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Photomechanical meta-molecule array for real-time terahertz imaging

Microsystems & Nanoengineering 2017年第1期3卷 20-26页

作者： Yongzheng Wen Delin Jia Wei Ma Yun Feng Ming Liu Liquan Dong Yuejin Zhao Xiaomei Yu National Key Laboratory of Science and Technology on Micro/Nano Fabrication Institute of MicroelectronicsPeking UniversityBeijing 100871China State Key Laboratory of New Ceramics and Fine Processing School of Materials Science and EngineeringTsinghua UniversityBeijing 100084China Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology School of optoelectronicBeijing Institute of TechnologyBeijing 100081China

Real-time terahertz(THz)imaging offers remarkable application possibilities,especially in the security and medical ***,most THz detectors work with scanners,and a long image acquisition time is *** thermal detectors can achieve realtime imaging by using a focal plane array but have the drawbacks of low sensitivity due to a lack of suitable absorbing *** this study,we propose a novel photomechanical meta-molecule array by conveniently assembling THz meta-atom absorbers and bi-material cantilevers together,which can couple THz radiation to a mechanical deflection of the meta-molecules with high *** optically reading out the mechanical deflections of all of the meta-molecules simultaneously,real-time THz imaging can be achieved.A polyimide sacrificial layer technique was developed to fabricate the device on a glass wafer,which facilitates the transmission of a readout light while the THz wave radiates onto the meta-molecule array directly from the front *** images and video of various objects as well as infrared images of the human body were captured successfully with the fabricated metamolecule *** proposed photomechanical device holds promise in applications in single and broadband THz as well as infrared imaging.

关键词： bi-material cantilever meta-atom absorber photomechanical meta-molecule array polyimide sacrificial layer technique terahertz imaging

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