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Roll-to-roll fabrication of large-scale polyorgansiloxane thin film with high flexibility and ultra-efficient atomic oxygen resistance

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Plasma Science and Technology 2022年第6期24卷 173-181页

作者：李毅李中华李得天何延春曹生珠王虎高恒蛟胡汉军贺颖王媛朱俊 Science and Technology on Vacuum Technology and Physical Laboratory Lanzhou Institute of PhysicsChina Academy of Space TechnologyLanzhou 730000People's Republic of China School/Hospital of Stomatology School/Hospital of Stomatology Lanzhou University(Dental Hospital).Key Laboratory of Dental Maxillofacial Reconstruction and Biological Intelligence Manufacturing Gansu ProvinceSchool of StomatologyLanzhou UniversityLanzhou 730000People's Republic of China State Key Laboratory of Advanced Display Technology Special Display and Imaging Technology Innovation Center of Anhui ProvinceAnhui Provincial Key Laboratory of Advanced Functional Materials and DevicesAcademy of Opto-Electric TechnologyHefei University of TechnologyHefei 230009People's Republic of China

One of the most widely used and well-established atomic oxygen(AO)protection solutions for low Earth orbit(LEO)satellites is the deposition of protective coatings on polymeric ***,manufacturing extensive expanses of these coating materials with good transparency,flexibility,smoothness,ultra-thinness,and exceptional AO resistance remains a critical ***,we successfully deposited a 400 nm thick polyorgansiloxane(SiO_(x)C_(y)H_(z))coating with high optical transparency and uniform good adherence on to a 1.2 m wide polyimide surface,by optimizing the distribution of hexamethyldisiloxane and oxygen as precursors in the roll-to-roll compatible plasmaenhanced chemical vapor deposition *** AO irradiation with the fluence of 7.9×10^(20)atoms·cm^(–2),the erosion yield of the SiO_(x)C_(y)H_(z)-coated Kapton was less than 2.30×10^(–26)cm^3·atom^(–1),which was less than 0.77%of that of the *** indicates that the SiO_(x)C_(y)H_(z)coating can well prevent the erosion of Kapton by *** addition,it was also clarified that a SiO_(2) passivation layer was formed on the surface of the SiO_(x)C_(y)H_(z)coating during AO irradiation,which exhibited a‘self-reinforcing’defense *** entire preparation process of the SiO_(x)C_(y)H_(z)coating was highly efficient and low-cost,and it has shown great potential for applications in LEO.

关键词： plasma-enhanced chemical vapor deposition hexamethyldisiloxane polyorganosiloxane thin film flexibility atomic oxygen

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