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Large Thrust Trans-scale precision positioning Stage Based on Inertial Stick-Slip Driving

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Transactions of Nanjing University of Aeronautics and Astronautics 2015年第2期32卷 204-209页

作者：李宗伟钟博文王振华金子祺孙立宁陈林森 College of Mechanical and Electrical Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology Soochow University Suzhou Industry Park Postdoctor Station SVG Digitoptics Co.Ltd

For the smaller thrust,it is difficult to achieve 3Dtrans-scale precision positioning based on previous stick-slip driving.A large thrust trans-scale precision positioning stage is studied based on the inertial stick-slip *** process of the movement is divided into two steps,i.e.,the″sliding″phase and the″stickness″*** the whole process,the kinematics model of the inertial stick-slip driving is established,and it reveals some factors affecting the velocity of inertial stick-slip ***,a simulation of movement is preformed by Matlab-Simulink software,and the whole process of the inertial stick-slip driving is *** one experimental prototype is designed,the back and forth velocity is ***,the simulation verifies the accuracy of the kinematics model.

关键词： PZT actuator inertial stick-slip driving trans-scale precision positioning

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precision positioning Control Based on Two-coordinate Incremental Encoder

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Precision Positioning Control Based on Two-coordinate Increm...

A precision-positioning Method for a High-Acceleration Low-Load Mechanism Based on Optimal Spatial and Temporal Distribution of Inertial Energy

作者： Guangyang Mao Xianmin Zhang Lingbo Xie Guangdong Province Key Laboratory of precision Equipment and Manufacturing Technology South China University of Technology

To increase the working space of atomic force microscopy,this article presents a precision positioning *** structure of this stage is optimized to decrease the largest *** coreless linear motor and two-coordinate incremental encoder are selected to build full-closed loop *** two-coordinate encoder can measure two-direction position signals which can be sent to the *** the interpolation and digitizing electronics,resolution of control can satisfy precision *** full-closed loop control can also decrease straightness error and improve trajectory tracking accuracy.

关键词： precision positioning Straightness error Two-coordinate encoder Trajectory tracking

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Engineering 2015年第3期1卷 391-398页

作者： Xin Chen Youdun Bai Zhijun Yang Jian Gao Gongfa Chen The Key Laboratory of Mechanical Equipment Manufacturing & Control Technology of Ministry of Education Guangdong University of Technology

High-speed and precision positioning are fundamental requirements for high-acceleration low-load mechanisms in integrated circuit （IC） packaging equipment. In this paper, we derive the transient nonlinear dynamicresponse equations of high-acceleration mechanisms, which reveal that stiffness, frequency, damping, and driving frequency are the primary factors. Therefore, we propose a new structural optimization and velocity-planning method for the precision positioning of a high-acceleration mechanism based on optimal spatial and temporal distribution of inertial energy. For structural optimization, we first reviewed the commonly flexible multibody dynamic optimization using equivalent static loads method （ESLM）, and then we selected the modified ESLM for optimal spatial distribution of inertial energy; hence, not only the stiffness but also the inertia and frequency of the real modal shapes are considered. For velocity planning, we developed a new velocity-planning method based on nonlinear dynamic-response optimization with varying motion conditions. Our method was verified on a high-acceleration die bonder. The amplitude of residual vibration could be decreased by more than 20% via structural optimization and the positioning time could be reduced by more than 40% via asymmetric variable velocity planning. This method provides an effective theoretical support for the precision positioning of high-acceleration low-load mechanisms.

关键词： high-acceleration low-load mechanism precision positioning spatial and temporal distribution inertial energy equivalent static loads method (ESLM) velocity planning

Design and Dynamic Modeling of a 2-DOF Decoupled Flexure-Based Mechanism

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Chinese Journal of Mechanical Engineering 2012年第4期25卷 688-696页

作者： QIN Yanding TIAN Yanling ZHANG Dawei School of Mechanical Engineering Tianjin University Tianjin 300072 China

