检索结果-南通市图书馆

SEM imaging of insulating specimen through a transparent conducting veil of carbon nanotube

Nano Research 2022年第7期15卷 6407-6415页

作者： Xinyu Gao Guo Chen He Ma Yuchen Ju Ke Zhang Lin Cong Wen Ning Zi Yuan Zebin Liu Lina Zhang Peng Liu Shoushan Fan Kaili Jiang State Key Laboratory of Low-Dimensional Quantum Physics Department of Physics and Tsinghua-Foxconn Nanotechnology Research CenterTsinghua UniversityBeijing 100084China College of Applied Sciences Beijing University of TechnologyBeijing 100124China Frontier Science Center for Quantum Information Beijing 100084China Beijing Advanced Innovation Center for Future Chips Beijing 100084China

Observing the morphology of insulating specimen in scanning electron microscope(SEM)is of great significance for the nanoscale semiconductor devices and biological tissues.However,the charging effect will cause image distortion and abnormal contrast when observing insulating specimen in SEM.A typical solution to this problem is using metal coating or water-removable conductive coating.Unfortunately,in both cases the surface of the specimen is covered by a thin layer of conductive material which hides the real surface morphology and is very difficult to be completely removed after imaging.Here we show a convenient,residue-free,and versatile method to observe real surface morphology of insulating specimen without charging effect in SEM with the help of a nanometer-thick film of super-aligned carbon nanotube(SACNT).This thin layer of SACNT film,like metal,can conduct the surface charge on insulating specimen through the sample stage to the ground,thus eliminating the charging effect.SACNT film can also be used as the conductive tape to carry and immobilize insulating powder or particles during SEM imaging.Different from the metal coating,SACNT film is transparent,so that the real microstructure of the insulating specimen surface can be observed.In addition,SACNT film can be easily attached to and peeled off from the surface of specimen without any residue.This convenient,residue-free,and versatile method can open up new possibilities in nondestructive SEM imaging of a wide variety of insulating materials,semiconductor devices,and biological tissues.

关键词： insulating specimen scanning electron microscope(SEM) super-aligned carbon nanotube(SACNT)film real morphology residue-free non-destructive imaging

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：