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Self-calibration and Compensation of Setting Errors for Surface Profile Measurement of a Microstructured roll workpiece

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Chinese Journal of Mechanical Engineering 2014年第1期27卷 14-22页

作者： GAO Wei XU Bin TAKEISHI Toshiki SHIMIZU Yuki ITO So Department of Nanomechanics Tohoku University School of Manufacturing Science and Engineering Sichuan University

Microstructured roll workpieces have been widely used as functional components in the precision industries. Current researches on quality control have focused on surface profile measurement of microstructured roll workpieces, and types of measurement systems and measurement methods have been developed. However, low measurement efficiency and low measurement accuracy caused by setting errors are the common disadvantages for surface profile measurement of microstructured roll workpieces. In order to shorten the measurement time and enhance the measurement accuracy, a method for self-calibration and compensation of setting errors is proposed for surface profile measurement of microstructured roll workpieces. A measurement system is constructed for the measurement, in which a precision spindle is employed to rotate the roll workpiece and an air-bearing displacement sensor with a micro-stylus probe is employed to scan the microstructured surface of the roll workpiece. The resolution of the displacement sensor is 0.14 nm and that of the rotary encoder of the spindle was 0.15r~. Geometrical and mathematical models are established for analyzing the influences of the setting errors of the roll workpiece and the displacement sensor with respect to the axis of the spindle, including the eccentric error of the roll workpiece, the offset error of the sensor axis and the zero point error of the sensor output. Measurement experiments are carded out on a roll workpiece on which periodic microstructures are a period of 133 i^m along the circumferential direction. Experimental results demonstrate the feasibility of the self-compensation method. The proposed method can be used to detect and compensate the setting errors without using any additional accurate artifact.

关键词： measurement profile setting error self-calibration compensation microstructure roll workpiece

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