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High-Speed Parallel plasmonic Direct-Writing Nanolithography Using Metasurface-Based plasmonic lens

Engineering 2021年第11期7卷 1623-1630页

作者： Yueqiang Hu Ling Li Rong Wang Jian Song Hongdong Wang Huigao Duan Jiaxin Ji Yonggang Meng State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body College of Mechanical and Vehicle EngineeringHunan UniversityChangsha 410082China State Key Laboratory of Tribology Department of Mechanical EngineeringTsinghua UniversityBeijing 100084China College of Mechanical and Electronic Engineering China University of PetroleumQingdao 266580China

Simple and efficient nanofabrication technology with low cost and high flexibility is indispensable for fundamental nanoscale research and *** in the near field using the surface plasmon polariton(i.e.,plasmonic lithography)provides a promising *** system with high stiffness passive nanogap control strategy on a high-speed rotating substrate is one of the most attractive highthroughput ***,a smaller and steadier plasmonic nanogap,new scheme of plasmonic lens,and parallel processing should be explored to achieve a new generation high resolution and reliable efficient ***,a parallel plasmonic direct-writing nanolithography system is established in which a novel plasmonic flying head is systematically designed to achieve around 15 nm minimum flying-height with high parallelism at the rotating speed of 8–18 m·s^(-1).A multi-stage metasurface-based polarization insensitive plasmonic lens is proposed to couple more power and realize a more confined spot compared with conventional plasmonic *** lithography of the nanostructures with the smallest(around 26 nm)linewidth is obtained with the prototyping *** proposed system holds great potential for high-freedom nanofabrication with low cost,such as planar optical elements and nano-electromechanical systems.

关键词： Nanofabrication Surface plasmon polariton Lithography plasmonic flying head plasmonic lens

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Integrated colloidal quantum dot photodetectors with color-tunable plasmonic nanofocusing lenses

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Light(Science & Applications) 2015年第1期4卷 538-544页

作者： Silke L Diedenhofen Dominik Kufer Tania Lasanta Gerasimos Konstantatos ICFO-Institut de Ciencies Fotoniques Barcelona 08860Spain

High-sensitivity photodetection is at the heart of many optoelectronic applications,including spectroscopy,imaging,surveillance,remote sensing and medical *** the highest possible sensitivity for a given photodetector technology requires the development of ultra-small-footprint detectors,as the noise sources scale with the area of the *** must be accomplished while sacrificing neither the optically active area of the detector nor its ***,such designs are based on diffraction-limited approaches using optical ***,we employ a plasmonic flat-lens bull’s eye structure(BES)to concentrate and focus light into a nanoscale colloidal quantum dot(CQD)*** plasmonic lenses function as nanofocusing resonant structures that simultaneously offer color selectivity and enhanced ***,we demonstrate the first CQD photodetector with a nanoscale footprint,the optically active area of which is determined by the BES;this detector represents an exciting opportunity for high-sensitivity sensing.

关键词： PbS quantum dots photodetectors plasmonic bull’s eye structures plasmonic lens

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