Flexure mechanisms with decoupled characteristics have been widely utilized in precision positioning ***,these mechanisms suffer from either slow response or low load ***,asymmetric design always leads to thermal *** order to solve these issues,a novel 2-DOF decoupled mechanism is developed by monolithically manufacturing sets of statically indeterminate symmetric（SIS） flexure structures in *** design helps to eliminate the thermal error and Finite Element Analysis（FEA） results show that the maximum coupling ratio between X and Y axes is below 0.25% when a maximum pretension force of 200 N is *** ignoring the mass effect,all the SIS flexure structures are simplified to ＂spring-damper＂ components,from which the static and dynamics model are *** relation between the first resonant frequency of the mechanism and the load is investigated by incorporating the load mass into the proposed dynamics *** results show that even with a load of 0.5 kg,the first resonant frequency is still higher than 300 Hz,indicating a high load *** mechanism＇s static and dynamic performances are experimentally *** linear stiffnesses of the mechanism at the working platform and at the driving point are measured to be 3.563 0 N·μm-1 and 3.362 1 N·μm-1,*** corresponding estimation values from analytical models are 3.405 7 N·μm-1 and 3.381 7 N·μm-1,which correspond to estimation errors of-4.41% and 0.6%,*** an additional load of 0.16 kg,the measured and estimated first resonant frequencies are 362 Hz and 365 Hz,*** estimation error is only 0.55%.The analytical and experimental results show that the developed mechanism has good performances in both decoupling ability and load capability;its static and dynamic performance can be precisely estimated from corresponding analytical *** proposed mechanism has wide potentials in precision positioning applic

关键词： precision positioning flexure hinge dynamics decoupled structure

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Research trends in methods for controlling macro-micro motion platforms

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纳米技术与精密工程(英文) 2023年第3期6卷 64-78页

作者： Lufan Zhang Pengqi Zhang Boshi Jiang Heng Yan College of Mechanical and Electrical Engineering Henan University of TechnologyZhengzhou 450001China

With ongoing economic,scientific,and technological developments,the electronic devices used in daily lives are developing toward precision and miniaturization,and so the demand for high-precision manufacturing machinery is *** most important piece of equipment in modern high-precision manufacturing is the macro-micro motion platform(M3P),which offers high speed,precision,and efficiency and has macro-micro motion coupling characteristics due to its mechanical design and composition of its driving ***,the design of the control system is crucial for the overall precision of the platform;conventional proportional–integral–derivative control cannot meet the system requirements,and so M3Ps are the subject of a growing range of modern control *** paper begins by describing the development history of M3Ps,followed by their platform structure and motion control system components,and then in-depth assessments of the macro,micro,and macro-micro control *** addition to examining the advantages and disadvantages of current macro-micro motion control,recent technological breakthroughs are ***,based on existing problems,future directions for M3P control systems are given,and the present conclusions offer guidelines for future work on M3Ps.

关键词： Macro-micro motion platform precision positioning Control method Piezoelectric driver Voice coil motor

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Realization of a Single Layer 3 Dof-micro-positioning mechanism

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Realization of a Single Layer 3 Dof-micro-positioning mechan...

Dynamic substructure model for multiple impact responses of micro/nano piezoelectric precision drive system

中国机构与机器科学国际会议（CCMMS2010）

作者： Su chih-chung Li zhen-bang Tsai chi-ling Chang shuo-hung Department of Mechanical Engineering National Taiwan University

＜正＞precision positioning stages were widely used in many *** paper focuses on the development of precision positioning technique achieving three degrees of freedom at nanometer *** finite element analysis and Taguchi method to one extensively adopted design the single layer 3 degree of freedom（dof） micro-positioning *** performance of the system was verified to achieve 10μm travel range,300 urad rotary ranges,30 nm translation resolution,and 0.9μrad rotary resolution,respectively.

关键词： precision positioning nanometer resolution piezoelectric actuator

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中国科学:技术科学 2010年第3期 329-329页

作者： SHEN YuNian & YIN XiaoChun Department of Mechanics and Engineering Science,Nanjing University of Science and Technology,Nanjing 210094,China

A dynamic substructure technique which considers the electromechanical coupling effect of the PZT and the inertial effect of flexible components is presented to study the multiple impact dynamic behavior of micro/nano piezoelectric impact drive *** can investigate the step-like motion of object body and the multiple impacts behaviors reasonably by the comparison of the experimental data and the numerical solution of the spring-mass *** is expected to have higher accuracy in the numerical simulations of the motion and the responses,especially to high frequency pulse voltage *** present dynamic substructure technique has firstly studied reasonably the propagations of piezoelectric-induced transient waves and impact-induced transient *** is helpful to the failure analysis and the design of piezoelectric stack and flexible *** present dynamic substructure technique can be applied to the transient dynamics optimization design and the precision control of the micro/nano piezoelectric impact drive systems.

关键词： piezoelectric micro actuator multiple impacts dynamic substructure technique electromechanical coupling transient wave propaga-tion precision positioning