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On the Temperature Profile of the Thermally Excited resonant Silicon Micro Structural Pressure sensor

Chinese Journal of Aeronautics 2002年第3期15卷 156-160页

作者：樊尚春贾振宏 Department of Measurement and Control Beijing University of Aeronautics and Astronautics Beijing 100083 China

According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov...

关键词： thermal excitation resonant sensor silicon microstructure pressure sensor

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Graphene-aluminum nitride NEMS resonant infrared detector

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Microsystems & Nanoengineering 2016年第1期2卷 181-187页

作者： Zhenyun Qian Yu Hui Fangze Liu Sungho Kang Swastik Kar Matteo Rinaldi Department of Electrical and Computer Engineering Northeastern UniversityBostonMA 02115USA Department of Physics Northeastern UniversityBostonMA 02115USA Los Alamos National Laboratory Los AlamosNM 87545USA

The use of micro-/nanoelectromechanical resonators for the room temperature detection of electromagnetic radiation at infrared frequencies has recently been investigated,showing thermal detection capabilities that could potentially outperform conventional *** scaling of the device thickness in the nanometer range and the achievement of high infrared absorption in such a subwavelength thickness,without sacrificing the electromechanical performance,are the two key challenges for the implementation of fast,high-resolution micro-/nanoelectromechanical resonant infrared *** this paper,we show that by using a virtually massless,high-electrical-conductivity,and transparent graphene electrode,floating at the van der Waals separation of a few angstroms from a piezoelectric aluminum nitride nanoplate,it is possible to implement ultrathin(460 nm)piezoelectric nanomechanical resonant structures with improved electromechanical performance(450% improved frequency×quality factor)and infrared detection capabilities(4100×improved infrared absorptance)compared with metal-electrode counterparts,despite their reduced *** intrinsic infrared absorption capabilities of a submicron thin graphene–aluminum nitride plate backed with a metal electrode are investigated for the first time and exploited for the first experimental demonstration of a piezoelectric nanoelectromechanical resonant thermal detector with enhanced infrared absorptance in a reduced ***,the combination of electromagnetic and piezoelectric resonances provided by the same graphene–aluminum nitride-metal stack allows the proposed device to selectively detect short-wavelength infrared radiation(by tailoring the thickness of aluminum nitride)with unprecedented electromechanical performance and thermal *** attributes potentially lead to the development of uncooled infrared detectors suitable for the implementation of high performance,miniaturized and power-efficient mul

关键词： aluminum nitride graphene infrared detector MEMS NEMS piezoelectric resonant sensor

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