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Advancing pressure sensors performance through a flexible MXene embedded interlocking structure in a microlens array

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Nano Research 2023年第7期16卷 10493-10499页

作者： Tong Li Zhenzong Xu Ben Bin Xu Zhanhu Guo Yunhong Jiang Xuehua Zhang Maryam Bayati Terence Xiaoteng Liu Yan-Hua Liu School of Optoelectronic Science and Engineering Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province&Key Lab of Modern Optical Technologies of Education Ministry of ChinaSoochow UniversitySuzhou 215006China Department of Mechanical and Construction Engineering Faculty of Engineering and EnvironmentNorthumbria UniversityNewcastle upon TyneNE18STUK Hub for Biotechnology in the Built Environment Department of Applied SciencesNorthumbria University at NewcastleNE18STUK Department of Chemical and Materials Engineering University of AlbertaEdmontonAlberta T6G 1H9Canada

Piezoresistive composite elastomers have shown great potentials for wearable and flexible electronic applications due to their high sensitivity,excellent frequency response,and easy signal detection.A composition membrane sensor with an interlocked structure has been developed and demonstrated outstanding pressure sensitivity,fast response time,and low temperature drift *** with a flexible MXene-based flat sensor(Ti_(3)C_(2)),the interlocked sensor exhibits a significantly improved pressure sensitivity of two magnitudes higher(21.04 kPa^(-1)),a fast reaction speed of 31 ms,and an excellent cycle life of 5000 test *** viability of sensor in responding to various external stimuli with high deformation capacity has been confirmed by calculating the force distribution of a polydimethylsiloxane(PDMS)film model with a microlens structure using the solid mechanics module in *** conventional process,we utilized three-dimensional(3D)laser-direct writing lithography equipment to directly transform high-precision 3D data into a micro-nano structure morphology through variable exposure doses,which reduces the hot melting ***,the flexible pressure device is capable of detecting and distinguishing signals ranging from finger movements to human pulses,even for speech *** simple,convenient,and large-format lithographic method offers new opportunities for developing novel human-computer interaction devices.

关键词： three-dimensional(3D)lithography microlens array flexible electronics pizoresistive pressure sensors MXene

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