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free *** this paper,an advanced control strategy through integrating product and process control is *** proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality *** the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle *** process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the *** equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process *** ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.

关键词： semiconductor manufacturing run-to-run control integrated product and process control

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Optimizing triple exponentially weighted moving average controller using TD3 algorithm in semiconductor manufacturing process

Optimizing triple exponentially weighted moving average cont...

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第35届中国过程控制会议

作者： Biao Jin Tianhong Pan Jiaqiang Tian School of Electrical Engineering and Automation Anhui University

It is difficult to achieve an optimal performance of triple exponentially weighted moving average(TriEWMA) controller with fixed weights. To adjust the weights online and improve the performance of the TriEWMA, an intelligent composite strategy using deep reinforcement learning is developed in this work. Firstly, the weight-adjusting problem is established as a Markov decision process. Then, the weights are adjusted online using the twin delayed deep deterministic policy gradient algorithm. Finally, the proposed method is applied to a chemical mechanical polishing process. Results demonstrate the effectiveness and superiority of the presented method in handling process dynamics and disturbance rejection.

关键词： TD3 Triple exponentially weighted moving average run-to-run control Semiconductor manufacturing process

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Variable EWMA controller for High Mixed Semiconductor Manufacturing Processes

Variable EWMA Controller for High Mixed Semiconductor Manufa...

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第三十届中国控制会议

作者： WONG David Shan-Hill Department of Chemical Engineering National Tsing-Hua University

＜正＞In high mixed semiconductor processes,the group and product Exponentially Weighted Moving Average（G＆P EWMA） controller is a popular model based on run-to-run ***,how to select optimum weights is the key issue in the G＆P EWMA *** this paper,an auto-tuning scheme for G＆P EWMA controller is proposed to improve the control *** weights of G＆P EWMA controller for next run are found using iterative algorithm which based on a set of previous run ***,the dataset is updated by a moving window *** auto-tuning of G＆P EWMA controller can ensure that every run is under the best *** validation of the proposed method is demonstrated by an industrial application.

关键词： run-to-run control EWMA High mixed product process

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